12/18/2010	12:00:57 AM	H2 valve closed
12/18/2010	12:00:57 AM	BCl3 valve closed
12/18/2010	12:00:57 AM	PH3 valve closed
12/18/2010	12:00:57 AM	SiCl4 pre valve closed
12/18/2010	12:00:57 AM	SiCl4 post valve closed
12/18/2010	12:00:57 AM	Bubbler valve closed
12/18/2010	12:00:57 AM	Helium valve opened
12/18/2010	12:00:57 AM	Main Vac valve opened
12/18/2010	12:00:57 AM	Bypass valve opened
12/18/2010	12:00:57 AM	Helium MFC set to  100.000000
12/18/2010	12:00:57 AM	H2 MFC set to  0.000000
12/18/2010	12:00:57 AM	BCl3 MFC set to  0.000000
12/18/2010	12:00:57 AM	PHl3 MFC set to  0.000000
12/18/2010	12:00:57 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:00:57 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:00:57 AM	Tube furnace set to 0
12/18/2010	12:01:57 AM	Helium valve closed
12/18/2010	12:01:57 AM	H2 valve closed
12/18/2010	12:01:57 AM	BCl3 valve closed
12/18/2010	12:01:57 AM	PH3 valve closed
12/18/2010	12:01:57 AM	SiCl4 pre valve closed
12/18/2010	12:01:57 AM	SiCl4 post valve closed
12/18/2010	12:01:57 AM	Bubbler valve closed
12/18/2010	12:01:57 AM	Main Vac valve opened
12/18/2010	12:01:57 AM	Bypass valve opened
12/18/2010	12:01:57 AM	Helium MFC set to  0.000000
12/18/2010	12:01:57 AM	H2 MFC set to  0.000000
12/18/2010	12:01:57 AM	BCl3 MFC set to  0.000000
12/18/2010	12:01:57 AM	PHl3 MFC set to  0.000000
12/18/2010	12:01:57 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:01:57 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:01:57 AM	Tube furnace set to 0
12/18/2010	12:02:57 AM	H2 valve closed
12/18/2010	12:02:57 AM	BCl3 valve closed
12/18/2010	12:02:57 AM	PH3 valve closed
12/18/2010	12:02:57 AM	SiCl4 pre valve closed
12/18/2010	12:02:57 AM	SiCl4 post valve closed
12/18/2010	12:02:57 AM	Bubbler valve closed
12/18/2010	12:02:57 AM	Helium valve opened
12/18/2010	12:02:57 AM	Main Vac valve opened
12/18/2010	12:02:57 AM	Bypass valve opened
12/18/2010	12:02:57 AM	Helium MFC set to  100.000000
12/18/2010	12:02:57 AM	H2 MFC set to  0.000000
12/18/2010	12:02:57 AM	BCl3 MFC set to  0.000000
12/18/2010	12:02:57 AM	PHl3 MFC set to  0.000000
12/18/2010	12:02:57 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:02:57 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:02:58 AM	Tube furnace set to 0
12/18/2010	12:03:58 AM	Helium valve closed
12/18/2010	12:03:58 AM	H2 valve closed
12/18/2010	12:03:58 AM	BCl3 valve closed
12/18/2010	12:03:58 AM	PH3 valve closed
12/18/2010	12:03:58 AM	SiCl4 pre valve closed
12/18/2010	12:03:58 AM	SiCl4 post valve closed
12/18/2010	12:03:58 AM	Bubbler valve closed
12/18/2010	12:03:58 AM	Main Vac valve opened
12/18/2010	12:03:58 AM	Bypass valve opened
12/18/2010	12:03:58 AM	Helium MFC set to  0.000000
12/18/2010	12:03:58 AM	H2 MFC set to  0.000000
12/18/2010	12:03:58 AM	BCl3 MFC set to  0.000000
12/18/2010	12:03:58 AM	PHl3 MFC set to  0.000000
12/18/2010	12:03:58 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:03:58 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:03:58 AM	Tube furnace set to 0
12/18/2010	12:04:58 AM	H2 valve closed
12/18/2010	12:04:58 AM	BCl3 valve closed
12/18/2010	12:04:58 AM	PH3 valve closed
12/18/2010	12:04:58 AM	SiCl4 pre valve closed
12/18/2010	12:04:58 AM	SiCl4 post valve closed
12/18/2010	12:04:58 AM	Bubbler valve closed
12/18/2010	12:04:58 AM	Helium valve opened
12/18/2010	12:04:58 AM	Main Vac valve opened
12/18/2010	12:04:58 AM	Bypass valve opened
12/18/2010	12:04:58 AM	Helium MFC set to  100.000000
12/18/2010	12:04:58 AM	H2 MFC set to  0.000000
12/18/2010	12:04:58 AM	BCl3 MFC set to  0.000000
12/18/2010	12:04:58 AM	PHl3 MFC set to  0.000000
12/18/2010	12:04:58 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:04:58 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:04:58 AM	Tube furnace set to 0
12/18/2010	12:05:58 AM	Helium valve closed
12/18/2010	12:05:58 AM	H2 valve closed
12/18/2010	12:05:58 AM	BCl3 valve closed
12/18/2010	12:05:58 AM	PH3 valve closed
12/18/2010	12:05:58 AM	SiCl4 pre valve closed
12/18/2010	12:05:58 AM	SiCl4 post valve closed
12/18/2010	12:05:58 AM	Bubbler valve closed
12/18/2010	12:05:58 AM	Main Vac valve opened
12/18/2010	12:05:58 AM	Bypass valve opened
12/18/2010	12:05:58 AM	Helium MFC set to  0.000000
12/18/2010	12:05:58 AM	H2 MFC set to  0.000000
12/18/2010	12:05:58 AM	BCl3 MFC set to  0.000000
12/18/2010	12:05:58 AM	PHl3 MFC set to  0.000000
12/18/2010	12:05:58 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:05:58 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:05:58 AM	Tube furnace set to 0
12/18/2010	12:06:58 AM	H2 valve closed
12/18/2010	12:06:58 AM	BCl3 valve closed
12/18/2010	12:06:58 AM	PH3 valve closed
12/18/2010	12:06:58 AM	SiCl4 pre valve closed
12/18/2010	12:06:58 AM	SiCl4 post valve closed
12/18/2010	12:06:58 AM	Bubbler valve closed
12/18/2010	12:06:58 AM	Helium valve opened
12/18/2010	12:06:58 AM	Main Vac valve opened
12/18/2010	12:06:58 AM	Bypass valve opened
12/18/2010	12:06:58 AM	Helium MFC set to  100.000000
12/18/2010	12:06:58 AM	H2 MFC set to  0.000000
12/18/2010	12:06:58 AM	BCl3 MFC set to  0.000000
12/18/2010	12:06:58 AM	PHl3 MFC set to  0.000000
12/18/2010	12:06:58 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:06:58 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:06:58 AM	Tube furnace set to 0
12/18/2010	12:07:58 AM	Helium valve closed
12/18/2010	12:07:58 AM	H2 valve closed
12/18/2010	12:07:58 AM	BCl3 valve closed
12/18/2010	12:07:58 AM	PH3 valve closed
12/18/2010	12:07:58 AM	SiCl4 pre valve closed
12/18/2010	12:07:58 AM	SiCl4 post valve closed
12/18/2010	12:07:58 AM	Bubbler valve closed
12/18/2010	12:07:58 AM	Main Vac valve opened
12/18/2010	12:07:58 AM	Bypass valve opened
12/18/2010	12:07:58 AM	Helium MFC set to  0.000000
12/18/2010	12:07:58 AM	H2 MFC set to  0.000000
12/18/2010	12:07:58 AM	BCl3 MFC set to  0.000000
12/18/2010	12:07:58 AM	PHl3 MFC set to  0.000000
12/18/2010	12:07:58 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:07:58 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:07:59 AM	Tube furnace set to 0
12/18/2010	12:08:59 AM	H2 valve closed
12/18/2010	12:08:59 AM	BCl3 valve closed
12/18/2010	12:08:59 AM	PH3 valve closed
12/18/2010	12:08:59 AM	SiCl4 pre valve closed
12/18/2010	12:08:59 AM	SiCl4 post valve closed
12/18/2010	12:08:59 AM	Bubbler valve closed
12/18/2010	12:08:59 AM	Helium valve opened
12/18/2010	12:08:59 AM	Main Vac valve opened
12/18/2010	12:08:59 AM	Bypass valve opened
12/18/2010	12:08:59 AM	Helium MFC set to  100.000000
12/18/2010	12:08:59 AM	H2 MFC set to  0.000000
12/18/2010	12:08:59 AM	BCl3 MFC set to  0.000000
12/18/2010	12:08:59 AM	PHl3 MFC set to  0.000000
12/18/2010	12:08:59 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:08:59 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:08:59 AM	Tube furnace set to 0
12/18/2010	12:09:59 AM	Helium valve closed
12/18/2010	12:09:59 AM	H2 valve closed
12/18/2010	12:09:59 AM	BCl3 valve closed
12/18/2010	12:09:59 AM	PH3 valve closed
12/18/2010	12:09:59 AM	SiCl4 pre valve closed
12/18/2010	12:09:59 AM	SiCl4 post valve closed
12/18/2010	12:09:59 AM	Bubbler valve closed
12/18/2010	12:09:59 AM	Main Vac valve opened
12/18/2010	12:09:59 AM	Bypass valve opened
12/18/2010	12:09:59 AM	Helium MFC set to  0.000000
12/18/2010	12:09:59 AM	H2 MFC set to  0.000000
12/18/2010	12:09:59 AM	BCl3 MFC set to  0.000000
12/18/2010	12:09:59 AM	PHl3 MFC set to  0.000000
12/18/2010	12:09:59 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:09:59 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:09:59 AM	Tube furnace set to 0
12/18/2010	12:10:59 AM	H2 valve closed
12/18/2010	12:10:59 AM	BCl3 valve closed
12/18/2010	12:10:59 AM	PH3 valve closed
12/18/2010	12:10:59 AM	SiCl4 pre valve closed
12/18/2010	12:10:59 AM	SiCl4 post valve closed
12/18/2010	12:10:59 AM	Bubbler valve closed
12/18/2010	12:10:59 AM	Helium valve opened
12/18/2010	12:10:59 AM	Main Vac valve opened
12/18/2010	12:10:59 AM	Bypass valve opened
12/18/2010	12:10:59 AM	Helium MFC set to  100.000000
12/18/2010	12:10:59 AM	H2 MFC set to  0.000000
12/18/2010	12:10:59 AM	BCl3 MFC set to  0.000000
12/18/2010	12:10:59 AM	PHl3 MFC set to  0.000000
12/18/2010	12:10:59 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:10:59 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:10:59 AM	Tube furnace set to 0
12/18/2010	12:11:59 AM	Helium valve closed
12/18/2010	12:11:59 AM	H2 valve closed
12/18/2010	12:11:59 AM	BCl3 valve closed
12/18/2010	12:11:59 AM	PH3 valve closed
12/18/2010	12:11:59 AM	SiCl4 pre valve closed
12/18/2010	12:11:59 AM	SiCl4 post valve closed
12/18/2010	12:11:59 AM	Bubbler valve closed
12/18/2010	12:11:59 AM	Main Vac valve opened
12/18/2010	12:11:59 AM	Bypass valve opened
12/18/2010	12:11:59 AM	Helium MFC set to  0.000000
12/18/2010	12:11:59 AM	H2 MFC set to  0.000000
12/18/2010	12:11:59 AM	BCl3 MFC set to  0.000000
12/18/2010	12:11:59 AM	PHl3 MFC set to  0.000000
12/18/2010	12:11:59 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:11:59 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:11:59 AM	Tube furnace set to 0
12/18/2010	12:12:00 AM	Run finished at 12:12 AM
12/18/2010	12:12:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	12:12:33 AM	Bypass valve closed
12/18/2010	12:12:33 AM	Main Vac valve closed
12/18/2010	12:12:50 AM	Main Vac valve opened
12/18/2010	12:12:50 AM	Bypass valve opened
12/18/2010	12:13:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	12:13:24 AM	Recipe started at 12:13 AM
12/18/2010	12:13:24 AM	Helium valve closed
12/18/2010	12:13:24 AM	H2 valve closed
12/18/2010	12:13:24 AM	BCl3 valve closed
12/18/2010	12:13:24 AM	PH3 valve closed
12/18/2010	12:13:24 AM	SiCl4 pre valve closed
12/18/2010	12:13:24 AM	SiCl4 post valve closed
12/18/2010	12:13:24 AM	Main Vac valve closed
12/18/2010	12:13:24 AM	Bubbler valve closed
12/18/2010	12:13:24 AM	Bypass valve opened
12/18/2010	12:13:24 AM	Helium MFC set to  0.000000
12/18/2010	12:13:24 AM	H2 MFC set to  0.000000
12/18/2010	12:13:24 AM	BCl3 MFC set to  0.000000
12/18/2010	12:13:24 AM	PHl3 MFC set to  0.000000
12/18/2010	12:13:24 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:13:24 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:13:24 AM	Tube furnace set to 0
12/18/2010	12:13:24 AM	Helium valve closed
12/18/2010	12:13:24 AM	H2 valve closed
12/18/2010	12:13:24 AM	BCl3 valve closed
12/18/2010	12:13:24 AM	PH3 valve closed
12/18/2010	12:13:24 AM	SiCl4 pre valve closed
12/18/2010	12:13:24 AM	SiCl4 post valve closed
12/18/2010	12:13:24 AM	Bubbler valve closed
12/18/2010	12:13:24 AM	Main Vac valve opened
12/18/2010	12:13:24 AM	Bypass valve opened
12/18/2010	12:13:24 AM	Helium MFC set to  0.000000
12/18/2010	12:13:24 AM	H2 MFC set to  0.000000
12/18/2010	12:13:24 AM	BCl3 MFC set to  0.000000
12/18/2010	12:13:24 AM	PHl3 MFC set to  0.000000
12/18/2010	12:13:24 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:13:24 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:13:25 AM	Tube furnace set to 0
12/18/2010	12:14:25 AM	H2 valve closed
12/18/2010	12:14:25 AM	BCl3 valve closed
12/18/2010	12:14:25 AM	PH3 valve closed
12/18/2010	12:14:25 AM	SiCl4 pre valve closed
12/18/2010	12:14:25 AM	SiCl4 post valve closed
12/18/2010	12:14:25 AM	Bubbler valve closed
12/18/2010	12:14:25 AM	Helium valve opened
12/18/2010	12:14:25 AM	Main Vac valve opened
12/18/2010	12:14:25 AM	Bypass valve opened
12/18/2010	12:14:25 AM	Helium MFC set to  100.000000
12/18/2010	12:14:25 AM	H2 MFC set to  0.000000
12/18/2010	12:14:25 AM	BCl3 MFC set to  0.000000
12/18/2010	12:14:25 AM	PHl3 MFC set to  0.000000
12/18/2010	12:14:25 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:14:25 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:14:25 AM	Tube furnace set to 0
12/18/2010	12:15:25 AM	Helium valve closed
12/18/2010	12:15:25 AM	H2 valve closed
12/18/2010	12:15:25 AM	BCl3 valve closed
12/18/2010	12:15:25 AM	PH3 valve closed
12/18/2010	12:15:25 AM	SiCl4 pre valve closed
12/18/2010	12:15:25 AM	SiCl4 post valve closed
12/18/2010	12:15:25 AM	Bubbler valve closed
12/18/2010	12:15:25 AM	Main Vac valve opened
12/18/2010	12:15:25 AM	Bypass valve opened
12/18/2010	12:15:25 AM	Helium MFC set to  0.000000
12/18/2010	12:15:25 AM	H2 MFC set to  0.000000
12/18/2010	12:15:25 AM	BCl3 MFC set to  0.000000
12/18/2010	12:15:25 AM	PHl3 MFC set to  0.000000
12/18/2010	12:15:25 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:15:25 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:15:25 AM	Tube furnace set to 0
12/18/2010	12:16:25 AM	H2 valve closed
12/18/2010	12:16:25 AM	BCl3 valve closed
12/18/2010	12:16:25 AM	PH3 valve closed
12/18/2010	12:16:25 AM	SiCl4 pre valve closed
12/18/2010	12:16:25 AM	SiCl4 post valve closed
12/18/2010	12:16:25 AM	Bubbler valve closed
12/18/2010	12:16:25 AM	Helium valve opened
12/18/2010	12:16:25 AM	Main Vac valve opened
12/18/2010	12:16:25 AM	Bypass valve opened
12/18/2010	12:16:25 AM	Helium MFC set to  100.000000
12/18/2010	12:16:25 AM	H2 MFC set to  0.000000
12/18/2010	12:16:25 AM	BCl3 MFC set to  0.000000
12/18/2010	12:16:25 AM	PHl3 MFC set to  0.000000
12/18/2010	12:16:25 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:16:25 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:16:25 AM	Tube furnace set to 0
12/18/2010	12:17:25 AM	Helium valve closed
12/18/2010	12:17:25 AM	H2 valve closed
12/18/2010	12:17:25 AM	BCl3 valve closed
12/18/2010	12:17:25 AM	PH3 valve closed
12/18/2010	12:17:25 AM	SiCl4 pre valve closed
12/18/2010	12:17:25 AM	SiCl4 post valve closed
12/18/2010	12:17:25 AM	Bubbler valve closed
12/18/2010	12:17:25 AM	Main Vac valve opened
12/18/2010	12:17:25 AM	Bypass valve opened
12/18/2010	12:17:25 AM	Helium MFC set to  0.000000
12/18/2010	12:17:25 AM	H2 MFC set to  0.000000
12/18/2010	12:17:25 AM	BCl3 MFC set to  0.000000
12/18/2010	12:17:25 AM	PHl3 MFC set to  0.000000
12/18/2010	12:17:25 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:17:25 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:17:25 AM	Tube furnace set to 0
12/18/2010	12:18:25 AM	H2 valve closed
12/18/2010	12:18:25 AM	BCl3 valve closed
12/18/2010	12:18:25 AM	PH3 valve closed
12/18/2010	12:18:25 AM	SiCl4 pre valve closed
12/18/2010	12:18:25 AM	SiCl4 post valve closed
12/18/2010	12:18:25 AM	Bubbler valve closed
12/18/2010	12:18:25 AM	Helium valve opened
12/18/2010	12:18:25 AM	Main Vac valve opened
12/18/2010	12:18:25 AM	Bypass valve opened
12/18/2010	12:18:25 AM	Helium MFC set to  100.000000
12/18/2010	12:18:25 AM	H2 MFC set to  0.000000
12/18/2010	12:18:25 AM	BCl3 MFC set to  0.000000
12/18/2010	12:18:25 AM	PHl3 MFC set to  0.000000
12/18/2010	12:18:25 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:18:25 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:18:26 AM	Tube furnace set to 0
12/18/2010	12:19:26 AM	Helium valve closed
12/18/2010	12:19:26 AM	H2 valve closed
12/18/2010	12:19:26 AM	BCl3 valve closed
12/18/2010	12:19:26 AM	PH3 valve closed
12/18/2010	12:19:26 AM	SiCl4 pre valve closed
12/18/2010	12:19:26 AM	SiCl4 post valve closed
12/18/2010	12:19:26 AM	Bubbler valve closed
12/18/2010	12:19:26 AM	Main Vac valve opened
12/18/2010	12:19:26 AM	Bypass valve opened
12/18/2010	12:19:26 AM	Helium MFC set to  0.000000
12/18/2010	12:19:26 AM	H2 MFC set to  0.000000
12/18/2010	12:19:26 AM	BCl3 MFC set to  0.000000
12/18/2010	12:19:26 AM	PHl3 MFC set to  0.000000
12/18/2010	12:19:26 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:19:26 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:19:26 AM	Tube furnace set to 0
12/18/2010	12:20:26 AM	H2 valve closed
12/18/2010	12:20:26 AM	BCl3 valve closed
12/18/2010	12:20:26 AM	PH3 valve closed
12/18/2010	12:20:26 AM	SiCl4 pre valve closed
12/18/2010	12:20:26 AM	SiCl4 post valve closed
12/18/2010	12:20:26 AM	Bubbler valve closed
12/18/2010	12:20:26 AM	Helium valve opened
12/18/2010	12:20:26 AM	Main Vac valve opened
12/18/2010	12:20:26 AM	Bypass valve opened
12/18/2010	12:20:26 AM	Helium MFC set to  100.000000
12/18/2010	12:20:26 AM	H2 MFC set to  0.000000
12/18/2010	12:20:26 AM	BCl3 MFC set to  0.000000
12/18/2010	12:20:26 AM	PHl3 MFC set to  0.000000
12/18/2010	12:20:26 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:20:26 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:20:26 AM	Tube furnace set to 0
12/18/2010	12:21:26 AM	Helium valve closed
12/18/2010	12:21:26 AM	H2 valve closed
12/18/2010	12:21:26 AM	BCl3 valve closed
12/18/2010	12:21:26 AM	PH3 valve closed
12/18/2010	12:21:26 AM	SiCl4 pre valve closed
12/18/2010	12:21:26 AM	SiCl4 post valve closed
12/18/2010	12:21:26 AM	Bubbler valve closed
12/18/2010	12:21:26 AM	Main Vac valve opened
12/18/2010	12:21:26 AM	Bypass valve opened
12/18/2010	12:21:26 AM	Helium MFC set to  0.000000
12/18/2010	12:21:26 AM	H2 MFC set to  0.000000
12/18/2010	12:21:26 AM	BCl3 MFC set to  0.000000
12/18/2010	12:21:26 AM	PHl3 MFC set to  0.000000
12/18/2010	12:21:26 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:21:26 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:21:26 AM	Tube furnace set to 0
12/18/2010	12:22:26 AM	H2 valve closed
12/18/2010	12:22:26 AM	BCl3 valve closed
12/18/2010	12:22:26 AM	PH3 valve closed
12/18/2010	12:22:26 AM	SiCl4 pre valve closed
12/18/2010	12:22:26 AM	SiCl4 post valve closed
12/18/2010	12:22:26 AM	Bubbler valve closed
12/18/2010	12:22:26 AM	Helium valve opened
12/18/2010	12:22:26 AM	Main Vac valve opened
12/18/2010	12:22:26 AM	Bypass valve opened
12/18/2010	12:22:26 AM	Helium MFC set to  100.000000
12/18/2010	12:22:26 AM	H2 MFC set to  0.000000
12/18/2010	12:22:26 AM	BCl3 MFC set to  0.000000
12/18/2010	12:22:26 AM	PHl3 MFC set to  0.000000
12/18/2010	12:22:26 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:22:26 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:22:26 AM	Tube furnace set to 0
12/18/2010	12:23:26 AM	Helium valve closed
12/18/2010	12:23:26 AM	H2 valve closed
12/18/2010	12:23:26 AM	BCl3 valve closed
12/18/2010	12:23:26 AM	PH3 valve closed
12/18/2010	12:23:26 AM	SiCl4 pre valve closed
12/18/2010	12:23:26 AM	SiCl4 post valve closed
12/18/2010	12:23:26 AM	Bubbler valve closed
12/18/2010	12:23:26 AM	Main Vac valve opened
12/18/2010	12:23:26 AM	Bypass valve opened
12/18/2010	12:23:26 AM	Helium MFC set to  0.000000
12/18/2010	12:23:26 AM	H2 MFC set to  0.000000
12/18/2010	12:23:26 AM	BCl3 MFC set to  0.000000
12/18/2010	12:23:26 AM	PHl3 MFC set to  0.000000
12/18/2010	12:23:26 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:23:26 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:23:27 AM	Tube furnace set to 0
12/18/2010	12:24:27 AM	H2 valve closed
12/18/2010	12:24:27 AM	BCl3 valve closed
12/18/2010	12:24:27 AM	PH3 valve closed
12/18/2010	12:24:27 AM	SiCl4 pre valve closed
12/18/2010	12:24:27 AM	SiCl4 post valve closed
12/18/2010	12:24:27 AM	Bubbler valve closed
12/18/2010	12:24:27 AM	Helium valve opened
12/18/2010	12:24:27 AM	Main Vac valve opened
12/18/2010	12:24:27 AM	Bypass valve opened
12/18/2010	12:24:27 AM	Helium MFC set to  100.000000
12/18/2010	12:24:27 AM	H2 MFC set to  0.000000
12/18/2010	12:24:27 AM	BCl3 MFC set to  0.000000
12/18/2010	12:24:27 AM	PHl3 MFC set to  0.000000
12/18/2010	12:24:27 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:24:27 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:24:27 AM	Tube furnace set to 0
12/18/2010	12:25:27 AM	Helium valve closed
12/18/2010	12:25:27 AM	H2 valve closed
12/18/2010	12:25:27 AM	BCl3 valve closed
12/18/2010	12:25:27 AM	PH3 valve closed
12/18/2010	12:25:27 AM	SiCl4 pre valve closed
12/18/2010	12:25:27 AM	SiCl4 post valve closed
12/18/2010	12:25:27 AM	Bubbler valve closed
12/18/2010	12:25:27 AM	Main Vac valve opened
12/18/2010	12:25:27 AM	Bypass valve opened
12/18/2010	12:25:27 AM	Helium MFC set to  0.000000
12/18/2010	12:25:27 AM	H2 MFC set to  0.000000
12/18/2010	12:25:27 AM	BCl3 MFC set to  0.000000
12/18/2010	12:25:27 AM	PHl3 MFC set to  0.000000
12/18/2010	12:25:27 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:25:27 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:25:27 AM	Tube furnace set to 0
12/18/2010	12:26:27 AM	H2 valve closed
12/18/2010	12:26:27 AM	BCl3 valve closed
12/18/2010	12:26:27 AM	PH3 valve closed
12/18/2010	12:26:27 AM	SiCl4 pre valve closed
12/18/2010	12:26:27 AM	SiCl4 post valve closed
12/18/2010	12:26:27 AM	Bubbler valve closed
12/18/2010	12:26:27 AM	Helium valve opened
12/18/2010	12:26:27 AM	Main Vac valve opened
12/18/2010	12:26:27 AM	Bypass valve opened
12/18/2010	12:26:27 AM	Helium MFC set to  100.000000
12/18/2010	12:26:27 AM	H2 MFC set to  0.000000
12/18/2010	12:26:27 AM	BCl3 MFC set to  0.000000
12/18/2010	12:26:27 AM	PHl3 MFC set to  0.000000
12/18/2010	12:26:27 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:26:27 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:26:27 AM	Tube furnace set to 0
12/18/2010	12:27:27 AM	Helium valve closed
12/18/2010	12:27:27 AM	H2 valve closed
12/18/2010	12:27:27 AM	BCl3 valve closed
12/18/2010	12:27:27 AM	PH3 valve closed
12/18/2010	12:27:27 AM	SiCl4 pre valve closed
12/18/2010	12:27:27 AM	SiCl4 post valve closed
12/18/2010	12:27:27 AM	Bubbler valve closed
12/18/2010	12:27:27 AM	Main Vac valve opened
12/18/2010	12:27:27 AM	Bypass valve opened
12/18/2010	12:27:27 AM	Helium MFC set to  0.000000
12/18/2010	12:27:27 AM	H2 MFC set to  0.000000
12/18/2010	12:27:27 AM	BCl3 MFC set to  0.000000
12/18/2010	12:27:27 AM	PHl3 MFC set to  0.000000
12/18/2010	12:27:27 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:27:27 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:27:27 AM	Tube furnace set to 0
12/18/2010	12:28:27 AM	H2 valve closed
12/18/2010	12:28:27 AM	BCl3 valve closed
12/18/2010	12:28:27 AM	PH3 valve closed
12/18/2010	12:28:27 AM	SiCl4 pre valve closed
12/18/2010	12:28:27 AM	SiCl4 post valve closed
12/18/2010	12:28:27 AM	Bubbler valve closed
12/18/2010	12:28:27 AM	Helium valve opened
12/18/2010	12:28:27 AM	Main Vac valve opened
12/18/2010	12:28:27 AM	Bypass valve opened
12/18/2010	12:28:27 AM	Helium MFC set to  100.000000
12/18/2010	12:28:27 AM	H2 MFC set to  0.000000
12/18/2010	12:28:27 AM	BCl3 MFC set to  0.000000
12/18/2010	12:28:27 AM	PHl3 MFC set to  0.000000
12/18/2010	12:28:27 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:28:27 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:28:28 AM	Tube furnace set to 0
12/18/2010	12:29:28 AM	Helium valve closed
12/18/2010	12:29:28 AM	H2 valve closed
12/18/2010	12:29:28 AM	BCl3 valve closed
12/18/2010	12:29:28 AM	PH3 valve closed
12/18/2010	12:29:28 AM	SiCl4 pre valve closed
12/18/2010	12:29:28 AM	SiCl4 post valve closed
12/18/2010	12:29:28 AM	Bubbler valve closed
12/18/2010	12:29:28 AM	Main Vac valve opened
12/18/2010	12:29:28 AM	Bypass valve opened
12/18/2010	12:29:28 AM	Helium MFC set to  0.000000
12/18/2010	12:29:28 AM	H2 MFC set to  0.000000
12/18/2010	12:29:28 AM	BCl3 MFC set to  0.000000
12/18/2010	12:29:28 AM	PHl3 MFC set to  0.000000
12/18/2010	12:29:28 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:29:28 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:29:28 AM	Tube furnace set to 0
12/18/2010	12:30:28 AM	H2 valve closed
12/18/2010	12:30:28 AM	BCl3 valve closed
12/18/2010	12:30:28 AM	PH3 valve closed
12/18/2010	12:30:28 AM	SiCl4 pre valve closed
12/18/2010	12:30:28 AM	SiCl4 post valve closed
12/18/2010	12:30:28 AM	Bubbler valve closed
12/18/2010	12:30:28 AM	Helium valve opened
12/18/2010	12:30:28 AM	Main Vac valve opened
12/18/2010	12:30:28 AM	Bypass valve opened
12/18/2010	12:30:28 AM	Helium MFC set to  100.000000
12/18/2010	12:30:28 AM	H2 MFC set to  0.000000
12/18/2010	12:30:28 AM	BCl3 MFC set to  0.000000
12/18/2010	12:30:28 AM	PHl3 MFC set to  0.000000
12/18/2010	12:30:28 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:30:28 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:30:28 AM	Tube furnace set to 0
12/18/2010	12:31:28 AM	Helium valve closed
12/18/2010	12:31:28 AM	H2 valve closed
12/18/2010	12:31:28 AM	BCl3 valve closed
12/18/2010	12:31:28 AM	PH3 valve closed
12/18/2010	12:31:28 AM	SiCl4 pre valve closed
12/18/2010	12:31:28 AM	SiCl4 post valve closed
12/18/2010	12:31:28 AM	Bubbler valve closed
12/18/2010	12:31:28 AM	Main Vac valve opened
12/18/2010	12:31:28 AM	Bypass valve opened
12/18/2010	12:31:28 AM	Helium MFC set to  0.000000
12/18/2010	12:31:28 AM	H2 MFC set to  0.000000
12/18/2010	12:31:28 AM	BCl3 MFC set to  0.000000
12/18/2010	12:31:28 AM	PHl3 MFC set to  0.000000
12/18/2010	12:31:28 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:31:28 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:31:28 AM	Tube furnace set to 0
12/18/2010	12:32:28 AM	H2 valve closed
12/18/2010	12:32:28 AM	BCl3 valve closed
12/18/2010	12:32:28 AM	PH3 valve closed
12/18/2010	12:32:28 AM	SiCl4 pre valve closed
12/18/2010	12:32:28 AM	SiCl4 post valve closed
12/18/2010	12:32:28 AM	Bubbler valve closed
12/18/2010	12:32:28 AM	Helium valve opened
12/18/2010	12:32:28 AM	Main Vac valve opened
12/18/2010	12:32:28 AM	Bypass valve opened
12/18/2010	12:32:28 AM	Helium MFC set to  100.000000
12/18/2010	12:32:28 AM	H2 MFC set to  0.000000
12/18/2010	12:32:28 AM	BCl3 MFC set to  0.000000
12/18/2010	12:32:28 AM	PHl3 MFC set to  0.000000
12/18/2010	12:32:28 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:32:28 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:32:28 AM	Tube furnace set to 0
12/18/2010	12:33:28 AM	Helium valve closed
12/18/2010	12:33:28 AM	H2 valve closed
12/18/2010	12:33:28 AM	BCl3 valve closed
12/18/2010	12:33:28 AM	PH3 valve closed
12/18/2010	12:33:28 AM	SiCl4 pre valve closed
12/18/2010	12:33:28 AM	SiCl4 post valve closed
12/18/2010	12:33:28 AM	Bubbler valve closed
12/18/2010	12:33:28 AM	Main Vac valve opened
12/18/2010	12:33:28 AM	Bypass valve opened
12/18/2010	12:33:28 AM	Helium MFC set to  0.000000
12/18/2010	12:33:28 AM	H2 MFC set to  0.000000
12/18/2010	12:33:28 AM	BCl3 MFC set to  0.000000
12/18/2010	12:33:28 AM	PHl3 MFC set to  0.000000
12/18/2010	12:33:28 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:33:28 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:33:28 AM	Tube furnace set to 0
12/18/2010	12:33:29 AM	Run finished at 12:33 AM
12/18/2010	12:33:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	12:40:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	12:40:14 AM	Recipe started at 12:40 AM
12/18/2010	12:40:14 AM	Helium valve closed
12/18/2010	12:40:14 AM	H2 valve closed
12/18/2010	12:40:14 AM	BCl3 valve closed
12/18/2010	12:40:14 AM	PH3 valve closed
12/18/2010	12:40:14 AM	SiCl4 pre valve closed
12/18/2010	12:40:14 AM	SiCl4 post valve closed
12/18/2010	12:40:14 AM	Main Vac valve closed
12/18/2010	12:40:14 AM	Bubbler valve closed
12/18/2010	12:40:14 AM	Bypass valve opened
12/18/2010	12:40:14 AM	Helium MFC set to  0.000000
12/18/2010	12:40:14 AM	H2 MFC set to  0.000000
12/18/2010	12:40:14 AM	BCl3 MFC set to  0.000000
12/18/2010	12:40:14 AM	PHl3 MFC set to  0.000000
12/18/2010	12:40:14 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:40:14 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:40:14 AM	Tube furnace set to 0
12/18/2010	12:40:14 AM	Helium valve closed
12/18/2010	12:40:14 AM	H2 valve closed
12/18/2010	12:40:14 AM	BCl3 valve closed
12/18/2010	12:40:14 AM	PH3 valve closed
12/18/2010	12:40:14 AM	SiCl4 pre valve closed
12/18/2010	12:40:14 AM	SiCl4 post valve closed
12/18/2010	12:40:14 AM	Bubbler valve closed
12/18/2010	12:40:14 AM	Main Vac valve opened
12/18/2010	12:40:14 AM	Bypass valve opened
12/18/2010	12:40:14 AM	Helium MFC set to  0.000000
12/18/2010	12:40:14 AM	H2 MFC set to  0.000000
12/18/2010	12:40:14 AM	BCl3 MFC set to  0.000000
12/18/2010	12:40:14 AM	PHl3 MFC set to  0.000000
12/18/2010	12:40:14 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:40:14 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:40:14 AM	Tube furnace set to 0
12/18/2010	12:41:14 AM	H2 valve closed
12/18/2010	12:41:14 AM	BCl3 valve closed
12/18/2010	12:41:14 AM	PH3 valve closed
12/18/2010	12:41:14 AM	SiCl4 pre valve closed
12/18/2010	12:41:14 AM	SiCl4 post valve closed
12/18/2010	12:41:14 AM	Bubbler valve closed
12/18/2010	12:41:14 AM	Helium valve opened
12/18/2010	12:41:14 AM	Main Vac valve opened
12/18/2010	12:41:14 AM	Bypass valve opened
12/18/2010	12:41:14 AM	Helium MFC set to  100.000000
12/18/2010	12:41:14 AM	H2 MFC set to  0.000000
12/18/2010	12:41:14 AM	BCl3 MFC set to  0.000000
12/18/2010	12:41:14 AM	PHl3 MFC set to  0.000000
12/18/2010	12:41:14 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:41:14 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:41:14 AM	Tube furnace set to 0
12/18/2010	12:42:15 AM	Helium valve closed
12/18/2010	12:42:15 AM	H2 valve closed
12/18/2010	12:42:15 AM	BCl3 valve closed
12/18/2010	12:42:15 AM	PH3 valve closed
12/18/2010	12:42:15 AM	SiCl4 pre valve closed
12/18/2010	12:42:15 AM	SiCl4 post valve closed
12/18/2010	12:42:15 AM	Bubbler valve closed
12/18/2010	12:42:15 AM	Main Vac valve opened
12/18/2010	12:42:15 AM	Bypass valve opened
12/18/2010	12:42:15 AM	Helium MFC set to  0.000000
12/18/2010	12:42:15 AM	H2 MFC set to  0.000000
12/18/2010	12:42:15 AM	BCl3 MFC set to  0.000000
12/18/2010	12:42:15 AM	PHl3 MFC set to  0.000000
12/18/2010	12:42:15 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:42:15 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:42:15 AM	Tube furnace set to 0
12/18/2010	12:43:15 AM	H2 valve closed
12/18/2010	12:43:15 AM	BCl3 valve closed
12/18/2010	12:43:15 AM	PH3 valve closed
12/18/2010	12:43:15 AM	SiCl4 pre valve closed
12/18/2010	12:43:15 AM	SiCl4 post valve closed
12/18/2010	12:43:15 AM	Bubbler valve closed
12/18/2010	12:43:15 AM	Helium valve opened
12/18/2010	12:43:15 AM	Main Vac valve opened
12/18/2010	12:43:15 AM	Bypass valve opened
12/18/2010	12:43:15 AM	Helium MFC set to  100.000000
12/18/2010	12:43:15 AM	H2 MFC set to  0.000000
12/18/2010	12:43:15 AM	BCl3 MFC set to  0.000000
12/18/2010	12:43:15 AM	PHl3 MFC set to  0.000000
12/18/2010	12:43:15 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:43:15 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:43:15 AM	Tube furnace set to 0
12/18/2010	12:44:15 AM	Helium valve closed
12/18/2010	12:44:15 AM	H2 valve closed
12/18/2010	12:44:15 AM	BCl3 valve closed
12/18/2010	12:44:15 AM	PH3 valve closed
12/18/2010	12:44:15 AM	SiCl4 pre valve closed
12/18/2010	12:44:15 AM	SiCl4 post valve closed
12/18/2010	12:44:15 AM	Bubbler valve closed
12/18/2010	12:44:15 AM	Main Vac valve opened
12/18/2010	12:44:15 AM	Bypass valve opened
12/18/2010	12:44:15 AM	Helium MFC set to  0.000000
12/18/2010	12:44:15 AM	H2 MFC set to  0.000000
12/18/2010	12:44:15 AM	BCl3 MFC set to  0.000000
12/18/2010	12:44:15 AM	PHl3 MFC set to  0.000000
12/18/2010	12:44:15 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:44:15 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:44:15 AM	Tube furnace set to 0
12/18/2010	12:45:15 AM	H2 valve closed
12/18/2010	12:45:15 AM	BCl3 valve closed
12/18/2010	12:45:15 AM	PH3 valve closed
12/18/2010	12:45:15 AM	SiCl4 pre valve closed
12/18/2010	12:45:15 AM	SiCl4 post valve closed
12/18/2010	12:45:15 AM	Bubbler valve closed
12/18/2010	12:45:15 AM	Helium valve opened
12/18/2010	12:45:15 AM	Main Vac valve opened
12/18/2010	12:45:15 AM	Bypass valve opened
12/18/2010	12:45:15 AM	Helium MFC set to  100.000000
12/18/2010	12:45:15 AM	H2 MFC set to  0.000000
12/18/2010	12:45:15 AM	BCl3 MFC set to  0.000000
12/18/2010	12:45:15 AM	PHl3 MFC set to  0.000000
12/18/2010	12:45:15 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:45:15 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:45:15 AM	Tube furnace set to 0
12/18/2010	12:46:15 AM	Helium valve closed
12/18/2010	12:46:15 AM	H2 valve closed
12/18/2010	12:46:15 AM	BCl3 valve closed
12/18/2010	12:46:15 AM	PH3 valve closed
12/18/2010	12:46:15 AM	SiCl4 pre valve closed
12/18/2010	12:46:15 AM	SiCl4 post valve closed
12/18/2010	12:46:15 AM	Bubbler valve closed
12/18/2010	12:46:15 AM	Main Vac valve opened
12/18/2010	12:46:15 AM	Bypass valve opened
12/18/2010	12:46:15 AM	Helium MFC set to  0.000000
12/18/2010	12:46:15 AM	H2 MFC set to  0.000000
12/18/2010	12:46:15 AM	BCl3 MFC set to  0.000000
12/18/2010	12:46:15 AM	PHl3 MFC set to  0.000000
12/18/2010	12:46:15 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:46:15 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:46:16 AM	Tube furnace set to 0
12/18/2010	12:47:16 AM	H2 valve closed
12/18/2010	12:47:16 AM	BCl3 valve closed
12/18/2010	12:47:16 AM	PH3 valve closed
12/18/2010	12:47:16 AM	SiCl4 pre valve closed
12/18/2010	12:47:16 AM	SiCl4 post valve closed
12/18/2010	12:47:16 AM	Bubbler valve closed
12/18/2010	12:47:16 AM	Helium valve opened
12/18/2010	12:47:16 AM	Main Vac valve opened
12/18/2010	12:47:16 AM	Bypass valve opened
12/18/2010	12:47:16 AM	Helium MFC set to  100.000000
12/18/2010	12:47:16 AM	H2 MFC set to  0.000000
12/18/2010	12:47:16 AM	BCl3 MFC set to  0.000000
12/18/2010	12:47:16 AM	PHl3 MFC set to  0.000000
12/18/2010	12:47:16 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:47:16 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:47:16 AM	Tube furnace set to 0
12/18/2010	12:47:36 AM	Helium valve closed
12/18/2010	12:47:36 AM	H2 valve closed
12/18/2010	12:47:36 AM	BCl3 valve closed
12/18/2010	12:47:36 AM	PH3 valve closed
12/18/2010	12:47:36 AM	SiCl4 pre valve closed
12/18/2010	12:47:36 AM	SiCl4 post valve closed
12/18/2010	12:47:36 AM	Bubbler valve closed
12/18/2010	12:47:36 AM	Main Vac valve opened
12/18/2010	12:47:36 AM	Bypass valve opened
12/18/2010	12:47:36 AM	Helium MFC set to  0.000000
12/18/2010	12:47:36 AM	H2 MFC set to  0.000000
12/18/2010	12:47:36 AM	BCl3 MFC set to  0.000000
12/18/2010	12:47:36 AM	PHl3 MFC set to  0.000000
12/18/2010	12:47:36 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:47:36 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:47:36 AM	Tube furnace set to 0
12/18/2010	12:47:36 AM	H2 valve closed
12/18/2010	12:47:36 AM	BCl3 valve closed
12/18/2010	12:47:36 AM	PH3 valve closed
12/18/2010	12:47:36 AM	SiCl4 pre valve closed
12/18/2010	12:47:36 AM	SiCl4 post valve closed
12/18/2010	12:47:36 AM	Bubbler valve closed
12/18/2010	12:47:36 AM	Helium valve opened
12/18/2010	12:47:36 AM	Main Vac valve opened
12/18/2010	12:47:36 AM	Bypass valve opened
12/18/2010	12:47:36 AM	Helium MFC set to  100.000000
12/18/2010	12:47:36 AM	H2 MFC set to  0.000000
12/18/2010	12:47:36 AM	BCl3 MFC set to  0.000000
12/18/2010	12:47:36 AM	PHl3 MFC set to  0.000000
12/18/2010	12:47:36 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:47:36 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:47:36 AM	Tube furnace set to 0
12/18/2010	12:47:37 AM	Helium valve closed
12/18/2010	12:47:37 AM	H2 valve closed
12/18/2010	12:47:37 AM	BCl3 valve closed
12/18/2010	12:47:37 AM	PH3 valve closed
12/18/2010	12:47:37 AM	SiCl4 pre valve closed
12/18/2010	12:47:37 AM	SiCl4 post valve closed
12/18/2010	12:47:37 AM	Bubbler valve closed
12/18/2010	12:47:37 AM	Main Vac valve opened
12/18/2010	12:47:37 AM	Bypass valve opened
12/18/2010	12:47:37 AM	Helium MFC set to  0.000000
12/18/2010	12:47:37 AM	H2 MFC set to  0.000000
12/18/2010	12:47:37 AM	BCl3 MFC set to  0.000000
12/18/2010	12:47:37 AM	PHl3 MFC set to  0.000000
12/18/2010	12:47:37 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:47:37 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:47:38 AM	Tube furnace set to 0
12/18/2010	12:47:38 AM	H2 valve closed
12/18/2010	12:47:38 AM	BCl3 valve closed
12/18/2010	12:47:38 AM	PH3 valve closed
12/18/2010	12:47:38 AM	SiCl4 pre valve closed
12/18/2010	12:47:38 AM	SiCl4 post valve closed
12/18/2010	12:47:38 AM	Bubbler valve closed
12/18/2010	12:47:38 AM	Helium valve opened
12/18/2010	12:47:38 AM	Main Vac valve opened
12/18/2010	12:47:38 AM	Bypass valve opened
12/18/2010	12:47:38 AM	Helium MFC set to  100.000000
12/18/2010	12:47:38 AM	H2 MFC set to  0.000000
12/18/2010	12:47:38 AM	BCl3 MFC set to  0.000000
12/18/2010	12:47:38 AM	PHl3 MFC set to  0.000000
12/18/2010	12:47:38 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:47:38 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:47:38 AM	Tube furnace set to 0
12/18/2010	12:47:40 AM	Helium valve closed
12/18/2010	12:47:40 AM	H2 valve closed
12/18/2010	12:47:40 AM	BCl3 valve closed
12/18/2010	12:47:40 AM	PH3 valve closed
12/18/2010	12:47:40 AM	SiCl4 pre valve closed
12/18/2010	12:47:40 AM	SiCl4 post valve closed
12/18/2010	12:47:40 AM	Bubbler valve closed
12/18/2010	12:47:40 AM	Main Vac valve opened
12/18/2010	12:47:40 AM	Bypass valve opened
12/18/2010	12:47:40 AM	Helium MFC set to  0.000000
12/18/2010	12:47:40 AM	H2 MFC set to  0.000000
12/18/2010	12:47:40 AM	BCl3 MFC set to  0.000000
12/18/2010	12:47:40 AM	PHl3 MFC set to  0.000000
12/18/2010	12:47:40 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:47:40 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:47:41 AM	Tube furnace set to 0
12/18/2010	12:47:41 AM	H2 valve closed
12/18/2010	12:47:41 AM	BCl3 valve closed
12/18/2010	12:47:41 AM	PH3 valve closed
12/18/2010	12:47:41 AM	SiCl4 pre valve closed
12/18/2010	12:47:41 AM	SiCl4 post valve closed
12/18/2010	12:47:41 AM	Bubbler valve closed
12/18/2010	12:47:41 AM	Helium valve opened
12/18/2010	12:47:41 AM	Main Vac valve opened
12/18/2010	12:47:41 AM	Bypass valve opened
12/18/2010	12:47:41 AM	Helium MFC set to  100.000000
12/18/2010	12:47:41 AM	H2 MFC set to  0.000000
12/18/2010	12:47:41 AM	BCl3 MFC set to  0.000000
12/18/2010	12:47:41 AM	PHl3 MFC set to  0.000000
12/18/2010	12:47:41 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:47:41 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:47:41 AM	Tube furnace set to 0
12/18/2010	12:47:44 AM	Helium valve closed
12/18/2010	12:47:44 AM	H2 valve closed
12/18/2010	12:47:44 AM	BCl3 valve closed
12/18/2010	12:47:44 AM	PH3 valve closed
12/18/2010	12:47:44 AM	SiCl4 pre valve closed
12/18/2010	12:47:44 AM	SiCl4 post valve closed
12/18/2010	12:47:44 AM	Bubbler valve closed
12/18/2010	12:47:44 AM	Main Vac valve opened
12/18/2010	12:47:44 AM	Bypass valve opened
12/18/2010	12:47:44 AM	Helium MFC set to  0.000000
12/18/2010	12:47:44 AM	H2 MFC set to  0.000000
12/18/2010	12:47:44 AM	BCl3 MFC set to  0.000000
12/18/2010	12:47:44 AM	PHl3 MFC set to  0.000000
12/18/2010	12:47:44 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:47:44 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:47:44 AM	Tube furnace set to 0
12/18/2010	12:47:45 AM	H2 valve closed
12/18/2010	12:47:45 AM	BCl3 valve closed
12/18/2010	12:47:45 AM	PH3 valve closed
12/18/2010	12:47:45 AM	SiCl4 pre valve closed
12/18/2010	12:47:45 AM	SiCl4 post valve closed
12/18/2010	12:47:45 AM	Bubbler valve closed
12/18/2010	12:47:45 AM	Helium valve opened
12/18/2010	12:47:45 AM	Main Vac valve opened
12/18/2010	12:47:45 AM	Bypass valve opened
12/18/2010	12:47:45 AM	Helium MFC set to  100.000000
12/18/2010	12:47:45 AM	H2 MFC set to  0.000000
12/18/2010	12:47:45 AM	BCl3 MFC set to  0.000000
12/18/2010	12:47:45 AM	PHl3 MFC set to  0.000000
12/18/2010	12:47:45 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:47:45 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:47:45 AM	Tube furnace set to 0
12/18/2010	12:47:46 AM	Helium valve closed
12/18/2010	12:47:46 AM	H2 valve closed
12/18/2010	12:47:46 AM	BCl3 valve closed
12/18/2010	12:47:46 AM	PH3 valve closed
12/18/2010	12:47:46 AM	SiCl4 pre valve closed
12/18/2010	12:47:46 AM	SiCl4 post valve closed
12/18/2010	12:47:46 AM	Bubbler valve closed
12/18/2010	12:47:46 AM	Main Vac valve opened
12/18/2010	12:47:46 AM	Bypass valve opened
12/18/2010	12:47:46 AM	Helium MFC set to  0.000000
12/18/2010	12:47:46 AM	H2 MFC set to  0.000000
12/18/2010	12:47:46 AM	BCl3 MFC set to  0.000000
12/18/2010	12:47:46 AM	PHl3 MFC set to  0.000000
12/18/2010	12:47:46 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:47:46 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:47:46 AM	Tube furnace set to 0
12/18/2010	12:47:47 AM	H2 valve closed
12/18/2010	12:47:47 AM	BCl3 valve closed
12/18/2010	12:47:47 AM	PH3 valve closed
12/18/2010	12:47:47 AM	SiCl4 pre valve closed
12/18/2010	12:47:47 AM	SiCl4 post valve closed
12/18/2010	12:47:47 AM	Bubbler valve closed
12/18/2010	12:47:47 AM	Helium valve opened
12/18/2010	12:47:47 AM	Main Vac valve opened
12/18/2010	12:47:47 AM	Bypass valve opened
12/18/2010	12:47:47 AM	Helium MFC set to  100.000000
12/18/2010	12:47:47 AM	H2 MFC set to  0.000000
12/18/2010	12:47:47 AM	BCl3 MFC set to  0.000000
12/18/2010	12:47:47 AM	PHl3 MFC set to  0.000000
12/18/2010	12:47:47 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:47:47 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:47:47 AM	Tube furnace set to 0
12/18/2010	12:47:48 AM	Helium valve closed
12/18/2010	12:47:48 AM	H2 valve closed
12/18/2010	12:47:48 AM	BCl3 valve closed
12/18/2010	12:47:48 AM	PH3 valve closed
12/18/2010	12:47:48 AM	SiCl4 pre valve closed
12/18/2010	12:47:48 AM	SiCl4 post valve closed
12/18/2010	12:47:48 AM	Bubbler valve closed
12/18/2010	12:47:48 AM	Main Vac valve opened
12/18/2010	12:47:48 AM	Bypass valve opened
12/18/2010	12:47:48 AM	Helium MFC set to  0.000000
12/18/2010	12:47:48 AM	H2 MFC set to  0.000000
12/18/2010	12:47:48 AM	BCl3 MFC set to  0.000000
12/18/2010	12:47:48 AM	PHl3 MFC set to  0.000000
12/18/2010	12:47:48 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:47:48 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:47:48 AM	Tube furnace set to 0
12/18/2010	12:47:49 AM	H2 valve closed
12/18/2010	12:47:49 AM	BCl3 valve closed
12/18/2010	12:47:49 AM	PH3 valve closed
12/18/2010	12:47:49 AM	SiCl4 pre valve closed
12/18/2010	12:47:49 AM	SiCl4 post valve closed
12/18/2010	12:47:49 AM	Bubbler valve closed
12/18/2010	12:47:49 AM	Helium valve opened
12/18/2010	12:47:49 AM	Main Vac valve opened
12/18/2010	12:47:49 AM	Bypass valve opened
12/18/2010	12:47:49 AM	Helium MFC set to  100.000000
12/18/2010	12:47:49 AM	H2 MFC set to  0.000000
12/18/2010	12:47:49 AM	BCl3 MFC set to  0.000000
12/18/2010	12:47:49 AM	PHl3 MFC set to  0.000000
12/18/2010	12:47:49 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:47:49 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:47:49 AM	Tube furnace set to 0
12/18/2010	12:48:49 AM	Helium valve closed
12/18/2010	12:48:49 AM	H2 valve closed
12/18/2010	12:48:49 AM	BCl3 valve closed
12/18/2010	12:48:49 AM	PH3 valve closed
12/18/2010	12:48:49 AM	SiCl4 pre valve closed
12/18/2010	12:48:49 AM	SiCl4 post valve closed
12/18/2010	12:48:49 AM	Bubbler valve closed
12/18/2010	12:48:49 AM	Main Vac valve opened
12/18/2010	12:48:49 AM	Bypass valve opened
12/18/2010	12:48:49 AM	Helium MFC set to  0.000000
12/18/2010	12:48:49 AM	H2 MFC set to  0.000000
12/18/2010	12:48:49 AM	BCl3 MFC set to  0.000000
12/18/2010	12:48:49 AM	PHl3 MFC set to  0.000000
12/18/2010	12:48:49 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:48:49 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:48:49 AM	Tube furnace set to 0
12/18/2010	12:48:50 AM	Run finished at 12:48 AM
12/18/2010	12:48:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	12:50:33 AM	Recipe started at 12:50 AM
12/18/2010	12:50:33 AM	Helium valve closed
12/18/2010	12:50:33 AM	BCl3 valve closed
12/18/2010	12:50:33 AM	PH3 valve closed
12/18/2010	12:50:33 AM	SiCl4 pre valve closed
12/18/2010	12:50:33 AM	SiCl4 post valve closed
12/18/2010	12:50:33 AM	Main Vac valve closed
12/18/2010	12:50:33 AM	Bypass valve closed
12/18/2010	12:50:33 AM	Bubbler valve closed
12/18/2010	12:50:33 AM	H2 valve opened
12/18/2010	12:50:33 AM	Helium MFC set to  0.000000
12/18/2010	12:50:33 AM	H2 MFC set to  500.000000
12/18/2010	12:50:33 AM	BCl3 MFC set to  0.000000
12/18/2010	12:50:33 AM	PHl3 MFC set to  0.000000
12/18/2010	12:50:33 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:50:33 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:50:34 AM	Tube furnace set to 0
12/18/2010	12:51:51 AM	Helium valve closed
12/18/2010	12:51:51 AM	BCl3 valve closed
12/18/2010	12:51:51 AM	PH3 valve closed
12/18/2010	12:51:51 AM	SiCl4 pre valve closed
12/18/2010	12:51:51 AM	SiCl4 post valve closed
12/18/2010	12:51:51 AM	Main Vac valve closed
12/18/2010	12:51:51 AM	Bypass valve closed
12/18/2010	12:51:51 AM	H2 valve opened
12/18/2010	12:51:51 AM	Bubbler valve opened
12/18/2010	12:51:51 AM	Helium MFC set to  0.000000
12/18/2010	12:51:51 AM	H2 MFC set to  500.000000
12/18/2010	12:51:51 AM	BCl3 MFC set to  0.000000
12/18/2010	12:51:51 AM	PHl3 MFC set to  0.000000
12/18/2010	12:51:51 AM	SiCl4 MFC set to  0.000000
12/18/2010	12:51:51 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:51:51 AM	Tube furnace set to 1000
12/18/2010	1:11:51 AM	Helium valve closed
12/18/2010	1:11:51 AM	BCl3 valve closed
12/18/2010	1:11:51 AM	Main Vac valve closed
12/18/2010	1:11:51 AM	Bypass valve closed
12/18/2010	1:11:51 AM	H2 valve opened
12/18/2010	1:11:51 AM	PH3 valve opened
12/18/2010	1:11:51 AM	SiCl4 pre valve opened
12/18/2010	1:11:51 AM	SiCl4 post valve opened
12/18/2010	1:11:51 AM	Bubbler valve opened
12/18/2010	1:11:51 AM	Helium MFC set to  0.000000
12/18/2010	1:11:51 AM	H2 MFC set to  500.000000
12/18/2010	1:11:51 AM	BCl3 MFC set to  0.000000
12/18/2010	1:11:51 AM	PHl3 MFC set to  1.000000
12/18/2010	1:11:51 AM	SiCl4 MFC set to  50.000000
12/18/2010	1:11:51 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	1:11:51 AM	Tube furnace set to 1000
12/18/2010	1:26:51 AM	H2 valve closed
12/18/2010	1:26:51 AM	BCl3 valve closed
12/18/2010	1:26:51 AM	PH3 valve closed
12/18/2010	1:26:51 AM	SiCl4 pre valve closed
12/18/2010	1:26:51 AM	SiCl4 post valve closed
12/18/2010	1:26:51 AM	Main Vac valve closed
12/18/2010	1:26:51 AM	Bypass valve closed
12/18/2010	1:26:51 AM	Helium valve opened
12/18/2010	1:26:51 AM	Bubbler valve opened
12/18/2010	1:26:51 AM	Helium MFC set to  500.000000
12/18/2010	1:26:51 AM	H2 MFC set to  0.000000
12/18/2010	1:26:51 AM	BCl3 MFC set to  0.000000
12/18/2010	1:26:51 AM	PHl3 MFC set to  0.000000
12/18/2010	1:26:51 AM	SiCl4 MFC set to  0.000000
12/18/2010	1:26:51 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	1:26:51 AM	Tube furnace set to 0
12/18/2010	1:46:51 AM	Helium valve closed
12/18/2010	1:46:51 AM	H2 valve closed
12/18/2010	1:46:51 AM	BCl3 valve closed
12/18/2010	1:46:51 AM	PH3 valve closed
12/18/2010	1:46:51 AM	SiCl4 pre valve closed
12/18/2010	1:46:51 AM	SiCl4 post valve closed
12/18/2010	1:46:51 AM	Main Vac valve closed
12/18/2010	1:46:51 AM	Bypass valve closed
12/18/2010	1:46:51 AM	Bubbler valve closed
12/18/2010	1:46:51 AM	Helium MFC set to  0.000000
12/18/2010	1:46:51 AM	H2 MFC set to  0.000000
12/18/2010	1:46:51 AM	BCl3 MFC set to  0.000000
12/18/2010	1:46:51 AM	PHl3 MFC set to  0.000000
12/18/2010	1:46:51 AM	SiCl4 MFC set to  0.000000
12/18/2010	1:46:51 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	1:46:51 AM	Tube furnace set to 0
12/18/2010	1:46:52 AM	Run finished at 1:46 AM
12/18/2010	1:53:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/18/2010	1:53:02 AM	Recipe started at 1:53 AM
12/18/2010	1:53:02 AM	H2 valve closed
12/18/2010	1:53:02 AM	BCl3 valve closed
12/18/2010	1:53:02 AM	PH3 valve closed
12/18/2010	1:53:02 AM	SiCl4 pre valve closed
12/18/2010	1:53:02 AM	SiCl4 post valve closed
12/18/2010	1:53:02 AM	Main Vac valve closed
12/18/2010	1:53:02 AM	Bypass valve closed
12/18/2010	1:53:02 AM	Bubbler valve closed
12/18/2010	1:53:02 AM	Helium valve opened
12/18/2010	1:53:02 AM	Helium MFC set to  500.000000
12/18/2010	1:53:02 AM	H2 MFC set to  0.000000
12/18/2010	1:53:02 AM	BCl3 MFC set to  0.000000
12/18/2010	1:53:02 AM	PHl3 MFC set to  0.000000
12/18/2010	1:53:02 AM	SiCl4 MFC set to  0.000000
12/18/2010	1:53:02 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	1:53:02 AM	Tube furnace set to 0
12/18/2010	1:53:05 AM	Helium valve closed
12/18/2010	1:53:05 AM	H2 valve closed
12/18/2010	1:53:05 AM	BCl3 valve closed
12/18/2010	1:53:05 AM	PH3 valve closed
12/18/2010	1:53:05 AM	SiCl4 pre valve closed
12/18/2010	1:53:05 AM	SiCl4 post valve closed
12/18/2010	1:53:05 AM	Main Vac valve closed
12/18/2010	1:53:05 AM	Bypass valve closed
12/18/2010	1:53:05 AM	Bubbler valve closed
12/18/2010	1:53:05 AM	Helium MFC set to  0.000000
12/18/2010	1:53:05 AM	H2 MFC set to  0.000000
12/18/2010	1:53:05 AM	BCl3 MFC set to  0.000000
12/18/2010	1:53:05 AM	PHl3 MFC set to  0.000000
12/18/2010	1:53:05 AM	SiCl4 MFC set to  0.000000
12/18/2010	1:53:05 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	1:53:05 AM	Tube furnace set to 0
12/18/2010	1:53:05 AM	Run finished at 1:53 AM
12/18/2010	1:53:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/18/2010	1:57:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2010	1:57:02 AM	Recipe started at 1:57 AM
12/18/2010	1:57:02 AM	Helium valve closed
12/18/2010	1:57:02 AM	H2 valve closed
12/18/2010	1:57:02 AM	BCl3 valve closed
12/18/2010	1:57:02 AM	PH3 valve closed
12/18/2010	1:57:02 AM	SiCl4 pre valve closed
12/18/2010	1:57:02 AM	SiCl4 post valve closed
12/18/2010	1:57:02 AM	Main Vac valve closed
12/18/2010	1:57:02 AM	Bubbler valve closed
12/18/2010	1:57:02 AM	Bypass valve opened
12/18/2010	1:57:02 AM	Helium MFC set to  0.000000
12/18/2010	1:57:02 AM	H2 MFC set to  0.000000
12/18/2010	1:57:02 AM	BCl3 MFC set to  0.000000
12/18/2010	1:57:02 AM	PHl3 MFC set to  0.000000
12/18/2010	1:57:02 AM	SiCl4 MFC set to  0.000000
12/18/2010	1:57:02 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	1:57:02 AM	Tube furnace set to 0
12/18/2010	1:57:58 AM	Helium valve closed
12/18/2010	1:57:58 AM	H2 valve closed
12/18/2010	1:57:58 AM	BCl3 valve closed
12/18/2010	1:57:58 AM	PH3 valve closed
12/18/2010	1:57:58 AM	SiCl4 pre valve closed
12/18/2010	1:57:58 AM	SiCl4 post valve closed
12/18/2010	1:57:58 AM	Bubbler valve closed
12/18/2010	1:57:58 AM	Main Vac valve opened
12/18/2010	1:57:58 AM	Bypass valve opened
12/18/2010	1:57:58 AM	Helium MFC set to  0.000000
12/18/2010	1:57:58 AM	H2 MFC set to  0.000000
12/18/2010	1:57:58 AM	BCl3 MFC set to  0.000000
12/18/2010	1:57:58 AM	PHl3 MFC set to  0.000000
12/18/2010	1:57:58 AM	SiCl4 MFC set to  0.000000
12/18/2010	1:57:58 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	1:57:58 AM	Tube furnace set to 0
12/18/2010	1:57:58 AM	Run finished at 1:57 AM
12/18/2010	1:57:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2010	1:58:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	1:58:43 AM	Recipe started at 1:58 AM
12/18/2010	1:58:43 AM	Helium valve closed
12/18/2010	1:58:43 AM	H2 valve closed
12/18/2010	1:58:43 AM	BCl3 valve closed
12/18/2010	1:58:43 AM	PH3 valve closed
12/18/2010	1:58:43 AM	SiCl4 pre valve closed
12/18/2010	1:58:43 AM	SiCl4 post valve closed
12/18/2010	1:58:43 AM	Main Vac valve closed
12/18/2010	1:58:43 AM	Bubbler valve closed
12/18/2010	1:58:43 AM	Bypass valve opened
12/18/2010	1:58:43 AM	Helium MFC set to  0.000000
12/18/2010	1:58:43 AM	H2 MFC set to  0.000000
12/18/2010	1:58:43 AM	BCl3 MFC set to  0.000000
12/18/2010	1:58:43 AM	PHl3 MFC set to  0.000000
12/18/2010	1:58:43 AM	SiCl4 MFC set to  0.000000
12/18/2010	1:58:43 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	1:58:43 AM	Tube furnace set to 0
12/18/2010	1:58:43 AM	Helium valve closed
12/18/2010	1:58:43 AM	H2 valve closed
12/18/2010	1:58:43 AM	BCl3 valve closed
12/18/2010	1:58:44 AM	PH3 valve closed
12/18/2010	1:58:44 AM	SiCl4 pre valve closed
12/18/2010	1:58:44 AM	SiCl4 post valve closed
12/18/2010	1:58:44 AM	Bubbler valve closed
12/18/2010	1:58:44 AM	Main Vac valve opened
12/18/2010	1:58:44 AM	Bypass valve opened
12/18/2010	1:58:44 AM	Helium MFC set to  0.000000
12/18/2010	1:58:44 AM	H2 MFC set to  0.000000
12/18/2010	1:58:44 AM	BCl3 MFC set to  0.000000
12/18/2010	1:58:44 AM	PHl3 MFC set to  0.000000
12/18/2010	1:58:44 AM	SiCl4 MFC set to  0.000000
12/18/2010	1:58:44 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	1:58:44 AM	Tube furnace set to 0
12/18/2010	1:59:44 AM	H2 valve closed
12/18/2010	1:59:44 AM	BCl3 valve closed
12/18/2010	1:59:44 AM	PH3 valve closed
12/18/2010	1:59:44 AM	SiCl4 pre valve closed
12/18/2010	1:59:44 AM	SiCl4 post valve closed
12/18/2010	1:59:44 AM	Bubbler valve closed
12/18/2010	1:59:44 AM	Helium valve opened
12/18/2010	1:59:44 AM	Main Vac valve opened
12/18/2010	1:59:44 AM	Bypass valve opened
12/18/2010	1:59:44 AM	Helium MFC set to  100.000000
12/18/2010	1:59:44 AM	H2 MFC set to  0.000000
12/18/2010	1:59:44 AM	BCl3 MFC set to  0.000000
12/18/2010	1:59:44 AM	PHl3 MFC set to  0.000000
12/18/2010	1:59:44 AM	SiCl4 MFC set to  0.000000
12/18/2010	1:59:44 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	1:59:44 AM	Tube furnace set to 0
12/18/2010	2:00:44 AM	Helium valve closed
12/18/2010	2:00:44 AM	H2 valve closed
12/18/2010	2:00:44 AM	BCl3 valve closed
12/18/2010	2:00:44 AM	PH3 valve closed
12/18/2010	2:00:44 AM	SiCl4 pre valve closed
12/18/2010	2:00:44 AM	SiCl4 post valve closed
12/18/2010	2:00:44 AM	Bubbler valve closed
12/18/2010	2:00:44 AM	Main Vac valve opened
12/18/2010	2:00:44 AM	Bypass valve opened
12/18/2010	2:00:44 AM	Helium MFC set to  0.000000
12/18/2010	2:00:44 AM	H2 MFC set to  0.000000
12/18/2010	2:00:44 AM	BCl3 MFC set to  0.000000
12/18/2010	2:00:44 AM	PHl3 MFC set to  0.000000
12/18/2010	2:00:44 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:00:44 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:00:44 AM	Tube furnace set to 0
12/18/2010	2:01:44 AM	H2 valve closed
12/18/2010	2:01:44 AM	BCl3 valve closed
12/18/2010	2:01:44 AM	PH3 valve closed
12/18/2010	2:01:44 AM	SiCl4 pre valve closed
12/18/2010	2:01:44 AM	SiCl4 post valve closed
12/18/2010	2:01:44 AM	Bubbler valve closed
12/18/2010	2:01:44 AM	Helium valve opened
12/18/2010	2:01:44 AM	Main Vac valve opened
12/18/2010	2:01:44 AM	Bypass valve opened
12/18/2010	2:01:44 AM	Helium MFC set to  100.000000
12/18/2010	2:01:44 AM	H2 MFC set to  0.000000
12/18/2010	2:01:44 AM	BCl3 MFC set to  0.000000
12/18/2010	2:01:44 AM	PHl3 MFC set to  0.000000
12/18/2010	2:01:44 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:01:44 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:01:44 AM	Tube furnace set to 0
12/18/2010	2:02:44 AM	Helium valve closed
12/18/2010	2:02:44 AM	H2 valve closed
12/18/2010	2:02:44 AM	BCl3 valve closed
12/18/2010	2:02:44 AM	PH3 valve closed
12/18/2010	2:02:44 AM	SiCl4 pre valve closed
12/18/2010	2:02:44 AM	SiCl4 post valve closed
12/18/2010	2:02:44 AM	Bubbler valve closed
12/18/2010	2:02:44 AM	Main Vac valve opened
12/18/2010	2:02:44 AM	Bypass valve opened
12/18/2010	2:02:44 AM	Helium MFC set to  0.000000
12/18/2010	2:02:44 AM	H2 MFC set to  0.000000
12/18/2010	2:02:44 AM	BCl3 MFC set to  0.000000
12/18/2010	2:02:44 AM	PHl3 MFC set to  0.000000
12/18/2010	2:02:44 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:02:44 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:02:44 AM	Tube furnace set to 0
12/18/2010	2:03:44 AM	H2 valve closed
12/18/2010	2:03:44 AM	BCl3 valve closed
12/18/2010	2:03:44 AM	PH3 valve closed
12/18/2010	2:03:44 AM	SiCl4 pre valve closed
12/18/2010	2:03:44 AM	SiCl4 post valve closed
12/18/2010	2:03:44 AM	Bubbler valve closed
12/18/2010	2:03:44 AM	Helium valve opened
12/18/2010	2:03:44 AM	Main Vac valve opened
12/18/2010	2:03:44 AM	Bypass valve opened
12/18/2010	2:03:44 AM	Helium MFC set to  100.000000
12/18/2010	2:03:44 AM	H2 MFC set to  0.000000
12/18/2010	2:03:44 AM	BCl3 MFC set to  0.000000
12/18/2010	2:03:44 AM	PHl3 MFC set to  0.000000
12/18/2010	2:03:44 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:03:44 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:03:45 AM	Tube furnace set to 0
12/18/2010	2:04:45 AM	Helium valve closed
12/18/2010	2:04:45 AM	H2 valve closed
12/18/2010	2:04:45 AM	BCl3 valve closed
12/18/2010	2:04:45 AM	PH3 valve closed
12/18/2010	2:04:45 AM	SiCl4 pre valve closed
12/18/2010	2:04:45 AM	SiCl4 post valve closed
12/18/2010	2:04:45 AM	Bubbler valve closed
12/18/2010	2:04:45 AM	Main Vac valve opened
12/18/2010	2:04:45 AM	Bypass valve opened
12/18/2010	2:04:45 AM	Helium MFC set to  0.000000
12/18/2010	2:04:45 AM	H2 MFC set to  0.000000
12/18/2010	2:04:45 AM	BCl3 MFC set to  0.000000
12/18/2010	2:04:45 AM	PHl3 MFC set to  0.000000
12/18/2010	2:04:45 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:04:45 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:04:45 AM	Tube furnace set to 0
12/18/2010	2:05:45 AM	H2 valve closed
12/18/2010	2:05:45 AM	BCl3 valve closed
12/18/2010	2:05:45 AM	PH3 valve closed
12/18/2010	2:05:45 AM	SiCl4 pre valve closed
12/18/2010	2:05:45 AM	SiCl4 post valve closed
12/18/2010	2:05:45 AM	Bubbler valve closed
12/18/2010	2:05:45 AM	Helium valve opened
12/18/2010	2:05:45 AM	Main Vac valve opened
12/18/2010	2:05:45 AM	Bypass valve opened
12/18/2010	2:05:45 AM	Helium MFC set to  100.000000
12/18/2010	2:05:45 AM	H2 MFC set to  0.000000
12/18/2010	2:05:45 AM	BCl3 MFC set to  0.000000
12/18/2010	2:05:45 AM	PHl3 MFC set to  0.000000
12/18/2010	2:05:45 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:05:45 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:05:45 AM	Tube furnace set to 0
12/18/2010	2:06:45 AM	Helium valve closed
12/18/2010	2:06:45 AM	H2 valve closed
12/18/2010	2:06:45 AM	BCl3 valve closed
12/18/2010	2:06:45 AM	PH3 valve closed
12/18/2010	2:06:45 AM	SiCl4 pre valve closed
12/18/2010	2:06:45 AM	SiCl4 post valve closed
12/18/2010	2:06:45 AM	Bubbler valve closed
12/18/2010	2:06:45 AM	Main Vac valve opened
12/18/2010	2:06:45 AM	Bypass valve opened
12/18/2010	2:06:45 AM	Helium MFC set to  0.000000
12/18/2010	2:06:45 AM	H2 MFC set to  0.000000
12/18/2010	2:06:45 AM	BCl3 MFC set to  0.000000
12/18/2010	2:06:45 AM	PHl3 MFC set to  0.000000
12/18/2010	2:06:45 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:06:45 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:06:45 AM	Tube furnace set to 0
12/18/2010	2:07:45 AM	H2 valve closed
12/18/2010	2:07:45 AM	BCl3 valve closed
12/18/2010	2:07:45 AM	PH3 valve closed
12/18/2010	2:07:45 AM	SiCl4 pre valve closed
12/18/2010	2:07:45 AM	SiCl4 post valve closed
12/18/2010	2:07:45 AM	Bubbler valve closed
12/18/2010	2:07:45 AM	Helium valve opened
12/18/2010	2:07:45 AM	Main Vac valve opened
12/18/2010	2:07:45 AM	Bypass valve opened
12/18/2010	2:07:45 AM	Helium MFC set to  100.000000
12/18/2010	2:07:45 AM	H2 MFC set to  0.000000
12/18/2010	2:07:45 AM	BCl3 MFC set to  0.000000
12/18/2010	2:07:45 AM	PHl3 MFC set to  0.000000
12/18/2010	2:07:45 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:07:45 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:07:45 AM	Tube furnace set to 0
12/18/2010	2:08:45 AM	Helium valve closed
12/18/2010	2:08:45 AM	H2 valve closed
12/18/2010	2:08:45 AM	BCl3 valve closed
12/18/2010	2:08:45 AM	PH3 valve closed
12/18/2010	2:08:45 AM	SiCl4 pre valve closed
12/18/2010	2:08:45 AM	SiCl4 post valve closed
12/18/2010	2:08:45 AM	Bubbler valve closed
12/18/2010	2:08:45 AM	Main Vac valve opened
12/18/2010	2:08:45 AM	Bypass valve opened
12/18/2010	2:08:45 AM	Helium MFC set to  0.000000
12/18/2010	2:08:45 AM	H2 MFC set to  0.000000
12/18/2010	2:08:45 AM	BCl3 MFC set to  0.000000
12/18/2010	2:08:45 AM	PHl3 MFC set to  0.000000
12/18/2010	2:08:45 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:08:45 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:08:46 AM	Tube furnace set to 0
12/18/2010	2:09:46 AM	H2 valve closed
12/18/2010	2:09:46 AM	BCl3 valve closed
12/18/2010	2:09:46 AM	PH3 valve closed
12/18/2010	2:09:46 AM	SiCl4 pre valve closed
12/18/2010	2:09:46 AM	SiCl4 post valve closed
12/18/2010	2:09:46 AM	Bubbler valve closed
12/18/2010	2:09:46 AM	Helium valve opened
12/18/2010	2:09:46 AM	Main Vac valve opened
12/18/2010	2:09:46 AM	Bypass valve opened
12/18/2010	2:09:46 AM	Helium MFC set to  100.000000
12/18/2010	2:09:46 AM	H2 MFC set to  0.000000
12/18/2010	2:09:46 AM	BCl3 MFC set to  0.000000
12/18/2010	2:09:46 AM	PHl3 MFC set to  0.000000
12/18/2010	2:09:46 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:09:46 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:09:46 AM	Tube furnace set to 0
12/18/2010	2:10:46 AM	Helium valve closed
12/18/2010	2:10:46 AM	H2 valve closed
12/18/2010	2:10:46 AM	BCl3 valve closed
12/18/2010	2:10:46 AM	PH3 valve closed
12/18/2010	2:10:46 AM	SiCl4 pre valve closed
12/18/2010	2:10:46 AM	SiCl4 post valve closed
12/18/2010	2:10:46 AM	Bubbler valve closed
12/18/2010	2:10:46 AM	Main Vac valve opened
12/18/2010	2:10:46 AM	Bypass valve opened
12/18/2010	2:10:46 AM	Helium MFC set to  0.000000
12/18/2010	2:10:46 AM	H2 MFC set to  0.000000
12/18/2010	2:10:46 AM	BCl3 MFC set to  0.000000
12/18/2010	2:10:46 AM	PHl3 MFC set to  0.000000
12/18/2010	2:10:46 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:10:46 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:10:46 AM	Tube furnace set to 0
12/18/2010	2:11:46 AM	H2 valve closed
12/18/2010	2:11:46 AM	BCl3 valve closed
12/18/2010	2:11:46 AM	PH3 valve closed
12/18/2010	2:11:46 AM	SiCl4 pre valve closed
12/18/2010	2:11:46 AM	SiCl4 post valve closed
12/18/2010	2:11:46 AM	Bubbler valve closed
12/18/2010	2:11:46 AM	Helium valve opened
12/18/2010	2:11:46 AM	Main Vac valve opened
12/18/2010	2:11:46 AM	Bypass valve opened
12/18/2010	2:11:46 AM	Helium MFC set to  100.000000
12/18/2010	2:11:46 AM	H2 MFC set to  0.000000
12/18/2010	2:11:46 AM	BCl3 MFC set to  0.000000
12/18/2010	2:11:46 AM	PHl3 MFC set to  0.000000
12/18/2010	2:11:46 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:11:46 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:11:46 AM	Tube furnace set to 0
12/18/2010	2:12:46 AM	Helium valve closed
12/18/2010	2:12:46 AM	H2 valve closed
12/18/2010	2:12:46 AM	BCl3 valve closed
12/18/2010	2:12:46 AM	PH3 valve closed
12/18/2010	2:12:46 AM	SiCl4 pre valve closed
12/18/2010	2:12:46 AM	SiCl4 post valve closed
12/18/2010	2:12:46 AM	Bubbler valve closed
12/18/2010	2:12:46 AM	Main Vac valve opened
12/18/2010	2:12:46 AM	Bypass valve opened
12/18/2010	2:12:46 AM	Helium MFC set to  0.000000
12/18/2010	2:12:46 AM	H2 MFC set to  0.000000
12/18/2010	2:12:46 AM	BCl3 MFC set to  0.000000
12/18/2010	2:12:46 AM	PHl3 MFC set to  0.000000
12/18/2010	2:12:46 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:12:46 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:12:46 AM	Tube furnace set to 0
12/18/2010	2:13:46 AM	H2 valve closed
12/18/2010	2:13:46 AM	BCl3 valve closed
12/18/2010	2:13:46 AM	PH3 valve closed
12/18/2010	2:13:46 AM	SiCl4 pre valve closed
12/18/2010	2:13:46 AM	SiCl4 post valve closed
12/18/2010	2:13:46 AM	Bubbler valve closed
12/18/2010	2:13:46 AM	Helium valve opened
12/18/2010	2:13:46 AM	Main Vac valve opened
12/18/2010	2:13:46 AM	Bypass valve opened
12/18/2010	2:13:46 AM	Helium MFC set to  100.000000
12/18/2010	2:13:46 AM	H2 MFC set to  0.000000
12/18/2010	2:13:46 AM	BCl3 MFC set to  0.000000
12/18/2010	2:13:46 AM	PHl3 MFC set to  0.000000
12/18/2010	2:13:46 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:13:46 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:13:47 AM	Tube furnace set to 0
12/18/2010	2:14:47 AM	Helium valve closed
12/18/2010	2:14:47 AM	H2 valve closed
12/18/2010	2:14:47 AM	BCl3 valve closed
12/18/2010	2:14:47 AM	PH3 valve closed
12/18/2010	2:14:47 AM	SiCl4 pre valve closed
12/18/2010	2:14:47 AM	SiCl4 post valve closed
12/18/2010	2:14:47 AM	Bubbler valve closed
12/18/2010	2:14:47 AM	Main Vac valve opened
12/18/2010	2:14:47 AM	Bypass valve opened
12/18/2010	2:14:47 AM	Helium MFC set to  0.000000
12/18/2010	2:14:47 AM	H2 MFC set to  0.000000
12/18/2010	2:14:47 AM	BCl3 MFC set to  0.000000
12/18/2010	2:14:47 AM	PHl3 MFC set to  0.000000
12/18/2010	2:14:47 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:14:47 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:14:47 AM	Tube furnace set to 0
12/18/2010	2:15:47 AM	H2 valve closed
12/18/2010	2:15:47 AM	BCl3 valve closed
12/18/2010	2:15:47 AM	PH3 valve closed
12/18/2010	2:15:47 AM	SiCl4 pre valve closed
12/18/2010	2:15:47 AM	SiCl4 post valve closed
12/18/2010	2:15:47 AM	Bubbler valve closed
12/18/2010	2:15:47 AM	Helium valve opened
12/18/2010	2:15:47 AM	Main Vac valve opened
12/18/2010	2:15:47 AM	Bypass valve opened
12/18/2010	2:15:47 AM	Helium MFC set to  100.000000
12/18/2010	2:15:47 AM	H2 MFC set to  0.000000
12/18/2010	2:15:47 AM	BCl3 MFC set to  0.000000
12/18/2010	2:15:47 AM	PHl3 MFC set to  0.000000
12/18/2010	2:15:47 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:15:47 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:15:47 AM	Tube furnace set to 0
12/18/2010	2:16:47 AM	Helium valve closed
12/18/2010	2:16:47 AM	H2 valve closed
12/18/2010	2:16:47 AM	BCl3 valve closed
12/18/2010	2:16:47 AM	PH3 valve closed
12/18/2010	2:16:47 AM	SiCl4 pre valve closed
12/18/2010	2:16:47 AM	SiCl4 post valve closed
12/18/2010	2:16:47 AM	Bubbler valve closed
12/18/2010	2:16:47 AM	Main Vac valve opened
12/18/2010	2:16:47 AM	Bypass valve opened
12/18/2010	2:16:47 AM	Helium MFC set to  0.000000
12/18/2010	2:16:47 AM	H2 MFC set to  0.000000
12/18/2010	2:16:47 AM	BCl3 MFC set to  0.000000
12/18/2010	2:16:47 AM	PHl3 MFC set to  0.000000
12/18/2010	2:16:47 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:16:47 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:16:47 AM	Tube furnace set to 0
12/18/2010	2:17:47 AM	H2 valve closed
12/18/2010	2:17:47 AM	BCl3 valve closed
12/18/2010	2:17:47 AM	PH3 valve closed
12/18/2010	2:17:47 AM	SiCl4 pre valve closed
12/18/2010	2:17:47 AM	SiCl4 post valve closed
12/18/2010	2:17:47 AM	Bubbler valve closed
12/18/2010	2:17:47 AM	Helium valve opened
12/18/2010	2:17:47 AM	Main Vac valve opened
12/18/2010	2:17:47 AM	Bypass valve opened
12/18/2010	2:17:47 AM	Helium MFC set to  100.000000
12/18/2010	2:17:47 AM	H2 MFC set to  0.000000
12/18/2010	2:17:47 AM	BCl3 MFC set to  0.000000
12/18/2010	2:17:47 AM	PHl3 MFC set to  0.000000
12/18/2010	2:17:47 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:17:47 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:17:47 AM	Tube furnace set to 0
12/18/2010	2:18:47 AM	Helium valve closed
12/18/2010	2:18:47 AM	H2 valve closed
12/18/2010	2:18:47 AM	BCl3 valve closed
12/18/2010	2:18:47 AM	PH3 valve closed
12/18/2010	2:18:47 AM	SiCl4 pre valve closed
12/18/2010	2:18:47 AM	SiCl4 post valve closed
12/18/2010	2:18:47 AM	Bubbler valve closed
12/18/2010	2:18:47 AM	Main Vac valve opened
12/18/2010	2:18:47 AM	Bypass valve opened
12/18/2010	2:18:47 AM	Helium MFC set to  0.000000
12/18/2010	2:18:47 AM	H2 MFC set to  0.000000
12/18/2010	2:18:47 AM	BCl3 MFC set to  0.000000
12/18/2010	2:18:47 AM	PHl3 MFC set to  0.000000
12/18/2010	2:18:47 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:18:47 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:18:48 AM	Tube furnace set to 0
12/18/2010	2:18:49 AM	Run finished at 2:18 AM
12/18/2010	2:18:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	2:19:18 AM	Bypass valve closed
12/18/2010	2:19:18 AM	Main Vac valve closed
12/18/2010	2:19:42 AM	Bypass valve opened
12/18/2010	2:19:42 AM	Main Vac valve opened
12/18/2010	2:19:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	2:19:57 AM	Recipe started at 2:19 AM
12/18/2010	2:19:57 AM	Helium valve closed
12/18/2010	2:19:57 AM	H2 valve closed
12/18/2010	2:19:57 AM	BCl3 valve closed
12/18/2010	2:19:57 AM	PH3 valve closed
12/18/2010	2:19:57 AM	SiCl4 pre valve closed
12/18/2010	2:19:57 AM	SiCl4 post valve closed
12/18/2010	2:19:57 AM	Main Vac valve closed
12/18/2010	2:19:57 AM	Bubbler valve closed
12/18/2010	2:19:57 AM	Bypass valve opened
12/18/2010	2:19:57 AM	Helium MFC set to  0.000000
12/18/2010	2:19:57 AM	H2 MFC set to  0.000000
12/18/2010	2:19:57 AM	BCl3 MFC set to  0.000000
12/18/2010	2:19:57 AM	PHl3 MFC set to  0.000000
12/18/2010	2:19:57 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:19:57 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:19:57 AM	Tube furnace set to 0
12/18/2010	2:19:57 AM	Helium valve closed
12/18/2010	2:19:57 AM	H2 valve closed
12/18/2010	2:19:57 AM	BCl3 valve closed
12/18/2010	2:19:57 AM	PH3 valve closed
12/18/2010	2:19:57 AM	SiCl4 pre valve closed
12/18/2010	2:19:57 AM	SiCl4 post valve closed
12/18/2010	2:19:57 AM	Bubbler valve closed
12/18/2010	2:19:57 AM	Main Vac valve opened
12/18/2010	2:19:57 AM	Bypass valve opened
12/18/2010	2:19:57 AM	Helium MFC set to  0.000000
12/18/2010	2:19:57 AM	H2 MFC set to  0.000000
12/18/2010	2:19:57 AM	BCl3 MFC set to  0.000000
12/18/2010	2:19:57 AM	PHl3 MFC set to  0.000000
12/18/2010	2:19:57 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:19:57 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:19:57 AM	Tube furnace set to 0
12/18/2010	2:20:57 AM	H2 valve closed
12/18/2010	2:20:57 AM	BCl3 valve closed
12/18/2010	2:20:57 AM	PH3 valve closed
12/18/2010	2:20:57 AM	SiCl4 pre valve closed
12/18/2010	2:20:57 AM	SiCl4 post valve closed
12/18/2010	2:20:57 AM	Bubbler valve closed
12/18/2010	2:20:57 AM	Helium valve opened
12/18/2010	2:20:57 AM	Main Vac valve opened
12/18/2010	2:20:57 AM	Bypass valve opened
12/18/2010	2:20:57 AM	Helium MFC set to  100.000000
12/18/2010	2:20:57 AM	H2 MFC set to  0.000000
12/18/2010	2:20:57 AM	BCl3 MFC set to  0.000000
12/18/2010	2:20:57 AM	PHl3 MFC set to  0.000000
12/18/2010	2:20:57 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:20:57 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:20:58 AM	Tube furnace set to 0
12/18/2010	2:21:58 AM	Helium valve closed
12/18/2010	2:21:58 AM	H2 valve closed
12/18/2010	2:21:58 AM	BCl3 valve closed
12/18/2010	2:21:58 AM	PH3 valve closed
12/18/2010	2:21:58 AM	SiCl4 pre valve closed
12/18/2010	2:21:58 AM	SiCl4 post valve closed
12/18/2010	2:21:58 AM	Bubbler valve closed
12/18/2010	2:21:58 AM	Main Vac valve opened
12/18/2010	2:21:58 AM	Bypass valve opened
12/18/2010	2:21:58 AM	Helium MFC set to  0.000000
12/18/2010	2:21:58 AM	H2 MFC set to  0.000000
12/18/2010	2:21:58 AM	BCl3 MFC set to  0.000000
12/18/2010	2:21:58 AM	PHl3 MFC set to  0.000000
12/18/2010	2:21:58 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:21:58 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:21:58 AM	Tube furnace set to 0
12/18/2010	2:22:58 AM	H2 valve closed
12/18/2010	2:22:58 AM	BCl3 valve closed
12/18/2010	2:22:58 AM	PH3 valve closed
12/18/2010	2:22:58 AM	SiCl4 pre valve closed
12/18/2010	2:22:58 AM	SiCl4 post valve closed
12/18/2010	2:22:58 AM	Bubbler valve closed
12/18/2010	2:22:58 AM	Helium valve opened
12/18/2010	2:22:58 AM	Main Vac valve opened
12/18/2010	2:22:58 AM	Bypass valve opened
12/18/2010	2:22:58 AM	Helium MFC set to  100.000000
12/18/2010	2:22:58 AM	H2 MFC set to  0.000000
12/18/2010	2:22:58 AM	BCl3 MFC set to  0.000000
12/18/2010	2:22:58 AM	PHl3 MFC set to  0.000000
12/18/2010	2:22:58 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:22:58 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:22:58 AM	Tube furnace set to 0
12/18/2010	2:23:58 AM	Helium valve closed
12/18/2010	2:23:58 AM	H2 valve closed
12/18/2010	2:23:58 AM	BCl3 valve closed
12/18/2010	2:23:58 AM	PH3 valve closed
12/18/2010	2:23:58 AM	SiCl4 pre valve closed
12/18/2010	2:23:58 AM	SiCl4 post valve closed
12/18/2010	2:23:58 AM	Bubbler valve closed
12/18/2010	2:23:58 AM	Main Vac valve opened
12/18/2010	2:23:58 AM	Bypass valve opened
12/18/2010	2:23:58 AM	Helium MFC set to  0.000000
12/18/2010	2:23:58 AM	H2 MFC set to  0.000000
12/18/2010	2:23:58 AM	BCl3 MFC set to  0.000000
12/18/2010	2:23:58 AM	PHl3 MFC set to  0.000000
12/18/2010	2:23:58 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:23:58 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:23:58 AM	Tube furnace set to 0
12/18/2010	2:24:58 AM	H2 valve closed
12/18/2010	2:24:58 AM	BCl3 valve closed
12/18/2010	2:24:58 AM	PH3 valve closed
12/18/2010	2:24:58 AM	SiCl4 pre valve closed
12/18/2010	2:24:58 AM	SiCl4 post valve closed
12/18/2010	2:24:58 AM	Bubbler valve closed
12/18/2010	2:24:58 AM	Helium valve opened
12/18/2010	2:24:58 AM	Main Vac valve opened
12/18/2010	2:24:58 AM	Bypass valve opened
12/18/2010	2:24:58 AM	Helium MFC set to  100.000000
12/18/2010	2:24:58 AM	H2 MFC set to  0.000000
12/18/2010	2:24:58 AM	BCl3 MFC set to  0.000000
12/18/2010	2:24:58 AM	PHl3 MFC set to  0.000000
12/18/2010	2:24:58 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:24:58 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:24:58 AM	Tube furnace set to 0
12/18/2010	2:25:58 AM	Helium valve closed
12/18/2010	2:25:58 AM	H2 valve closed
12/18/2010	2:25:58 AM	BCl3 valve closed
12/18/2010	2:25:58 AM	PH3 valve closed
12/18/2010	2:25:58 AM	SiCl4 pre valve closed
12/18/2010	2:25:58 AM	SiCl4 post valve closed
12/18/2010	2:25:58 AM	Bubbler valve closed
12/18/2010	2:25:58 AM	Main Vac valve opened
12/18/2010	2:25:58 AM	Bypass valve opened
12/18/2010	2:25:58 AM	Helium MFC set to  0.000000
12/18/2010	2:25:58 AM	H2 MFC set to  0.000000
12/18/2010	2:25:58 AM	BCl3 MFC set to  0.000000
12/18/2010	2:25:58 AM	PHl3 MFC set to  0.000000
12/18/2010	2:25:58 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:25:58 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:25:59 AM	Tube furnace set to 0
12/18/2010	2:26:59 AM	H2 valve closed
12/18/2010	2:26:59 AM	BCl3 valve closed
12/18/2010	2:26:59 AM	PH3 valve closed
12/18/2010	2:26:59 AM	SiCl4 pre valve closed
12/18/2010	2:26:59 AM	SiCl4 post valve closed
12/18/2010	2:26:59 AM	Bubbler valve closed
12/18/2010	2:26:59 AM	Helium valve opened
12/18/2010	2:26:59 AM	Main Vac valve opened
12/18/2010	2:26:59 AM	Bypass valve opened
12/18/2010	2:26:59 AM	Helium MFC set to  100.000000
12/18/2010	2:26:59 AM	H2 MFC set to  0.000000
12/18/2010	2:26:59 AM	BCl3 MFC set to  0.000000
12/18/2010	2:26:59 AM	PHl3 MFC set to  0.000000
12/18/2010	2:26:59 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:26:59 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:26:59 AM	Tube furnace set to 0
12/18/2010	2:27:59 AM	Helium valve closed
12/18/2010	2:27:59 AM	H2 valve closed
12/18/2010	2:27:59 AM	BCl3 valve closed
12/18/2010	2:27:59 AM	PH3 valve closed
12/18/2010	2:27:59 AM	SiCl4 pre valve closed
12/18/2010	2:27:59 AM	SiCl4 post valve closed
12/18/2010	2:27:59 AM	Bubbler valve closed
12/18/2010	2:27:59 AM	Main Vac valve opened
12/18/2010	2:27:59 AM	Bypass valve opened
12/18/2010	2:27:59 AM	Helium MFC set to  0.000000
12/18/2010	2:27:59 AM	H2 MFC set to  0.000000
12/18/2010	2:27:59 AM	BCl3 MFC set to  0.000000
12/18/2010	2:27:59 AM	PHl3 MFC set to  0.000000
12/18/2010	2:27:59 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:27:59 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:27:59 AM	Tube furnace set to 0
12/18/2010	2:28:59 AM	H2 valve closed
12/18/2010	2:28:59 AM	BCl3 valve closed
12/18/2010	2:28:59 AM	PH3 valve closed
12/18/2010	2:28:59 AM	SiCl4 pre valve closed
12/18/2010	2:28:59 AM	SiCl4 post valve closed
12/18/2010	2:28:59 AM	Bubbler valve closed
12/18/2010	2:28:59 AM	Helium valve opened
12/18/2010	2:28:59 AM	Main Vac valve opened
12/18/2010	2:28:59 AM	Bypass valve opened
12/18/2010	2:28:59 AM	Helium MFC set to  100.000000
12/18/2010	2:28:59 AM	H2 MFC set to  0.000000
12/18/2010	2:28:59 AM	BCl3 MFC set to  0.000000
12/18/2010	2:28:59 AM	PHl3 MFC set to  0.000000
12/18/2010	2:28:59 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:28:59 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:28:59 AM	Tube furnace set to 0
12/18/2010	2:29:59 AM	Helium valve closed
12/18/2010	2:29:59 AM	H2 valve closed
12/18/2010	2:29:59 AM	BCl3 valve closed
12/18/2010	2:29:59 AM	PH3 valve closed
12/18/2010	2:29:59 AM	SiCl4 pre valve closed
12/18/2010	2:29:59 AM	SiCl4 post valve closed
12/18/2010	2:29:59 AM	Bubbler valve closed
12/18/2010	2:29:59 AM	Main Vac valve opened
12/18/2010	2:29:59 AM	Bypass valve opened
12/18/2010	2:29:59 AM	Helium MFC set to  0.000000
12/18/2010	2:29:59 AM	H2 MFC set to  0.000000
12/18/2010	2:29:59 AM	BCl3 MFC set to  0.000000
12/18/2010	2:29:59 AM	PHl3 MFC set to  0.000000
12/18/2010	2:29:59 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:29:59 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:29:59 AM	Tube furnace set to 0
12/18/2010	2:30:59 AM	H2 valve closed
12/18/2010	2:30:59 AM	BCl3 valve closed
12/18/2010	2:30:59 AM	PH3 valve closed
12/18/2010	2:30:59 AM	SiCl4 pre valve closed
12/18/2010	2:30:59 AM	SiCl4 post valve closed
12/18/2010	2:30:59 AM	Bubbler valve closed
12/18/2010	2:30:59 AM	Helium valve opened
12/18/2010	2:30:59 AM	Main Vac valve opened
12/18/2010	2:30:59 AM	Bypass valve opened
12/18/2010	2:30:59 AM	Helium MFC set to  100.000000
12/18/2010	2:30:59 AM	H2 MFC set to  0.000000
12/18/2010	2:30:59 AM	BCl3 MFC set to  0.000000
12/18/2010	2:30:59 AM	PHl3 MFC set to  0.000000
12/18/2010	2:30:59 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:30:59 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:31:00 AM	Tube furnace set to 0
12/18/2010	2:32:00 AM	Helium valve closed
12/18/2010	2:32:00 AM	H2 valve closed
12/18/2010	2:32:00 AM	BCl3 valve closed
12/18/2010	2:32:00 AM	PH3 valve closed
12/18/2010	2:32:00 AM	SiCl4 pre valve closed
12/18/2010	2:32:00 AM	SiCl4 post valve closed
12/18/2010	2:32:00 AM	Bubbler valve closed
12/18/2010	2:32:00 AM	Main Vac valve opened
12/18/2010	2:32:00 AM	Bypass valve opened
12/18/2010	2:32:00 AM	Helium MFC set to  0.000000
12/18/2010	2:32:00 AM	H2 MFC set to  0.000000
12/18/2010	2:32:00 AM	BCl3 MFC set to  0.000000
12/18/2010	2:32:00 AM	PHl3 MFC set to  0.000000
12/18/2010	2:32:00 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:32:00 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:32:00 AM	Tube furnace set to 0
12/18/2010	2:33:00 AM	H2 valve closed
12/18/2010	2:33:00 AM	BCl3 valve closed
12/18/2010	2:33:00 AM	PH3 valve closed
12/18/2010	2:33:00 AM	SiCl4 pre valve closed
12/18/2010	2:33:00 AM	SiCl4 post valve closed
12/18/2010	2:33:00 AM	Bubbler valve closed
12/18/2010	2:33:00 AM	Helium valve opened
12/18/2010	2:33:00 AM	Main Vac valve opened
12/18/2010	2:33:00 AM	Bypass valve opened
12/18/2010	2:33:00 AM	Helium MFC set to  100.000000
12/18/2010	2:33:00 AM	H2 MFC set to  0.000000
12/18/2010	2:33:00 AM	BCl3 MFC set to  0.000000
12/18/2010	2:33:00 AM	PHl3 MFC set to  0.000000
12/18/2010	2:33:00 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:33:00 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:33:00 AM	Tube furnace set to 0
12/18/2010	2:34:00 AM	Helium valve closed
12/18/2010	2:34:00 AM	H2 valve closed
12/18/2010	2:34:00 AM	BCl3 valve closed
12/18/2010	2:34:00 AM	PH3 valve closed
12/18/2010	2:34:00 AM	SiCl4 pre valve closed
12/18/2010	2:34:00 AM	SiCl4 post valve closed
12/18/2010	2:34:00 AM	Bubbler valve closed
12/18/2010	2:34:00 AM	Main Vac valve opened
12/18/2010	2:34:00 AM	Bypass valve opened
12/18/2010	2:34:00 AM	Helium MFC set to  0.000000
12/18/2010	2:34:00 AM	H2 MFC set to  0.000000
12/18/2010	2:34:00 AM	BCl3 MFC set to  0.000000
12/18/2010	2:34:00 AM	PHl3 MFC set to  0.000000
12/18/2010	2:34:00 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:34:00 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:34:00 AM	Tube furnace set to 0
12/18/2010	2:35:00 AM	H2 valve closed
12/18/2010	2:35:00 AM	BCl3 valve closed
12/18/2010	2:35:00 AM	PH3 valve closed
12/18/2010	2:35:00 AM	SiCl4 pre valve closed
12/18/2010	2:35:00 AM	SiCl4 post valve closed
12/18/2010	2:35:00 AM	Bubbler valve closed
12/18/2010	2:35:00 AM	Helium valve opened
12/18/2010	2:35:00 AM	Main Vac valve opened
12/18/2010	2:35:00 AM	Bypass valve opened
12/18/2010	2:35:00 AM	Helium MFC set to  100.000000
12/18/2010	2:35:00 AM	H2 MFC set to  0.000000
12/18/2010	2:35:00 AM	BCl3 MFC set to  0.000000
12/18/2010	2:35:00 AM	PHl3 MFC set to  0.000000
12/18/2010	2:35:00 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:35:00 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:35:00 AM	Tube furnace set to 0
12/18/2010	2:36:00 AM	Helium valve closed
12/18/2010	2:36:00 AM	H2 valve closed
12/18/2010	2:36:00 AM	BCl3 valve closed
12/18/2010	2:36:00 AM	PH3 valve closed
12/18/2010	2:36:00 AM	SiCl4 pre valve closed
12/18/2010	2:36:00 AM	SiCl4 post valve closed
12/18/2010	2:36:00 AM	Bubbler valve closed
12/18/2010	2:36:00 AM	Main Vac valve opened
12/18/2010	2:36:00 AM	Bypass valve opened
12/18/2010	2:36:00 AM	Helium MFC set to  0.000000
12/18/2010	2:36:00 AM	H2 MFC set to  0.000000
12/18/2010	2:36:00 AM	BCl3 MFC set to  0.000000
12/18/2010	2:36:00 AM	PHl3 MFC set to  0.000000
12/18/2010	2:36:00 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:36:00 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:36:01 AM	Tube furnace set to 0
12/18/2010	2:37:01 AM	H2 valve closed
12/18/2010	2:37:01 AM	BCl3 valve closed
12/18/2010	2:37:01 AM	PH3 valve closed
12/18/2010	2:37:01 AM	SiCl4 pre valve closed
12/18/2010	2:37:01 AM	SiCl4 post valve closed
12/18/2010	2:37:01 AM	Bubbler valve closed
12/18/2010	2:37:01 AM	Helium valve opened
12/18/2010	2:37:01 AM	Main Vac valve opened
12/18/2010	2:37:01 AM	Bypass valve opened
12/18/2010	2:37:01 AM	Helium MFC set to  100.000000
12/18/2010	2:37:01 AM	H2 MFC set to  0.000000
12/18/2010	2:37:01 AM	BCl3 MFC set to  0.000000
12/18/2010	2:37:01 AM	PHl3 MFC set to  0.000000
12/18/2010	2:37:01 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:37:01 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:37:01 AM	Tube furnace set to 0
12/18/2010	2:38:01 AM	Helium valve closed
12/18/2010	2:38:01 AM	H2 valve closed
12/18/2010	2:38:01 AM	BCl3 valve closed
12/18/2010	2:38:01 AM	PH3 valve closed
12/18/2010	2:38:01 AM	SiCl4 pre valve closed
12/18/2010	2:38:01 AM	SiCl4 post valve closed
12/18/2010	2:38:01 AM	Bubbler valve closed
12/18/2010	2:38:01 AM	Main Vac valve opened
12/18/2010	2:38:01 AM	Bypass valve opened
12/18/2010	2:38:01 AM	Helium MFC set to  0.000000
12/18/2010	2:38:01 AM	H2 MFC set to  0.000000
12/18/2010	2:38:01 AM	BCl3 MFC set to  0.000000
12/18/2010	2:38:01 AM	PHl3 MFC set to  0.000000
12/18/2010	2:38:01 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:38:01 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:38:01 AM	Tube furnace set to 0
12/18/2010	2:39:01 AM	H2 valve closed
12/18/2010	2:39:01 AM	BCl3 valve closed
12/18/2010	2:39:01 AM	PH3 valve closed
12/18/2010	2:39:01 AM	SiCl4 pre valve closed
12/18/2010	2:39:01 AM	SiCl4 post valve closed
12/18/2010	2:39:01 AM	Bubbler valve closed
12/18/2010	2:39:01 AM	Helium valve opened
12/18/2010	2:39:01 AM	Main Vac valve opened
12/18/2010	2:39:01 AM	Bypass valve opened
12/18/2010	2:39:01 AM	Helium MFC set to  100.000000
12/18/2010	2:39:01 AM	H2 MFC set to  0.000000
12/18/2010	2:39:01 AM	BCl3 MFC set to  0.000000
12/18/2010	2:39:01 AM	PHl3 MFC set to  0.000000
12/18/2010	2:39:01 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:39:01 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:39:01 AM	Tube furnace set to 0
12/18/2010	2:40:01 AM	Helium valve closed
12/18/2010	2:40:01 AM	H2 valve closed
12/18/2010	2:40:01 AM	BCl3 valve closed
12/18/2010	2:40:01 AM	PH3 valve closed
12/18/2010	2:40:01 AM	SiCl4 pre valve closed
12/18/2010	2:40:01 AM	SiCl4 post valve closed
12/18/2010	2:40:01 AM	Bubbler valve closed
12/18/2010	2:40:01 AM	Main Vac valve opened
12/18/2010	2:40:01 AM	Bypass valve opened
12/18/2010	2:40:01 AM	Helium MFC set to  0.000000
12/18/2010	2:40:01 AM	H2 MFC set to  0.000000
12/18/2010	2:40:01 AM	BCl3 MFC set to  0.000000
12/18/2010	2:40:01 AM	PHl3 MFC set to  0.000000
12/18/2010	2:40:01 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:40:01 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:40:01 AM	Tube furnace set to 0
12/18/2010	2:40:02 AM	Run finished at 2:40 AM
12/18/2010	2:40:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	2:41:14 AM	Recipe started at 2:41 AM
12/18/2010	2:41:14 AM	Helium valve closed
12/18/2010	2:41:14 AM	BCl3 valve closed
12/18/2010	2:41:14 AM	PH3 valve closed
12/18/2010	2:41:14 AM	SiCl4 pre valve closed
12/18/2010	2:41:14 AM	SiCl4 post valve closed
12/18/2010	2:41:14 AM	Main Vac valve closed
12/18/2010	2:41:14 AM	Bypass valve closed
12/18/2010	2:41:14 AM	Bubbler valve closed
12/18/2010	2:41:14 AM	H2 valve opened
12/18/2010	2:41:14 AM	Helium MFC set to  0.000000
12/18/2010	2:41:14 AM	H2 MFC set to  500.000000
12/18/2010	2:41:14 AM	BCl3 MFC set to  0.000000
12/18/2010	2:41:14 AM	PHl3 MFC set to  0.000000
12/18/2010	2:41:14 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:41:14 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:41:14 AM	Tube furnace set to 0
12/18/2010	2:42:31 AM	Helium valve closed
12/18/2010	2:42:31 AM	BCl3 valve closed
12/18/2010	2:42:31 AM	PH3 valve closed
12/18/2010	2:42:31 AM	SiCl4 pre valve closed
12/18/2010	2:42:31 AM	SiCl4 post valve closed
12/18/2010	2:42:31 AM	Main Vac valve closed
12/18/2010	2:42:31 AM	Bypass valve closed
12/18/2010	2:42:31 AM	H2 valve opened
12/18/2010	2:42:31 AM	Bubbler valve opened
12/18/2010	2:42:31 AM	Helium MFC set to  0.000000
12/18/2010	2:42:31 AM	H2 MFC set to  500.000000
12/18/2010	2:42:31 AM	BCl3 MFC set to  0.000000
12/18/2010	2:42:31 AM	PHl3 MFC set to  0.000000
12/18/2010	2:42:31 AM	SiCl4 MFC set to  0.000000
12/18/2010	2:42:31 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	2:42:31 AM	Tube furnace set to 1000
12/18/2010	3:02:31 AM	Helium valve closed
12/18/2010	3:02:31 AM	BCl3 valve closed
12/18/2010	3:02:31 AM	Main Vac valve closed
12/18/2010	3:02:31 AM	Bypass valve closed
12/18/2010	3:02:31 AM	H2 valve opened
12/18/2010	3:02:31 AM	PH3 valve opened
12/18/2010	3:02:31 AM	SiCl4 pre valve opened
12/18/2010	3:02:31 AM	SiCl4 post valve opened
12/18/2010	3:02:31 AM	Bubbler valve opened
12/18/2010	3:02:31 AM	Helium MFC set to  0.000000
12/18/2010	3:02:31 AM	H2 MFC set to  500.000000
12/18/2010	3:02:31 AM	BCl3 MFC set to  0.000000
12/18/2010	3:02:31 AM	PHl3 MFC set to  1.000000
12/18/2010	3:02:31 AM	SiCl4 MFC set to  50.000000
12/18/2010	3:02:31 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	3:02:31 AM	Tube furnace set to 1000
12/18/2010	3:19:31 AM	H2 valve closed
12/18/2010	3:19:31 AM	BCl3 valve closed
12/18/2010	3:19:31 AM	PH3 valve closed
12/18/2010	3:19:31 AM	SiCl4 pre valve closed
12/18/2010	3:19:31 AM	SiCl4 post valve closed
12/18/2010	3:19:31 AM	Main Vac valve closed
12/18/2010	3:19:31 AM	Bypass valve closed
12/18/2010	3:19:31 AM	Helium valve opened
12/18/2010	3:19:31 AM	Bubbler valve opened
12/18/2010	3:19:31 AM	Helium MFC set to  500.000000
12/18/2010	3:19:31 AM	H2 MFC set to  0.000000
12/18/2010	3:19:31 AM	BCl3 MFC set to  0.000000
12/18/2010	3:19:31 AM	PHl3 MFC set to  0.000000
12/18/2010	3:19:31 AM	SiCl4 MFC set to  0.000000
12/18/2010	3:19:31 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	3:19:31 AM	Tube furnace set to 0
12/18/2010	3:39:31 AM	Helium valve closed
12/18/2010	3:39:31 AM	H2 valve closed
12/18/2010	3:39:31 AM	BCl3 valve closed
12/18/2010	3:39:31 AM	PH3 valve closed
12/18/2010	3:39:31 AM	SiCl4 pre valve closed
12/18/2010	3:39:31 AM	SiCl4 post valve closed
12/18/2010	3:39:31 AM	Main Vac valve closed
12/18/2010	3:39:31 AM	Bypass valve closed
12/18/2010	3:39:31 AM	Bubbler valve closed
12/18/2010	3:39:31 AM	Helium MFC set to  0.000000
12/18/2010	3:39:31 AM	H2 MFC set to  0.000000
12/18/2010	3:39:31 AM	BCl3 MFC set to  0.000000
12/18/2010	3:39:31 AM	PHl3 MFC set to  0.000000
12/18/2010	3:39:31 AM	SiCl4 MFC set to  0.000000
12/18/2010	3:39:31 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	3:39:31 AM	Tube furnace set to 0
12/18/2010	3:39:32 AM	Run finished at 3:39 AM
12/18/2010	3:52:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/18/2010	3:52:54 AM	Recipe started at 3:52 AM
12/18/2010	3:52:54 AM	H2 valve closed
12/18/2010	3:52:54 AM	BCl3 valve closed
12/18/2010	3:52:54 AM	PH3 valve closed
12/18/2010	3:52:54 AM	SiCl4 pre valve closed
12/18/2010	3:52:54 AM	SiCl4 post valve closed
12/18/2010	3:52:54 AM	Main Vac valve closed
12/18/2010	3:52:54 AM	Bypass valve closed
12/18/2010	3:52:54 AM	Bubbler valve closed
12/18/2010	3:52:54 AM	Helium valve opened
12/18/2010	3:52:54 AM	Helium MFC set to  500.000000
12/18/2010	3:52:54 AM	H2 MFC set to  0.000000
12/18/2010	3:52:54 AM	BCl3 MFC set to  0.000000
12/18/2010	3:52:54 AM	PHl3 MFC set to  0.000000
12/18/2010	3:52:54 AM	SiCl4 MFC set to  0.000000
12/18/2010	3:52:54 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	3:52:54 AM	Tube furnace set to 0
12/18/2010	3:52:59 AM	Helium valve closed
12/18/2010	3:52:59 AM	H2 valve closed
12/18/2010	3:52:59 AM	BCl3 valve closed
12/18/2010	3:52:59 AM	PH3 valve closed
12/18/2010	3:52:59 AM	SiCl4 pre valve closed
12/18/2010	3:52:59 AM	SiCl4 post valve closed
12/18/2010	3:52:59 AM	Main Vac valve closed
12/18/2010	3:52:59 AM	Bypass valve closed
12/18/2010	3:52:59 AM	Bubbler valve closed
12/18/2010	3:52:59 AM	Helium MFC set to  0.000000
12/18/2010	3:52:59 AM	H2 MFC set to  0.000000
12/18/2010	3:52:59 AM	BCl3 MFC set to  0.000000
12/18/2010	3:52:59 AM	PHl3 MFC set to  0.000000
12/18/2010	3:52:59 AM	SiCl4 MFC set to  0.000000
12/18/2010	3:52:59 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	3:53:00 AM	Tube furnace set to 0
12/18/2010	3:53:00 AM	Run finished at 3:53 AM
12/18/2010	3:53:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/18/2010	3:56:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2010	3:56:40 AM	Recipe started at 3:56 AM
12/18/2010	3:56:40 AM	Helium valve closed
12/18/2010	3:56:40 AM	H2 valve closed
12/18/2010	3:56:40 AM	BCl3 valve closed
12/18/2010	3:56:40 AM	PH3 valve closed
12/18/2010	3:56:40 AM	SiCl4 pre valve closed
12/18/2010	3:56:40 AM	SiCl4 post valve closed
12/18/2010	3:56:40 AM	Main Vac valve closed
12/18/2010	3:56:40 AM	Bubbler valve closed
12/18/2010	3:56:40 AM	Bypass valve opened
12/18/2010	3:56:40 AM	Helium MFC set to  0.000000
12/18/2010	3:56:40 AM	H2 MFC set to  0.000000
12/18/2010	3:56:40 AM	BCl3 MFC set to  0.000000
12/18/2010	3:56:40 AM	PHl3 MFC set to  0.000000
12/18/2010	3:56:40 AM	SiCl4 MFC set to  0.000000
12/18/2010	3:56:40 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	3:56:40 AM	Tube furnace set to 0
12/18/2010	3:57:36 AM	Helium valve closed
12/18/2010	3:57:36 AM	H2 valve closed
12/18/2010	3:57:36 AM	BCl3 valve closed
12/18/2010	3:57:36 AM	PH3 valve closed
12/18/2010	3:57:36 AM	SiCl4 pre valve closed
12/18/2010	3:57:36 AM	SiCl4 post valve closed
12/18/2010	3:57:36 AM	Bubbler valve closed
12/18/2010	3:57:36 AM	Main Vac valve opened
12/18/2010	3:57:36 AM	Bypass valve opened
12/18/2010	3:57:36 AM	Helium MFC set to  0.000000
12/18/2010	3:57:36 AM	H2 MFC set to  0.000000
12/18/2010	3:57:36 AM	BCl3 MFC set to  0.000000
12/18/2010	3:57:36 AM	PHl3 MFC set to  0.000000
12/18/2010	3:57:36 AM	SiCl4 MFC set to  0.000000
12/18/2010	3:57:36 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	3:57:36 AM	Tube furnace set to 0
12/18/2010	3:57:37 AM	Run finished at 3:57 AM
12/18/2010	3:57:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2010	3:58:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	3:58:18 AM	Recipe started at 3:58 AM
12/18/2010	3:58:18 AM	Helium valve closed
12/18/2010	3:58:18 AM	H2 valve closed
12/18/2010	3:58:18 AM	BCl3 valve closed
12/18/2010	3:58:18 AM	PH3 valve closed
12/18/2010	3:58:18 AM	SiCl4 pre valve closed
12/18/2010	3:58:18 AM	SiCl4 post valve closed
12/18/2010	3:58:18 AM	Main Vac valve closed
12/18/2010	3:58:18 AM	Bubbler valve closed
12/18/2010	3:58:18 AM	Bypass valve opened
12/18/2010	3:58:18 AM	Helium MFC set to  0.000000
12/18/2010	3:58:18 AM	H2 MFC set to  0.000000
12/18/2010	3:58:18 AM	BCl3 MFC set to  0.000000
12/18/2010	3:58:18 AM	PHl3 MFC set to  0.000000
12/18/2010	3:58:18 AM	SiCl4 MFC set to  0.000000
12/18/2010	3:58:18 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	3:58:18 AM	Tube furnace set to 0
12/18/2010	3:58:18 AM	Helium valve closed
12/18/2010	3:58:18 AM	H2 valve closed
12/18/2010	3:58:18 AM	BCl3 valve closed
12/18/2010	3:58:18 AM	PH3 valve closed
12/18/2010	3:58:18 AM	SiCl4 pre valve closed
12/18/2010	3:58:19 AM	SiCl4 post valve closed
12/18/2010	3:58:19 AM	Bubbler valve closed
12/18/2010	3:58:19 AM	Main Vac valve opened
12/18/2010	3:58:19 AM	Bypass valve opened
12/18/2010	3:58:19 AM	Helium MFC set to  0.000000
12/18/2010	3:58:19 AM	H2 MFC set to  0.000000
12/18/2010	3:58:19 AM	BCl3 MFC set to  0.000000
12/18/2010	3:58:19 AM	PHl3 MFC set to  0.000000
12/18/2010	3:58:19 AM	SiCl4 MFC set to  0.000000
12/18/2010	3:58:19 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	3:58:19 AM	Tube furnace set to 0
12/18/2010	3:59:19 AM	H2 valve closed
12/18/2010	3:59:19 AM	BCl3 valve closed
12/18/2010	3:59:19 AM	PH3 valve closed
12/18/2010	3:59:19 AM	SiCl4 pre valve closed
12/18/2010	3:59:19 AM	SiCl4 post valve closed
12/18/2010	3:59:19 AM	Bubbler valve closed
12/18/2010	3:59:19 AM	Helium valve opened
12/18/2010	3:59:19 AM	Main Vac valve opened
12/18/2010	3:59:19 AM	Bypass valve opened
12/18/2010	3:59:19 AM	Helium MFC set to  100.000000
12/18/2010	3:59:19 AM	H2 MFC set to  0.000000
12/18/2010	3:59:19 AM	BCl3 MFC set to  0.000000
12/18/2010	3:59:19 AM	PHl3 MFC set to  0.000000
12/18/2010	3:59:19 AM	SiCl4 MFC set to  0.000000
12/18/2010	3:59:19 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	3:59:19 AM	Tube furnace set to 0
12/18/2010	4:00:19 AM	Helium valve closed
12/18/2010	4:00:19 AM	H2 valve closed
12/18/2010	4:00:19 AM	BCl3 valve closed
12/18/2010	4:00:19 AM	PH3 valve closed
12/18/2010	4:00:19 AM	SiCl4 pre valve closed
12/18/2010	4:00:19 AM	SiCl4 post valve closed
12/18/2010	4:00:19 AM	Bubbler valve closed
12/18/2010	4:00:19 AM	Main Vac valve opened
12/18/2010	4:00:19 AM	Bypass valve opened
12/18/2010	4:00:19 AM	Helium MFC set to  0.000000
12/18/2010	4:00:19 AM	H2 MFC set to  0.000000
12/18/2010	4:00:19 AM	BCl3 MFC set to  0.000000
12/18/2010	4:00:19 AM	PHl3 MFC set to  0.000000
12/18/2010	4:00:19 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:00:19 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:00:19 AM	Tube furnace set to 0
12/18/2010	4:01:19 AM	H2 valve closed
12/18/2010	4:01:19 AM	BCl3 valve closed
12/18/2010	4:01:19 AM	PH3 valve closed
12/18/2010	4:01:19 AM	SiCl4 pre valve closed
12/18/2010	4:01:19 AM	SiCl4 post valve closed
12/18/2010	4:01:19 AM	Bubbler valve closed
12/18/2010	4:01:19 AM	Helium valve opened
12/18/2010	4:01:19 AM	Main Vac valve opened
12/18/2010	4:01:19 AM	Bypass valve opened
12/18/2010	4:01:19 AM	Helium MFC set to  100.000000
12/18/2010	4:01:19 AM	H2 MFC set to  0.000000
12/18/2010	4:01:19 AM	BCl3 MFC set to  0.000000
12/18/2010	4:01:19 AM	PHl3 MFC set to  0.000000
12/18/2010	4:01:19 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:01:19 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:01:19 AM	Tube furnace set to 0
12/18/2010	4:02:19 AM	Helium valve closed
12/18/2010	4:02:19 AM	H2 valve closed
12/18/2010	4:02:19 AM	BCl3 valve closed
12/18/2010	4:02:19 AM	PH3 valve closed
12/18/2010	4:02:19 AM	SiCl4 pre valve closed
12/18/2010	4:02:19 AM	SiCl4 post valve closed
12/18/2010	4:02:19 AM	Bubbler valve closed
12/18/2010	4:02:19 AM	Main Vac valve opened
12/18/2010	4:02:19 AM	Bypass valve opened
12/18/2010	4:02:19 AM	Helium MFC set to  0.000000
12/18/2010	4:02:19 AM	H2 MFC set to  0.000000
12/18/2010	4:02:19 AM	BCl3 MFC set to  0.000000
12/18/2010	4:02:19 AM	PHl3 MFC set to  0.000000
12/18/2010	4:02:19 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:02:19 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:02:19 AM	Tube furnace set to 0
12/18/2010	4:03:19 AM	H2 valve closed
12/18/2010	4:03:19 AM	BCl3 valve closed
12/18/2010	4:03:19 AM	PH3 valve closed
12/18/2010	4:03:19 AM	SiCl4 pre valve closed
12/18/2010	4:03:19 AM	SiCl4 post valve closed
12/18/2010	4:03:19 AM	Bubbler valve closed
12/18/2010	4:03:19 AM	Helium valve opened
12/18/2010	4:03:19 AM	Main Vac valve opened
12/18/2010	4:03:19 AM	Bypass valve opened
12/18/2010	4:03:19 AM	Helium MFC set to  100.000000
12/18/2010	4:03:19 AM	H2 MFC set to  0.000000
12/18/2010	4:03:19 AM	BCl3 MFC set to  0.000000
12/18/2010	4:03:19 AM	PHl3 MFC set to  0.000000
12/18/2010	4:03:19 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:03:19 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:03:20 AM	Tube furnace set to 0
12/18/2010	4:04:20 AM	Helium valve closed
12/18/2010	4:04:20 AM	H2 valve closed
12/18/2010	4:04:20 AM	BCl3 valve closed
12/18/2010	4:04:20 AM	PH3 valve closed
12/18/2010	4:04:20 AM	SiCl4 pre valve closed
12/18/2010	4:04:20 AM	SiCl4 post valve closed
12/18/2010	4:04:20 AM	Bubbler valve closed
12/18/2010	4:04:20 AM	Main Vac valve opened
12/18/2010	4:04:20 AM	Bypass valve opened
12/18/2010	4:04:20 AM	Helium MFC set to  0.000000
12/18/2010	4:04:20 AM	H2 MFC set to  0.000000
12/18/2010	4:04:20 AM	BCl3 MFC set to  0.000000
12/18/2010	4:04:20 AM	PHl3 MFC set to  0.000000
12/18/2010	4:04:20 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:04:20 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:04:20 AM	Tube furnace set to 0
12/18/2010	4:05:20 AM	H2 valve closed
12/18/2010	4:05:20 AM	BCl3 valve closed
12/18/2010	4:05:20 AM	PH3 valve closed
12/18/2010	4:05:20 AM	SiCl4 pre valve closed
12/18/2010	4:05:20 AM	SiCl4 post valve closed
12/18/2010	4:05:20 AM	Bubbler valve closed
12/18/2010	4:05:20 AM	Helium valve opened
12/18/2010	4:05:20 AM	Main Vac valve opened
12/18/2010	4:05:20 AM	Bypass valve opened
12/18/2010	4:05:20 AM	Helium MFC set to  100.000000
12/18/2010	4:05:20 AM	H2 MFC set to  0.000000
12/18/2010	4:05:20 AM	BCl3 MFC set to  0.000000
12/18/2010	4:05:20 AM	PHl3 MFC set to  0.000000
12/18/2010	4:05:20 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:05:20 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:05:20 AM	Tube furnace set to 0
12/18/2010	4:06:20 AM	Helium valve closed
12/18/2010	4:06:20 AM	H2 valve closed
12/18/2010	4:06:20 AM	BCl3 valve closed
12/18/2010	4:06:20 AM	PH3 valve closed
12/18/2010	4:06:20 AM	SiCl4 pre valve closed
12/18/2010	4:06:20 AM	SiCl4 post valve closed
12/18/2010	4:06:20 AM	Bubbler valve closed
12/18/2010	4:06:20 AM	Main Vac valve opened
12/18/2010	4:06:20 AM	Bypass valve opened
12/18/2010	4:06:20 AM	Helium MFC set to  0.000000
12/18/2010	4:06:20 AM	H2 MFC set to  0.000000
12/18/2010	4:06:20 AM	BCl3 MFC set to  0.000000
12/18/2010	4:06:20 AM	PHl3 MFC set to  0.000000
12/18/2010	4:06:20 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:06:20 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:06:20 AM	Tube furnace set to 0
12/18/2010	4:07:20 AM	H2 valve closed
12/18/2010	4:07:20 AM	BCl3 valve closed
12/18/2010	4:07:20 AM	PH3 valve closed
12/18/2010	4:07:20 AM	SiCl4 pre valve closed
12/18/2010	4:07:20 AM	SiCl4 post valve closed
12/18/2010	4:07:20 AM	Bubbler valve closed
12/18/2010	4:07:20 AM	Helium valve opened
12/18/2010	4:07:20 AM	Main Vac valve opened
12/18/2010	4:07:20 AM	Bypass valve opened
12/18/2010	4:07:20 AM	Helium MFC set to  100.000000
12/18/2010	4:07:20 AM	H2 MFC set to  0.000000
12/18/2010	4:07:20 AM	BCl3 MFC set to  0.000000
12/18/2010	4:07:20 AM	PHl3 MFC set to  0.000000
12/18/2010	4:07:20 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:07:20 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:07:20 AM	Tube furnace set to 0
12/18/2010	4:08:20 AM	Helium valve closed
12/18/2010	4:08:20 AM	H2 valve closed
12/18/2010	4:08:20 AM	BCl3 valve closed
12/18/2010	4:08:20 AM	PH3 valve closed
12/18/2010	4:08:20 AM	SiCl4 pre valve closed
12/18/2010	4:08:20 AM	SiCl4 post valve closed
12/18/2010	4:08:20 AM	Bubbler valve closed
12/18/2010	4:08:20 AM	Main Vac valve opened
12/18/2010	4:08:20 AM	Bypass valve opened
12/18/2010	4:08:20 AM	Helium MFC set to  0.000000
12/18/2010	4:08:20 AM	H2 MFC set to  0.000000
12/18/2010	4:08:20 AM	BCl3 MFC set to  0.000000
12/18/2010	4:08:20 AM	PHl3 MFC set to  0.000000
12/18/2010	4:08:20 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:08:20 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:08:21 AM	Tube furnace set to 0
12/18/2010	4:09:21 AM	H2 valve closed
12/18/2010	4:09:21 AM	BCl3 valve closed
12/18/2010	4:09:21 AM	PH3 valve closed
12/18/2010	4:09:21 AM	SiCl4 pre valve closed
12/18/2010	4:09:21 AM	SiCl4 post valve closed
12/18/2010	4:09:21 AM	Bubbler valve closed
12/18/2010	4:09:21 AM	Helium valve opened
12/18/2010	4:09:21 AM	Main Vac valve opened
12/18/2010	4:09:21 AM	Bypass valve opened
12/18/2010	4:09:21 AM	Helium MFC set to  100.000000
12/18/2010	4:09:21 AM	H2 MFC set to  0.000000
12/18/2010	4:09:21 AM	BCl3 MFC set to  0.000000
12/18/2010	4:09:21 AM	PHl3 MFC set to  0.000000
12/18/2010	4:09:21 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:09:21 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:09:21 AM	Tube furnace set to 0
12/18/2010	4:10:21 AM	Helium valve closed
12/18/2010	4:10:21 AM	H2 valve closed
12/18/2010	4:10:21 AM	BCl3 valve closed
12/18/2010	4:10:21 AM	PH3 valve closed
12/18/2010	4:10:21 AM	SiCl4 pre valve closed
12/18/2010	4:10:21 AM	SiCl4 post valve closed
12/18/2010	4:10:21 AM	Bubbler valve closed
12/18/2010	4:10:21 AM	Main Vac valve opened
12/18/2010	4:10:21 AM	Bypass valve opened
12/18/2010	4:10:21 AM	Helium MFC set to  0.000000
12/18/2010	4:10:21 AM	H2 MFC set to  0.000000
12/18/2010	4:10:21 AM	BCl3 MFC set to  0.000000
12/18/2010	4:10:21 AM	PHl3 MFC set to  0.000000
12/18/2010	4:10:21 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:10:21 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:10:21 AM	Tube furnace set to 0
12/18/2010	4:11:21 AM	H2 valve closed
12/18/2010	4:11:21 AM	BCl3 valve closed
12/18/2010	4:11:21 AM	PH3 valve closed
12/18/2010	4:11:21 AM	SiCl4 pre valve closed
12/18/2010	4:11:21 AM	SiCl4 post valve closed
12/18/2010	4:11:21 AM	Bubbler valve closed
12/18/2010	4:11:21 AM	Helium valve opened
12/18/2010	4:11:21 AM	Main Vac valve opened
12/18/2010	4:11:21 AM	Bypass valve opened
12/18/2010	4:11:21 AM	Helium MFC set to  100.000000
12/18/2010	4:11:21 AM	H2 MFC set to  0.000000
12/18/2010	4:11:21 AM	BCl3 MFC set to  0.000000
12/18/2010	4:11:21 AM	PHl3 MFC set to  0.000000
12/18/2010	4:11:21 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:11:21 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:11:21 AM	Tube furnace set to 0
12/18/2010	4:12:21 AM	Helium valve closed
12/18/2010	4:12:21 AM	H2 valve closed
12/18/2010	4:12:21 AM	BCl3 valve closed
12/18/2010	4:12:21 AM	PH3 valve closed
12/18/2010	4:12:21 AM	SiCl4 pre valve closed
12/18/2010	4:12:21 AM	SiCl4 post valve closed
12/18/2010	4:12:21 AM	Bubbler valve closed
12/18/2010	4:12:21 AM	Main Vac valve opened
12/18/2010	4:12:21 AM	Bypass valve opened
12/18/2010	4:12:21 AM	Helium MFC set to  0.000000
12/18/2010	4:12:21 AM	H2 MFC set to  0.000000
12/18/2010	4:12:21 AM	BCl3 MFC set to  0.000000
12/18/2010	4:12:21 AM	PHl3 MFC set to  0.000000
12/18/2010	4:12:21 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:12:21 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:12:21 AM	Tube furnace set to 0
12/18/2010	4:13:21 AM	H2 valve closed
12/18/2010	4:13:21 AM	BCl3 valve closed
12/18/2010	4:13:21 AM	PH3 valve closed
12/18/2010	4:13:21 AM	SiCl4 pre valve closed
12/18/2010	4:13:21 AM	SiCl4 post valve closed
12/18/2010	4:13:21 AM	Bubbler valve closed
12/18/2010	4:13:21 AM	Helium valve opened
12/18/2010	4:13:21 AM	Main Vac valve opened
12/18/2010	4:13:21 AM	Bypass valve opened
12/18/2010	4:13:21 AM	Helium MFC set to  100.000000
12/18/2010	4:13:21 AM	H2 MFC set to  0.000000
12/18/2010	4:13:21 AM	BCl3 MFC set to  0.000000
12/18/2010	4:13:21 AM	PHl3 MFC set to  0.000000
12/18/2010	4:13:21 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:13:21 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:13:22 AM	Tube furnace set to 0
12/18/2010	4:14:22 AM	Helium valve closed
12/18/2010	4:14:22 AM	H2 valve closed
12/18/2010	4:14:22 AM	BCl3 valve closed
12/18/2010	4:14:22 AM	PH3 valve closed
12/18/2010	4:14:22 AM	SiCl4 pre valve closed
12/18/2010	4:14:22 AM	SiCl4 post valve closed
12/18/2010	4:14:22 AM	Bubbler valve closed
12/18/2010	4:14:22 AM	Main Vac valve opened
12/18/2010	4:14:22 AM	Bypass valve opened
12/18/2010	4:14:22 AM	Helium MFC set to  0.000000
12/18/2010	4:14:22 AM	H2 MFC set to  0.000000
12/18/2010	4:14:22 AM	BCl3 MFC set to  0.000000
12/18/2010	4:14:22 AM	PHl3 MFC set to  0.000000
12/18/2010	4:14:22 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:14:22 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:14:22 AM	Tube furnace set to 0
12/18/2010	4:15:22 AM	H2 valve closed
12/18/2010	4:15:22 AM	BCl3 valve closed
12/18/2010	4:15:22 AM	PH3 valve closed
12/18/2010	4:15:22 AM	SiCl4 pre valve closed
12/18/2010	4:15:22 AM	SiCl4 post valve closed
12/18/2010	4:15:22 AM	Bubbler valve closed
12/18/2010	4:15:22 AM	Helium valve opened
12/18/2010	4:15:22 AM	Main Vac valve opened
12/18/2010	4:15:22 AM	Bypass valve opened
12/18/2010	4:15:22 AM	Helium MFC set to  100.000000
12/18/2010	4:15:22 AM	H2 MFC set to  0.000000
12/18/2010	4:15:22 AM	BCl3 MFC set to  0.000000
12/18/2010	4:15:22 AM	PHl3 MFC set to  0.000000
12/18/2010	4:15:22 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:15:22 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:15:22 AM	Tube furnace set to 0
12/18/2010	4:16:22 AM	Helium valve closed
12/18/2010	4:16:22 AM	H2 valve closed
12/18/2010	4:16:22 AM	BCl3 valve closed
12/18/2010	4:16:22 AM	PH3 valve closed
12/18/2010	4:16:22 AM	SiCl4 pre valve closed
12/18/2010	4:16:22 AM	SiCl4 post valve closed
12/18/2010	4:16:22 AM	Bubbler valve closed
12/18/2010	4:16:22 AM	Main Vac valve opened
12/18/2010	4:16:22 AM	Bypass valve opened
12/18/2010	4:16:22 AM	Helium MFC set to  0.000000
12/18/2010	4:16:22 AM	H2 MFC set to  0.000000
12/18/2010	4:16:22 AM	BCl3 MFC set to  0.000000
12/18/2010	4:16:22 AM	PHl3 MFC set to  0.000000
12/18/2010	4:16:22 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:16:22 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:16:22 AM	Tube furnace set to 0
12/18/2010	4:17:22 AM	H2 valve closed
12/18/2010	4:17:22 AM	BCl3 valve closed
12/18/2010	4:17:22 AM	PH3 valve closed
12/18/2010	4:17:22 AM	SiCl4 pre valve closed
12/18/2010	4:17:22 AM	SiCl4 post valve closed
12/18/2010	4:17:22 AM	Bubbler valve closed
12/18/2010	4:17:22 AM	Helium valve opened
12/18/2010	4:17:22 AM	Main Vac valve opened
12/18/2010	4:17:22 AM	Bypass valve opened
12/18/2010	4:17:22 AM	Helium MFC set to  100.000000
12/18/2010	4:17:22 AM	H2 MFC set to  0.000000
12/18/2010	4:17:22 AM	BCl3 MFC set to  0.000000
12/18/2010	4:17:22 AM	PHl3 MFC set to  0.000000
12/18/2010	4:17:22 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:17:22 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:17:22 AM	Tube furnace set to 0
12/18/2010	4:18:22 AM	Helium valve closed
12/18/2010	4:18:22 AM	H2 valve closed
12/18/2010	4:18:22 AM	BCl3 valve closed
12/18/2010	4:18:22 AM	PH3 valve closed
12/18/2010	4:18:22 AM	SiCl4 pre valve closed
12/18/2010	4:18:22 AM	SiCl4 post valve closed
12/18/2010	4:18:22 AM	Bubbler valve closed
12/18/2010	4:18:22 AM	Main Vac valve opened
12/18/2010	4:18:22 AM	Bypass valve opened
12/18/2010	4:18:22 AM	Helium MFC set to  0.000000
12/18/2010	4:18:22 AM	H2 MFC set to  0.000000
12/18/2010	4:18:22 AM	BCl3 MFC set to  0.000000
12/18/2010	4:18:22 AM	PHl3 MFC set to  0.000000
12/18/2010	4:18:22 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:18:22 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:18:23 AM	Tube furnace set to 0
12/18/2010	4:18:24 AM	Run finished at 4:18 AM
12/18/2010	4:18:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	4:19:32 AM	Bypass valve closed
12/18/2010	4:19:33 AM	Main Vac valve closed
12/18/2010	4:19:48 AM	Bypass valve opened
12/18/2010	4:19:48 AM	Main Vac valve opened
12/18/2010	4:19:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	4:20:04 AM	Recipe started at 4:19 AM
12/18/2010	4:20:04 AM	Helium valve closed
12/18/2010	4:20:04 AM	H2 valve closed
12/18/2010	4:20:04 AM	BCl3 valve closed
12/18/2010	4:20:04 AM	PH3 valve closed
12/18/2010	4:20:04 AM	SiCl4 pre valve closed
12/18/2010	4:20:04 AM	SiCl4 post valve closed
12/18/2010	4:20:04 AM	Main Vac valve closed
12/18/2010	4:20:04 AM	Bubbler valve closed
12/18/2010	4:20:04 AM	Bypass valve opened
12/18/2010	4:20:04 AM	Helium MFC set to  0.000000
12/18/2010	4:20:04 AM	H2 MFC set to  0.000000
12/18/2010	4:20:04 AM	BCl3 MFC set to  0.000000
12/18/2010	4:20:04 AM	PHl3 MFC set to  0.000000
12/18/2010	4:20:04 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:20:04 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:20:04 AM	Tube furnace set to 0
12/18/2010	4:20:04 AM	Helium valve closed
12/18/2010	4:20:04 AM	H2 valve closed
12/18/2010	4:20:04 AM	BCl3 valve closed
12/18/2010	4:20:04 AM	PH3 valve closed
12/18/2010	4:20:04 AM	SiCl4 pre valve closed
12/18/2010	4:20:04 AM	SiCl4 post valve closed
12/18/2010	4:20:04 AM	Bubbler valve closed
12/18/2010	4:20:04 AM	Main Vac valve opened
12/18/2010	4:20:04 AM	Bypass valve opened
12/18/2010	4:20:04 AM	Helium MFC set to  0.000000
12/18/2010	4:20:04 AM	H2 MFC set to  0.000000
12/18/2010	4:20:04 AM	BCl3 MFC set to  0.000000
12/18/2010	4:20:04 AM	PHl3 MFC set to  0.000000
12/18/2010	4:20:04 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:20:04 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:20:05 AM	Tube furnace set to 0
12/18/2010	4:21:05 AM	H2 valve closed
12/18/2010	4:21:05 AM	BCl3 valve closed
12/18/2010	4:21:05 AM	PH3 valve closed
12/18/2010	4:21:05 AM	SiCl4 pre valve closed
12/18/2010	4:21:05 AM	SiCl4 post valve closed
12/18/2010	4:21:05 AM	Bubbler valve closed
12/18/2010	4:21:05 AM	Helium valve opened
12/18/2010	4:21:05 AM	Main Vac valve opened
12/18/2010	4:21:05 AM	Bypass valve opened
12/18/2010	4:21:05 AM	Helium MFC set to  100.000000
12/18/2010	4:21:05 AM	H2 MFC set to  0.000000
12/18/2010	4:21:05 AM	BCl3 MFC set to  0.000000
12/18/2010	4:21:05 AM	PHl3 MFC set to  0.000000
12/18/2010	4:21:05 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:21:05 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:21:05 AM	Tube furnace set to 0
12/18/2010	4:22:05 AM	Helium valve closed
12/18/2010	4:22:05 AM	H2 valve closed
12/18/2010	4:22:05 AM	BCl3 valve closed
12/18/2010	4:22:05 AM	PH3 valve closed
12/18/2010	4:22:05 AM	SiCl4 pre valve closed
12/18/2010	4:22:05 AM	SiCl4 post valve closed
12/18/2010	4:22:05 AM	Bubbler valve closed
12/18/2010	4:22:05 AM	Main Vac valve opened
12/18/2010	4:22:05 AM	Bypass valve opened
12/18/2010	4:22:05 AM	Helium MFC set to  0.000000
12/18/2010	4:22:05 AM	H2 MFC set to  0.000000
12/18/2010	4:22:05 AM	BCl3 MFC set to  0.000000
12/18/2010	4:22:05 AM	PHl3 MFC set to  0.000000
12/18/2010	4:22:05 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:22:05 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:22:05 AM	Tube furnace set to 0
12/18/2010	4:23:05 AM	H2 valve closed
12/18/2010	4:23:05 AM	BCl3 valve closed
12/18/2010	4:23:05 AM	PH3 valve closed
12/18/2010	4:23:05 AM	SiCl4 pre valve closed
12/18/2010	4:23:05 AM	SiCl4 post valve closed
12/18/2010	4:23:05 AM	Bubbler valve closed
12/18/2010	4:23:05 AM	Helium valve opened
12/18/2010	4:23:05 AM	Main Vac valve opened
12/18/2010	4:23:05 AM	Bypass valve opened
12/18/2010	4:23:05 AM	Helium MFC set to  100.000000
12/18/2010	4:23:05 AM	H2 MFC set to  0.000000
12/18/2010	4:23:05 AM	BCl3 MFC set to  0.000000
12/18/2010	4:23:05 AM	PHl3 MFC set to  0.000000
12/18/2010	4:23:05 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:23:05 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:23:05 AM	Tube furnace set to 0
12/18/2010	4:24:05 AM	Helium valve closed
12/18/2010	4:24:05 AM	H2 valve closed
12/18/2010	4:24:05 AM	BCl3 valve closed
12/18/2010	4:24:05 AM	PH3 valve closed
12/18/2010	4:24:05 AM	SiCl4 pre valve closed
12/18/2010	4:24:05 AM	SiCl4 post valve closed
12/18/2010	4:24:05 AM	Bubbler valve closed
12/18/2010	4:24:05 AM	Main Vac valve opened
12/18/2010	4:24:05 AM	Bypass valve opened
12/18/2010	4:24:05 AM	Helium MFC set to  0.000000
12/18/2010	4:24:05 AM	H2 MFC set to  0.000000
12/18/2010	4:24:05 AM	BCl3 MFC set to  0.000000
12/18/2010	4:24:05 AM	PHl3 MFC set to  0.000000
12/18/2010	4:24:05 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:24:05 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:24:05 AM	Tube furnace set to 0
12/18/2010	4:25:06 AM	H2 valve closed
12/18/2010	4:25:06 AM	BCl3 valve closed
12/18/2010	4:25:06 AM	PH3 valve closed
12/18/2010	4:25:06 AM	SiCl4 pre valve closed
12/18/2010	4:25:06 AM	SiCl4 post valve closed
12/18/2010	4:25:06 AM	Bubbler valve closed
12/18/2010	4:25:06 AM	Helium valve opened
12/18/2010	4:25:06 AM	Main Vac valve opened
12/18/2010	4:25:06 AM	Bypass valve opened
12/18/2010	4:25:06 AM	Helium MFC set to  100.000000
12/18/2010	4:25:06 AM	H2 MFC set to  0.000000
12/18/2010	4:25:06 AM	BCl3 MFC set to  0.000000
12/18/2010	4:25:06 AM	PHl3 MFC set to  0.000000
12/18/2010	4:25:06 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:25:06 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:25:06 AM	Tube furnace set to 0
12/18/2010	4:26:06 AM	Helium valve closed
12/18/2010	4:26:06 AM	H2 valve closed
12/18/2010	4:26:06 AM	BCl3 valve closed
12/18/2010	4:26:06 AM	PH3 valve closed
12/18/2010	4:26:06 AM	SiCl4 pre valve closed
12/18/2010	4:26:06 AM	SiCl4 post valve closed
12/18/2010	4:26:06 AM	Bubbler valve closed
12/18/2010	4:26:06 AM	Main Vac valve opened
12/18/2010	4:26:06 AM	Bypass valve opened
12/18/2010	4:26:06 AM	Helium MFC set to  0.000000
12/18/2010	4:26:06 AM	H2 MFC set to  0.000000
12/18/2010	4:26:06 AM	BCl3 MFC set to  0.000000
12/18/2010	4:26:06 AM	PHl3 MFC set to  0.000000
12/18/2010	4:26:06 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:26:06 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:26:06 AM	Tube furnace set to 0
12/18/2010	4:27:06 AM	H2 valve closed
12/18/2010	4:27:06 AM	BCl3 valve closed
12/18/2010	4:27:06 AM	PH3 valve closed
12/18/2010	4:27:06 AM	SiCl4 pre valve closed
12/18/2010	4:27:06 AM	SiCl4 post valve closed
12/18/2010	4:27:06 AM	Bubbler valve closed
12/18/2010	4:27:06 AM	Helium valve opened
12/18/2010	4:27:06 AM	Main Vac valve opened
12/18/2010	4:27:06 AM	Bypass valve opened
12/18/2010	4:27:06 AM	Helium MFC set to  100.000000
12/18/2010	4:27:06 AM	H2 MFC set to  0.000000
12/18/2010	4:27:06 AM	BCl3 MFC set to  0.000000
12/18/2010	4:27:06 AM	PHl3 MFC set to  0.000000
12/18/2010	4:27:06 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:27:06 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:27:06 AM	Tube furnace set to 0
12/18/2010	4:28:06 AM	Helium valve closed
12/18/2010	4:28:06 AM	H2 valve closed
12/18/2010	4:28:06 AM	BCl3 valve closed
12/18/2010	4:28:06 AM	PH3 valve closed
12/18/2010	4:28:06 AM	SiCl4 pre valve closed
12/18/2010	4:28:06 AM	SiCl4 post valve closed
12/18/2010	4:28:06 AM	Bubbler valve closed
12/18/2010	4:28:06 AM	Main Vac valve opened
12/18/2010	4:28:06 AM	Bypass valve opened
12/18/2010	4:28:06 AM	Helium MFC set to  0.000000
12/18/2010	4:28:06 AM	H2 MFC set to  0.000000
12/18/2010	4:28:06 AM	BCl3 MFC set to  0.000000
12/18/2010	4:28:06 AM	PHl3 MFC set to  0.000000
12/18/2010	4:28:06 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:28:06 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:28:06 AM	Tube furnace set to 0
12/18/2010	4:29:06 AM	H2 valve closed
12/18/2010	4:29:06 AM	BCl3 valve closed
12/18/2010	4:29:06 AM	PH3 valve closed
12/18/2010	4:29:06 AM	SiCl4 pre valve closed
12/18/2010	4:29:06 AM	SiCl4 post valve closed
12/18/2010	4:29:06 AM	Bubbler valve closed
12/18/2010	4:29:06 AM	Helium valve opened
12/18/2010	4:29:06 AM	Main Vac valve opened
12/18/2010	4:29:06 AM	Bypass valve opened
12/18/2010	4:29:06 AM	Helium MFC set to  100.000000
12/18/2010	4:29:06 AM	H2 MFC set to  0.000000
12/18/2010	4:29:06 AM	BCl3 MFC set to  0.000000
12/18/2010	4:29:06 AM	PHl3 MFC set to  0.000000
12/18/2010	4:29:06 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:29:06 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:29:07 AM	Tube furnace set to 0
12/18/2010	4:30:07 AM	Helium valve closed
12/18/2010	4:30:07 AM	H2 valve closed
12/18/2010	4:30:07 AM	BCl3 valve closed
12/18/2010	4:30:07 AM	PH3 valve closed
12/18/2010	4:30:07 AM	SiCl4 pre valve closed
12/18/2010	4:30:07 AM	SiCl4 post valve closed
12/18/2010	4:30:07 AM	Bubbler valve closed
12/18/2010	4:30:07 AM	Main Vac valve opened
12/18/2010	4:30:07 AM	Bypass valve opened
12/18/2010	4:30:07 AM	Helium MFC set to  0.000000
12/18/2010	4:30:07 AM	H2 MFC set to  0.000000
12/18/2010	4:30:07 AM	BCl3 MFC set to  0.000000
12/18/2010	4:30:07 AM	PHl3 MFC set to  0.000000
12/18/2010	4:30:07 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:30:07 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:30:07 AM	Tube furnace set to 0
12/18/2010	4:31:07 AM	H2 valve closed
12/18/2010	4:31:07 AM	BCl3 valve closed
12/18/2010	4:31:07 AM	PH3 valve closed
12/18/2010	4:31:07 AM	SiCl4 pre valve closed
12/18/2010	4:31:07 AM	SiCl4 post valve closed
12/18/2010	4:31:07 AM	Bubbler valve closed
12/18/2010	4:31:07 AM	Helium valve opened
12/18/2010	4:31:07 AM	Main Vac valve opened
12/18/2010	4:31:07 AM	Bypass valve opened
12/18/2010	4:31:07 AM	Helium MFC set to  100.000000
12/18/2010	4:31:07 AM	H2 MFC set to  0.000000
12/18/2010	4:31:07 AM	BCl3 MFC set to  0.000000
12/18/2010	4:31:07 AM	PHl3 MFC set to  0.000000
12/18/2010	4:31:07 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:31:07 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:31:07 AM	Tube furnace set to 0
12/18/2010	4:32:07 AM	Helium valve closed
12/18/2010	4:32:07 AM	H2 valve closed
12/18/2010	4:32:07 AM	BCl3 valve closed
12/18/2010	4:32:07 AM	PH3 valve closed
12/18/2010	4:32:07 AM	SiCl4 pre valve closed
12/18/2010	4:32:07 AM	SiCl4 post valve closed
12/18/2010	4:32:07 AM	Bubbler valve closed
12/18/2010	4:32:07 AM	Main Vac valve opened
12/18/2010	4:32:07 AM	Bypass valve opened
12/18/2010	4:32:07 AM	Helium MFC set to  0.000000
12/18/2010	4:32:07 AM	H2 MFC set to  0.000000
12/18/2010	4:32:07 AM	BCl3 MFC set to  0.000000
12/18/2010	4:32:07 AM	PHl3 MFC set to  0.000000
12/18/2010	4:32:07 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:32:07 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:32:07 AM	Tube furnace set to 0
12/18/2010	4:32:22 AM	H2 valve closed
12/18/2010	4:32:22 AM	BCl3 valve closed
12/18/2010	4:32:22 AM	PH3 valve closed
12/18/2010	4:32:22 AM	SiCl4 pre valve closed
12/18/2010	4:32:22 AM	SiCl4 post valve closed
12/18/2010	4:32:22 AM	Bubbler valve closed
12/18/2010	4:32:22 AM	Helium valve opened
12/18/2010	4:32:22 AM	Main Vac valve opened
12/18/2010	4:32:22 AM	Bypass valve opened
12/18/2010	4:32:22 AM	Helium MFC set to  100.000000
12/18/2010	4:32:22 AM	H2 MFC set to  0.000000
12/18/2010	4:32:22 AM	BCl3 MFC set to  0.000000
12/18/2010	4:32:22 AM	PHl3 MFC set to  0.000000
12/18/2010	4:32:22 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:32:22 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:32:23 AM	Tube furnace set to 0
12/18/2010	4:32:23 AM	Helium valve closed
12/18/2010	4:32:23 AM	H2 valve closed
12/18/2010	4:32:23 AM	BCl3 valve closed
12/18/2010	4:32:23 AM	PH3 valve closed
12/18/2010	4:32:23 AM	SiCl4 pre valve closed
12/18/2010	4:32:23 AM	SiCl4 post valve closed
12/18/2010	4:32:23 AM	Bubbler valve closed
12/18/2010	4:32:23 AM	Main Vac valve opened
12/18/2010	4:32:23 AM	Bypass valve opened
12/18/2010	4:32:23 AM	Helium MFC set to  0.000000
12/18/2010	4:32:23 AM	H2 MFC set to  0.000000
12/18/2010	4:32:23 AM	BCl3 MFC set to  0.000000
12/18/2010	4:32:23 AM	PHl3 MFC set to  0.000000
12/18/2010	4:32:23 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:32:23 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:32:23 AM	Tube furnace set to 0
12/18/2010	4:32:24 AM	H2 valve closed
12/18/2010	4:32:24 AM	BCl3 valve closed
12/18/2010	4:32:24 AM	PH3 valve closed
12/18/2010	4:32:24 AM	SiCl4 pre valve closed
12/18/2010	4:32:24 AM	SiCl4 post valve closed
12/18/2010	4:32:24 AM	Bubbler valve closed
12/18/2010	4:32:24 AM	Helium valve opened
12/18/2010	4:32:24 AM	Main Vac valve opened
12/18/2010	4:32:24 AM	Bypass valve opened
12/18/2010	4:32:24 AM	Helium MFC set to  100.000000
12/18/2010	4:32:24 AM	H2 MFC set to  0.000000
12/18/2010	4:32:24 AM	BCl3 MFC set to  0.000000
12/18/2010	4:32:24 AM	PHl3 MFC set to  0.000000
12/18/2010	4:32:24 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:32:24 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:32:24 AM	Tube furnace set to 0
12/18/2010	4:32:25 AM	Helium valve closed
12/18/2010	4:32:25 AM	H2 valve closed
12/18/2010	4:32:25 AM	BCl3 valve closed
12/18/2010	4:32:25 AM	PH3 valve closed
12/18/2010	4:32:25 AM	SiCl4 pre valve closed
12/18/2010	4:32:25 AM	SiCl4 post valve closed
12/18/2010	4:32:25 AM	Bubbler valve closed
12/18/2010	4:32:25 AM	Main Vac valve opened
12/18/2010	4:32:25 AM	Bypass valve opened
12/18/2010	4:32:25 AM	Helium MFC set to  0.000000
12/18/2010	4:32:25 AM	H2 MFC set to  0.000000
12/18/2010	4:32:25 AM	BCl3 MFC set to  0.000000
12/18/2010	4:32:25 AM	PHl3 MFC set to  0.000000
12/18/2010	4:32:25 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:32:25 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:32:25 AM	Tube furnace set to 0
12/18/2010	4:32:25 AM	H2 valve closed
12/18/2010	4:32:25 AM	BCl3 valve closed
12/18/2010	4:32:25 AM	PH3 valve closed
12/18/2010	4:32:25 AM	SiCl4 pre valve closed
12/18/2010	4:32:25 AM	SiCl4 post valve closed
12/18/2010	4:32:25 AM	Bubbler valve closed
12/18/2010	4:32:25 AM	Helium valve opened
12/18/2010	4:32:25 AM	Main Vac valve opened
12/18/2010	4:32:25 AM	Bypass valve opened
12/18/2010	4:32:25 AM	Helium MFC set to  100.000000
12/18/2010	4:32:25 AM	H2 MFC set to  0.000000
12/18/2010	4:32:25 AM	BCl3 MFC set to  0.000000
12/18/2010	4:32:25 AM	PHl3 MFC set to  0.000000
12/18/2010	4:32:25 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:32:25 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:32:25 AM	Tube furnace set to 0
12/18/2010	4:32:26 AM	Helium valve closed
12/18/2010	4:32:26 AM	H2 valve closed
12/18/2010	4:32:26 AM	BCl3 valve closed
12/18/2010	4:32:26 AM	PH3 valve closed
12/18/2010	4:32:26 AM	SiCl4 pre valve closed
12/18/2010	4:32:26 AM	SiCl4 post valve closed
12/18/2010	4:32:26 AM	Bubbler valve closed
12/18/2010	4:32:26 AM	Main Vac valve opened
12/18/2010	4:32:26 AM	Bypass valve opened
12/18/2010	4:32:26 AM	Helium MFC set to  0.000000
12/18/2010	4:32:26 AM	H2 MFC set to  0.000000
12/18/2010	4:32:26 AM	BCl3 MFC set to  0.000000
12/18/2010	4:32:26 AM	PHl3 MFC set to  0.000000
12/18/2010	4:32:26 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:32:26 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:32:26 AM	Tube furnace set to 0
12/18/2010	4:33:26 AM	H2 valve closed
12/18/2010	4:33:26 AM	BCl3 valve closed
12/18/2010	4:33:26 AM	PH3 valve closed
12/18/2010	4:33:26 AM	SiCl4 pre valve closed
12/18/2010	4:33:26 AM	SiCl4 post valve closed
12/18/2010	4:33:26 AM	Bubbler valve closed
12/18/2010	4:33:26 AM	Helium valve opened
12/18/2010	4:33:26 AM	Main Vac valve opened
12/18/2010	4:33:26 AM	Bypass valve opened
12/18/2010	4:33:26 AM	Helium MFC set to  100.000000
12/18/2010	4:33:26 AM	H2 MFC set to  0.000000
12/18/2010	4:33:26 AM	BCl3 MFC set to  0.000000
12/18/2010	4:33:26 AM	PHl3 MFC set to  0.000000
12/18/2010	4:33:26 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:33:26 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:33:26 AM	Tube furnace set to 0
12/18/2010	4:34:26 AM	Helium valve closed
12/18/2010	4:34:26 AM	H2 valve closed
12/18/2010	4:34:26 AM	BCl3 valve closed
12/18/2010	4:34:26 AM	PH3 valve closed
12/18/2010	4:34:26 AM	SiCl4 pre valve closed
12/18/2010	4:34:26 AM	SiCl4 post valve closed
12/18/2010	4:34:26 AM	Bubbler valve closed
12/18/2010	4:34:26 AM	Main Vac valve opened
12/18/2010	4:34:26 AM	Bypass valve opened
12/18/2010	4:34:26 AM	Helium MFC set to  0.000000
12/18/2010	4:34:26 AM	H2 MFC set to  0.000000
12/18/2010	4:34:26 AM	BCl3 MFC set to  0.000000
12/18/2010	4:34:26 AM	PHl3 MFC set to  0.000000
12/18/2010	4:34:26 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:34:26 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:34:27 AM	Tube furnace set to 0
12/18/2010	4:34:28 AM	Run finished at 4:34 AM
12/18/2010	4:34:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	4:35:37 AM	Bypass valve closed
12/18/2010	4:35:38 AM	Main Vac valve closed
12/18/2010	4:36:55 AM	Bypass valve opened
12/18/2010	4:36:55 AM	Main Vac valve opened
12/18/2010	4:36:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	4:37:11 AM	Recipe started at 4:37 AM
12/18/2010	4:37:11 AM	Helium valve closed
12/18/2010	4:37:11 AM	H2 valve closed
12/18/2010	4:37:11 AM	BCl3 valve closed
12/18/2010	4:37:11 AM	PH3 valve closed
12/18/2010	4:37:11 AM	SiCl4 pre valve closed
12/18/2010	4:37:11 AM	SiCl4 post valve closed
12/18/2010	4:37:11 AM	Main Vac valve closed
12/18/2010	4:37:11 AM	Bubbler valve closed
12/18/2010	4:37:11 AM	Bypass valve opened
12/18/2010	4:37:11 AM	Helium MFC set to  0.000000
12/18/2010	4:37:11 AM	H2 MFC set to  0.000000
12/18/2010	4:37:11 AM	BCl3 MFC set to  0.000000
12/18/2010	4:37:11 AM	PHl3 MFC set to  0.000000
12/18/2010	4:37:11 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:37:11 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:37:12 AM	Tube furnace set to 0
12/18/2010	4:37:12 AM	Helium valve closed
12/18/2010	4:37:12 AM	H2 valve closed
12/18/2010	4:37:12 AM	BCl3 valve closed
12/18/2010	4:37:12 AM	PH3 valve closed
12/18/2010	4:37:12 AM	SiCl4 pre valve closed
12/18/2010	4:37:12 AM	SiCl4 post valve closed
12/18/2010	4:37:12 AM	Bubbler valve closed
12/18/2010	4:37:12 AM	Main Vac valve opened
12/18/2010	4:37:12 AM	Bypass valve opened
12/18/2010	4:37:12 AM	Helium MFC set to  0.000000
12/18/2010	4:37:12 AM	H2 MFC set to  0.000000
12/18/2010	4:37:12 AM	BCl3 MFC set to  0.000000
12/18/2010	4:37:12 AM	PHl3 MFC set to  0.000000
12/18/2010	4:37:12 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:37:12 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:37:12 AM	Tube furnace set to 0
12/18/2010	4:38:12 AM	H2 valve closed
12/18/2010	4:38:12 AM	BCl3 valve closed
12/18/2010	4:38:12 AM	PH3 valve closed
12/18/2010	4:38:12 AM	SiCl4 pre valve closed
12/18/2010	4:38:12 AM	SiCl4 post valve closed
12/18/2010	4:38:12 AM	Bubbler valve closed
12/18/2010	4:38:12 AM	Helium valve opened
12/18/2010	4:38:12 AM	Main Vac valve opened
12/18/2010	4:38:12 AM	Bypass valve opened
12/18/2010	4:38:12 AM	Helium MFC set to  100.000000
12/18/2010	4:38:12 AM	H2 MFC set to  0.000000
12/18/2010	4:38:12 AM	BCl3 MFC set to  0.000000
12/18/2010	4:38:12 AM	PHl3 MFC set to  0.000000
12/18/2010	4:38:12 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:38:12 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:38:12 AM	Tube furnace set to 0
12/18/2010	4:39:12 AM	Helium valve closed
12/18/2010	4:39:12 AM	H2 valve closed
12/18/2010	4:39:12 AM	BCl3 valve closed
12/18/2010	4:39:12 AM	PH3 valve closed
12/18/2010	4:39:12 AM	SiCl4 pre valve closed
12/18/2010	4:39:12 AM	SiCl4 post valve closed
12/18/2010	4:39:12 AM	Bubbler valve closed
12/18/2010	4:39:12 AM	Main Vac valve opened
12/18/2010	4:39:12 AM	Bypass valve opened
12/18/2010	4:39:12 AM	Helium MFC set to  0.000000
12/18/2010	4:39:12 AM	H2 MFC set to  0.000000
12/18/2010	4:39:12 AM	BCl3 MFC set to  0.000000
12/18/2010	4:39:12 AM	PHl3 MFC set to  0.000000
12/18/2010	4:39:12 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:39:12 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:39:12 AM	Tube furnace set to 0
12/18/2010	4:40:12 AM	H2 valve closed
12/18/2010	4:40:12 AM	BCl3 valve closed
12/18/2010	4:40:12 AM	PH3 valve closed
12/18/2010	4:40:12 AM	SiCl4 pre valve closed
12/18/2010	4:40:12 AM	SiCl4 post valve closed
12/18/2010	4:40:12 AM	Bubbler valve closed
12/18/2010	4:40:12 AM	Helium valve opened
12/18/2010	4:40:12 AM	Main Vac valve opened
12/18/2010	4:40:12 AM	Bypass valve opened
12/18/2010	4:40:12 AM	Helium MFC set to  100.000000
12/18/2010	4:40:12 AM	H2 MFC set to  0.000000
12/18/2010	4:40:12 AM	BCl3 MFC set to  0.000000
12/18/2010	4:40:12 AM	PHl3 MFC set to  0.000000
12/18/2010	4:40:12 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:40:12 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:40:13 AM	Tube furnace set to 0
12/18/2010	4:41:13 AM	Helium valve closed
12/18/2010	4:41:13 AM	H2 valve closed
12/18/2010	4:41:13 AM	BCl3 valve closed
12/18/2010	4:41:13 AM	PH3 valve closed
12/18/2010	4:41:13 AM	SiCl4 pre valve closed
12/18/2010	4:41:13 AM	SiCl4 post valve closed
12/18/2010	4:41:13 AM	Bubbler valve closed
12/18/2010	4:41:13 AM	Main Vac valve opened
12/18/2010	4:41:13 AM	Bypass valve opened
12/18/2010	4:41:13 AM	Helium MFC set to  0.000000
12/18/2010	4:41:13 AM	H2 MFC set to  0.000000
12/18/2010	4:41:13 AM	BCl3 MFC set to  0.000000
12/18/2010	4:41:13 AM	PHl3 MFC set to  0.000000
12/18/2010	4:41:13 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:41:13 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:41:13 AM	Tube furnace set to 0
12/18/2010	4:42:13 AM	H2 valve closed
12/18/2010	4:42:13 AM	BCl3 valve closed
12/18/2010	4:42:13 AM	PH3 valve closed
12/18/2010	4:42:13 AM	SiCl4 pre valve closed
12/18/2010	4:42:13 AM	SiCl4 post valve closed
12/18/2010	4:42:13 AM	Bubbler valve closed
12/18/2010	4:42:13 AM	Helium valve opened
12/18/2010	4:42:13 AM	Main Vac valve opened
12/18/2010	4:42:13 AM	Bypass valve opened
12/18/2010	4:42:13 AM	Helium MFC set to  100.000000
12/18/2010	4:42:13 AM	H2 MFC set to  0.000000
12/18/2010	4:42:13 AM	BCl3 MFC set to  0.000000
12/18/2010	4:42:13 AM	PHl3 MFC set to  0.000000
12/18/2010	4:42:13 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:42:13 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:42:13 AM	Tube furnace set to 0
12/18/2010	4:43:13 AM	Helium valve closed
12/18/2010	4:43:13 AM	H2 valve closed
12/18/2010	4:43:13 AM	BCl3 valve closed
12/18/2010	4:43:13 AM	PH3 valve closed
12/18/2010	4:43:13 AM	SiCl4 pre valve closed
12/18/2010	4:43:13 AM	SiCl4 post valve closed
12/18/2010	4:43:13 AM	Bubbler valve closed
12/18/2010	4:43:13 AM	Main Vac valve opened
12/18/2010	4:43:13 AM	Bypass valve opened
12/18/2010	4:43:13 AM	Helium MFC set to  0.000000
12/18/2010	4:43:13 AM	H2 MFC set to  0.000000
12/18/2010	4:43:13 AM	BCl3 MFC set to  0.000000
12/18/2010	4:43:13 AM	PHl3 MFC set to  0.000000
12/18/2010	4:43:13 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:43:13 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:43:13 AM	Tube furnace set to 0
12/18/2010	4:44:13 AM	H2 valve closed
12/18/2010	4:44:13 AM	BCl3 valve closed
12/18/2010	4:44:13 AM	PH3 valve closed
12/18/2010	4:44:13 AM	SiCl4 pre valve closed
12/18/2010	4:44:13 AM	SiCl4 post valve closed
12/18/2010	4:44:13 AM	Bubbler valve closed
12/18/2010	4:44:13 AM	Helium valve opened
12/18/2010	4:44:13 AM	Main Vac valve opened
12/18/2010	4:44:13 AM	Bypass valve opened
12/18/2010	4:44:13 AM	Helium MFC set to  100.000000
12/18/2010	4:44:13 AM	H2 MFC set to  0.000000
12/18/2010	4:44:13 AM	BCl3 MFC set to  0.000000
12/18/2010	4:44:13 AM	PHl3 MFC set to  0.000000
12/18/2010	4:44:13 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:44:13 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:44:14 AM	Tube furnace set to 0
12/18/2010	4:45:14 AM	Helium valve closed
12/18/2010	4:45:14 AM	H2 valve closed
12/18/2010	4:45:14 AM	BCl3 valve closed
12/18/2010	4:45:14 AM	PH3 valve closed
12/18/2010	4:45:14 AM	SiCl4 pre valve closed
12/18/2010	4:45:14 AM	SiCl4 post valve closed
12/18/2010	4:45:14 AM	Bubbler valve closed
12/18/2010	4:45:14 AM	Main Vac valve opened
12/18/2010	4:45:14 AM	Bypass valve opened
12/18/2010	4:45:14 AM	Helium MFC set to  0.000000
12/18/2010	4:45:14 AM	H2 MFC set to  0.000000
12/18/2010	4:45:14 AM	BCl3 MFC set to  0.000000
12/18/2010	4:45:14 AM	PHl3 MFC set to  0.000000
12/18/2010	4:45:14 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:45:14 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:45:14 AM	Tube furnace set to 0
12/18/2010	4:46:14 AM	H2 valve closed
12/18/2010	4:46:14 AM	BCl3 valve closed
12/18/2010	4:46:14 AM	PH3 valve closed
12/18/2010	4:46:14 AM	SiCl4 pre valve closed
12/18/2010	4:46:14 AM	SiCl4 post valve closed
12/18/2010	4:46:14 AM	Bubbler valve closed
12/18/2010	4:46:14 AM	Helium valve opened
12/18/2010	4:46:14 AM	Main Vac valve opened
12/18/2010	4:46:14 AM	Bypass valve opened
12/18/2010	4:46:14 AM	Helium MFC set to  100.000000
12/18/2010	4:46:14 AM	H2 MFC set to  0.000000
12/18/2010	4:46:14 AM	BCl3 MFC set to  0.000000
12/18/2010	4:46:14 AM	PHl3 MFC set to  0.000000
12/18/2010	4:46:14 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:46:14 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:46:14 AM	Tube furnace set to 0
12/18/2010	4:46:22 AM	Helium valve closed
12/18/2010	4:46:22 AM	H2 valve closed
12/18/2010	4:46:22 AM	BCl3 valve closed
12/18/2010	4:46:22 AM	PH3 valve closed
12/18/2010	4:46:22 AM	SiCl4 pre valve closed
12/18/2010	4:46:22 AM	SiCl4 post valve closed
12/18/2010	4:46:22 AM	Bubbler valve closed
12/18/2010	4:46:22 AM	Main Vac valve opened
12/18/2010	4:46:22 AM	Bypass valve opened
12/18/2010	4:46:22 AM	Helium MFC set to  0.000000
12/18/2010	4:46:22 AM	H2 MFC set to  0.000000
12/18/2010	4:46:22 AM	BCl3 MFC set to  0.000000
12/18/2010	4:46:22 AM	PHl3 MFC set to  0.000000
12/18/2010	4:46:22 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:46:22 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:46:22 AM	Tube furnace set to 0
12/18/2010	4:46:23 AM	H2 valve closed
12/18/2010	4:46:23 AM	BCl3 valve closed
12/18/2010	4:46:23 AM	PH3 valve closed
12/18/2010	4:46:23 AM	SiCl4 pre valve closed
12/18/2010	4:46:23 AM	SiCl4 post valve closed
12/18/2010	4:46:23 AM	Bubbler valve closed
12/18/2010	4:46:23 AM	Helium valve opened
12/18/2010	4:46:23 AM	Main Vac valve opened
12/18/2010	4:46:23 AM	Bypass valve opened
12/18/2010	4:46:23 AM	Helium MFC set to  100.000000
12/18/2010	4:46:23 AM	H2 MFC set to  0.000000
12/18/2010	4:46:23 AM	BCl3 MFC set to  0.000000
12/18/2010	4:46:23 AM	PHl3 MFC set to  0.000000
12/18/2010	4:46:23 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:46:23 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:46:23 AM	Tube furnace set to 0
12/18/2010	4:46:24 AM	Helium valve closed
12/18/2010	4:46:24 AM	H2 valve closed
12/18/2010	4:46:24 AM	BCl3 valve closed
12/18/2010	4:46:24 AM	PH3 valve closed
12/18/2010	4:46:24 AM	SiCl4 pre valve closed
12/18/2010	4:46:24 AM	SiCl4 post valve closed
12/18/2010	4:46:24 AM	Bubbler valve closed
12/18/2010	4:46:24 AM	Main Vac valve opened
12/18/2010	4:46:24 AM	Bypass valve opened
12/18/2010	4:46:24 AM	Helium MFC set to  0.000000
12/18/2010	4:46:24 AM	H2 MFC set to  0.000000
12/18/2010	4:46:24 AM	BCl3 MFC set to  0.000000
12/18/2010	4:46:24 AM	PHl3 MFC set to  0.000000
12/18/2010	4:46:24 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:46:24 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:46:24 AM	Tube furnace set to 0
12/18/2010	4:46:25 AM	H2 valve closed
12/18/2010	4:46:25 AM	BCl3 valve closed
12/18/2010	4:46:25 AM	PH3 valve closed
12/18/2010	4:46:25 AM	SiCl4 pre valve closed
12/18/2010	4:46:25 AM	SiCl4 post valve closed
12/18/2010	4:46:25 AM	Bubbler valve closed
12/18/2010	4:46:25 AM	Helium valve opened
12/18/2010	4:46:25 AM	Main Vac valve opened
12/18/2010	4:46:25 AM	Bypass valve opened
12/18/2010	4:46:25 AM	Helium MFC set to  100.000000
12/18/2010	4:46:25 AM	H2 MFC set to  0.000000
12/18/2010	4:46:25 AM	BCl3 MFC set to  0.000000
12/18/2010	4:46:25 AM	PHl3 MFC set to  0.000000
12/18/2010	4:46:25 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:46:25 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:46:25 AM	Tube furnace set to 0
12/18/2010	4:46:26 AM	Helium valve closed
12/18/2010	4:46:26 AM	H2 valve closed
12/18/2010	4:46:26 AM	BCl3 valve closed
12/18/2010	4:46:26 AM	PH3 valve closed
12/18/2010	4:46:26 AM	SiCl4 pre valve closed
12/18/2010	4:46:26 AM	SiCl4 post valve closed
12/18/2010	4:46:26 AM	Bubbler valve closed
12/18/2010	4:46:26 AM	Main Vac valve opened
12/18/2010	4:46:26 AM	Bypass valve opened
12/18/2010	4:46:26 AM	Helium MFC set to  0.000000
12/18/2010	4:46:26 AM	H2 MFC set to  0.000000
12/18/2010	4:46:26 AM	BCl3 MFC set to  0.000000
12/18/2010	4:46:26 AM	PHl3 MFC set to  0.000000
12/18/2010	4:46:26 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:46:26 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:46:26 AM	Tube furnace set to 0
12/18/2010	4:46:27 AM	H2 valve closed
12/18/2010	4:46:27 AM	BCl3 valve closed
12/18/2010	4:46:27 AM	PH3 valve closed
12/18/2010	4:46:27 AM	SiCl4 pre valve closed
12/18/2010	4:46:27 AM	SiCl4 post valve closed
12/18/2010	4:46:27 AM	Bubbler valve closed
12/18/2010	4:46:27 AM	Helium valve opened
12/18/2010	4:46:27 AM	Main Vac valve opened
12/18/2010	4:46:27 AM	Bypass valve opened
12/18/2010	4:46:27 AM	Helium MFC set to  100.000000
12/18/2010	4:46:27 AM	H2 MFC set to  0.000000
12/18/2010	4:46:27 AM	BCl3 MFC set to  0.000000
12/18/2010	4:46:27 AM	PHl3 MFC set to  0.000000
12/18/2010	4:46:27 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:46:27 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:46:27 AM	Tube furnace set to 0
12/18/2010	4:47:27 AM	Helium valve closed
12/18/2010	4:47:27 AM	H2 valve closed
12/18/2010	4:47:27 AM	BCl3 valve closed
12/18/2010	4:47:27 AM	PH3 valve closed
12/18/2010	4:47:27 AM	SiCl4 pre valve closed
12/18/2010	4:47:27 AM	SiCl4 post valve closed
12/18/2010	4:47:27 AM	Bubbler valve closed
12/18/2010	4:47:27 AM	Main Vac valve opened
12/18/2010	4:47:27 AM	Bypass valve opened
12/18/2010	4:47:27 AM	Helium MFC set to  0.000000
12/18/2010	4:47:27 AM	H2 MFC set to  0.000000
12/18/2010	4:47:27 AM	BCl3 MFC set to  0.000000
12/18/2010	4:47:27 AM	PHl3 MFC set to  0.000000
12/18/2010	4:47:27 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:47:27 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:47:27 AM	Tube furnace set to 0
12/18/2010	4:48:27 AM	H2 valve closed
12/18/2010	4:48:27 AM	BCl3 valve closed
12/18/2010	4:48:27 AM	PH3 valve closed
12/18/2010	4:48:27 AM	SiCl4 pre valve closed
12/18/2010	4:48:27 AM	SiCl4 post valve closed
12/18/2010	4:48:27 AM	Bubbler valve closed
12/18/2010	4:48:27 AM	Helium valve opened
12/18/2010	4:48:27 AM	Main Vac valve opened
12/18/2010	4:48:27 AM	Bypass valve opened
12/18/2010	4:48:27 AM	Helium MFC set to  100.000000
12/18/2010	4:48:27 AM	H2 MFC set to  0.000000
12/18/2010	4:48:27 AM	BCl3 MFC set to  0.000000
12/18/2010	4:48:27 AM	PHl3 MFC set to  0.000000
12/18/2010	4:48:27 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:48:27 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:48:28 AM	Tube furnace set to 0
12/18/2010	4:49:28 AM	Helium valve closed
12/18/2010	4:49:28 AM	H2 valve closed
12/18/2010	4:49:28 AM	BCl3 valve closed
12/18/2010	4:49:28 AM	PH3 valve closed
12/18/2010	4:49:28 AM	SiCl4 pre valve closed
12/18/2010	4:49:28 AM	SiCl4 post valve closed
12/18/2010	4:49:28 AM	Bubbler valve closed
12/18/2010	4:49:28 AM	Main Vac valve opened
12/18/2010	4:49:28 AM	Bypass valve opened
12/18/2010	4:49:28 AM	Helium MFC set to  0.000000
12/18/2010	4:49:28 AM	H2 MFC set to  0.000000
12/18/2010	4:49:28 AM	BCl3 MFC set to  0.000000
12/18/2010	4:49:28 AM	PHl3 MFC set to  0.000000
12/18/2010	4:49:28 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:49:28 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:49:28 AM	Tube furnace set to 0
12/18/2010	4:50:28 AM	H2 valve closed
12/18/2010	4:50:28 AM	BCl3 valve closed
12/18/2010	4:50:28 AM	PH3 valve closed
12/18/2010	4:50:28 AM	SiCl4 pre valve closed
12/18/2010	4:50:28 AM	SiCl4 post valve closed
12/18/2010	4:50:28 AM	Bubbler valve closed
12/18/2010	4:50:28 AM	Helium valve opened
12/18/2010	4:50:28 AM	Main Vac valve opened
12/18/2010	4:50:28 AM	Bypass valve opened
12/18/2010	4:50:28 AM	Helium MFC set to  100.000000
12/18/2010	4:50:28 AM	H2 MFC set to  0.000000
12/18/2010	4:50:28 AM	BCl3 MFC set to  0.000000
12/18/2010	4:50:28 AM	PHl3 MFC set to  0.000000
12/18/2010	4:50:28 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:50:28 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:50:28 AM	Tube furnace set to 0
12/18/2010	4:51:28 AM	Helium valve closed
12/18/2010	4:51:28 AM	H2 valve closed
12/18/2010	4:51:28 AM	BCl3 valve closed
12/18/2010	4:51:28 AM	PH3 valve closed
12/18/2010	4:51:28 AM	SiCl4 pre valve closed
12/18/2010	4:51:28 AM	SiCl4 post valve closed
12/18/2010	4:51:28 AM	Bubbler valve closed
12/18/2010	4:51:28 AM	Main Vac valve opened
12/18/2010	4:51:28 AM	Bypass valve opened
12/18/2010	4:51:28 AM	Helium MFC set to  0.000000
12/18/2010	4:51:28 AM	H2 MFC set to  0.000000
12/18/2010	4:51:28 AM	BCl3 MFC set to  0.000000
12/18/2010	4:51:28 AM	PHl3 MFC set to  0.000000
12/18/2010	4:51:28 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:51:28 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:51:28 AM	Tube furnace set to 0
12/18/2010	4:51:29 AM	Run finished at 4:51 AM
12/18/2010	4:51:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	4:52:35 AM	Recipe started at 4:52 AM
12/18/2010	4:52:35 AM	Helium valve closed
12/18/2010	4:52:35 AM	BCl3 valve closed
12/18/2010	4:52:35 AM	PH3 valve closed
12/18/2010	4:52:35 AM	SiCl4 pre valve closed
12/18/2010	4:52:35 AM	SiCl4 post valve closed
12/18/2010	4:52:35 AM	Main Vac valve closed
12/18/2010	4:52:35 AM	Bypass valve closed
12/18/2010	4:52:35 AM	Bubbler valve closed
12/18/2010	4:52:35 AM	H2 valve opened
12/18/2010	4:52:35 AM	Helium MFC set to  0.000000
12/18/2010	4:52:35 AM	H2 MFC set to  500.000000
12/18/2010	4:52:35 AM	BCl3 MFC set to  0.000000
12/18/2010	4:52:35 AM	PHl3 MFC set to  0.000000
12/18/2010	4:52:35 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:52:35 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:52:35 AM	Tube furnace set to 0
12/18/2010	4:53:52 AM	Helium valve closed
12/18/2010	4:53:52 AM	BCl3 valve closed
12/18/2010	4:53:52 AM	PH3 valve closed
12/18/2010	4:53:52 AM	SiCl4 pre valve closed
12/18/2010	4:53:52 AM	SiCl4 post valve closed
12/18/2010	4:53:52 AM	Main Vac valve closed
12/18/2010	4:53:52 AM	Bypass valve closed
12/18/2010	4:53:52 AM	H2 valve opened
12/18/2010	4:53:52 AM	Bubbler valve opened
12/18/2010	4:53:52 AM	Helium MFC set to  0.000000
12/18/2010	4:53:52 AM	H2 MFC set to  500.000000
12/18/2010	4:53:52 AM	BCl3 MFC set to  0.000000
12/18/2010	4:53:52 AM	PHl3 MFC set to  0.000000
12/18/2010	4:53:52 AM	SiCl4 MFC set to  0.000000
12/18/2010	4:53:52 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:53:53 AM	Tube furnace set to 1000
12/18/2010	5:13:53 AM	Helium valve closed
12/18/2010	5:13:53 AM	BCl3 valve closed
12/18/2010	5:13:53 AM	Main Vac valve closed
12/18/2010	5:13:53 AM	Bypass valve closed
12/18/2010	5:13:53 AM	H2 valve opened
12/18/2010	5:13:53 AM	PH3 valve opened
12/18/2010	5:13:53 AM	SiCl4 pre valve opened
12/18/2010	5:13:53 AM	SiCl4 post valve opened
12/18/2010	5:13:53 AM	Bubbler valve opened
12/18/2010	5:13:53 AM	Helium MFC set to  0.000000
12/18/2010	5:13:53 AM	H2 MFC set to  500.000000
12/18/2010	5:13:53 AM	BCl3 MFC set to  0.000000
12/18/2010	5:13:53 AM	PHl3 MFC set to  0.500000
12/18/2010	5:13:53 AM	SiCl4 MFC set to  50.000000
12/18/2010	5:13:53 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	5:13:53 AM	Tube furnace set to 1000
12/18/2010	5:30:53 AM	H2 valve closed
12/18/2010	5:30:53 AM	BCl3 valve closed
12/18/2010	5:30:53 AM	PH3 valve closed
12/18/2010	5:30:53 AM	SiCl4 pre valve closed
12/18/2010	5:30:53 AM	SiCl4 post valve closed
12/18/2010	5:30:53 AM	Main Vac valve closed
12/18/2010	5:30:53 AM	Bypass valve closed
12/18/2010	5:30:53 AM	Helium valve opened
12/18/2010	5:30:53 AM	Bubbler valve opened
12/18/2010	5:30:53 AM	Helium MFC set to  500.000000
12/18/2010	5:30:53 AM	H2 MFC set to  0.000000
12/18/2010	5:30:53 AM	BCl3 MFC set to  0.000000
12/18/2010	5:30:53 AM	PHl3 MFC set to  0.000000
12/18/2010	5:30:53 AM	SiCl4 MFC set to  0.000000
12/18/2010	5:30:53 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	5:30:53 AM	Tube furnace set to 0
12/18/2010	5:50:53 AM	Helium valve closed
12/18/2010	5:50:53 AM	H2 valve closed
12/18/2010	5:50:53 AM	BCl3 valve closed
12/18/2010	5:50:53 AM	PH3 valve closed
12/18/2010	5:50:53 AM	SiCl4 pre valve closed
12/18/2010	5:50:53 AM	SiCl4 post valve closed
12/18/2010	5:50:53 AM	Main Vac valve closed
12/18/2010	5:50:53 AM	Bypass valve closed
12/18/2010	5:50:53 AM	Bubbler valve closed
12/18/2010	5:50:53 AM	Helium MFC set to  0.000000
12/18/2010	5:50:53 AM	H2 MFC set to  0.000000
12/18/2010	5:50:53 AM	BCl3 MFC set to  0.000000
12/18/2010	5:50:53 AM	PHl3 MFC set to  0.000000
12/18/2010	5:50:53 AM	SiCl4 MFC set to  0.000000
12/18/2010	5:50:53 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	5:50:53 AM	Tube furnace set to 0
12/18/2010	5:50:53 AM	Run finished at 5:50 AM
12/18/2010	6:03:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/18/2010	6:03:39 AM	Recipe started at 6:03 AM
12/18/2010	6:03:39 AM	H2 valve closed
12/18/2010	6:03:39 AM	BCl3 valve closed
12/18/2010	6:03:39 AM	PH3 valve closed
12/18/2010	6:03:39 AM	SiCl4 pre valve closed
12/18/2010	6:03:39 AM	SiCl4 post valve closed
12/18/2010	6:03:39 AM	Main Vac valve closed
12/18/2010	6:03:39 AM	Bypass valve closed
12/18/2010	6:03:39 AM	Bubbler valve closed
12/18/2010	6:03:39 AM	Helium valve opened
12/18/2010	6:03:39 AM	Helium MFC set to  500.000000
12/18/2010	6:03:39 AM	H2 MFC set to  0.000000
12/18/2010	6:03:39 AM	BCl3 MFC set to  0.000000
12/18/2010	6:03:39 AM	PHl3 MFC set to  0.000000
12/18/2010	6:03:39 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:03:39 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:03:39 AM	Tube furnace set to 0
12/18/2010	6:03:44 AM	Helium valve closed
12/18/2010	6:03:44 AM	H2 valve closed
12/18/2010	6:03:44 AM	BCl3 valve closed
12/18/2010	6:03:44 AM	PH3 valve closed
12/18/2010	6:03:44 AM	SiCl4 pre valve closed
12/18/2010	6:03:44 AM	SiCl4 post valve closed
12/18/2010	6:03:44 AM	Main Vac valve closed
12/18/2010	6:03:44 AM	Bypass valve closed
12/18/2010	6:03:44 AM	Bubbler valve closed
12/18/2010	6:03:44 AM	Helium MFC set to  0.000000
12/18/2010	6:03:44 AM	H2 MFC set to  0.000000
12/18/2010	6:03:44 AM	BCl3 MFC set to  0.000000
12/18/2010	6:03:44 AM	PHl3 MFC set to  0.000000
12/18/2010	6:03:44 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:03:44 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:03:44 AM	Tube furnace set to 0
12/18/2010	6:03:44 AM	Run finished at 6:03 AM
12/18/2010	6:03:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/18/2010	6:10:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2010	6:10:33 AM	Recipe started at 6:10 AM
12/18/2010	6:10:33 AM	Helium valve closed
12/18/2010	6:10:33 AM	H2 valve closed
12/18/2010	6:10:33 AM	BCl3 valve closed
12/18/2010	6:10:33 AM	PH3 valve closed
12/18/2010	6:10:33 AM	SiCl4 pre valve closed
12/18/2010	6:10:33 AM	SiCl4 post valve closed
12/18/2010	6:10:33 AM	Main Vac valve closed
12/18/2010	6:10:33 AM	Bubbler valve closed
12/18/2010	6:10:33 AM	Bypass valve opened
12/18/2010	6:10:33 AM	Helium MFC set to  0.000000
12/18/2010	6:10:33 AM	H2 MFC set to  0.000000
12/18/2010	6:10:33 AM	BCl3 MFC set to  0.000000
12/18/2010	6:10:33 AM	PHl3 MFC set to  0.000000
12/18/2010	6:10:33 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:10:33 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:10:33 AM	Tube furnace set to 0
12/18/2010	6:11:30 AM	Helium valve closed
12/18/2010	6:11:30 AM	H2 valve closed
12/18/2010	6:11:30 AM	BCl3 valve closed
12/18/2010	6:11:30 AM	PH3 valve closed
12/18/2010	6:11:30 AM	SiCl4 pre valve closed
12/18/2010	6:11:30 AM	SiCl4 post valve closed
12/18/2010	6:11:30 AM	Bubbler valve closed
12/18/2010	6:11:30 AM	Main Vac valve opened
12/18/2010	6:11:30 AM	Bypass valve opened
12/18/2010	6:11:30 AM	Helium MFC set to  0.000000
12/18/2010	6:11:30 AM	H2 MFC set to  0.000000
12/18/2010	6:11:30 AM	BCl3 MFC set to  0.000000
12/18/2010	6:11:30 AM	PHl3 MFC set to  0.000000
12/18/2010	6:11:30 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:11:30 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:11:31 AM	Tube furnace set to 0
12/18/2010	6:11:31 AM	Run finished at 6:11 AM
12/18/2010	6:11:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2010	6:12:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	6:12:54 AM	Recipe started at 6:12 AM
12/18/2010	6:12:54 AM	Helium valve closed
12/18/2010	6:12:54 AM	H2 valve closed
12/18/2010	6:12:54 AM	BCl3 valve closed
12/18/2010	6:12:54 AM	PH3 valve closed
12/18/2010	6:12:54 AM	SiCl4 pre valve closed
12/18/2010	6:12:54 AM	SiCl4 post valve closed
12/18/2010	6:12:54 AM	Main Vac valve closed
12/18/2010	6:12:54 AM	Bubbler valve closed
12/18/2010	6:12:54 AM	Bypass valve opened
12/18/2010	6:12:54 AM	Helium MFC set to  0.000000
12/18/2010	6:12:54 AM	H2 MFC set to  0.000000
12/18/2010	6:12:54 AM	BCl3 MFC set to  0.000000
12/18/2010	6:12:54 AM	PHl3 MFC set to  0.000000
12/18/2010	6:12:54 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:12:54 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:12:54 AM	Tube furnace set to 0
12/18/2010	6:12:55 AM	Helium valve closed
12/18/2010	6:12:55 AM	H2 valve closed
12/18/2010	6:12:55 AM	BCl3 valve closed
12/18/2010	6:12:55 AM	PH3 valve closed
12/18/2010	6:12:55 AM	SiCl4 pre valve closed
12/18/2010	6:12:55 AM	SiCl4 post valve closed
12/18/2010	6:12:55 AM	Bubbler valve closed
12/18/2010	6:12:55 AM	Main Vac valve opened
12/18/2010	6:12:55 AM	Bypass valve opened
12/18/2010	6:12:55 AM	Helium MFC set to  0.000000
12/18/2010	6:12:55 AM	H2 MFC set to  0.000000
12/18/2010	6:12:55 AM	BCl3 MFC set to  0.000000
12/18/2010	6:12:55 AM	PHl3 MFC set to  0.000000
12/18/2010	6:12:55 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:12:55 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:12:55 AM	Tube furnace set to 0
12/18/2010	6:13:55 AM	H2 valve closed
12/18/2010	6:13:55 AM	BCl3 valve closed
12/18/2010	6:13:55 AM	PH3 valve closed
12/18/2010	6:13:55 AM	SiCl4 pre valve closed
12/18/2010	6:13:55 AM	SiCl4 post valve closed
12/18/2010	6:13:55 AM	Bubbler valve closed
12/18/2010	6:13:55 AM	Helium valve opened
12/18/2010	6:13:55 AM	Main Vac valve opened
12/18/2010	6:13:55 AM	Bypass valve opened
12/18/2010	6:13:55 AM	Helium MFC set to  100.000000
12/18/2010	6:13:55 AM	H2 MFC set to  0.000000
12/18/2010	6:13:55 AM	BCl3 MFC set to  0.000000
12/18/2010	6:13:55 AM	PHl3 MFC set to  0.000000
12/18/2010	6:13:55 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:13:55 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:13:55 AM	Tube furnace set to 0
12/18/2010	6:14:55 AM	Helium valve closed
12/18/2010	6:14:55 AM	H2 valve closed
12/18/2010	6:14:55 AM	BCl3 valve closed
12/18/2010	6:14:55 AM	PH3 valve closed
12/18/2010	6:14:55 AM	SiCl4 pre valve closed
12/18/2010	6:14:55 AM	SiCl4 post valve closed
12/18/2010	6:14:55 AM	Bubbler valve closed
12/18/2010	6:14:55 AM	Main Vac valve opened
12/18/2010	6:14:55 AM	Bypass valve opened
12/18/2010	6:14:55 AM	Helium MFC set to  0.000000
12/18/2010	6:14:55 AM	H2 MFC set to  0.000000
12/18/2010	6:14:55 AM	BCl3 MFC set to  0.000000
12/18/2010	6:14:55 AM	PHl3 MFC set to  0.000000
12/18/2010	6:14:55 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:14:55 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:14:55 AM	Tube furnace set to 0
12/18/2010	6:15:55 AM	H2 valve closed
12/18/2010	6:15:55 AM	BCl3 valve closed
12/18/2010	6:15:55 AM	PH3 valve closed
12/18/2010	6:15:55 AM	SiCl4 pre valve closed
12/18/2010	6:15:55 AM	SiCl4 post valve closed
12/18/2010	6:15:55 AM	Bubbler valve closed
12/18/2010	6:15:55 AM	Helium valve opened
12/18/2010	6:15:55 AM	Main Vac valve opened
12/18/2010	6:15:55 AM	Bypass valve opened
12/18/2010	6:15:55 AM	Helium MFC set to  100.000000
12/18/2010	6:15:55 AM	H2 MFC set to  0.000000
12/18/2010	6:15:55 AM	BCl3 MFC set to  0.000000
12/18/2010	6:15:55 AM	PHl3 MFC set to  0.000000
12/18/2010	6:15:55 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:15:55 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:15:55 AM	Tube furnace set to 0
12/18/2010	6:16:55 AM	Helium valve closed
12/18/2010	6:16:55 AM	H2 valve closed
12/18/2010	6:16:55 AM	BCl3 valve closed
12/18/2010	6:16:55 AM	PH3 valve closed
12/18/2010	6:16:55 AM	SiCl4 pre valve closed
12/18/2010	6:16:55 AM	SiCl4 post valve closed
12/18/2010	6:16:55 AM	Bubbler valve closed
12/18/2010	6:16:55 AM	Main Vac valve opened
12/18/2010	6:16:55 AM	Bypass valve opened
12/18/2010	6:16:55 AM	Helium MFC set to  0.000000
12/18/2010	6:16:55 AM	H2 MFC set to  0.000000
12/18/2010	6:16:55 AM	BCl3 MFC set to  0.000000
12/18/2010	6:16:55 AM	PHl3 MFC set to  0.000000
12/18/2010	6:16:55 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:16:55 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:16:56 AM	Tube furnace set to 0
12/18/2010	6:17:56 AM	H2 valve closed
12/18/2010	6:17:56 AM	BCl3 valve closed
12/18/2010	6:17:56 AM	PH3 valve closed
12/18/2010	6:17:56 AM	SiCl4 pre valve closed
12/18/2010	6:17:56 AM	SiCl4 post valve closed
12/18/2010	6:17:56 AM	Bubbler valve closed
12/18/2010	6:17:56 AM	Helium valve opened
12/18/2010	6:17:56 AM	Main Vac valve opened
12/18/2010	6:17:56 AM	Bypass valve opened
12/18/2010	6:17:56 AM	Helium MFC set to  100.000000
12/18/2010	6:17:56 AM	H2 MFC set to  0.000000
12/18/2010	6:17:56 AM	BCl3 MFC set to  0.000000
12/18/2010	6:17:56 AM	PHl3 MFC set to  0.000000
12/18/2010	6:17:56 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:17:56 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:17:56 AM	Tube furnace set to 0
12/18/2010	6:18:56 AM	Helium valve closed
12/18/2010	6:18:56 AM	H2 valve closed
12/18/2010	6:18:56 AM	BCl3 valve closed
12/18/2010	6:18:56 AM	PH3 valve closed
12/18/2010	6:18:56 AM	SiCl4 pre valve closed
12/18/2010	6:18:56 AM	SiCl4 post valve closed
12/18/2010	6:18:56 AM	Bubbler valve closed
12/18/2010	6:18:56 AM	Main Vac valve opened
12/18/2010	6:18:56 AM	Bypass valve opened
12/18/2010	6:18:56 AM	Helium MFC set to  0.000000
12/18/2010	6:18:56 AM	H2 MFC set to  0.000000
12/18/2010	6:18:56 AM	BCl3 MFC set to  0.000000
12/18/2010	6:18:56 AM	PHl3 MFC set to  0.000000
12/18/2010	6:18:56 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:18:56 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:18:56 AM	Tube furnace set to 0
12/18/2010	6:19:56 AM	H2 valve closed
12/18/2010	6:19:56 AM	BCl3 valve closed
12/18/2010	6:19:56 AM	PH3 valve closed
12/18/2010	6:19:56 AM	SiCl4 pre valve closed
12/18/2010	6:19:56 AM	SiCl4 post valve closed
12/18/2010	6:19:56 AM	Bubbler valve closed
12/18/2010	6:19:56 AM	Helium valve opened
12/18/2010	6:19:56 AM	Main Vac valve opened
12/18/2010	6:19:56 AM	Bypass valve opened
12/18/2010	6:19:56 AM	Helium MFC set to  100.000000
12/18/2010	6:19:56 AM	H2 MFC set to  0.000000
12/18/2010	6:19:56 AM	BCl3 MFC set to  0.000000
12/18/2010	6:19:56 AM	PHl3 MFC set to  0.000000
12/18/2010	6:19:56 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:19:56 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:19:56 AM	Tube furnace set to 0
12/18/2010	6:20:56 AM	Helium valve closed
12/18/2010	6:20:56 AM	H2 valve closed
12/18/2010	6:20:56 AM	BCl3 valve closed
12/18/2010	6:20:56 AM	PH3 valve closed
12/18/2010	6:20:56 AM	SiCl4 pre valve closed
12/18/2010	6:20:56 AM	SiCl4 post valve closed
12/18/2010	6:20:56 AM	Bubbler valve closed
12/18/2010	6:20:56 AM	Main Vac valve opened
12/18/2010	6:20:56 AM	Bypass valve opened
12/18/2010	6:20:56 AM	Helium MFC set to  0.000000
12/18/2010	6:20:56 AM	H2 MFC set to  0.000000
12/18/2010	6:20:56 AM	BCl3 MFC set to  0.000000
12/18/2010	6:20:56 AM	PHl3 MFC set to  0.000000
12/18/2010	6:20:56 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:20:56 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:20:56 AM	Tube furnace set to 0
12/18/2010	6:21:56 AM	H2 valve closed
12/18/2010	6:21:56 AM	BCl3 valve closed
12/18/2010	6:21:56 AM	PH3 valve closed
12/18/2010	6:21:56 AM	SiCl4 pre valve closed
12/18/2010	6:21:56 AM	SiCl4 post valve closed
12/18/2010	6:21:56 AM	Bubbler valve closed
12/18/2010	6:21:56 AM	Helium valve opened
12/18/2010	6:21:56 AM	Main Vac valve opened
12/18/2010	6:21:56 AM	Bypass valve opened
12/18/2010	6:21:56 AM	Helium MFC set to  100.000000
12/18/2010	6:21:56 AM	H2 MFC set to  0.000000
12/18/2010	6:21:56 AM	BCl3 MFC set to  0.000000
12/18/2010	6:21:56 AM	PHl3 MFC set to  0.000000
12/18/2010	6:21:56 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:21:56 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:21:57 AM	Tube furnace set to 0
12/18/2010	6:22:57 AM	Helium valve closed
12/18/2010	6:22:57 AM	H2 valve closed
12/18/2010	6:22:57 AM	BCl3 valve closed
12/18/2010	6:22:57 AM	PH3 valve closed
12/18/2010	6:22:57 AM	SiCl4 pre valve closed
12/18/2010	6:22:57 AM	SiCl4 post valve closed
12/18/2010	6:22:57 AM	Bubbler valve closed
12/18/2010	6:22:57 AM	Main Vac valve opened
12/18/2010	6:22:57 AM	Bypass valve opened
12/18/2010	6:22:57 AM	Helium MFC set to  0.000000
12/18/2010	6:22:57 AM	H2 MFC set to  0.000000
12/18/2010	6:22:57 AM	BCl3 MFC set to  0.000000
12/18/2010	6:22:57 AM	PHl3 MFC set to  0.000000
12/18/2010	6:22:57 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:22:57 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:22:57 AM	Tube furnace set to 0
12/18/2010	6:23:57 AM	H2 valve closed
12/18/2010	6:23:57 AM	BCl3 valve closed
12/18/2010	6:23:57 AM	PH3 valve closed
12/18/2010	6:23:57 AM	SiCl4 pre valve closed
12/18/2010	6:23:57 AM	SiCl4 post valve closed
12/18/2010	6:23:57 AM	Bubbler valve closed
12/18/2010	6:23:57 AM	Helium valve opened
12/18/2010	6:23:57 AM	Main Vac valve opened
12/18/2010	6:23:57 AM	Bypass valve opened
12/18/2010	6:23:57 AM	Helium MFC set to  100.000000
12/18/2010	6:23:57 AM	H2 MFC set to  0.000000
12/18/2010	6:23:57 AM	BCl3 MFC set to  0.000000
12/18/2010	6:23:57 AM	PHl3 MFC set to  0.000000
12/18/2010	6:23:57 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:23:57 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:23:57 AM	Tube furnace set to 0
12/18/2010	6:24:57 AM	Helium valve closed
12/18/2010	6:24:57 AM	H2 valve closed
12/18/2010	6:24:57 AM	BCl3 valve closed
12/18/2010	6:24:57 AM	PH3 valve closed
12/18/2010	6:24:57 AM	SiCl4 pre valve closed
12/18/2010	6:24:57 AM	SiCl4 post valve closed
12/18/2010	6:24:57 AM	Bubbler valve closed
12/18/2010	6:24:57 AM	Main Vac valve opened
12/18/2010	6:24:57 AM	Bypass valve opened
12/18/2010	6:24:57 AM	Helium MFC set to  0.000000
12/18/2010	6:24:57 AM	H2 MFC set to  0.000000
12/18/2010	6:24:57 AM	BCl3 MFC set to  0.000000
12/18/2010	6:24:57 AM	PHl3 MFC set to  0.000000
12/18/2010	6:24:57 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:24:57 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:24:57 AM	Tube furnace set to 0
12/18/2010	6:25:57 AM	H2 valve closed
12/18/2010	6:25:57 AM	BCl3 valve closed
12/18/2010	6:25:57 AM	PH3 valve closed
12/18/2010	6:25:57 AM	SiCl4 pre valve closed
12/18/2010	6:25:57 AM	SiCl4 post valve closed
12/18/2010	6:25:57 AM	Bubbler valve closed
12/18/2010	6:25:57 AM	Helium valve opened
12/18/2010	6:25:57 AM	Main Vac valve opened
12/18/2010	6:25:57 AM	Bypass valve opened
12/18/2010	6:25:57 AM	Helium MFC set to  100.000000
12/18/2010	6:25:57 AM	H2 MFC set to  0.000000
12/18/2010	6:25:57 AM	BCl3 MFC set to  0.000000
12/18/2010	6:25:57 AM	PHl3 MFC set to  0.000000
12/18/2010	6:25:57 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:25:57 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:25:57 AM	Tube furnace set to 0
12/18/2010	6:26:57 AM	Helium valve closed
12/18/2010	6:26:57 AM	H2 valve closed
12/18/2010	6:26:57 AM	BCl3 valve closed
12/18/2010	6:26:57 AM	PH3 valve closed
12/18/2010	6:26:57 AM	SiCl4 pre valve closed
12/18/2010	6:26:57 AM	SiCl4 post valve closed
12/18/2010	6:26:57 AM	Bubbler valve closed
12/18/2010	6:26:57 AM	Main Vac valve opened
12/18/2010	6:26:57 AM	Bypass valve opened
12/18/2010	6:26:57 AM	Helium MFC set to  0.000000
12/18/2010	6:26:57 AM	H2 MFC set to  0.000000
12/18/2010	6:26:57 AM	BCl3 MFC set to  0.000000
12/18/2010	6:26:57 AM	PHl3 MFC set to  0.000000
12/18/2010	6:26:57 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:26:57 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:26:58 AM	Tube furnace set to 0
12/18/2010	6:27:58 AM	H2 valve closed
12/18/2010	6:27:58 AM	BCl3 valve closed
12/18/2010	6:27:58 AM	PH3 valve closed
12/18/2010	6:27:58 AM	SiCl4 pre valve closed
12/18/2010	6:27:58 AM	SiCl4 post valve closed
12/18/2010	6:27:58 AM	Bubbler valve closed
12/18/2010	6:27:58 AM	Helium valve opened
12/18/2010	6:27:58 AM	Main Vac valve opened
12/18/2010	6:27:58 AM	Bypass valve opened
12/18/2010	6:27:58 AM	Helium MFC set to  100.000000
12/18/2010	6:27:58 AM	H2 MFC set to  0.000000
12/18/2010	6:27:58 AM	BCl3 MFC set to  0.000000
12/18/2010	6:27:58 AM	PHl3 MFC set to  0.000000
12/18/2010	6:27:58 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:27:58 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:27:58 AM	Tube furnace set to 0
12/18/2010	6:28:58 AM	Helium valve closed
12/18/2010	6:28:58 AM	H2 valve closed
12/18/2010	6:28:58 AM	BCl3 valve closed
12/18/2010	6:28:58 AM	PH3 valve closed
12/18/2010	6:28:58 AM	SiCl4 pre valve closed
12/18/2010	6:28:58 AM	SiCl4 post valve closed
12/18/2010	6:28:58 AM	Bubbler valve closed
12/18/2010	6:28:58 AM	Main Vac valve opened
12/18/2010	6:28:58 AM	Bypass valve opened
12/18/2010	6:28:58 AM	Helium MFC set to  0.000000
12/18/2010	6:28:58 AM	H2 MFC set to  0.000000
12/18/2010	6:28:58 AM	BCl3 MFC set to  0.000000
12/18/2010	6:28:58 AM	PHl3 MFC set to  0.000000
12/18/2010	6:28:58 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:28:58 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:28:58 AM	Tube furnace set to 0
12/18/2010	6:29:58 AM	H2 valve closed
12/18/2010	6:29:58 AM	BCl3 valve closed
12/18/2010	6:29:58 AM	PH3 valve closed
12/18/2010	6:29:58 AM	SiCl4 pre valve closed
12/18/2010	6:29:58 AM	SiCl4 post valve closed
12/18/2010	6:29:58 AM	Bubbler valve closed
12/18/2010	6:29:58 AM	Helium valve opened
12/18/2010	6:29:58 AM	Main Vac valve opened
12/18/2010	6:29:58 AM	Bypass valve opened
12/18/2010	6:29:58 AM	Helium MFC set to  100.000000
12/18/2010	6:29:58 AM	H2 MFC set to  0.000000
12/18/2010	6:29:58 AM	BCl3 MFC set to  0.000000
12/18/2010	6:29:58 AM	PHl3 MFC set to  0.000000
12/18/2010	6:29:58 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:29:58 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:29:58 AM	Tube furnace set to 0
12/18/2010	6:30:58 AM	Helium valve closed
12/18/2010	6:30:58 AM	H2 valve closed
12/18/2010	6:30:58 AM	BCl3 valve closed
12/18/2010	6:30:58 AM	PH3 valve closed
12/18/2010	6:30:58 AM	SiCl4 pre valve closed
12/18/2010	6:30:58 AM	SiCl4 post valve closed
12/18/2010	6:30:58 AM	Bubbler valve closed
12/18/2010	6:30:58 AM	Main Vac valve opened
12/18/2010	6:30:58 AM	Bypass valve opened
12/18/2010	6:30:58 AM	Helium MFC set to  0.000000
12/18/2010	6:30:58 AM	H2 MFC set to  0.000000
12/18/2010	6:30:58 AM	BCl3 MFC set to  0.000000
12/18/2010	6:30:58 AM	PHl3 MFC set to  0.000000
12/18/2010	6:30:58 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:30:58 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:30:58 AM	Tube furnace set to 0
12/18/2010	6:31:58 AM	H2 valve closed
12/18/2010	6:31:58 AM	BCl3 valve closed
12/18/2010	6:31:58 AM	PH3 valve closed
12/18/2010	6:31:58 AM	SiCl4 pre valve closed
12/18/2010	6:31:58 AM	SiCl4 post valve closed
12/18/2010	6:31:58 AM	Bubbler valve closed
12/18/2010	6:31:58 AM	Helium valve opened
12/18/2010	6:31:58 AM	Main Vac valve opened
12/18/2010	6:31:58 AM	Bypass valve opened
12/18/2010	6:31:58 AM	Helium MFC set to  100.000000
12/18/2010	6:31:58 AM	H2 MFC set to  0.000000
12/18/2010	6:31:58 AM	BCl3 MFC set to  0.000000
12/18/2010	6:31:58 AM	PHl3 MFC set to  0.000000
12/18/2010	6:31:58 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:31:58 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:31:59 AM	Tube furnace set to 0
12/18/2010	6:32:59 AM	Helium valve closed
12/18/2010	6:32:59 AM	H2 valve closed
12/18/2010	6:32:59 AM	BCl3 valve closed
12/18/2010	6:32:59 AM	PH3 valve closed
12/18/2010	6:32:59 AM	SiCl4 pre valve closed
12/18/2010	6:32:59 AM	SiCl4 post valve closed
12/18/2010	6:32:59 AM	Bubbler valve closed
12/18/2010	6:32:59 AM	Main Vac valve opened
12/18/2010	6:32:59 AM	Bypass valve opened
12/18/2010	6:32:59 AM	Helium MFC set to  0.000000
12/18/2010	6:32:59 AM	H2 MFC set to  0.000000
12/18/2010	6:32:59 AM	BCl3 MFC set to  0.000000
12/18/2010	6:32:59 AM	PHl3 MFC set to  0.000000
12/18/2010	6:32:59 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:32:59 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:32:59 AM	Tube furnace set to 0
12/18/2010	6:33:00 AM	Run finished at 6:33 AM
12/18/2010	6:33:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	6:33:31 AM	Main Vac valve closed
12/18/2010	6:33:32 AM	Bypass valve closed
12/18/2010	6:33:48 AM	Main Vac valve opened
12/18/2010	6:33:49 AM	Bypass valve opened
12/18/2010	6:33:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	6:34:07 AM	Recipe started at 6:34 AM
12/18/2010	6:34:07 AM	Helium valve closed
12/18/2010	6:34:07 AM	H2 valve closed
12/18/2010	6:34:07 AM	BCl3 valve closed
12/18/2010	6:34:07 AM	PH3 valve closed
12/18/2010	6:34:07 AM	SiCl4 pre valve closed
12/18/2010	6:34:07 AM	SiCl4 post valve closed
12/18/2010	6:34:07 AM	Main Vac valve closed
12/18/2010	6:34:07 AM	Bubbler valve closed
12/18/2010	6:34:07 AM	Bypass valve opened
12/18/2010	6:34:07 AM	Helium MFC set to  0.000000
12/18/2010	6:34:07 AM	H2 MFC set to  0.000000
12/18/2010	6:34:07 AM	BCl3 MFC set to  0.000000
12/18/2010	6:34:07 AM	PHl3 MFC set to  0.000000
12/18/2010	6:34:07 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:34:07 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:34:07 AM	Tube furnace set to 0
12/18/2010	6:34:07 AM	Helium valve closed
12/18/2010	6:34:07 AM	H2 valve closed
12/18/2010	6:34:07 AM	BCl3 valve closed
12/18/2010	6:34:07 AM	PH3 valve closed
12/18/2010	6:34:07 AM	SiCl4 pre valve closed
12/18/2010	6:34:07 AM	SiCl4 post valve closed
12/18/2010	6:34:07 AM	Bubbler valve closed
12/18/2010	6:34:07 AM	Main Vac valve opened
12/18/2010	6:34:07 AM	Bypass valve opened
12/18/2010	6:34:07 AM	Helium MFC set to  0.000000
12/18/2010	6:34:07 AM	H2 MFC set to  0.000000
12/18/2010	6:34:07 AM	BCl3 MFC set to  0.000000
12/18/2010	6:34:08 AM	PHl3 MFC set to  0.000000
12/18/2010	6:34:08 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:34:08 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:34:08 AM	Tube furnace set to 0
12/18/2010	6:35:08 AM	H2 valve closed
12/18/2010	6:35:08 AM	BCl3 valve closed
12/18/2010	6:35:08 AM	PH3 valve closed
12/18/2010	6:35:08 AM	SiCl4 pre valve closed
12/18/2010	6:35:08 AM	SiCl4 post valve closed
12/18/2010	6:35:08 AM	Bubbler valve closed
12/18/2010	6:35:08 AM	Helium valve opened
12/18/2010	6:35:08 AM	Main Vac valve opened
12/18/2010	6:35:08 AM	Bypass valve opened
12/18/2010	6:35:08 AM	Helium MFC set to  100.000000
12/18/2010	6:35:08 AM	H2 MFC set to  0.000000
12/18/2010	6:35:08 AM	BCl3 MFC set to  0.000000
12/18/2010	6:35:08 AM	PHl3 MFC set to  0.000000
12/18/2010	6:35:08 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:35:08 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:35:08 AM	Tube furnace set to 0
12/18/2010	6:36:08 AM	Helium valve closed
12/18/2010	6:36:08 AM	H2 valve closed
12/18/2010	6:36:08 AM	BCl3 valve closed
12/18/2010	6:36:08 AM	PH3 valve closed
12/18/2010	6:36:08 AM	SiCl4 pre valve closed
12/18/2010	6:36:08 AM	SiCl4 post valve closed
12/18/2010	6:36:08 AM	Bubbler valve closed
12/18/2010	6:36:08 AM	Main Vac valve opened
12/18/2010	6:36:08 AM	Bypass valve opened
12/18/2010	6:36:08 AM	Helium MFC set to  0.000000
12/18/2010	6:36:08 AM	H2 MFC set to  0.000000
12/18/2010	6:36:08 AM	BCl3 MFC set to  0.000000
12/18/2010	6:36:08 AM	PHl3 MFC set to  0.000000
12/18/2010	6:36:08 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:36:08 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:36:08 AM	Tube furnace set to 0
12/18/2010	6:37:08 AM	H2 valve closed
12/18/2010	6:37:08 AM	BCl3 valve closed
12/18/2010	6:37:08 AM	PH3 valve closed
12/18/2010	6:37:08 AM	SiCl4 pre valve closed
12/18/2010	6:37:08 AM	SiCl4 post valve closed
12/18/2010	6:37:08 AM	Bubbler valve closed
12/18/2010	6:37:08 AM	Helium valve opened
12/18/2010	6:37:08 AM	Main Vac valve opened
12/18/2010	6:37:08 AM	Bypass valve opened
12/18/2010	6:37:08 AM	Helium MFC set to  100.000000
12/18/2010	6:37:08 AM	H2 MFC set to  0.000000
12/18/2010	6:37:08 AM	BCl3 MFC set to  0.000000
12/18/2010	6:37:08 AM	PHl3 MFC set to  0.000000
12/18/2010	6:37:08 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:37:08 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:37:08 AM	Tube furnace set to 0
12/18/2010	6:38:08 AM	Helium valve closed
12/18/2010	6:38:08 AM	H2 valve closed
12/18/2010	6:38:08 AM	BCl3 valve closed
12/18/2010	6:38:08 AM	PH3 valve closed
12/18/2010	6:38:08 AM	SiCl4 pre valve closed
12/18/2010	6:38:08 AM	SiCl4 post valve closed
12/18/2010	6:38:08 AM	Bubbler valve closed
12/18/2010	6:38:08 AM	Main Vac valve opened
12/18/2010	6:38:08 AM	Bypass valve opened
12/18/2010	6:38:08 AM	Helium MFC set to  0.000000
12/18/2010	6:38:08 AM	H2 MFC set to  0.000000
12/18/2010	6:38:08 AM	BCl3 MFC set to  0.000000
12/18/2010	6:38:08 AM	PHl3 MFC set to  0.000000
12/18/2010	6:38:08 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:38:08 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:38:08 AM	Tube furnace set to 0
12/18/2010	6:39:08 AM	H2 valve closed
12/18/2010	6:39:08 AM	BCl3 valve closed
12/18/2010	6:39:08 AM	PH3 valve closed
12/18/2010	6:39:08 AM	SiCl4 pre valve closed
12/18/2010	6:39:08 AM	SiCl4 post valve closed
12/18/2010	6:39:08 AM	Bubbler valve closed
12/18/2010	6:39:08 AM	Helium valve opened
12/18/2010	6:39:08 AM	Main Vac valve opened
12/18/2010	6:39:08 AM	Bypass valve opened
12/18/2010	6:39:08 AM	Helium MFC set to  100.000000
12/18/2010	6:39:08 AM	H2 MFC set to  0.000000
12/18/2010	6:39:08 AM	BCl3 MFC set to  0.000000
12/18/2010	6:39:08 AM	PHl3 MFC set to  0.000000
12/18/2010	6:39:08 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:39:08 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:39:09 AM	Tube furnace set to 0
12/18/2010	6:40:09 AM	Helium valve closed
12/18/2010	6:40:09 AM	H2 valve closed
12/18/2010	6:40:09 AM	BCl3 valve closed
12/18/2010	6:40:09 AM	PH3 valve closed
12/18/2010	6:40:09 AM	SiCl4 pre valve closed
12/18/2010	6:40:09 AM	SiCl4 post valve closed
12/18/2010	6:40:09 AM	Bubbler valve closed
12/18/2010	6:40:09 AM	Main Vac valve opened
12/18/2010	6:40:09 AM	Bypass valve opened
12/18/2010	6:40:09 AM	Helium MFC set to  0.000000
12/18/2010	6:40:09 AM	H2 MFC set to  0.000000
12/18/2010	6:40:09 AM	BCl3 MFC set to  0.000000
12/18/2010	6:40:09 AM	PHl3 MFC set to  0.000000
12/18/2010	6:40:09 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:40:09 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:40:09 AM	Tube furnace set to 0
12/18/2010	6:41:09 AM	H2 valve closed
12/18/2010	6:41:09 AM	BCl3 valve closed
12/18/2010	6:41:09 AM	PH3 valve closed
12/18/2010	6:41:09 AM	SiCl4 pre valve closed
12/18/2010	6:41:09 AM	SiCl4 post valve closed
12/18/2010	6:41:09 AM	Bubbler valve closed
12/18/2010	6:41:09 AM	Helium valve opened
12/18/2010	6:41:09 AM	Main Vac valve opened
12/18/2010	6:41:09 AM	Bypass valve opened
12/18/2010	6:41:09 AM	Helium MFC set to  100.000000
12/18/2010	6:41:09 AM	H2 MFC set to  0.000000
12/18/2010	6:41:09 AM	BCl3 MFC set to  0.000000
12/18/2010	6:41:09 AM	PHl3 MFC set to  0.000000
12/18/2010	6:41:09 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:41:09 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:41:09 AM	Tube furnace set to 0
12/18/2010	6:42:09 AM	Helium valve closed
12/18/2010	6:42:09 AM	H2 valve closed
12/18/2010	6:42:09 AM	BCl3 valve closed
12/18/2010	6:42:09 AM	PH3 valve closed
12/18/2010	6:42:09 AM	SiCl4 pre valve closed
12/18/2010	6:42:09 AM	SiCl4 post valve closed
12/18/2010	6:42:09 AM	Bubbler valve closed
12/18/2010	6:42:09 AM	Main Vac valve opened
12/18/2010	6:42:09 AM	Bypass valve opened
12/18/2010	6:42:09 AM	Helium MFC set to  0.000000
12/18/2010	6:42:09 AM	H2 MFC set to  0.000000
12/18/2010	6:42:09 AM	BCl3 MFC set to  0.000000
12/18/2010	6:42:09 AM	PHl3 MFC set to  0.000000
12/18/2010	6:42:09 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:42:09 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:42:09 AM	Tube furnace set to 0
12/18/2010	6:43:09 AM	H2 valve closed
12/18/2010	6:43:09 AM	BCl3 valve closed
12/18/2010	6:43:09 AM	PH3 valve closed
12/18/2010	6:43:09 AM	SiCl4 pre valve closed
12/18/2010	6:43:09 AM	SiCl4 post valve closed
12/18/2010	6:43:09 AM	Bubbler valve closed
12/18/2010	6:43:09 AM	Helium valve opened
12/18/2010	6:43:09 AM	Main Vac valve opened
12/18/2010	6:43:09 AM	Bypass valve opened
12/18/2010	6:43:09 AM	Helium MFC set to  100.000000
12/18/2010	6:43:09 AM	H2 MFC set to  0.000000
12/18/2010	6:43:09 AM	BCl3 MFC set to  0.000000
12/18/2010	6:43:09 AM	PHl3 MFC set to  0.000000
12/18/2010	6:43:09 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:43:09 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:43:09 AM	Tube furnace set to 0
12/18/2010	6:44:09 AM	Helium valve closed
12/18/2010	6:44:09 AM	H2 valve closed
12/18/2010	6:44:09 AM	BCl3 valve closed
12/18/2010	6:44:09 AM	PH3 valve closed
12/18/2010	6:44:09 AM	SiCl4 pre valve closed
12/18/2010	6:44:09 AM	SiCl4 post valve closed
12/18/2010	6:44:09 AM	Bubbler valve closed
12/18/2010	6:44:09 AM	Main Vac valve opened
12/18/2010	6:44:09 AM	Bypass valve opened
12/18/2010	6:44:09 AM	Helium MFC set to  0.000000
12/18/2010	6:44:09 AM	H2 MFC set to  0.000000
12/18/2010	6:44:09 AM	BCl3 MFC set to  0.000000
12/18/2010	6:44:09 AM	PHl3 MFC set to  0.000000
12/18/2010	6:44:09 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:44:09 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:44:10 AM	Tube furnace set to 0
12/18/2010	6:45:10 AM	H2 valve closed
12/18/2010	6:45:10 AM	BCl3 valve closed
12/18/2010	6:45:10 AM	PH3 valve closed
12/18/2010	6:45:10 AM	SiCl4 pre valve closed
12/18/2010	6:45:10 AM	SiCl4 post valve closed
12/18/2010	6:45:10 AM	Bubbler valve closed
12/18/2010	6:45:10 AM	Helium valve opened
12/18/2010	6:45:10 AM	Main Vac valve opened
12/18/2010	6:45:10 AM	Bypass valve opened
12/18/2010	6:45:10 AM	Helium MFC set to  100.000000
12/18/2010	6:45:10 AM	H2 MFC set to  0.000000
12/18/2010	6:45:10 AM	BCl3 MFC set to  0.000000
12/18/2010	6:45:10 AM	PHl3 MFC set to  0.000000
12/18/2010	6:45:10 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:45:10 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:45:10 AM	Tube furnace set to 0
12/18/2010	6:46:10 AM	Helium valve closed
12/18/2010	6:46:10 AM	H2 valve closed
12/18/2010	6:46:10 AM	BCl3 valve closed
12/18/2010	6:46:10 AM	PH3 valve closed
12/18/2010	6:46:10 AM	SiCl4 pre valve closed
12/18/2010	6:46:10 AM	SiCl4 post valve closed
12/18/2010	6:46:10 AM	Bubbler valve closed
12/18/2010	6:46:10 AM	Main Vac valve opened
12/18/2010	6:46:10 AM	Bypass valve opened
12/18/2010	6:46:10 AM	Helium MFC set to  0.000000
12/18/2010	6:46:10 AM	H2 MFC set to  0.000000
12/18/2010	6:46:10 AM	BCl3 MFC set to  0.000000
12/18/2010	6:46:10 AM	PHl3 MFC set to  0.000000
12/18/2010	6:46:10 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:46:10 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:46:10 AM	Tube furnace set to 0
12/18/2010	6:47:10 AM	H2 valve closed
12/18/2010	6:47:10 AM	BCl3 valve closed
12/18/2010	6:47:10 AM	PH3 valve closed
12/18/2010	6:47:10 AM	SiCl4 pre valve closed
12/18/2010	6:47:10 AM	SiCl4 post valve closed
12/18/2010	6:47:10 AM	Bubbler valve closed
12/18/2010	6:47:10 AM	Helium valve opened
12/18/2010	6:47:10 AM	Main Vac valve opened
12/18/2010	6:47:10 AM	Bypass valve opened
12/18/2010	6:47:10 AM	Helium MFC set to  100.000000
12/18/2010	6:47:10 AM	H2 MFC set to  0.000000
12/18/2010	6:47:10 AM	BCl3 MFC set to  0.000000
12/18/2010	6:47:10 AM	PHl3 MFC set to  0.000000
12/18/2010	6:47:10 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:47:10 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:47:10 AM	Tube furnace set to 0
12/18/2010	6:48:10 AM	Helium valve closed
12/18/2010	6:48:10 AM	H2 valve closed
12/18/2010	6:48:10 AM	BCl3 valve closed
12/18/2010	6:48:10 AM	PH3 valve closed
12/18/2010	6:48:10 AM	SiCl4 pre valve closed
12/18/2010	6:48:10 AM	SiCl4 post valve closed
12/18/2010	6:48:10 AM	Bubbler valve closed
12/18/2010	6:48:10 AM	Main Vac valve opened
12/18/2010	6:48:10 AM	Bypass valve opened
12/18/2010	6:48:10 AM	Helium MFC set to  0.000000
12/18/2010	6:48:10 AM	H2 MFC set to  0.000000
12/18/2010	6:48:10 AM	BCl3 MFC set to  0.000000
12/18/2010	6:48:10 AM	PHl3 MFC set to  0.000000
12/18/2010	6:48:10 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:48:10 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:48:10 AM	Tube furnace set to 0
12/18/2010	6:49:10 AM	H2 valve closed
12/18/2010	6:49:10 AM	BCl3 valve closed
12/18/2010	6:49:10 AM	PH3 valve closed
12/18/2010	6:49:10 AM	SiCl4 pre valve closed
12/18/2010	6:49:10 AM	SiCl4 post valve closed
12/18/2010	6:49:10 AM	Bubbler valve closed
12/18/2010	6:49:10 AM	Helium valve opened
12/18/2010	6:49:10 AM	Main Vac valve opened
12/18/2010	6:49:10 AM	Bypass valve opened
12/18/2010	6:49:10 AM	Helium MFC set to  100.000000
12/18/2010	6:49:10 AM	H2 MFC set to  0.000000
12/18/2010	6:49:10 AM	BCl3 MFC set to  0.000000
12/18/2010	6:49:10 AM	PHl3 MFC set to  0.000000
12/18/2010	6:49:10 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:49:10 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:49:11 AM	Tube furnace set to 0
12/18/2010	6:50:11 AM	Helium valve closed
12/18/2010	6:50:11 AM	H2 valve closed
12/18/2010	6:50:11 AM	BCl3 valve closed
12/18/2010	6:50:11 AM	PH3 valve closed
12/18/2010	6:50:11 AM	SiCl4 pre valve closed
12/18/2010	6:50:11 AM	SiCl4 post valve closed
12/18/2010	6:50:11 AM	Bubbler valve closed
12/18/2010	6:50:11 AM	Main Vac valve opened
12/18/2010	6:50:11 AM	Bypass valve opened
12/18/2010	6:50:11 AM	Helium MFC set to  0.000000
12/18/2010	6:50:11 AM	H2 MFC set to  0.000000
12/18/2010	6:50:11 AM	BCl3 MFC set to  0.000000
12/18/2010	6:50:11 AM	PHl3 MFC set to  0.000000
12/18/2010	6:50:11 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:50:11 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:50:11 AM	Tube furnace set to 0
12/18/2010	6:51:11 AM	H2 valve closed
12/18/2010	6:51:11 AM	BCl3 valve closed
12/18/2010	6:51:11 AM	PH3 valve closed
12/18/2010	6:51:11 AM	SiCl4 pre valve closed
12/18/2010	6:51:11 AM	SiCl4 post valve closed
12/18/2010	6:51:11 AM	Bubbler valve closed
12/18/2010	6:51:11 AM	Helium valve opened
12/18/2010	6:51:11 AM	Main Vac valve opened
12/18/2010	6:51:11 AM	Bypass valve opened
12/18/2010	6:51:11 AM	Helium MFC set to  100.000000
12/18/2010	6:51:11 AM	H2 MFC set to  0.000000
12/18/2010	6:51:11 AM	BCl3 MFC set to  0.000000
12/18/2010	6:51:11 AM	PHl3 MFC set to  0.000000
12/18/2010	6:51:11 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:51:11 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:51:11 AM	Tube furnace set to 0
12/18/2010	6:52:11 AM	Helium valve closed
12/18/2010	6:52:11 AM	H2 valve closed
12/18/2010	6:52:11 AM	BCl3 valve closed
12/18/2010	6:52:11 AM	PH3 valve closed
12/18/2010	6:52:11 AM	SiCl4 pre valve closed
12/18/2010	6:52:11 AM	SiCl4 post valve closed
12/18/2010	6:52:11 AM	Bubbler valve closed
12/18/2010	6:52:11 AM	Main Vac valve opened
12/18/2010	6:52:11 AM	Bypass valve opened
12/18/2010	6:52:11 AM	Helium MFC set to  0.000000
12/18/2010	6:52:11 AM	H2 MFC set to  0.000000
12/18/2010	6:52:11 AM	BCl3 MFC set to  0.000000
12/18/2010	6:52:11 AM	PHl3 MFC set to  0.000000
12/18/2010	6:52:11 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:52:11 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:52:11 AM	Tube furnace set to 0
12/18/2010	6:53:11 AM	H2 valve closed
12/18/2010	6:53:11 AM	BCl3 valve closed
12/18/2010	6:53:11 AM	PH3 valve closed
12/18/2010	6:53:11 AM	SiCl4 pre valve closed
12/18/2010	6:53:11 AM	SiCl4 post valve closed
12/18/2010	6:53:11 AM	Bubbler valve closed
12/18/2010	6:53:11 AM	Helium valve opened
12/18/2010	6:53:11 AM	Main Vac valve opened
12/18/2010	6:53:11 AM	Bypass valve opened
12/18/2010	6:53:11 AM	Helium MFC set to  100.000000
12/18/2010	6:53:11 AM	H2 MFC set to  0.000000
12/18/2010	6:53:11 AM	BCl3 MFC set to  0.000000
12/18/2010	6:53:11 AM	PHl3 MFC set to  0.000000
12/18/2010	6:53:11 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:53:11 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:53:11 AM	Tube furnace set to 0
12/18/2010	6:54:11 AM	Helium valve closed
12/18/2010	6:54:11 AM	H2 valve closed
12/18/2010	6:54:11 AM	BCl3 valve closed
12/18/2010	6:54:11 AM	PH3 valve closed
12/18/2010	6:54:11 AM	SiCl4 pre valve closed
12/18/2010	6:54:11 AM	SiCl4 post valve closed
12/18/2010	6:54:11 AM	Bubbler valve closed
12/18/2010	6:54:11 AM	Main Vac valve opened
12/18/2010	6:54:11 AM	Bypass valve opened
12/18/2010	6:54:11 AM	Helium MFC set to  0.000000
12/18/2010	6:54:11 AM	H2 MFC set to  0.000000
12/18/2010	6:54:11 AM	BCl3 MFC set to  0.000000
12/18/2010	6:54:11 AM	PHl3 MFC set to  0.000000
12/18/2010	6:54:11 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:54:11 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:54:12 AM	Tube furnace set to 0
12/18/2010	6:54:13 AM	Run finished at 6:54 AM
12/18/2010	6:54:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	6:57:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	6:58:03 AM	Recipe started at 6:57 AM
12/18/2010	6:58:04 AM	Helium valve closed
12/18/2010	6:58:04 AM	H2 valve closed
12/18/2010	6:58:04 AM	BCl3 valve closed
12/18/2010	6:58:04 AM	PH3 valve closed
12/18/2010	6:58:04 AM	SiCl4 pre valve closed
12/18/2010	6:58:04 AM	SiCl4 post valve closed
12/18/2010	6:58:04 AM	Main Vac valve closed
12/18/2010	6:58:04 AM	Bubbler valve closed
12/18/2010	6:58:04 AM	Bypass valve opened
12/18/2010	6:58:04 AM	Helium MFC set to  0.000000
12/18/2010	6:58:04 AM	H2 MFC set to  0.000000
12/18/2010	6:58:04 AM	BCl3 MFC set to  0.000000
12/18/2010	6:58:04 AM	PHl3 MFC set to  0.000000
12/18/2010	6:58:04 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:58:04 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:58:04 AM	Tube furnace set to 0
12/18/2010	6:58:04 AM	Helium valve closed
12/18/2010	6:58:04 AM	H2 valve closed
12/18/2010	6:58:04 AM	BCl3 valve closed
12/18/2010	6:58:04 AM	PH3 valve closed
12/18/2010	6:58:04 AM	SiCl4 pre valve closed
12/18/2010	6:58:04 AM	SiCl4 post valve closed
12/18/2010	6:58:04 AM	Bubbler valve closed
12/18/2010	6:58:04 AM	Main Vac valve opened
12/18/2010	6:58:04 AM	Bypass valve opened
12/18/2010	6:58:04 AM	Helium MFC set to  0.000000
12/18/2010	6:58:04 AM	H2 MFC set to  0.000000
12/18/2010	6:58:04 AM	BCl3 MFC set to  0.000000
12/18/2010	6:58:04 AM	PHl3 MFC set to  0.000000
12/18/2010	6:58:04 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:58:04 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:58:04 AM	Tube furnace set to 0
12/18/2010	6:58:08 AM	H2 valve closed
12/18/2010	6:58:08 AM	BCl3 valve closed
12/18/2010	6:58:08 AM	PH3 valve closed
12/18/2010	6:58:08 AM	SiCl4 pre valve closed
12/18/2010	6:58:08 AM	SiCl4 post valve closed
12/18/2010	6:58:08 AM	Bubbler valve closed
12/18/2010	6:58:08 AM	Helium valve opened
12/18/2010	6:58:08 AM	Main Vac valve opened
12/18/2010	6:58:08 AM	Bypass valve opened
12/18/2010	6:58:08 AM	Helium MFC set to  100.000000
12/18/2010	6:58:08 AM	H2 MFC set to  0.000000
12/18/2010	6:58:08 AM	BCl3 MFC set to  0.000000
12/18/2010	6:58:08 AM	PHl3 MFC set to  0.000000
12/18/2010	6:58:08 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:58:08 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:58:09 AM	Tube furnace set to 0
12/18/2010	6:58:09 AM	Helium valve closed
12/18/2010	6:58:09 AM	H2 valve closed
12/18/2010	6:58:09 AM	BCl3 valve closed
12/18/2010	6:58:09 AM	PH3 valve closed
12/18/2010	6:58:09 AM	SiCl4 pre valve closed
12/18/2010	6:58:09 AM	SiCl4 post valve closed
12/18/2010	6:58:09 AM	Bubbler valve closed
12/18/2010	6:58:09 AM	Main Vac valve opened
12/18/2010	6:58:09 AM	Bypass valve opened
12/18/2010	6:58:09 AM	Helium MFC set to  0.000000
12/18/2010	6:58:09 AM	H2 MFC set to  0.000000
12/18/2010	6:58:09 AM	BCl3 MFC set to  0.000000
12/18/2010	6:58:09 AM	PHl3 MFC set to  0.000000
12/18/2010	6:58:09 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:58:09 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:58:09 AM	Tube furnace set to 0
12/18/2010	6:58:11 AM	H2 valve closed
12/18/2010	6:58:11 AM	BCl3 valve closed
12/18/2010	6:58:11 AM	PH3 valve closed
12/18/2010	6:58:11 AM	SiCl4 pre valve closed
12/18/2010	6:58:11 AM	SiCl4 post valve closed
12/18/2010	6:58:11 AM	Bubbler valve closed
12/18/2010	6:58:11 AM	Helium valve opened
12/18/2010	6:58:11 AM	Main Vac valve opened
12/18/2010	6:58:11 AM	Bypass valve opened
12/18/2010	6:58:11 AM	Helium MFC set to  100.000000
12/18/2010	6:58:11 AM	H2 MFC set to  0.000000
12/18/2010	6:58:11 AM	BCl3 MFC set to  0.000000
12/18/2010	6:58:11 AM	PHl3 MFC set to  0.000000
12/18/2010	6:58:11 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:58:11 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:58:11 AM	Tube furnace set to 0
12/18/2010	6:58:11 AM	Helium valve closed
12/18/2010	6:58:11 AM	H2 valve closed
12/18/2010	6:58:11 AM	BCl3 valve closed
12/18/2010	6:58:11 AM	PH3 valve closed
12/18/2010	6:58:11 AM	SiCl4 pre valve closed
12/18/2010	6:58:11 AM	SiCl4 post valve closed
12/18/2010	6:58:11 AM	Bubbler valve closed
12/18/2010	6:58:11 AM	Main Vac valve opened
12/18/2010	6:58:11 AM	Bypass valve opened
12/18/2010	6:58:11 AM	Helium MFC set to  0.000000
12/18/2010	6:58:11 AM	H2 MFC set to  0.000000
12/18/2010	6:58:11 AM	BCl3 MFC set to  0.000000
12/18/2010	6:58:11 AM	PHl3 MFC set to  0.000000
12/18/2010	6:58:11 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:58:11 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:58:11 AM	Tube furnace set to 0
12/18/2010	6:58:12 AM	H2 valve closed
12/18/2010	6:58:12 AM	BCl3 valve closed
12/18/2010	6:58:12 AM	PH3 valve closed
12/18/2010	6:58:12 AM	SiCl4 pre valve closed
12/18/2010	6:58:12 AM	SiCl4 post valve closed
12/18/2010	6:58:12 AM	Bubbler valve closed
12/18/2010	6:58:12 AM	Helium valve opened
12/18/2010	6:58:12 AM	Main Vac valve opened
12/18/2010	6:58:12 AM	Bypass valve opened
12/18/2010	6:58:12 AM	Helium MFC set to  100.000000
12/18/2010	6:58:12 AM	H2 MFC set to  0.000000
12/18/2010	6:58:12 AM	BCl3 MFC set to  0.000000
12/18/2010	6:58:12 AM	PHl3 MFC set to  0.000000
12/18/2010	6:58:12 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:58:12 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:58:12 AM	Tube furnace set to 0
12/18/2010	6:58:13 AM	Helium valve closed
12/18/2010	6:58:13 AM	H2 valve closed
12/18/2010	6:58:13 AM	BCl3 valve closed
12/18/2010	6:58:13 AM	PH3 valve closed
12/18/2010	6:58:13 AM	SiCl4 pre valve closed
12/18/2010	6:58:13 AM	SiCl4 post valve closed
12/18/2010	6:58:13 AM	Bubbler valve closed
12/18/2010	6:58:13 AM	Main Vac valve opened
12/18/2010	6:58:13 AM	Bypass valve opened
12/18/2010	6:58:13 AM	Helium MFC set to  0.000000
12/18/2010	6:58:13 AM	H2 MFC set to  0.000000
12/18/2010	6:58:13 AM	BCl3 MFC set to  0.000000
12/18/2010	6:58:13 AM	PHl3 MFC set to  0.000000
12/18/2010	6:58:13 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:58:13 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:58:13 AM	Tube furnace set to 0
12/18/2010	6:58:14 AM	H2 valve closed
12/18/2010	6:58:14 AM	BCl3 valve closed
12/18/2010	6:58:14 AM	PH3 valve closed
12/18/2010	6:58:14 AM	SiCl4 pre valve closed
12/18/2010	6:58:14 AM	SiCl4 post valve closed
12/18/2010	6:58:14 AM	Bubbler valve closed
12/18/2010	6:58:14 AM	Helium valve opened
12/18/2010	6:58:14 AM	Main Vac valve opened
12/18/2010	6:58:14 AM	Bypass valve opened
12/18/2010	6:58:14 AM	Helium MFC set to  100.000000
12/18/2010	6:58:14 AM	H2 MFC set to  0.000000
12/18/2010	6:58:14 AM	BCl3 MFC set to  0.000000
12/18/2010	6:58:14 AM	PHl3 MFC set to  0.000000
12/18/2010	6:58:14 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:58:14 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:58:14 AM	Tube furnace set to 0
12/18/2010	6:58:15 AM	Helium valve closed
12/18/2010	6:58:15 AM	H2 valve closed
12/18/2010	6:58:15 AM	BCl3 valve closed
12/18/2010	6:58:15 AM	PH3 valve closed
12/18/2010	6:58:15 AM	SiCl4 pre valve closed
12/18/2010	6:58:15 AM	SiCl4 post valve closed
12/18/2010	6:58:15 AM	Bubbler valve closed
12/18/2010	6:58:15 AM	Main Vac valve opened
12/18/2010	6:58:15 AM	Bypass valve opened
12/18/2010	6:58:15 AM	Helium MFC set to  0.000000
12/18/2010	6:58:15 AM	H2 MFC set to  0.000000
12/18/2010	6:58:15 AM	BCl3 MFC set to  0.000000
12/18/2010	6:58:15 AM	PHl3 MFC set to  0.000000
12/18/2010	6:58:15 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:58:15 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:58:15 AM	Tube furnace set to 0
12/18/2010	6:58:16 AM	H2 valve closed
12/18/2010	6:58:16 AM	BCl3 valve closed
12/18/2010	6:58:16 AM	PH3 valve closed
12/18/2010	6:58:16 AM	SiCl4 pre valve closed
12/18/2010	6:58:16 AM	SiCl4 post valve closed
12/18/2010	6:58:16 AM	Bubbler valve closed
12/18/2010	6:58:16 AM	Helium valve opened
12/18/2010	6:58:16 AM	Main Vac valve opened
12/18/2010	6:58:16 AM	Bypass valve opened
12/18/2010	6:58:16 AM	Helium MFC set to  100.000000
12/18/2010	6:58:16 AM	H2 MFC set to  0.000000
12/18/2010	6:58:16 AM	BCl3 MFC set to  0.000000
12/18/2010	6:58:16 AM	PHl3 MFC set to  0.000000
12/18/2010	6:58:16 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:58:16 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:58:16 AM	Tube furnace set to 0
12/18/2010	6:58:17 AM	Helium valve closed
12/18/2010	6:58:17 AM	H2 valve closed
12/18/2010	6:58:17 AM	BCl3 valve closed
12/18/2010	6:58:17 AM	PH3 valve closed
12/18/2010	6:58:17 AM	SiCl4 pre valve closed
12/18/2010	6:58:17 AM	SiCl4 post valve closed
12/18/2010	6:58:17 AM	Bubbler valve closed
12/18/2010	6:58:17 AM	Main Vac valve opened
12/18/2010	6:58:17 AM	Bypass valve opened
12/18/2010	6:58:17 AM	Helium MFC set to  0.000000
12/18/2010	6:58:17 AM	H2 MFC set to  0.000000
12/18/2010	6:58:17 AM	BCl3 MFC set to  0.000000
12/18/2010	6:58:17 AM	PHl3 MFC set to  0.000000
12/18/2010	6:58:17 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:58:17 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:58:17 AM	Tube furnace set to 0
12/18/2010	6:58:20 AM	H2 valve closed
12/18/2010	6:58:20 AM	BCl3 valve closed
12/18/2010	6:58:20 AM	PH3 valve closed
12/18/2010	6:58:20 AM	SiCl4 pre valve closed
12/18/2010	6:58:20 AM	SiCl4 post valve closed
12/18/2010	6:58:20 AM	Bubbler valve closed
12/18/2010	6:58:20 AM	Helium valve opened
12/18/2010	6:58:20 AM	Main Vac valve opened
12/18/2010	6:58:20 AM	Bypass valve opened
12/18/2010	6:58:20 AM	Helium MFC set to  100.000000
12/18/2010	6:58:20 AM	H2 MFC set to  0.000000
12/18/2010	6:58:20 AM	BCl3 MFC set to  0.000000
12/18/2010	6:58:20 AM	PHl3 MFC set to  0.000000
12/18/2010	6:58:20 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:58:20 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:58:20 AM	Tube furnace set to 0
12/18/2010	6:58:21 AM	Helium valve closed
12/18/2010	6:58:21 AM	H2 valve closed
12/18/2010	6:58:21 AM	BCl3 valve closed
12/18/2010	6:58:21 AM	PH3 valve closed
12/18/2010	6:58:21 AM	SiCl4 pre valve closed
12/18/2010	6:58:21 AM	SiCl4 post valve closed
12/18/2010	6:58:21 AM	Bubbler valve closed
12/18/2010	6:58:21 AM	Main Vac valve opened
12/18/2010	6:58:21 AM	Bypass valve opened
12/18/2010	6:58:21 AM	Helium MFC set to  0.000000
12/18/2010	6:58:21 AM	H2 MFC set to  0.000000
12/18/2010	6:58:21 AM	BCl3 MFC set to  0.000000
12/18/2010	6:58:21 AM	PHl3 MFC set to  0.000000
12/18/2010	6:58:21 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:58:21 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:58:21 AM	Tube furnace set to 0
12/18/2010	6:59:21 AM	H2 valve closed
12/18/2010	6:59:21 AM	BCl3 valve closed
12/18/2010	6:59:21 AM	PH3 valve closed
12/18/2010	6:59:21 AM	SiCl4 pre valve closed
12/18/2010	6:59:21 AM	SiCl4 post valve closed
12/18/2010	6:59:21 AM	Bubbler valve closed
12/18/2010	6:59:21 AM	Helium valve opened
12/18/2010	6:59:21 AM	Main Vac valve opened
12/18/2010	6:59:21 AM	Bypass valve opened
12/18/2010	6:59:21 AM	Helium MFC set to  100.000000
12/18/2010	6:59:21 AM	H2 MFC set to  0.000000
12/18/2010	6:59:21 AM	BCl3 MFC set to  0.000000
12/18/2010	6:59:21 AM	PHl3 MFC set to  0.000000
12/18/2010	6:59:21 AM	SiCl4 MFC set to  0.000000
12/18/2010	6:59:21 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	6:59:21 AM	Tube furnace set to 0
12/18/2010	7:00:21 AM	Helium valve closed
12/18/2010	7:00:21 AM	H2 valve closed
12/18/2010	7:00:21 AM	BCl3 valve closed
12/18/2010	7:00:21 AM	PH3 valve closed
12/18/2010	7:00:21 AM	SiCl4 pre valve closed
12/18/2010	7:00:21 AM	SiCl4 post valve closed
12/18/2010	7:00:21 AM	Bubbler valve closed
12/18/2010	7:00:21 AM	Main Vac valve opened
12/18/2010	7:00:21 AM	Bypass valve opened
12/18/2010	7:00:21 AM	Helium MFC set to  0.000000
12/18/2010	7:00:21 AM	H2 MFC set to  0.000000
12/18/2010	7:00:21 AM	BCl3 MFC set to  0.000000
12/18/2010	7:00:21 AM	PHl3 MFC set to  0.000000
12/18/2010	7:00:21 AM	SiCl4 MFC set to  0.000000
12/18/2010	7:00:21 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	7:00:21 AM	Tube furnace set to 0
12/18/2010	7:01:21 AM	H2 valve closed
12/18/2010	7:01:21 AM	BCl3 valve closed
12/18/2010	7:01:21 AM	PH3 valve closed
12/18/2010	7:01:21 AM	SiCl4 pre valve closed
12/18/2010	7:01:21 AM	SiCl4 post valve closed
12/18/2010	7:01:21 AM	Bubbler valve closed
12/18/2010	7:01:21 AM	Helium valve opened
12/18/2010	7:01:21 AM	Main Vac valve opened
12/18/2010	7:01:21 AM	Bypass valve opened
12/18/2010	7:01:21 AM	Helium MFC set to  100.000000
12/18/2010	7:01:21 AM	H2 MFC set to  0.000000
12/18/2010	7:01:21 AM	BCl3 MFC set to  0.000000
12/18/2010	7:01:21 AM	PHl3 MFC set to  0.000000
12/18/2010	7:01:21 AM	SiCl4 MFC set to  0.000000
12/18/2010	7:01:21 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	7:01:22 AM	Tube furnace set to 0
12/18/2010	7:02:22 AM	Helium valve closed
12/18/2010	7:02:22 AM	H2 valve closed
12/18/2010	7:02:22 AM	BCl3 valve closed
12/18/2010	7:02:22 AM	PH3 valve closed
12/18/2010	7:02:22 AM	SiCl4 pre valve closed
12/18/2010	7:02:22 AM	SiCl4 post valve closed
12/18/2010	7:02:22 AM	Bubbler valve closed
12/18/2010	7:02:22 AM	Main Vac valve opened
12/18/2010	7:02:22 AM	Bypass valve opened
12/18/2010	7:02:22 AM	Helium MFC set to  0.000000
12/18/2010	7:02:22 AM	H2 MFC set to  0.000000
12/18/2010	7:02:22 AM	BCl3 MFC set to  0.000000
12/18/2010	7:02:22 AM	PHl3 MFC set to  0.000000
12/18/2010	7:02:22 AM	SiCl4 MFC set to  0.000000
12/18/2010	7:02:22 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	7:02:22 AM	Tube furnace set to 0
12/18/2010	7:03:22 AM	H2 valve closed
12/18/2010	7:03:22 AM	BCl3 valve closed
12/18/2010	7:03:22 AM	PH3 valve closed
12/18/2010	7:03:22 AM	SiCl4 pre valve closed
12/18/2010	7:03:22 AM	SiCl4 post valve closed
12/18/2010	7:03:22 AM	Bubbler valve closed
12/18/2010	7:03:22 AM	Helium valve opened
12/18/2010	7:03:22 AM	Main Vac valve opened
12/18/2010	7:03:22 AM	Bypass valve opened
12/18/2010	7:03:22 AM	Helium MFC set to  100.000000
12/18/2010	7:03:22 AM	H2 MFC set to  0.000000
12/18/2010	7:03:22 AM	BCl3 MFC set to  0.000000
12/18/2010	7:03:22 AM	PHl3 MFC set to  0.000000
12/18/2010	7:03:22 AM	SiCl4 MFC set to  0.000000
12/18/2010	7:03:22 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	7:03:22 AM	Tube furnace set to 0
12/18/2010	7:04:22 AM	Helium valve closed
12/18/2010	7:04:22 AM	H2 valve closed
12/18/2010	7:04:22 AM	BCl3 valve closed
12/18/2010	7:04:22 AM	PH3 valve closed
12/18/2010	7:04:22 AM	SiCl4 pre valve closed
12/18/2010	7:04:22 AM	SiCl4 post valve closed
12/18/2010	7:04:22 AM	Bubbler valve closed
12/18/2010	7:04:22 AM	Main Vac valve opened
12/18/2010	7:04:22 AM	Bypass valve opened
12/18/2010	7:04:22 AM	Helium MFC set to  0.000000
12/18/2010	7:04:22 AM	H2 MFC set to  0.000000
12/18/2010	7:04:22 AM	BCl3 MFC set to  0.000000
12/18/2010	7:04:22 AM	PHl3 MFC set to  0.000000
12/18/2010	7:04:22 AM	SiCl4 MFC set to  0.000000
12/18/2010	7:04:22 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	7:04:22 AM	Tube furnace set to 0
12/18/2010	7:05:22 AM	H2 valve closed
12/18/2010	7:05:22 AM	BCl3 valve closed
12/18/2010	7:05:22 AM	PH3 valve closed
12/18/2010	7:05:22 AM	SiCl4 pre valve closed
12/18/2010	7:05:22 AM	SiCl4 post valve closed
12/18/2010	7:05:22 AM	Bubbler valve closed
12/18/2010	7:05:22 AM	Helium valve opened
12/18/2010	7:05:22 AM	Main Vac valve opened
12/18/2010	7:05:22 AM	Bypass valve opened
12/18/2010	7:05:22 AM	Helium MFC set to  100.000000
12/18/2010	7:05:22 AM	H2 MFC set to  0.000000
12/18/2010	7:05:22 AM	BCl3 MFC set to  0.000000
12/18/2010	7:05:22 AM	PHl3 MFC set to  0.000000
12/18/2010	7:05:22 AM	SiCl4 MFC set to  0.000000
12/18/2010	7:05:22 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	7:05:22 AM	Tube furnace set to 0
12/18/2010	7:06:22 AM	Helium valve closed
12/18/2010	7:06:22 AM	H2 valve closed
12/18/2010	7:06:22 AM	BCl3 valve closed
12/18/2010	7:06:22 AM	PH3 valve closed
12/18/2010	7:06:22 AM	SiCl4 pre valve closed
12/18/2010	7:06:22 AM	SiCl4 post valve closed
12/18/2010	7:06:22 AM	Bubbler valve closed
12/18/2010	7:06:22 AM	Main Vac valve opened
12/18/2010	7:06:22 AM	Bypass valve opened
12/18/2010	7:06:22 AM	Helium MFC set to  0.000000
12/18/2010	7:06:22 AM	H2 MFC set to  0.000000
12/18/2010	7:06:22 AM	BCl3 MFC set to  0.000000
12/18/2010	7:06:22 AM	PHl3 MFC set to  0.000000
12/18/2010	7:06:22 AM	SiCl4 MFC set to  0.000000
12/18/2010	7:06:22 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	7:06:23 AM	Tube furnace set to 0
12/18/2010	7:06:24 AM	Run finished at 7:06 AM
12/18/2010	7:06:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	7:08:18 AM	Recipe started at 7:08 AM
12/18/2010	7:08:18 AM	Helium valve closed
12/18/2010	7:08:18 AM	BCl3 valve closed
12/18/2010	7:08:18 AM	PH3 valve closed
12/18/2010	7:08:18 AM	SiCl4 pre valve closed
12/18/2010	7:08:18 AM	SiCl4 post valve closed
12/18/2010	7:08:18 AM	Main Vac valve closed
12/18/2010	7:08:18 AM	Bypass valve closed
12/18/2010	7:08:18 AM	Bubbler valve closed
12/18/2010	7:08:18 AM	H2 valve opened
12/18/2010	7:08:18 AM	Helium MFC set to  0.000000
12/18/2010	7:08:18 AM	H2 MFC set to  500.000000
12/18/2010	7:08:18 AM	BCl3 MFC set to  0.000000
12/18/2010	7:08:18 AM	PHl3 MFC set to  0.000000
12/18/2010	7:08:18 AM	SiCl4 MFC set to  0.000000
12/18/2010	7:08:18 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	7:08:19 AM	Tube furnace set to 0
12/18/2010	7:09:36 AM	Helium valve closed
12/18/2010	7:09:36 AM	BCl3 valve closed
12/18/2010	7:09:36 AM	PH3 valve closed
12/18/2010	7:09:36 AM	SiCl4 pre valve closed
12/18/2010	7:09:36 AM	SiCl4 post valve closed
12/18/2010	7:09:36 AM	Main Vac valve closed
12/18/2010	7:09:36 AM	Bypass valve closed
12/18/2010	7:09:36 AM	H2 valve opened
12/18/2010	7:09:36 AM	Bubbler valve opened
12/18/2010	7:09:36 AM	Helium MFC set to  0.000000
12/18/2010	7:09:36 AM	H2 MFC set to  500.000000
12/18/2010	7:09:36 AM	BCl3 MFC set to  0.000000
12/18/2010	7:09:36 AM	PHl3 MFC set to  0.000000
12/18/2010	7:09:36 AM	SiCl4 MFC set to  0.000000
12/18/2010	7:09:36 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	7:09:36 AM	Tube furnace set to 1000
12/18/2010	7:29:36 AM	Helium valve closed
12/18/2010	7:29:36 AM	BCl3 valve closed
12/18/2010	7:29:36 AM	Main Vac valve closed
12/18/2010	7:29:36 AM	Bypass valve closed
12/18/2010	7:29:36 AM	H2 valve opened
12/18/2010	7:29:36 AM	PH3 valve opened
12/18/2010	7:29:36 AM	SiCl4 pre valve opened
12/18/2010	7:29:36 AM	SiCl4 post valve opened
12/18/2010	7:29:36 AM	Bubbler valve opened
12/18/2010	7:29:36 AM	Helium MFC set to  0.000000
12/18/2010	7:29:36 AM	H2 MFC set to  500.000000
12/18/2010	7:29:36 AM	BCl3 MFC set to  0.000000
12/18/2010	7:29:36 AM	PHl3 MFC set to  0.200000
12/18/2010	7:29:36 AM	SiCl4 MFC set to  50.000000
12/18/2010	7:29:36 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	7:29:36 AM	Tube furnace set to 1000
12/18/2010	7:46:36 AM	H2 valve closed
12/18/2010	7:46:36 AM	BCl3 valve closed
12/18/2010	7:46:36 AM	PH3 valve closed
12/18/2010	7:46:36 AM	SiCl4 pre valve closed
12/18/2010	7:46:36 AM	SiCl4 post valve closed
12/18/2010	7:46:36 AM	Main Vac valve closed
12/18/2010	7:46:36 AM	Bypass valve closed
12/18/2010	7:46:36 AM	Helium valve opened
12/18/2010	7:46:36 AM	Bubbler valve opened
12/18/2010	7:46:36 AM	Helium MFC set to  500.000000
12/18/2010	7:46:36 AM	H2 MFC set to  0.000000
12/18/2010	7:46:36 AM	BCl3 MFC set to  0.000000
12/18/2010	7:46:36 AM	PHl3 MFC set to  0.000000
12/18/2010	7:46:36 AM	SiCl4 MFC set to  0.000000
12/18/2010	7:46:36 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	7:46:37 AM	Tube furnace set to 0
12/18/2010	8:06:36 AM	Helium valve closed
12/18/2010	8:06:36 AM	H2 valve closed
12/18/2010	8:06:36 AM	BCl3 valve closed
12/18/2010	8:06:37 AM	PH3 valve closed
12/18/2010	8:06:37 AM	SiCl4 pre valve closed
12/18/2010	8:06:37 AM	SiCl4 post valve closed
12/18/2010	8:06:37 AM	Main Vac valve closed
12/18/2010	8:06:37 AM	Bypass valve closed
12/18/2010	8:06:37 AM	Bubbler valve closed
12/18/2010	8:06:37 AM	Helium MFC set to  0.000000
12/18/2010	8:06:37 AM	H2 MFC set to  0.000000
12/18/2010	8:06:37 AM	BCl3 MFC set to  0.000000
12/18/2010	8:06:37 AM	PHl3 MFC set to  0.000000
12/18/2010	8:06:37 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:06:37 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:06:37 AM	Tube furnace set to 0
12/18/2010	8:06:37 AM	Run finished at 8:06 AM
12/18/2010	8:14:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/18/2010	8:14:14 AM	Recipe started at 8:14 AM
12/18/2010	8:14:14 AM	H2 valve closed
12/18/2010	8:14:14 AM	BCl3 valve closed
12/18/2010	8:14:14 AM	PH3 valve closed
12/18/2010	8:14:14 AM	SiCl4 pre valve closed
12/18/2010	8:14:14 AM	SiCl4 post valve closed
12/18/2010	8:14:14 AM	Main Vac valve closed
12/18/2010	8:14:14 AM	Bypass valve closed
12/18/2010	8:14:14 AM	Bubbler valve closed
12/18/2010	8:14:14 AM	Helium valve opened
12/18/2010	8:14:14 AM	Helium MFC set to  500.000000
12/18/2010	8:14:14 AM	H2 MFC set to  0.000000
12/18/2010	8:14:14 AM	BCl3 MFC set to  0.000000
12/18/2010	8:14:14 AM	PHl3 MFC set to  0.000000
12/18/2010	8:14:14 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:14:14 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:14:15 AM	Tube furnace set to 0
12/18/2010	8:14:18 AM	Helium valve closed
12/18/2010	8:14:18 AM	H2 valve closed
12/18/2010	8:14:18 AM	BCl3 valve closed
12/18/2010	8:14:18 AM	PH3 valve closed
12/18/2010	8:14:18 AM	SiCl4 pre valve closed
12/18/2010	8:14:18 AM	SiCl4 post valve closed
12/18/2010	8:14:18 AM	Main Vac valve closed
12/18/2010	8:14:18 AM	Bypass valve closed
12/18/2010	8:14:18 AM	Bubbler valve closed
12/18/2010	8:14:18 AM	Helium MFC set to  0.000000
12/18/2010	8:14:18 AM	H2 MFC set to  0.000000
12/18/2010	8:14:18 AM	BCl3 MFC set to  0.000000
12/18/2010	8:14:18 AM	PHl3 MFC set to  0.000000
12/18/2010	8:14:18 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:14:18 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:14:19 AM	Tube furnace set to 0
12/18/2010	8:14:19 AM	Run finished at 8:14 AM
12/18/2010	8:14:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/18/2010	8:22:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2010	8:22:55 AM	Recipe started at 8:22 AM
12/18/2010	8:22:55 AM	Helium valve closed
12/18/2010	8:22:55 AM	H2 valve closed
12/18/2010	8:22:55 AM	BCl3 valve closed
12/18/2010	8:22:55 AM	PH3 valve closed
12/18/2010	8:22:55 AM	SiCl4 pre valve closed
12/18/2010	8:22:55 AM	SiCl4 post valve closed
12/18/2010	8:22:55 AM	Main Vac valve closed
12/18/2010	8:22:55 AM	Bubbler valve closed
12/18/2010	8:22:55 AM	Bypass valve opened
12/18/2010	8:22:55 AM	Helium MFC set to  0.000000
12/18/2010	8:22:55 AM	H2 MFC set to  0.000000
12/18/2010	8:22:55 AM	BCl3 MFC set to  0.000000
12/18/2010	8:22:55 AM	PHl3 MFC set to  0.000000
12/18/2010	8:22:55 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:22:55 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:22:55 AM	Tube furnace set to 0
12/18/2010	8:23:53 AM	Helium valve closed
12/18/2010	8:23:53 AM	H2 valve closed
12/18/2010	8:23:53 AM	BCl3 valve closed
12/18/2010	8:23:53 AM	PH3 valve closed
12/18/2010	8:23:53 AM	SiCl4 pre valve closed
12/18/2010	8:23:53 AM	SiCl4 post valve closed
12/18/2010	8:23:53 AM	Bubbler valve closed
12/18/2010	8:23:53 AM	Main Vac valve opened
12/18/2010	8:23:53 AM	Bypass valve opened
12/18/2010	8:23:53 AM	Helium MFC set to  0.000000
12/18/2010	8:23:53 AM	H2 MFC set to  0.000000
12/18/2010	8:23:53 AM	BCl3 MFC set to  0.000000
12/18/2010	8:23:53 AM	PHl3 MFC set to  0.000000
12/18/2010	8:23:53 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:23:53 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:23:53 AM	Tube furnace set to 0
12/18/2010	8:23:53 AM	Run finished at 8:23 AM
12/18/2010	8:23:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2010	8:25:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	8:25:24 AM	Recipe started at 8:25 AM
12/18/2010	8:25:24 AM	Helium valve closed
12/18/2010	8:25:24 AM	H2 valve closed
12/18/2010	8:25:24 AM	BCl3 valve closed
12/18/2010	8:25:24 AM	PH3 valve closed
12/18/2010	8:25:24 AM	SiCl4 pre valve closed
12/18/2010	8:25:24 AM	SiCl4 post valve closed
12/18/2010	8:25:24 AM	Main Vac valve closed
12/18/2010	8:25:24 AM	Bubbler valve closed
12/18/2010	8:25:24 AM	Bypass valve opened
12/18/2010	8:25:24 AM	Helium MFC set to  0.000000
12/18/2010	8:25:24 AM	H2 MFC set to  0.000000
12/18/2010	8:25:24 AM	BCl3 MFC set to  0.000000
12/18/2010	8:25:24 AM	PHl3 MFC set to  0.000000
12/18/2010	8:25:24 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:25:24 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:25:24 AM	Tube furnace set to 0
12/18/2010	8:25:24 AM	Helium valve closed
12/18/2010	8:25:24 AM	H2 valve closed
12/18/2010	8:25:24 AM	BCl3 valve closed
12/18/2010	8:25:24 AM	PH3 valve closed
12/18/2010	8:25:24 AM	SiCl4 pre valve closed
12/18/2010	8:25:24 AM	SiCl4 post valve closed
12/18/2010	8:25:24 AM	Bubbler valve closed
12/18/2010	8:25:24 AM	Main Vac valve opened
12/18/2010	8:25:24 AM	Bypass valve opened
12/18/2010	8:25:24 AM	Helium MFC set to  0.000000
12/18/2010	8:25:24 AM	H2 MFC set to  0.000000
12/18/2010	8:25:24 AM	BCl3 MFC set to  0.000000
12/18/2010	8:25:24 AM	PHl3 MFC set to  0.000000
12/18/2010	8:25:24 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:25:24 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:25:24 AM	Tube furnace set to 0
12/18/2010	8:26:24 AM	H2 valve closed
12/18/2010	8:26:24 AM	BCl3 valve closed
12/18/2010	8:26:24 AM	PH3 valve closed
12/18/2010	8:26:24 AM	SiCl4 pre valve closed
12/18/2010	8:26:24 AM	SiCl4 post valve closed
12/18/2010	8:26:24 AM	Bubbler valve closed
12/18/2010	8:26:24 AM	Helium valve opened
12/18/2010	8:26:24 AM	Main Vac valve opened
12/18/2010	8:26:24 AM	Bypass valve opened
12/18/2010	8:26:24 AM	Helium MFC set to  100.000000
12/18/2010	8:26:24 AM	H2 MFC set to  0.000000
12/18/2010	8:26:24 AM	BCl3 MFC set to  0.000000
12/18/2010	8:26:24 AM	PHl3 MFC set to  0.000000
12/18/2010	8:26:24 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:26:24 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:26:24 AM	Tube furnace set to 0
12/18/2010	8:27:24 AM	Helium valve closed
12/18/2010	8:27:24 AM	H2 valve closed
12/18/2010	8:27:24 AM	BCl3 valve closed
12/18/2010	8:27:24 AM	PH3 valve closed
12/18/2010	8:27:24 AM	SiCl4 pre valve closed
12/18/2010	8:27:24 AM	SiCl4 post valve closed
12/18/2010	8:27:24 AM	Bubbler valve closed
12/18/2010	8:27:24 AM	Main Vac valve opened
12/18/2010	8:27:24 AM	Bypass valve opened
12/18/2010	8:27:24 AM	Helium MFC set to  0.000000
12/18/2010	8:27:24 AM	H2 MFC set to  0.000000
12/18/2010	8:27:24 AM	BCl3 MFC set to  0.000000
12/18/2010	8:27:24 AM	PHl3 MFC set to  0.000000
12/18/2010	8:27:24 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:27:24 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:27:25 AM	Tube furnace set to 0
12/18/2010	8:28:25 AM	H2 valve closed
12/18/2010	8:28:25 AM	BCl3 valve closed
12/18/2010	8:28:25 AM	PH3 valve closed
12/18/2010	8:28:25 AM	SiCl4 pre valve closed
12/18/2010	8:28:25 AM	SiCl4 post valve closed
12/18/2010	8:28:25 AM	Bubbler valve closed
12/18/2010	8:28:25 AM	Helium valve opened
12/18/2010	8:28:25 AM	Main Vac valve opened
12/18/2010	8:28:25 AM	Bypass valve opened
12/18/2010	8:28:25 AM	Helium MFC set to  100.000000
12/18/2010	8:28:25 AM	H2 MFC set to  0.000000
12/18/2010	8:28:25 AM	BCl3 MFC set to  0.000000
12/18/2010	8:28:25 AM	PHl3 MFC set to  0.000000
12/18/2010	8:28:25 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:28:25 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:28:25 AM	Tube furnace set to 0
12/18/2010	8:29:25 AM	Helium valve closed
12/18/2010	8:29:25 AM	H2 valve closed
12/18/2010	8:29:25 AM	BCl3 valve closed
12/18/2010	8:29:25 AM	PH3 valve closed
12/18/2010	8:29:25 AM	SiCl4 pre valve closed
12/18/2010	8:29:25 AM	SiCl4 post valve closed
12/18/2010	8:29:25 AM	Bubbler valve closed
12/18/2010	8:29:25 AM	Main Vac valve opened
12/18/2010	8:29:25 AM	Bypass valve opened
12/18/2010	8:29:25 AM	Helium MFC set to  0.000000
12/18/2010	8:29:25 AM	H2 MFC set to  0.000000
12/18/2010	8:29:25 AM	BCl3 MFC set to  0.000000
12/18/2010	8:29:25 AM	PHl3 MFC set to  0.000000
12/18/2010	8:29:25 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:29:25 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:29:25 AM	Tube furnace set to 0
12/18/2010	8:30:25 AM	H2 valve closed
12/18/2010	8:30:25 AM	BCl3 valve closed
12/18/2010	8:30:25 AM	PH3 valve closed
12/18/2010	8:30:25 AM	SiCl4 pre valve closed
12/18/2010	8:30:25 AM	SiCl4 post valve closed
12/18/2010	8:30:25 AM	Bubbler valve closed
12/18/2010	8:30:25 AM	Helium valve opened
12/18/2010	8:30:25 AM	Main Vac valve opened
12/18/2010	8:30:25 AM	Bypass valve opened
12/18/2010	8:30:25 AM	Helium MFC set to  100.000000
12/18/2010	8:30:25 AM	H2 MFC set to  0.000000
12/18/2010	8:30:25 AM	BCl3 MFC set to  0.000000
12/18/2010	8:30:25 AM	PHl3 MFC set to  0.000000
12/18/2010	8:30:25 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:30:25 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:30:25 AM	Tube furnace set to 0
12/18/2010	8:31:25 AM	Helium valve closed
12/18/2010	8:31:25 AM	H2 valve closed
12/18/2010	8:31:25 AM	BCl3 valve closed
12/18/2010	8:31:25 AM	PH3 valve closed
12/18/2010	8:31:25 AM	SiCl4 pre valve closed
12/18/2010	8:31:25 AM	SiCl4 post valve closed
12/18/2010	8:31:25 AM	Bubbler valve closed
12/18/2010	8:31:25 AM	Main Vac valve opened
12/18/2010	8:31:25 AM	Bypass valve opened
12/18/2010	8:31:25 AM	Helium MFC set to  0.000000
12/18/2010	8:31:25 AM	H2 MFC set to  0.000000
12/18/2010	8:31:25 AM	BCl3 MFC set to  0.000000
12/18/2010	8:31:25 AM	PHl3 MFC set to  0.000000
12/18/2010	8:31:25 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:31:25 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:31:25 AM	Tube furnace set to 0
12/18/2010	8:32:25 AM	H2 valve closed
12/18/2010	8:32:25 AM	BCl3 valve closed
12/18/2010	8:32:25 AM	PH3 valve closed
12/18/2010	8:32:25 AM	SiCl4 pre valve closed
12/18/2010	8:32:25 AM	SiCl4 post valve closed
12/18/2010	8:32:25 AM	Bubbler valve closed
12/18/2010	8:32:25 AM	Helium valve opened
12/18/2010	8:32:25 AM	Main Vac valve opened
12/18/2010	8:32:25 AM	Bypass valve opened
12/18/2010	8:32:25 AM	Helium MFC set to  100.000000
12/18/2010	8:32:25 AM	H2 MFC set to  0.000000
12/18/2010	8:32:25 AM	BCl3 MFC set to  0.000000
12/18/2010	8:32:25 AM	PHl3 MFC set to  0.000000
12/18/2010	8:32:25 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:32:25 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:32:26 AM	Tube furnace set to 0
12/18/2010	8:33:26 AM	Helium valve closed
12/18/2010	8:33:26 AM	H2 valve closed
12/18/2010	8:33:26 AM	BCl3 valve closed
12/18/2010	8:33:26 AM	PH3 valve closed
12/18/2010	8:33:26 AM	SiCl4 pre valve closed
12/18/2010	8:33:26 AM	SiCl4 post valve closed
12/18/2010	8:33:26 AM	Bubbler valve closed
12/18/2010	8:33:26 AM	Main Vac valve opened
12/18/2010	8:33:26 AM	Bypass valve opened
12/18/2010	8:33:26 AM	Helium MFC set to  0.000000
12/18/2010	8:33:26 AM	H2 MFC set to  0.000000
12/18/2010	8:33:26 AM	BCl3 MFC set to  0.000000
12/18/2010	8:33:26 AM	PHl3 MFC set to  0.000000
12/18/2010	8:33:26 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:33:26 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:33:26 AM	Tube furnace set to 0
12/18/2010	8:34:26 AM	H2 valve closed
12/18/2010	8:34:26 AM	BCl3 valve closed
12/18/2010	8:34:26 AM	PH3 valve closed
12/18/2010	8:34:26 AM	SiCl4 pre valve closed
12/18/2010	8:34:26 AM	SiCl4 post valve closed
12/18/2010	8:34:26 AM	Bubbler valve closed
12/18/2010	8:34:26 AM	Helium valve opened
12/18/2010	8:34:26 AM	Main Vac valve opened
12/18/2010	8:34:26 AM	Bypass valve opened
12/18/2010	8:34:26 AM	Helium MFC set to  100.000000
12/18/2010	8:34:26 AM	H2 MFC set to  0.000000
12/18/2010	8:34:26 AM	BCl3 MFC set to  0.000000
12/18/2010	8:34:26 AM	PHl3 MFC set to  0.000000
12/18/2010	8:34:26 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:34:26 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:34:26 AM	Tube furnace set to 0
12/18/2010	8:35:26 AM	Helium valve closed
12/18/2010	8:35:26 AM	H2 valve closed
12/18/2010	8:35:26 AM	BCl3 valve closed
12/18/2010	8:35:26 AM	PH3 valve closed
12/18/2010	8:35:26 AM	SiCl4 pre valve closed
12/18/2010	8:35:26 AM	SiCl4 post valve closed
12/18/2010	8:35:26 AM	Bubbler valve closed
12/18/2010	8:35:26 AM	Main Vac valve opened
12/18/2010	8:35:26 AM	Bypass valve opened
12/18/2010	8:35:26 AM	Helium MFC set to  0.000000
12/18/2010	8:35:26 AM	H2 MFC set to  0.000000
12/18/2010	8:35:26 AM	BCl3 MFC set to  0.000000
12/18/2010	8:35:26 AM	PHl3 MFC set to  0.000000
12/18/2010	8:35:26 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:35:26 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:35:26 AM	Tube furnace set to 0
12/18/2010	8:36:26 AM	H2 valve closed
12/18/2010	8:36:26 AM	BCl3 valve closed
12/18/2010	8:36:26 AM	PH3 valve closed
12/18/2010	8:36:26 AM	SiCl4 pre valve closed
12/18/2010	8:36:26 AM	SiCl4 post valve closed
12/18/2010	8:36:26 AM	Bubbler valve closed
12/18/2010	8:36:26 AM	Helium valve opened
12/18/2010	8:36:26 AM	Main Vac valve opened
12/18/2010	8:36:26 AM	Bypass valve opened
12/18/2010	8:36:26 AM	Helium MFC set to  100.000000
12/18/2010	8:36:26 AM	H2 MFC set to  0.000000
12/18/2010	8:36:26 AM	BCl3 MFC set to  0.000000
12/18/2010	8:36:26 AM	PHl3 MFC set to  0.000000
12/18/2010	8:36:26 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:36:26 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:36:26 AM	Tube furnace set to 0
12/18/2010	8:37:26 AM	Helium valve closed
12/18/2010	8:37:26 AM	H2 valve closed
12/18/2010	8:37:26 AM	BCl3 valve closed
12/18/2010	8:37:26 AM	PH3 valve closed
12/18/2010	8:37:26 AM	SiCl4 pre valve closed
12/18/2010	8:37:26 AM	SiCl4 post valve closed
12/18/2010	8:37:26 AM	Bubbler valve closed
12/18/2010	8:37:26 AM	Main Vac valve opened
12/18/2010	8:37:26 AM	Bypass valve opened
12/18/2010	8:37:26 AM	Helium MFC set to  0.000000
12/18/2010	8:37:26 AM	H2 MFC set to  0.000000
12/18/2010	8:37:26 AM	BCl3 MFC set to  0.000000
12/18/2010	8:37:26 AM	PHl3 MFC set to  0.000000
12/18/2010	8:37:26 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:37:26 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:37:27 AM	Tube furnace set to 0
12/18/2010	8:38:27 AM	H2 valve closed
12/18/2010	8:38:27 AM	BCl3 valve closed
12/18/2010	8:38:27 AM	PH3 valve closed
12/18/2010	8:38:27 AM	SiCl4 pre valve closed
12/18/2010	8:38:27 AM	SiCl4 post valve closed
12/18/2010	8:38:27 AM	Bubbler valve closed
12/18/2010	8:38:27 AM	Helium valve opened
12/18/2010	8:38:27 AM	Main Vac valve opened
12/18/2010	8:38:27 AM	Bypass valve opened
12/18/2010	8:38:27 AM	Helium MFC set to  100.000000
12/18/2010	8:38:27 AM	H2 MFC set to  0.000000
12/18/2010	8:38:27 AM	BCl3 MFC set to  0.000000
12/18/2010	8:38:27 AM	PHl3 MFC set to  0.000000
12/18/2010	8:38:27 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:38:27 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:38:27 AM	Tube furnace set to 0
12/18/2010	8:39:27 AM	Helium valve closed
12/18/2010	8:39:27 AM	H2 valve closed
12/18/2010	8:39:27 AM	BCl3 valve closed
12/18/2010	8:39:27 AM	PH3 valve closed
12/18/2010	8:39:27 AM	SiCl4 pre valve closed
12/18/2010	8:39:27 AM	SiCl4 post valve closed
12/18/2010	8:39:27 AM	Bubbler valve closed
12/18/2010	8:39:27 AM	Main Vac valve opened
12/18/2010	8:39:27 AM	Bypass valve opened
12/18/2010	8:39:27 AM	Helium MFC set to  0.000000
12/18/2010	8:39:27 AM	H2 MFC set to  0.000000
12/18/2010	8:39:27 AM	BCl3 MFC set to  0.000000
12/18/2010	8:39:27 AM	PHl3 MFC set to  0.000000
12/18/2010	8:39:27 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:39:27 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:39:27 AM	Tube furnace set to 0
12/18/2010	8:40:27 AM	H2 valve closed
12/18/2010	8:40:27 AM	BCl3 valve closed
12/18/2010	8:40:27 AM	PH3 valve closed
12/18/2010	8:40:27 AM	SiCl4 pre valve closed
12/18/2010	8:40:27 AM	SiCl4 post valve closed
12/18/2010	8:40:27 AM	Bubbler valve closed
12/18/2010	8:40:27 AM	Helium valve opened
12/18/2010	8:40:27 AM	Main Vac valve opened
12/18/2010	8:40:27 AM	Bypass valve opened
12/18/2010	8:40:27 AM	Helium MFC set to  100.000000
12/18/2010	8:40:27 AM	H2 MFC set to  0.000000
12/18/2010	8:40:27 AM	BCl3 MFC set to  0.000000
12/18/2010	8:40:27 AM	PHl3 MFC set to  0.000000
12/18/2010	8:40:27 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:40:27 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:40:27 AM	Tube furnace set to 0
12/18/2010	8:41:27 AM	Helium valve closed
12/18/2010	8:41:27 AM	H2 valve closed
12/18/2010	8:41:27 AM	BCl3 valve closed
12/18/2010	8:41:27 AM	PH3 valve closed
12/18/2010	8:41:27 AM	SiCl4 pre valve closed
12/18/2010	8:41:27 AM	SiCl4 post valve closed
12/18/2010	8:41:27 AM	Bubbler valve closed
12/18/2010	8:41:27 AM	Main Vac valve opened
12/18/2010	8:41:27 AM	Bypass valve opened
12/18/2010	8:41:27 AM	Helium MFC set to  0.000000
12/18/2010	8:41:27 AM	H2 MFC set to  0.000000
12/18/2010	8:41:27 AM	BCl3 MFC set to  0.000000
12/18/2010	8:41:27 AM	PHl3 MFC set to  0.000000
12/18/2010	8:41:27 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:41:27 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:41:27 AM	Tube furnace set to 0
12/18/2010	8:42:27 AM	H2 valve closed
12/18/2010	8:42:27 AM	BCl3 valve closed
12/18/2010	8:42:27 AM	PH3 valve closed
12/18/2010	8:42:27 AM	SiCl4 pre valve closed
12/18/2010	8:42:27 AM	SiCl4 post valve closed
12/18/2010	8:42:27 AM	Bubbler valve closed
12/18/2010	8:42:27 AM	Helium valve opened
12/18/2010	8:42:27 AM	Main Vac valve opened
12/18/2010	8:42:27 AM	Bypass valve opened
12/18/2010	8:42:27 AM	Helium MFC set to  100.000000
12/18/2010	8:42:27 AM	H2 MFC set to  0.000000
12/18/2010	8:42:27 AM	BCl3 MFC set to  0.000000
12/18/2010	8:42:27 AM	PHl3 MFC set to  0.000000
12/18/2010	8:42:27 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:42:27 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:42:28 AM	Tube furnace set to 0
12/18/2010	8:43:28 AM	Helium valve closed
12/18/2010	8:43:28 AM	H2 valve closed
12/18/2010	8:43:28 AM	BCl3 valve closed
12/18/2010	8:43:28 AM	PH3 valve closed
12/18/2010	8:43:28 AM	SiCl4 pre valve closed
12/18/2010	8:43:28 AM	SiCl4 post valve closed
12/18/2010	8:43:28 AM	Bubbler valve closed
12/18/2010	8:43:28 AM	Main Vac valve opened
12/18/2010	8:43:28 AM	Bypass valve opened
12/18/2010	8:43:28 AM	Helium MFC set to  0.000000
12/18/2010	8:43:28 AM	H2 MFC set to  0.000000
12/18/2010	8:43:28 AM	BCl3 MFC set to  0.000000
12/18/2010	8:43:28 AM	PHl3 MFC set to  0.000000
12/18/2010	8:43:28 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:43:28 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:43:28 AM	Tube furnace set to 0
12/18/2010	8:44:28 AM	H2 valve closed
12/18/2010	8:44:28 AM	BCl3 valve closed
12/18/2010	8:44:28 AM	PH3 valve closed
12/18/2010	8:44:28 AM	SiCl4 pre valve closed
12/18/2010	8:44:28 AM	SiCl4 post valve closed
12/18/2010	8:44:28 AM	Bubbler valve closed
12/18/2010	8:44:28 AM	Helium valve opened
12/18/2010	8:44:28 AM	Main Vac valve opened
12/18/2010	8:44:28 AM	Bypass valve opened
12/18/2010	8:44:28 AM	Helium MFC set to  100.000000
12/18/2010	8:44:28 AM	H2 MFC set to  0.000000
12/18/2010	8:44:28 AM	BCl3 MFC set to  0.000000
12/18/2010	8:44:28 AM	PHl3 MFC set to  0.000000
12/18/2010	8:44:28 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:44:28 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:44:28 AM	Tube furnace set to 0
12/18/2010	8:45:28 AM	Helium valve closed
12/18/2010	8:45:28 AM	H2 valve closed
12/18/2010	8:45:28 AM	BCl3 valve closed
12/18/2010	8:45:28 AM	PH3 valve closed
12/18/2010	8:45:28 AM	SiCl4 pre valve closed
12/18/2010	8:45:28 AM	SiCl4 post valve closed
12/18/2010	8:45:28 AM	Bubbler valve closed
12/18/2010	8:45:28 AM	Main Vac valve opened
12/18/2010	8:45:28 AM	Bypass valve opened
12/18/2010	8:45:28 AM	Helium MFC set to  0.000000
12/18/2010	8:45:28 AM	H2 MFC set to  0.000000
12/18/2010	8:45:28 AM	BCl3 MFC set to  0.000000
12/18/2010	8:45:28 AM	PHl3 MFC set to  0.000000
12/18/2010	8:45:28 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:45:28 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:45:28 AM	Tube furnace set to 0
12/18/2010	8:45:29 AM	Run finished at 8:45 AM
12/18/2010	8:45:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	8:46:44 AM	Bypass valve closed
12/18/2010	8:46:45 AM	Main Vac valve closed
12/18/2010	8:47:05 AM	Main Vac valve opened
12/18/2010	8:47:06 AM	Bypass valve opened
12/18/2010	8:47:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	8:47:30 AM	Recipe started at 8:47 AM
12/18/2010	8:47:30 AM	Helium valve closed
12/18/2010	8:47:30 AM	H2 valve closed
12/18/2010	8:47:30 AM	BCl3 valve closed
12/18/2010	8:47:30 AM	PH3 valve closed
12/18/2010	8:47:30 AM	SiCl4 pre valve closed
12/18/2010	8:47:30 AM	SiCl4 post valve closed
12/18/2010	8:47:30 AM	Main Vac valve closed
12/18/2010	8:47:30 AM	Bubbler valve closed
12/18/2010	8:47:30 AM	Bypass valve opened
12/18/2010	8:47:30 AM	Helium MFC set to  0.000000
12/18/2010	8:47:30 AM	H2 MFC set to  0.000000
12/18/2010	8:47:30 AM	BCl3 MFC set to  0.000000
12/18/2010	8:47:30 AM	PHl3 MFC set to  0.000000
12/18/2010	8:47:30 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:47:30 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:47:30 AM	Tube furnace set to 0
12/18/2010	8:47:31 AM	Helium valve closed
12/18/2010	8:47:31 AM	H2 valve closed
12/18/2010	8:47:31 AM	BCl3 valve closed
12/18/2010	8:47:31 AM	PH3 valve closed
12/18/2010	8:47:31 AM	SiCl4 pre valve closed
12/18/2010	8:47:31 AM	SiCl4 post valve closed
12/18/2010	8:47:31 AM	Bubbler valve closed
12/18/2010	8:47:31 AM	Main Vac valve opened
12/18/2010	8:47:31 AM	Bypass valve opened
12/18/2010	8:47:31 AM	Helium MFC set to  0.000000
12/18/2010	8:47:31 AM	H2 MFC set to  0.000000
12/18/2010	8:47:31 AM	BCl3 MFC set to  0.000000
12/18/2010	8:47:31 AM	PHl3 MFC set to  0.000000
12/18/2010	8:47:31 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:47:31 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:47:31 AM	Tube furnace set to 0
12/18/2010	8:48:31 AM	H2 valve closed
12/18/2010	8:48:31 AM	BCl3 valve closed
12/18/2010	8:48:31 AM	PH3 valve closed
12/18/2010	8:48:31 AM	SiCl4 pre valve closed
12/18/2010	8:48:31 AM	SiCl4 post valve closed
12/18/2010	8:48:31 AM	Bubbler valve closed
12/18/2010	8:48:31 AM	Helium valve opened
12/18/2010	8:48:31 AM	Main Vac valve opened
12/18/2010	8:48:31 AM	Bypass valve opened
12/18/2010	8:48:31 AM	Helium MFC set to  100.000000
12/18/2010	8:48:31 AM	H2 MFC set to  0.000000
12/18/2010	8:48:31 AM	BCl3 MFC set to  0.000000
12/18/2010	8:48:31 AM	PHl3 MFC set to  0.000000
12/18/2010	8:48:31 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:48:31 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:48:31 AM	Tube furnace set to 0
12/18/2010	8:49:31 AM	Helium valve closed
12/18/2010	8:49:31 AM	H2 valve closed
12/18/2010	8:49:31 AM	BCl3 valve closed
12/18/2010	8:49:31 AM	PH3 valve closed
12/18/2010	8:49:31 AM	SiCl4 pre valve closed
12/18/2010	8:49:31 AM	SiCl4 post valve closed
12/18/2010	8:49:31 AM	Bubbler valve closed
12/18/2010	8:49:31 AM	Main Vac valve opened
12/18/2010	8:49:31 AM	Bypass valve opened
12/18/2010	8:49:31 AM	Helium MFC set to  0.000000
12/18/2010	8:49:31 AM	H2 MFC set to  0.000000
12/18/2010	8:49:31 AM	BCl3 MFC set to  0.000000
12/18/2010	8:49:31 AM	PHl3 MFC set to  0.000000
12/18/2010	8:49:31 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:49:31 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:49:31 AM	Tube furnace set to 0
12/18/2010	8:50:31 AM	H2 valve closed
12/18/2010	8:50:31 AM	BCl3 valve closed
12/18/2010	8:50:31 AM	PH3 valve closed
12/18/2010	8:50:31 AM	SiCl4 pre valve closed
12/18/2010	8:50:31 AM	SiCl4 post valve closed
12/18/2010	8:50:31 AM	Bubbler valve closed
12/18/2010	8:50:31 AM	Helium valve opened
12/18/2010	8:50:31 AM	Main Vac valve opened
12/18/2010	8:50:31 AM	Bypass valve opened
12/18/2010	8:50:31 AM	Helium MFC set to  100.000000
12/18/2010	8:50:31 AM	H2 MFC set to  0.000000
12/18/2010	8:50:31 AM	BCl3 MFC set to  0.000000
12/18/2010	8:50:31 AM	PHl3 MFC set to  0.000000
12/18/2010	8:50:31 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:50:31 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:50:31 AM	Tube furnace set to 0
12/18/2010	8:51:31 AM	Helium valve closed
12/18/2010	8:51:31 AM	H2 valve closed
12/18/2010	8:51:31 AM	BCl3 valve closed
12/18/2010	8:51:31 AM	PH3 valve closed
12/18/2010	8:51:31 AM	SiCl4 pre valve closed
12/18/2010	8:51:31 AM	SiCl4 post valve closed
12/18/2010	8:51:31 AM	Bubbler valve closed
12/18/2010	8:51:31 AM	Main Vac valve opened
12/18/2010	8:51:31 AM	Bypass valve opened
12/18/2010	8:51:31 AM	Helium MFC set to  0.000000
12/18/2010	8:51:31 AM	H2 MFC set to  0.000000
12/18/2010	8:51:31 AM	BCl3 MFC set to  0.000000
12/18/2010	8:51:31 AM	PHl3 MFC set to  0.000000
12/18/2010	8:51:31 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:51:31 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:51:31 AM	Tube furnace set to 0
12/18/2010	8:52:31 AM	H2 valve closed
12/18/2010	8:52:31 AM	BCl3 valve closed
12/18/2010	8:52:31 AM	PH3 valve closed
12/18/2010	8:52:31 AM	SiCl4 pre valve closed
12/18/2010	8:52:31 AM	SiCl4 post valve closed
12/18/2010	8:52:31 AM	Bubbler valve closed
12/18/2010	8:52:32 AM	Helium valve opened
12/18/2010	8:52:32 AM	Main Vac valve opened
12/18/2010	8:52:32 AM	Bypass valve opened
12/18/2010	8:52:32 AM	Helium MFC set to  100.000000
12/18/2010	8:52:32 AM	H2 MFC set to  0.000000
12/18/2010	8:52:32 AM	BCl3 MFC set to  0.000000
12/18/2010	8:52:32 AM	PHl3 MFC set to  0.000000
12/18/2010	8:52:32 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:52:32 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:52:32 AM	Tube furnace set to 0
12/18/2010	8:53:32 AM	Helium valve closed
12/18/2010	8:53:32 AM	H2 valve closed
12/18/2010	8:53:32 AM	BCl3 valve closed
12/18/2010	8:53:32 AM	PH3 valve closed
12/18/2010	8:53:32 AM	SiCl4 pre valve closed
12/18/2010	8:53:32 AM	SiCl4 post valve closed
12/18/2010	8:53:32 AM	Bubbler valve closed
12/18/2010	8:53:32 AM	Main Vac valve opened
12/18/2010	8:53:32 AM	Bypass valve opened
12/18/2010	8:53:32 AM	Helium MFC set to  0.000000
12/18/2010	8:53:32 AM	H2 MFC set to  0.000000
12/18/2010	8:53:32 AM	BCl3 MFC set to  0.000000
12/18/2010	8:53:32 AM	PHl3 MFC set to  0.000000
12/18/2010	8:53:32 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:53:32 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:53:32 AM	Tube furnace set to 0
12/18/2010	8:54:32 AM	H2 valve closed
12/18/2010	8:54:32 AM	BCl3 valve closed
12/18/2010	8:54:32 AM	PH3 valve closed
12/18/2010	8:54:32 AM	SiCl4 pre valve closed
12/18/2010	8:54:32 AM	SiCl4 post valve closed
12/18/2010	8:54:32 AM	Bubbler valve closed
12/18/2010	8:54:32 AM	Helium valve opened
12/18/2010	8:54:32 AM	Main Vac valve opened
12/18/2010	8:54:32 AM	Bypass valve opened
12/18/2010	8:54:32 AM	Helium MFC set to  100.000000
12/18/2010	8:54:32 AM	H2 MFC set to  0.000000
12/18/2010	8:54:32 AM	BCl3 MFC set to  0.000000
12/18/2010	8:54:32 AM	PHl3 MFC set to  0.000000
12/18/2010	8:54:32 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:54:32 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:54:32 AM	Tube furnace set to 0
12/18/2010	8:55:32 AM	Helium valve closed
12/18/2010	8:55:32 AM	H2 valve closed
12/18/2010	8:55:32 AM	BCl3 valve closed
12/18/2010	8:55:32 AM	PH3 valve closed
12/18/2010	8:55:32 AM	SiCl4 pre valve closed
12/18/2010	8:55:32 AM	SiCl4 post valve closed
12/18/2010	8:55:32 AM	Bubbler valve closed
12/18/2010	8:55:32 AM	Main Vac valve opened
12/18/2010	8:55:32 AM	Bypass valve opened
12/18/2010	8:55:32 AM	Helium MFC set to  0.000000
12/18/2010	8:55:32 AM	H2 MFC set to  0.000000
12/18/2010	8:55:32 AM	BCl3 MFC set to  0.000000
12/18/2010	8:55:32 AM	PHl3 MFC set to  0.000000
12/18/2010	8:55:32 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:55:32 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:55:32 AM	Tube furnace set to 0
12/18/2010	8:56:32 AM	H2 valve closed
12/18/2010	8:56:32 AM	BCl3 valve closed
12/18/2010	8:56:32 AM	PH3 valve closed
12/18/2010	8:56:32 AM	SiCl4 pre valve closed
12/18/2010	8:56:32 AM	SiCl4 post valve closed
12/18/2010	8:56:32 AM	Bubbler valve closed
12/18/2010	8:56:32 AM	Helium valve opened
12/18/2010	8:56:32 AM	Main Vac valve opened
12/18/2010	8:56:32 AM	Bypass valve opened
12/18/2010	8:56:32 AM	Helium MFC set to  100.000000
12/18/2010	8:56:32 AM	H2 MFC set to  0.000000
12/18/2010	8:56:32 AM	BCl3 MFC set to  0.000000
12/18/2010	8:56:32 AM	PHl3 MFC set to  0.000000
12/18/2010	8:56:32 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:56:32 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:56:32 AM	Tube furnace set to 0
12/18/2010	8:57:32 AM	Helium valve closed
12/18/2010	8:57:32 AM	H2 valve closed
12/18/2010	8:57:32 AM	BCl3 valve closed
12/18/2010	8:57:32 AM	PH3 valve closed
12/18/2010	8:57:32 AM	SiCl4 pre valve closed
12/18/2010	8:57:32 AM	SiCl4 post valve closed
12/18/2010	8:57:32 AM	Bubbler valve closed
12/18/2010	8:57:32 AM	Main Vac valve opened
12/18/2010	8:57:32 AM	Bypass valve opened
12/18/2010	8:57:32 AM	Helium MFC set to  0.000000
12/18/2010	8:57:32 AM	H2 MFC set to  0.000000
12/18/2010	8:57:32 AM	BCl3 MFC set to  0.000000
12/18/2010	8:57:32 AM	PHl3 MFC set to  0.000000
12/18/2010	8:57:32 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:57:32 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:57:33 AM	Tube furnace set to 0
12/18/2010	8:58:33 AM	H2 valve closed
12/18/2010	8:58:33 AM	BCl3 valve closed
12/18/2010	8:58:33 AM	PH3 valve closed
12/18/2010	8:58:33 AM	SiCl4 pre valve closed
12/18/2010	8:58:33 AM	SiCl4 post valve closed
12/18/2010	8:58:33 AM	Bubbler valve closed
12/18/2010	8:58:33 AM	Helium valve opened
12/18/2010	8:58:33 AM	Main Vac valve opened
12/18/2010	8:58:33 AM	Bypass valve opened
12/18/2010	8:58:33 AM	Helium MFC set to  100.000000
12/18/2010	8:58:33 AM	H2 MFC set to  0.000000
12/18/2010	8:58:33 AM	BCl3 MFC set to  0.000000
12/18/2010	8:58:33 AM	PHl3 MFC set to  0.000000
12/18/2010	8:58:33 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:58:33 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:58:33 AM	Tube furnace set to 0
12/18/2010	8:59:33 AM	Helium valve closed
12/18/2010	8:59:33 AM	H2 valve closed
12/18/2010	8:59:33 AM	BCl3 valve closed
12/18/2010	8:59:33 AM	PH3 valve closed
12/18/2010	8:59:33 AM	SiCl4 pre valve closed
12/18/2010	8:59:33 AM	SiCl4 post valve closed
12/18/2010	8:59:33 AM	Bubbler valve closed
12/18/2010	8:59:33 AM	Main Vac valve opened
12/18/2010	8:59:33 AM	Bypass valve opened
12/18/2010	8:59:33 AM	Helium MFC set to  0.000000
12/18/2010	8:59:33 AM	H2 MFC set to  0.000000
12/18/2010	8:59:33 AM	BCl3 MFC set to  0.000000
12/18/2010	8:59:33 AM	PHl3 MFC set to  0.000000
12/18/2010	8:59:33 AM	SiCl4 MFC set to  0.000000
12/18/2010	8:59:33 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	8:59:33 AM	Tube furnace set to 0
12/18/2010	9:00:33 AM	H2 valve closed
12/18/2010	9:00:33 AM	BCl3 valve closed
12/18/2010	9:00:33 AM	PH3 valve closed
12/18/2010	9:00:33 AM	SiCl4 pre valve closed
12/18/2010	9:00:33 AM	SiCl4 post valve closed
12/18/2010	9:00:33 AM	Bubbler valve closed
12/18/2010	9:00:33 AM	Helium valve opened
12/18/2010	9:00:33 AM	Main Vac valve opened
12/18/2010	9:00:33 AM	Bypass valve opened
12/18/2010	9:00:33 AM	Helium MFC set to  100.000000
12/18/2010	9:00:33 AM	H2 MFC set to  0.000000
12/18/2010	9:00:33 AM	BCl3 MFC set to  0.000000
12/18/2010	9:00:33 AM	PHl3 MFC set to  0.000000
12/18/2010	9:00:33 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:00:33 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:00:33 AM	Tube furnace set to 0
12/18/2010	9:01:33 AM	Helium valve closed
12/18/2010	9:01:33 AM	H2 valve closed
12/18/2010	9:01:33 AM	BCl3 valve closed
12/18/2010	9:01:33 AM	PH3 valve closed
12/18/2010	9:01:33 AM	SiCl4 pre valve closed
12/18/2010	9:01:33 AM	SiCl4 post valve closed
12/18/2010	9:01:33 AM	Bubbler valve closed
12/18/2010	9:01:33 AM	Main Vac valve opened
12/18/2010	9:01:33 AM	Bypass valve opened
12/18/2010	9:01:33 AM	Helium MFC set to  0.000000
12/18/2010	9:01:33 AM	H2 MFC set to  0.000000
12/18/2010	9:01:33 AM	BCl3 MFC set to  0.000000
12/18/2010	9:01:33 AM	PHl3 MFC set to  0.000000
12/18/2010	9:01:33 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:01:33 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:01:33 AM	Tube furnace set to 0
12/18/2010	9:02:33 AM	H2 valve closed
12/18/2010	9:02:33 AM	BCl3 valve closed
12/18/2010	9:02:33 AM	PH3 valve closed
12/18/2010	9:02:33 AM	SiCl4 pre valve closed
12/18/2010	9:02:33 AM	SiCl4 post valve closed
12/18/2010	9:02:33 AM	Bubbler valve closed
12/18/2010	9:02:33 AM	Helium valve opened
12/18/2010	9:02:33 AM	Main Vac valve opened
12/18/2010	9:02:33 AM	Bypass valve opened
12/18/2010	9:02:33 AM	Helium MFC set to  100.000000
12/18/2010	9:02:33 AM	H2 MFC set to  0.000000
12/18/2010	9:02:33 AM	BCl3 MFC set to  0.000000
12/18/2010	9:02:33 AM	PHl3 MFC set to  0.000000
12/18/2010	9:02:33 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:02:33 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:02:34 AM	Tube furnace set to 0
12/18/2010	9:03:34 AM	Helium valve closed
12/18/2010	9:03:34 AM	H2 valve closed
12/18/2010	9:03:34 AM	BCl3 valve closed
12/18/2010	9:03:34 AM	PH3 valve closed
12/18/2010	9:03:34 AM	SiCl4 pre valve closed
12/18/2010	9:03:34 AM	SiCl4 post valve closed
12/18/2010	9:03:34 AM	Bubbler valve closed
12/18/2010	9:03:34 AM	Main Vac valve opened
12/18/2010	9:03:34 AM	Bypass valve opened
12/18/2010	9:03:34 AM	Helium MFC set to  0.000000
12/18/2010	9:03:34 AM	H2 MFC set to  0.000000
12/18/2010	9:03:34 AM	BCl3 MFC set to  0.000000
12/18/2010	9:03:34 AM	PHl3 MFC set to  0.000000
12/18/2010	9:03:34 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:03:34 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:03:34 AM	Tube furnace set to 0
12/18/2010	9:04:34 AM	H2 valve closed
12/18/2010	9:04:34 AM	BCl3 valve closed
12/18/2010	9:04:34 AM	PH3 valve closed
12/18/2010	9:04:34 AM	SiCl4 pre valve closed
12/18/2010	9:04:34 AM	SiCl4 post valve closed
12/18/2010	9:04:34 AM	Bubbler valve closed
12/18/2010	9:04:34 AM	Helium valve opened
12/18/2010	9:04:34 AM	Main Vac valve opened
12/18/2010	9:04:34 AM	Bypass valve opened
12/18/2010	9:04:34 AM	Helium MFC set to  100.000000
12/18/2010	9:04:34 AM	H2 MFC set to  0.000000
12/18/2010	9:04:34 AM	BCl3 MFC set to  0.000000
12/18/2010	9:04:34 AM	PHl3 MFC set to  0.000000
12/18/2010	9:04:34 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:04:34 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:04:34 AM	Tube furnace set to 0
12/18/2010	9:05:34 AM	Helium valve closed
12/18/2010	9:05:34 AM	H2 valve closed
12/18/2010	9:05:34 AM	BCl3 valve closed
12/18/2010	9:05:34 AM	PH3 valve closed
12/18/2010	9:05:34 AM	SiCl4 pre valve closed
12/18/2010	9:05:34 AM	SiCl4 post valve closed
12/18/2010	9:05:34 AM	Bubbler valve closed
12/18/2010	9:05:34 AM	Main Vac valve opened
12/18/2010	9:05:34 AM	Bypass valve opened
12/18/2010	9:05:34 AM	Helium MFC set to  0.000000
12/18/2010	9:05:34 AM	H2 MFC set to  0.000000
12/18/2010	9:05:34 AM	BCl3 MFC set to  0.000000
12/18/2010	9:05:34 AM	PHl3 MFC set to  0.000000
12/18/2010	9:05:34 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:05:34 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:05:34 AM	Tube furnace set to 0
12/18/2010	9:06:34 AM	H2 valve closed
12/18/2010	9:06:34 AM	BCl3 valve closed
12/18/2010	9:06:34 AM	PH3 valve closed
12/18/2010	9:06:34 AM	SiCl4 pre valve closed
12/18/2010	9:06:34 AM	SiCl4 post valve closed
12/18/2010	9:06:34 AM	Bubbler valve closed
12/18/2010	9:06:34 AM	Helium valve opened
12/18/2010	9:06:34 AM	Main Vac valve opened
12/18/2010	9:06:34 AM	Bypass valve opened
12/18/2010	9:06:34 AM	Helium MFC set to  100.000000
12/18/2010	9:06:34 AM	H2 MFC set to  0.000000
12/18/2010	9:06:34 AM	BCl3 MFC set to  0.000000
12/18/2010	9:06:34 AM	PHl3 MFC set to  0.000000
12/18/2010	9:06:34 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:06:34 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:06:34 AM	Tube furnace set to 0
12/18/2010	9:07:34 AM	Helium valve closed
12/18/2010	9:07:34 AM	H2 valve closed
12/18/2010	9:07:34 AM	BCl3 valve closed
12/18/2010	9:07:34 AM	PH3 valve closed
12/18/2010	9:07:34 AM	SiCl4 pre valve closed
12/18/2010	9:07:34 AM	SiCl4 post valve closed
12/18/2010	9:07:34 AM	Bubbler valve closed
12/18/2010	9:07:34 AM	Main Vac valve opened
12/18/2010	9:07:34 AM	Bypass valve opened
12/18/2010	9:07:34 AM	Helium MFC set to  0.000000
12/18/2010	9:07:34 AM	H2 MFC set to  0.000000
12/18/2010	9:07:34 AM	BCl3 MFC set to  0.000000
12/18/2010	9:07:34 AM	PHl3 MFC set to  0.000000
12/18/2010	9:07:34 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:07:34 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:07:35 AM	Tube furnace set to 0
12/18/2010	9:07:36 AM	Run finished at 9:07 AM
12/18/2010	9:07:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	9:13:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	9:13:18 AM	Recipe started at 9:13 AM
12/18/2010	9:13:18 AM	Helium valve closed
12/18/2010	9:13:18 AM	H2 valve closed
12/18/2010	9:13:18 AM	BCl3 valve closed
12/18/2010	9:13:18 AM	PH3 valve closed
12/18/2010	9:13:18 AM	SiCl4 pre valve closed
12/18/2010	9:13:18 AM	SiCl4 post valve closed
12/18/2010	9:13:18 AM	Main Vac valve closed
12/18/2010	9:13:18 AM	Bubbler valve closed
12/18/2010	9:13:18 AM	Bypass valve opened
12/18/2010	9:13:18 AM	Helium MFC set to  0.000000
12/18/2010	9:13:18 AM	H2 MFC set to  0.000000
12/18/2010	9:13:18 AM	BCl3 MFC set to  0.000000
12/18/2010	9:13:18 AM	PHl3 MFC set to  0.000000
12/18/2010	9:13:18 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:13:18 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:13:18 AM	Tube furnace set to 0
12/18/2010	9:13:19 AM	Helium valve closed
12/18/2010	9:13:19 AM	H2 valve closed
12/18/2010	9:13:19 AM	BCl3 valve closed
12/18/2010	9:13:19 AM	PH3 valve closed
12/18/2010	9:13:19 AM	SiCl4 pre valve closed
12/18/2010	9:13:19 AM	SiCl4 post valve closed
12/18/2010	9:13:19 AM	Bubbler valve closed
12/18/2010	9:13:19 AM	Main Vac valve opened
12/18/2010	9:13:19 AM	Bypass valve opened
12/18/2010	9:13:19 AM	Helium MFC set to  0.000000
12/18/2010	9:13:19 AM	H2 MFC set to  0.000000
12/18/2010	9:13:19 AM	BCl3 MFC set to  0.000000
12/18/2010	9:13:19 AM	PHl3 MFC set to  0.000000
12/18/2010	9:13:19 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:13:19 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:13:19 AM	Tube furnace set to 0
12/18/2010	9:13:23 AM	H2 valve closed
12/18/2010	9:13:23 AM	BCl3 valve closed
12/18/2010	9:13:23 AM	PH3 valve closed
12/18/2010	9:13:23 AM	SiCl4 pre valve closed
12/18/2010	9:13:23 AM	SiCl4 post valve closed
12/18/2010	9:13:23 AM	Bubbler valve closed
12/18/2010	9:13:23 AM	Helium valve opened
12/18/2010	9:13:23 AM	Main Vac valve opened
12/18/2010	9:13:23 AM	Bypass valve opened
12/18/2010	9:13:23 AM	Helium MFC set to  100.000000
12/18/2010	9:13:23 AM	H2 MFC set to  0.000000
12/18/2010	9:13:23 AM	BCl3 MFC set to  0.000000
12/18/2010	9:13:23 AM	PHl3 MFC set to  0.000000
12/18/2010	9:13:23 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:13:23 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:13:23 AM	Tube furnace set to 0
12/18/2010	9:13:24 AM	Helium valve closed
12/18/2010	9:13:24 AM	H2 valve closed
12/18/2010	9:13:24 AM	BCl3 valve closed
12/18/2010	9:13:24 AM	PH3 valve closed
12/18/2010	9:13:24 AM	SiCl4 pre valve closed
12/18/2010	9:13:24 AM	SiCl4 post valve closed
12/18/2010	9:13:24 AM	Bubbler valve closed
12/18/2010	9:13:24 AM	Main Vac valve opened
12/18/2010	9:13:24 AM	Bypass valve opened
12/18/2010	9:13:24 AM	Helium MFC set to  0.000000
12/18/2010	9:13:24 AM	H2 MFC set to  0.000000
12/18/2010	9:13:24 AM	BCl3 MFC set to  0.000000
12/18/2010	9:13:24 AM	PHl3 MFC set to  0.000000
12/18/2010	9:13:24 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:13:24 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:13:24 AM	Tube furnace set to 0
12/18/2010	9:13:25 AM	H2 valve closed
12/18/2010	9:13:25 AM	BCl3 valve closed
12/18/2010	9:13:25 AM	PH3 valve closed
12/18/2010	9:13:25 AM	SiCl4 pre valve closed
12/18/2010	9:13:25 AM	SiCl4 post valve closed
12/18/2010	9:13:25 AM	Bubbler valve closed
12/18/2010	9:13:25 AM	Helium valve opened
12/18/2010	9:13:25 AM	Main Vac valve opened
12/18/2010	9:13:25 AM	Bypass valve opened
12/18/2010	9:13:25 AM	Helium MFC set to  100.000000
12/18/2010	9:13:25 AM	H2 MFC set to  0.000000
12/18/2010	9:13:25 AM	BCl3 MFC set to  0.000000
12/18/2010	9:13:25 AM	PHl3 MFC set to  0.000000
12/18/2010	9:13:25 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:13:25 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:13:25 AM	Tube furnace set to 0
12/18/2010	9:13:25 AM	Helium valve closed
12/18/2010	9:13:25 AM	H2 valve closed
12/18/2010	9:13:25 AM	BCl3 valve closed
12/18/2010	9:13:25 AM	PH3 valve closed
12/18/2010	9:13:25 AM	SiCl4 pre valve closed
12/18/2010	9:13:25 AM	SiCl4 post valve closed
12/18/2010	9:13:25 AM	Bubbler valve closed
12/18/2010	9:13:25 AM	Main Vac valve opened
12/18/2010	9:13:25 AM	Bypass valve opened
12/18/2010	9:13:25 AM	Helium MFC set to  0.000000
12/18/2010	9:13:25 AM	H2 MFC set to  0.000000
12/18/2010	9:13:25 AM	BCl3 MFC set to  0.000000
12/18/2010	9:13:25 AM	PHl3 MFC set to  0.000000
12/18/2010	9:13:25 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:13:25 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:13:25 AM	Tube furnace set to 0
12/18/2010	9:13:26 AM	H2 valve closed
12/18/2010	9:13:26 AM	BCl3 valve closed
12/18/2010	9:13:26 AM	PH3 valve closed
12/18/2010	9:13:26 AM	SiCl4 pre valve closed
12/18/2010	9:13:26 AM	SiCl4 post valve closed
12/18/2010	9:13:26 AM	Bubbler valve closed
12/18/2010	9:13:26 AM	Helium valve opened
12/18/2010	9:13:26 AM	Main Vac valve opened
12/18/2010	9:13:26 AM	Bypass valve opened
12/18/2010	9:13:26 AM	Helium MFC set to  100.000000
12/18/2010	9:13:26 AM	H2 MFC set to  0.000000
12/18/2010	9:13:26 AM	BCl3 MFC set to  0.000000
12/18/2010	9:13:26 AM	PHl3 MFC set to  0.000000
12/18/2010	9:13:26 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:13:26 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:13:26 AM	Tube furnace set to 0
12/18/2010	9:13:27 AM	Helium valve closed
12/18/2010	9:13:27 AM	H2 valve closed
12/18/2010	9:13:27 AM	BCl3 valve closed
12/18/2010	9:13:27 AM	PH3 valve closed
12/18/2010	9:13:27 AM	SiCl4 pre valve closed
12/18/2010	9:13:27 AM	SiCl4 post valve closed
12/18/2010	9:13:27 AM	Bubbler valve closed
12/18/2010	9:13:27 AM	Main Vac valve opened
12/18/2010	9:13:27 AM	Bypass valve opened
12/18/2010	9:13:27 AM	Helium MFC set to  0.000000
12/18/2010	9:13:27 AM	H2 MFC set to  0.000000
12/18/2010	9:13:27 AM	BCl3 MFC set to  0.000000
12/18/2010	9:13:27 AM	PHl3 MFC set to  0.000000
12/18/2010	9:13:27 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:13:27 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:13:27 AM	Tube furnace set to 0
12/18/2010	9:13:28 AM	H2 valve closed
12/18/2010	9:13:28 AM	BCl3 valve closed
12/18/2010	9:13:28 AM	PH3 valve closed
12/18/2010	9:13:28 AM	SiCl4 pre valve closed
12/18/2010	9:13:28 AM	SiCl4 post valve closed
12/18/2010	9:13:28 AM	Bubbler valve closed
12/18/2010	9:13:28 AM	Helium valve opened
12/18/2010	9:13:28 AM	Main Vac valve opened
12/18/2010	9:13:28 AM	Bypass valve opened
12/18/2010	9:13:28 AM	Helium MFC set to  100.000000
12/18/2010	9:13:28 AM	H2 MFC set to  0.000000
12/18/2010	9:13:28 AM	BCl3 MFC set to  0.000000
12/18/2010	9:13:28 AM	PHl3 MFC set to  0.000000
12/18/2010	9:13:28 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:13:28 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:13:28 AM	Tube furnace set to 0
12/18/2010	9:13:29 AM	Helium valve closed
12/18/2010	9:13:29 AM	H2 valve closed
12/18/2010	9:13:29 AM	BCl3 valve closed
12/18/2010	9:13:29 AM	PH3 valve closed
12/18/2010	9:13:29 AM	SiCl4 pre valve closed
12/18/2010	9:13:29 AM	SiCl4 post valve closed
12/18/2010	9:13:29 AM	Bubbler valve closed
12/18/2010	9:13:29 AM	Main Vac valve opened
12/18/2010	9:13:29 AM	Bypass valve opened
12/18/2010	9:13:29 AM	Helium MFC set to  0.000000
12/18/2010	9:13:29 AM	H2 MFC set to  0.000000
12/18/2010	9:13:29 AM	BCl3 MFC set to  0.000000
12/18/2010	9:13:29 AM	PHl3 MFC set to  0.000000
12/18/2010	9:13:29 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:13:29 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:13:29 AM	Tube furnace set to 0
12/18/2010	9:13:30 AM	H2 valve closed
12/18/2010	9:13:30 AM	BCl3 valve closed
12/18/2010	9:13:30 AM	PH3 valve closed
12/18/2010	9:13:30 AM	SiCl4 pre valve closed
12/18/2010	9:13:30 AM	SiCl4 post valve closed
12/18/2010	9:13:30 AM	Bubbler valve closed
12/18/2010	9:13:30 AM	Helium valve opened
12/18/2010	9:13:30 AM	Main Vac valve opened
12/18/2010	9:13:30 AM	Bypass valve opened
12/18/2010	9:13:30 AM	Helium MFC set to  100.000000
12/18/2010	9:13:30 AM	H2 MFC set to  0.000000
12/18/2010	9:13:30 AM	BCl3 MFC set to  0.000000
12/18/2010	9:13:30 AM	PHl3 MFC set to  0.000000
12/18/2010	9:13:30 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:13:30 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:13:30 AM	Tube furnace set to 0
12/18/2010	9:13:30 AM	Helium valve closed
12/18/2010	9:13:30 AM	H2 valve closed
12/18/2010	9:13:30 AM	BCl3 valve closed
12/18/2010	9:13:30 AM	PH3 valve closed
12/18/2010	9:13:30 AM	SiCl4 pre valve closed
12/18/2010	9:13:30 AM	SiCl4 post valve closed
12/18/2010	9:13:30 AM	Bubbler valve closed
12/18/2010	9:13:30 AM	Main Vac valve opened
12/18/2010	9:13:30 AM	Bypass valve opened
12/18/2010	9:13:30 AM	Helium MFC set to  0.000000
12/18/2010	9:13:30 AM	H2 MFC set to  0.000000
12/18/2010	9:13:30 AM	BCl3 MFC set to  0.000000
12/18/2010	9:13:30 AM	PHl3 MFC set to  0.000000
12/18/2010	9:13:30 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:13:30 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:13:31 AM	Tube furnace set to 0
12/18/2010	9:14:31 AM	H2 valve closed
12/18/2010	9:14:31 AM	BCl3 valve closed
12/18/2010	9:14:31 AM	PH3 valve closed
12/18/2010	9:14:31 AM	SiCl4 pre valve closed
12/18/2010	9:14:31 AM	SiCl4 post valve closed
12/18/2010	9:14:31 AM	Bubbler valve closed
12/18/2010	9:14:31 AM	Helium valve opened
12/18/2010	9:14:31 AM	Main Vac valve opened
12/18/2010	9:14:31 AM	Bypass valve opened
12/18/2010	9:14:31 AM	Helium MFC set to  100.000000
12/18/2010	9:14:31 AM	H2 MFC set to  0.000000
12/18/2010	9:14:31 AM	BCl3 MFC set to  0.000000
12/18/2010	9:14:31 AM	PHl3 MFC set to  0.000000
12/18/2010	9:14:31 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:14:31 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:14:31 AM	Tube furnace set to 0
12/18/2010	9:15:31 AM	Helium valve closed
12/18/2010	9:15:31 AM	H2 valve closed
12/18/2010	9:15:31 AM	BCl3 valve closed
12/18/2010	9:15:31 AM	PH3 valve closed
12/18/2010	9:15:31 AM	SiCl4 pre valve closed
12/18/2010	9:15:31 AM	SiCl4 post valve closed
12/18/2010	9:15:31 AM	Bubbler valve closed
12/18/2010	9:15:31 AM	Main Vac valve opened
12/18/2010	9:15:31 AM	Bypass valve opened
12/18/2010	9:15:31 AM	Helium MFC set to  0.000000
12/18/2010	9:15:31 AM	H2 MFC set to  0.000000
12/18/2010	9:15:31 AM	BCl3 MFC set to  0.000000
12/18/2010	9:15:31 AM	PHl3 MFC set to  0.000000
12/18/2010	9:15:31 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:15:31 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:15:31 AM	Tube furnace set to 0
12/18/2010	9:16:31 AM	H2 valve closed
12/18/2010	9:16:31 AM	BCl3 valve closed
12/18/2010	9:16:31 AM	PH3 valve closed
12/18/2010	9:16:31 AM	SiCl4 pre valve closed
12/18/2010	9:16:31 AM	SiCl4 post valve closed
12/18/2010	9:16:31 AM	Bubbler valve closed
12/18/2010	9:16:31 AM	Helium valve opened
12/18/2010	9:16:31 AM	Main Vac valve opened
12/18/2010	9:16:31 AM	Bypass valve opened
12/18/2010	9:16:31 AM	Helium MFC set to  100.000000
12/18/2010	9:16:31 AM	H2 MFC set to  0.000000
12/18/2010	9:16:31 AM	BCl3 MFC set to  0.000000
12/18/2010	9:16:31 AM	PHl3 MFC set to  0.000000
12/18/2010	9:16:31 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:16:31 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:16:31 AM	Tube furnace set to 0
12/18/2010	9:17:31 AM	Helium valve closed
12/18/2010	9:17:31 AM	H2 valve closed
12/18/2010	9:17:31 AM	BCl3 valve closed
12/18/2010	9:17:31 AM	PH3 valve closed
12/18/2010	9:17:31 AM	SiCl4 pre valve closed
12/18/2010	9:17:31 AM	SiCl4 post valve closed
12/18/2010	9:17:31 AM	Bubbler valve closed
12/18/2010	9:17:31 AM	Main Vac valve opened
12/18/2010	9:17:31 AM	Bypass valve opened
12/18/2010	9:17:31 AM	Helium MFC set to  0.000000
12/18/2010	9:17:31 AM	H2 MFC set to  0.000000
12/18/2010	9:17:31 AM	BCl3 MFC set to  0.000000
12/18/2010	9:17:31 AM	PHl3 MFC set to  0.000000
12/18/2010	9:17:31 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:17:31 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:17:31 AM	Tube furnace set to 0
12/18/2010	9:18:31 AM	H2 valve closed
12/18/2010	9:18:31 AM	BCl3 valve closed
12/18/2010	9:18:31 AM	PH3 valve closed
12/18/2010	9:18:31 AM	SiCl4 pre valve closed
12/18/2010	9:18:31 AM	SiCl4 post valve closed
12/18/2010	9:18:31 AM	Bubbler valve closed
12/18/2010	9:18:31 AM	Helium valve opened
12/18/2010	9:18:31 AM	Main Vac valve opened
12/18/2010	9:18:31 AM	Bypass valve opened
12/18/2010	9:18:31 AM	Helium MFC set to  100.000000
12/18/2010	9:18:31 AM	H2 MFC set to  0.000000
12/18/2010	9:18:31 AM	BCl3 MFC set to  0.000000
12/18/2010	9:18:31 AM	PHl3 MFC set to  0.000000
12/18/2010	9:18:31 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:18:31 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:18:32 AM	Tube furnace set to 0
12/18/2010	9:19:32 AM	Helium valve closed
12/18/2010	9:19:32 AM	H2 valve closed
12/18/2010	9:19:32 AM	BCl3 valve closed
12/18/2010	9:19:32 AM	PH3 valve closed
12/18/2010	9:19:32 AM	SiCl4 pre valve closed
12/18/2010	9:19:32 AM	SiCl4 post valve closed
12/18/2010	9:19:32 AM	Bubbler valve closed
12/18/2010	9:19:32 AM	Main Vac valve opened
12/18/2010	9:19:32 AM	Bypass valve opened
12/18/2010	9:19:32 AM	Helium MFC set to  0.000000
12/18/2010	9:19:32 AM	H2 MFC set to  0.000000
12/18/2010	9:19:32 AM	BCl3 MFC set to  0.000000
12/18/2010	9:19:32 AM	PHl3 MFC set to  0.000000
12/18/2010	9:19:32 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:19:32 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:19:32 AM	Tube furnace set to 0
12/18/2010	9:20:32 AM	H2 valve closed
12/18/2010	9:20:32 AM	BCl3 valve closed
12/18/2010	9:20:32 AM	PH3 valve closed
12/18/2010	9:20:32 AM	SiCl4 pre valve closed
12/18/2010	9:20:32 AM	SiCl4 post valve closed
12/18/2010	9:20:32 AM	Bubbler valve closed
12/18/2010	9:20:32 AM	Helium valve opened
12/18/2010	9:20:32 AM	Main Vac valve opened
12/18/2010	9:20:32 AM	Bypass valve opened
12/18/2010	9:20:32 AM	Helium MFC set to  100.000000
12/18/2010	9:20:32 AM	H2 MFC set to  0.000000
12/18/2010	9:20:32 AM	BCl3 MFC set to  0.000000
12/18/2010	9:20:32 AM	PHl3 MFC set to  0.000000
12/18/2010	9:20:32 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:20:32 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:20:32 AM	Tube furnace set to 0
12/18/2010	9:21:32 AM	Helium valve closed
12/18/2010	9:21:32 AM	H2 valve closed
12/18/2010	9:21:32 AM	BCl3 valve closed
12/18/2010	9:21:32 AM	PH3 valve closed
12/18/2010	9:21:32 AM	SiCl4 pre valve closed
12/18/2010	9:21:32 AM	SiCl4 post valve closed
12/18/2010	9:21:32 AM	Bubbler valve closed
12/18/2010	9:21:32 AM	Main Vac valve opened
12/18/2010	9:21:32 AM	Bypass valve opened
12/18/2010	9:21:32 AM	Helium MFC set to  0.000000
12/18/2010	9:21:32 AM	H2 MFC set to  0.000000
12/18/2010	9:21:32 AM	BCl3 MFC set to  0.000000
12/18/2010	9:21:32 AM	PHl3 MFC set to  0.000000
12/18/2010	9:21:32 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:21:32 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:21:32 AM	Tube furnace set to 0
12/18/2010	9:22:32 AM	H2 valve closed
12/18/2010	9:22:32 AM	BCl3 valve closed
12/18/2010	9:22:32 AM	PH3 valve closed
12/18/2010	9:22:32 AM	SiCl4 pre valve closed
12/18/2010	9:22:32 AM	SiCl4 post valve closed
12/18/2010	9:22:32 AM	Bubbler valve closed
12/18/2010	9:22:32 AM	Helium valve opened
12/18/2010	9:22:32 AM	Main Vac valve opened
12/18/2010	9:22:32 AM	Bypass valve opened
12/18/2010	9:22:32 AM	Helium MFC set to  100.000000
12/18/2010	9:22:32 AM	H2 MFC set to  0.000000
12/18/2010	9:22:32 AM	BCl3 MFC set to  0.000000
12/18/2010	9:22:32 AM	PHl3 MFC set to  0.000000
12/18/2010	9:22:32 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:22:32 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:22:32 AM	Tube furnace set to 0
12/18/2010	9:23:32 AM	Helium valve closed
12/18/2010	9:23:32 AM	H2 valve closed
12/18/2010	9:23:32 AM	BCl3 valve closed
12/18/2010	9:23:32 AM	PH3 valve closed
12/18/2010	9:23:32 AM	SiCl4 pre valve closed
12/18/2010	9:23:32 AM	SiCl4 post valve closed
12/18/2010	9:23:32 AM	Bubbler valve closed
12/18/2010	9:23:32 AM	Main Vac valve opened
12/18/2010	9:23:32 AM	Bypass valve opened
12/18/2010	9:23:32 AM	Helium MFC set to  0.000000
12/18/2010	9:23:32 AM	H2 MFC set to  0.000000
12/18/2010	9:23:32 AM	BCl3 MFC set to  0.000000
12/18/2010	9:23:32 AM	PHl3 MFC set to  0.000000
12/18/2010	9:23:32 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:23:32 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:23:33 AM	Tube furnace set to 0
12/18/2010	9:23:34 AM	Run finished at 9:23 AM
12/18/2010	9:23:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	9:28:30 AM	Recipe started at 9:28 AM
12/18/2010	9:28:30 AM	Helium valve closed
12/18/2010	9:28:30 AM	BCl3 valve closed
12/18/2010	9:28:30 AM	PH3 valve closed
12/18/2010	9:28:30 AM	SiCl4 pre valve closed
12/18/2010	9:28:30 AM	SiCl4 post valve closed
12/18/2010	9:28:30 AM	Main Vac valve closed
12/18/2010	9:28:30 AM	Bypass valve closed
12/18/2010	9:28:30 AM	Bubbler valve closed
12/18/2010	9:28:30 AM	H2 valve opened
12/18/2010	9:28:30 AM	Helium MFC set to  0.000000
12/18/2010	9:28:30 AM	H2 MFC set to  500.000000
12/18/2010	9:28:30 AM	BCl3 MFC set to  0.000000
12/18/2010	9:28:30 AM	PHl3 MFC set to  0.000000
12/18/2010	9:28:30 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:28:30 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:28:31 AM	Tube furnace set to 0
12/18/2010	9:29:48 AM	Helium valve closed
12/18/2010	9:29:48 AM	BCl3 valve closed
12/18/2010	9:29:48 AM	PH3 valve closed
12/18/2010	9:29:48 AM	SiCl4 pre valve closed
12/18/2010	9:29:48 AM	SiCl4 post valve closed
12/18/2010	9:29:48 AM	Main Vac valve closed
12/18/2010	9:29:48 AM	Bypass valve closed
12/18/2010	9:29:48 AM	H2 valve opened
12/18/2010	9:29:48 AM	Bubbler valve opened
12/18/2010	9:29:48 AM	Helium MFC set to  0.000000
12/18/2010	9:29:48 AM	H2 MFC set to  500.000000
12/18/2010	9:29:48 AM	BCl3 MFC set to  0.000000
12/18/2010	9:29:48 AM	PHl3 MFC set to  0.000000
12/18/2010	9:29:48 AM	SiCl4 MFC set to  0.000000
12/18/2010	9:29:48 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:29:48 AM	Tube furnace set to 1000
12/18/2010	9:49:48 AM	Helium valve closed
12/18/2010	9:49:48 AM	BCl3 valve closed
12/18/2010	9:49:48 AM	Main Vac valve closed
12/18/2010	9:49:48 AM	Bypass valve closed
12/18/2010	9:49:48 AM	H2 valve opened
12/18/2010	9:49:48 AM	PH3 valve opened
12/18/2010	9:49:48 AM	SiCl4 pre valve opened
12/18/2010	9:49:48 AM	SiCl4 post valve opened
12/18/2010	9:49:48 AM	Bubbler valve opened
12/18/2010	9:49:48 AM	Helium MFC set to  0.000000
12/18/2010	9:49:48 AM	H2 MFC set to  500.000000
12/18/2010	9:49:48 AM	BCl3 MFC set to  0.000000
12/18/2010	9:49:48 AM	PHl3 MFC set to  2.000000
12/18/2010	9:49:48 AM	SiCl4 MFC set to  50.000000
12/18/2010	9:49:48 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	9:49:48 AM	Tube furnace set to 1000
12/18/2010	10:06:48 AM	H2 valve closed
12/18/2010	10:06:48 AM	BCl3 valve closed
12/18/2010	10:06:48 AM	PH3 valve closed
12/18/2010	10:06:48 AM	SiCl4 pre valve closed
12/18/2010	10:06:48 AM	SiCl4 post valve closed
12/18/2010	10:06:48 AM	Main Vac valve closed
12/18/2010	10:06:48 AM	Bypass valve closed
12/18/2010	10:06:48 AM	Helium valve opened
12/18/2010	10:06:48 AM	Bubbler valve opened
12/18/2010	10:06:48 AM	Helium MFC set to  500.000000
12/18/2010	10:06:48 AM	H2 MFC set to  0.000000
12/18/2010	10:06:48 AM	BCl3 MFC set to  0.000000
12/18/2010	10:06:48 AM	PHl3 MFC set to  0.000000
12/18/2010	10:06:48 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:06:48 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:06:49 AM	Tube furnace set to 0
12/18/2010	10:26:49 AM	Helium valve closed
12/18/2010	10:26:49 AM	H2 valve closed
12/18/2010	10:26:49 AM	BCl3 valve closed
12/18/2010	10:26:49 AM	PH3 valve closed
12/18/2010	10:26:49 AM	SiCl4 pre valve closed
12/18/2010	10:26:49 AM	SiCl4 post valve closed
12/18/2010	10:26:49 AM	Main Vac valve closed
12/18/2010	10:26:49 AM	Bypass valve closed
12/18/2010	10:26:49 AM	Bubbler valve closed
12/18/2010	10:26:49 AM	Helium MFC set to  0.000000
12/18/2010	10:26:49 AM	H2 MFC set to  0.000000
12/18/2010	10:26:49 AM	BCl3 MFC set to  0.000000
12/18/2010	10:26:49 AM	PHl3 MFC set to  0.000000
12/18/2010	10:26:49 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:26:49 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:26:49 AM	Tube furnace set to 0
12/18/2010	10:26:49 AM	Run finished at 10:26 AM
12/18/2010	10:34:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/18/2010	10:34:48 AM	Recipe started at 10:34 AM
12/18/2010	10:34:48 AM	H2 valve closed
12/18/2010	10:34:48 AM	BCl3 valve closed
12/18/2010	10:34:48 AM	PH3 valve closed
12/18/2010	10:34:48 AM	SiCl4 pre valve closed
12/18/2010	10:34:48 AM	SiCl4 post valve closed
12/18/2010	10:34:48 AM	Main Vac valve closed
12/18/2010	10:34:48 AM	Bypass valve closed
12/18/2010	10:34:48 AM	Bubbler valve closed
12/18/2010	10:34:48 AM	Helium valve opened
12/18/2010	10:34:48 AM	Helium MFC set to  500.000000
12/18/2010	10:34:48 AM	H2 MFC set to  0.000000
12/18/2010	10:34:48 AM	BCl3 MFC set to  0.000000
12/18/2010	10:34:48 AM	PHl3 MFC set to  0.000000
12/18/2010	10:34:48 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:34:48 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:34:48 AM	Tube furnace set to 0
12/18/2010	10:34:52 AM	Helium valve closed
12/18/2010	10:34:52 AM	H2 valve closed
12/18/2010	10:34:52 AM	BCl3 valve closed
12/18/2010	10:34:52 AM	PH3 valve closed
12/18/2010	10:34:52 AM	SiCl4 pre valve closed
12/18/2010	10:34:52 AM	SiCl4 post valve closed
12/18/2010	10:34:52 AM	Main Vac valve closed
12/18/2010	10:34:52 AM	Bypass valve closed
12/18/2010	10:34:52 AM	Bubbler valve closed
12/18/2010	10:34:52 AM	Helium MFC set to  0.000000
12/18/2010	10:34:52 AM	H2 MFC set to  0.000000
12/18/2010	10:34:52 AM	BCl3 MFC set to  0.000000
12/18/2010	10:34:52 AM	PHl3 MFC set to  0.000000
12/18/2010	10:34:52 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:34:52 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:34:52 AM	Tube furnace set to 0
12/18/2010	10:34:53 AM	Run finished at 10:34 AM
12/18/2010	10:34:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/18/2010	10:38:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2010	10:38:45 AM	Recipe started at 10:38 AM
12/18/2010	10:38:45 AM	Helium valve closed
12/18/2010	10:38:45 AM	H2 valve closed
12/18/2010	10:38:45 AM	BCl3 valve closed
12/18/2010	10:38:45 AM	PH3 valve closed
12/18/2010	10:38:45 AM	SiCl4 pre valve closed
12/18/2010	10:38:45 AM	SiCl4 post valve closed
12/18/2010	10:38:45 AM	Main Vac valve closed
12/18/2010	10:38:45 AM	Bubbler valve closed
12/18/2010	10:38:45 AM	Bypass valve opened
12/18/2010	10:38:45 AM	Helium MFC set to  0.000000
12/18/2010	10:38:45 AM	H2 MFC set to  0.000000
12/18/2010	10:38:45 AM	BCl3 MFC set to  0.000000
12/18/2010	10:38:45 AM	PHl3 MFC set to  0.000000
12/18/2010	10:38:45 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:38:45 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:38:45 AM	Tube furnace set to 0
12/18/2010	10:39:41 AM	Helium valve closed
12/18/2010	10:39:41 AM	H2 valve closed
12/18/2010	10:39:41 AM	BCl3 valve closed
12/18/2010	10:39:41 AM	PH3 valve closed
12/18/2010	10:39:41 AM	SiCl4 pre valve closed
12/18/2010	10:39:41 AM	SiCl4 post valve closed
12/18/2010	10:39:41 AM	Bubbler valve closed
12/18/2010	10:39:41 AM	Main Vac valve opened
12/18/2010	10:39:41 AM	Bypass valve opened
12/18/2010	10:39:41 AM	Helium MFC set to  0.000000
12/18/2010	10:39:41 AM	H2 MFC set to  0.000000
12/18/2010	10:39:41 AM	BCl3 MFC set to  0.000000
12/18/2010	10:39:41 AM	PHl3 MFC set to  0.000000
12/18/2010	10:39:41 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:39:41 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:39:41 AM	Tube furnace set to 0
12/18/2010	10:39:41 AM	Run finished at 10:39 AM
12/18/2010	10:39:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2010	10:41:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	10:41:15 AM	Recipe started at 10:41 AM
12/18/2010	10:41:15 AM	Helium valve closed
12/18/2010	10:41:15 AM	H2 valve closed
12/18/2010	10:41:15 AM	BCl3 valve closed
12/18/2010	10:41:15 AM	PH3 valve closed
12/18/2010	10:41:15 AM	SiCl4 pre valve closed
12/18/2010	10:41:15 AM	SiCl4 post valve closed
12/18/2010	10:41:15 AM	Main Vac valve closed
12/18/2010	10:41:15 AM	Bubbler valve closed
12/18/2010	10:41:15 AM	Bypass valve opened
12/18/2010	10:41:15 AM	Helium MFC set to  0.000000
12/18/2010	10:41:15 AM	H2 MFC set to  0.000000
12/18/2010	10:41:15 AM	BCl3 MFC set to  0.000000
12/18/2010	10:41:15 AM	PHl3 MFC set to  0.000000
12/18/2010	10:41:15 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:41:15 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:41:15 AM	Tube furnace set to 0
12/18/2010	10:41:15 AM	Helium valve closed
12/18/2010	10:41:15 AM	H2 valve closed
12/18/2010	10:41:15 AM	BCl3 valve closed
12/18/2010	10:41:15 AM	PH3 valve closed
12/18/2010	10:41:15 AM	SiCl4 pre valve closed
12/18/2010	10:41:15 AM	SiCl4 post valve closed
12/18/2010	10:41:15 AM	Bubbler valve closed
12/18/2010	10:41:15 AM	Main Vac valve opened
12/18/2010	10:41:15 AM	Bypass valve opened
12/18/2010	10:41:15 AM	Helium MFC set to  0.000000
12/18/2010	10:41:15 AM	H2 MFC set to  0.000000
12/18/2010	10:41:15 AM	BCl3 MFC set to  0.000000
12/18/2010	10:41:15 AM	PHl3 MFC set to  0.000000
12/18/2010	10:41:15 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:41:15 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:41:16 AM	Tube furnace set to 0
12/18/2010	10:42:16 AM	H2 valve closed
12/18/2010	10:42:16 AM	BCl3 valve closed
12/18/2010	10:42:16 AM	PH3 valve closed
12/18/2010	10:42:16 AM	SiCl4 pre valve closed
12/18/2010	10:42:16 AM	SiCl4 post valve closed
12/18/2010	10:42:16 AM	Bubbler valve closed
12/18/2010	10:42:16 AM	Helium valve opened
12/18/2010	10:42:16 AM	Main Vac valve opened
12/18/2010	10:42:16 AM	Bypass valve opened
12/18/2010	10:42:16 AM	Helium MFC set to  100.000000
12/18/2010	10:42:16 AM	H2 MFC set to  0.000000
12/18/2010	10:42:16 AM	BCl3 MFC set to  0.000000
12/18/2010	10:42:16 AM	PHl3 MFC set to  0.000000
12/18/2010	10:42:16 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:42:16 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:42:16 AM	Tube furnace set to 0
12/18/2010	10:43:16 AM	Helium valve closed
12/18/2010	10:43:16 AM	H2 valve closed
12/18/2010	10:43:16 AM	BCl3 valve closed
12/18/2010	10:43:16 AM	PH3 valve closed
12/18/2010	10:43:16 AM	SiCl4 pre valve closed
12/18/2010	10:43:16 AM	SiCl4 post valve closed
12/18/2010	10:43:16 AM	Bubbler valve closed
12/18/2010	10:43:16 AM	Main Vac valve opened
12/18/2010	10:43:16 AM	Bypass valve opened
12/18/2010	10:43:16 AM	Helium MFC set to  0.000000
12/18/2010	10:43:16 AM	H2 MFC set to  0.000000
12/18/2010	10:43:16 AM	BCl3 MFC set to  0.000000
12/18/2010	10:43:16 AM	PHl3 MFC set to  0.000000
12/18/2010	10:43:16 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:43:16 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:43:16 AM	Tube furnace set to 0
12/18/2010	10:44:16 AM	H2 valve closed
12/18/2010	10:44:16 AM	BCl3 valve closed
12/18/2010	10:44:16 AM	PH3 valve closed
12/18/2010	10:44:16 AM	SiCl4 pre valve closed
12/18/2010	10:44:16 AM	SiCl4 post valve closed
12/18/2010	10:44:16 AM	Bubbler valve closed
12/18/2010	10:44:16 AM	Helium valve opened
12/18/2010	10:44:16 AM	Main Vac valve opened
12/18/2010	10:44:16 AM	Bypass valve opened
12/18/2010	10:44:16 AM	Helium MFC set to  100.000000
12/18/2010	10:44:16 AM	H2 MFC set to  0.000000
12/18/2010	10:44:16 AM	BCl3 MFC set to  0.000000
12/18/2010	10:44:16 AM	PHl3 MFC set to  0.000000
12/18/2010	10:44:16 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:44:16 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:44:16 AM	Tube furnace set to 0
12/18/2010	10:45:16 AM	Helium valve closed
12/18/2010	10:45:16 AM	H2 valve closed
12/18/2010	10:45:16 AM	BCl3 valve closed
12/18/2010	10:45:16 AM	PH3 valve closed
12/18/2010	10:45:16 AM	SiCl4 pre valve closed
12/18/2010	10:45:16 AM	SiCl4 post valve closed
12/18/2010	10:45:16 AM	Bubbler valve closed
12/18/2010	10:45:16 AM	Main Vac valve opened
12/18/2010	10:45:16 AM	Bypass valve opened
12/18/2010	10:45:16 AM	Helium MFC set to  0.000000
12/18/2010	10:45:16 AM	H2 MFC set to  0.000000
12/18/2010	10:45:16 AM	BCl3 MFC set to  0.000000
12/18/2010	10:45:16 AM	PHl3 MFC set to  0.000000
12/18/2010	10:45:16 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:45:16 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:45:16 AM	Tube furnace set to 0
12/18/2010	10:46:16 AM	H2 valve closed
12/18/2010	10:46:16 AM	BCl3 valve closed
12/18/2010	10:46:16 AM	PH3 valve closed
12/18/2010	10:46:16 AM	SiCl4 pre valve closed
12/18/2010	10:46:16 AM	SiCl4 post valve closed
12/18/2010	10:46:16 AM	Bubbler valve closed
12/18/2010	10:46:16 AM	Helium valve opened
12/18/2010	10:46:16 AM	Main Vac valve opened
12/18/2010	10:46:16 AM	Bypass valve opened
12/18/2010	10:46:16 AM	Helium MFC set to  100.000000
12/18/2010	10:46:16 AM	H2 MFC set to  0.000000
12/18/2010	10:46:16 AM	BCl3 MFC set to  0.000000
12/18/2010	10:46:16 AM	PHl3 MFC set to  0.000000
12/18/2010	10:46:16 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:46:16 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:46:17 AM	Tube furnace set to 0
12/18/2010	10:47:17 AM	Helium valve closed
12/18/2010	10:47:17 AM	H2 valve closed
12/18/2010	10:47:17 AM	BCl3 valve closed
12/18/2010	10:47:17 AM	PH3 valve closed
12/18/2010	10:47:17 AM	SiCl4 pre valve closed
12/18/2010	10:47:17 AM	SiCl4 post valve closed
12/18/2010	10:47:17 AM	Bubbler valve closed
12/18/2010	10:47:17 AM	Main Vac valve opened
12/18/2010	10:47:17 AM	Bypass valve opened
12/18/2010	10:47:17 AM	Helium MFC set to  0.000000
12/18/2010	10:47:17 AM	H2 MFC set to  0.000000
12/18/2010	10:47:17 AM	BCl3 MFC set to  0.000000
12/18/2010	10:47:17 AM	PHl3 MFC set to  0.000000
12/18/2010	10:47:17 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:47:17 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:47:17 AM	Tube furnace set to 0
12/18/2010	10:48:17 AM	H2 valve closed
12/18/2010	10:48:17 AM	BCl3 valve closed
12/18/2010	10:48:17 AM	PH3 valve closed
12/18/2010	10:48:17 AM	SiCl4 pre valve closed
12/18/2010	10:48:17 AM	SiCl4 post valve closed
12/18/2010	10:48:17 AM	Bubbler valve closed
12/18/2010	10:48:17 AM	Helium valve opened
12/18/2010	10:48:17 AM	Main Vac valve opened
12/18/2010	10:48:17 AM	Bypass valve opened
12/18/2010	10:48:17 AM	Helium MFC set to  100.000000
12/18/2010	10:48:17 AM	H2 MFC set to  0.000000
12/18/2010	10:48:17 AM	BCl3 MFC set to  0.000000
12/18/2010	10:48:17 AM	PHl3 MFC set to  0.000000
12/18/2010	10:48:17 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:48:17 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:48:17 AM	Tube furnace set to 0
12/18/2010	10:49:17 AM	Helium valve closed
12/18/2010	10:49:17 AM	H2 valve closed
12/18/2010	10:49:17 AM	BCl3 valve closed
12/18/2010	10:49:17 AM	PH3 valve closed
12/18/2010	10:49:17 AM	SiCl4 pre valve closed
12/18/2010	10:49:17 AM	SiCl4 post valve closed
12/18/2010	10:49:17 AM	Bubbler valve closed
12/18/2010	10:49:17 AM	Main Vac valve opened
12/18/2010	10:49:17 AM	Bypass valve opened
12/18/2010	10:49:17 AM	Helium MFC set to  0.000000
12/18/2010	10:49:17 AM	H2 MFC set to  0.000000
12/18/2010	10:49:17 AM	BCl3 MFC set to  0.000000
12/18/2010	10:49:17 AM	PHl3 MFC set to  0.000000
12/18/2010	10:49:17 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:49:17 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:49:17 AM	Tube furnace set to 0
12/18/2010	10:50:17 AM	H2 valve closed
12/18/2010	10:50:17 AM	BCl3 valve closed
12/18/2010	10:50:17 AM	PH3 valve closed
12/18/2010	10:50:17 AM	SiCl4 pre valve closed
12/18/2010	10:50:17 AM	SiCl4 post valve closed
12/18/2010	10:50:17 AM	Bubbler valve closed
12/18/2010	10:50:17 AM	Helium valve opened
12/18/2010	10:50:17 AM	Main Vac valve opened
12/18/2010	10:50:17 AM	Bypass valve opened
12/18/2010	10:50:17 AM	Helium MFC set to  100.000000
12/18/2010	10:50:17 AM	H2 MFC set to  0.000000
12/18/2010	10:50:17 AM	BCl3 MFC set to  0.000000
12/18/2010	10:50:17 AM	PHl3 MFC set to  0.000000
12/18/2010	10:50:17 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:50:17 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:50:17 AM	Tube furnace set to 0
12/18/2010	10:51:17 AM	Helium valve closed
12/18/2010	10:51:17 AM	H2 valve closed
12/18/2010	10:51:17 AM	BCl3 valve closed
12/18/2010	10:51:17 AM	PH3 valve closed
12/18/2010	10:51:17 AM	SiCl4 pre valve closed
12/18/2010	10:51:17 AM	SiCl4 post valve closed
12/18/2010	10:51:17 AM	Bubbler valve closed
12/18/2010	10:51:17 AM	Main Vac valve opened
12/18/2010	10:51:17 AM	Bypass valve opened
12/18/2010	10:51:17 AM	Helium MFC set to  0.000000
12/18/2010	10:51:17 AM	H2 MFC set to  0.000000
12/18/2010	10:51:17 AM	BCl3 MFC set to  0.000000
12/18/2010	10:51:17 AM	PHl3 MFC set to  0.000000
12/18/2010	10:51:17 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:51:17 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:51:18 AM	Tube furnace set to 0
12/18/2010	10:52:18 AM	H2 valve closed
12/18/2010	10:52:18 AM	BCl3 valve closed
12/18/2010	10:52:18 AM	PH3 valve closed
12/18/2010	10:52:18 AM	SiCl4 pre valve closed
12/18/2010	10:52:18 AM	SiCl4 post valve closed
12/18/2010	10:52:18 AM	Bubbler valve closed
12/18/2010	10:52:18 AM	Helium valve opened
12/18/2010	10:52:18 AM	Main Vac valve opened
12/18/2010	10:52:18 AM	Bypass valve opened
12/18/2010	10:52:18 AM	Helium MFC set to  100.000000
12/18/2010	10:52:18 AM	H2 MFC set to  0.000000
12/18/2010	10:52:18 AM	BCl3 MFC set to  0.000000
12/18/2010	10:52:18 AM	PHl3 MFC set to  0.000000
12/18/2010	10:52:18 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:52:18 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:52:18 AM	Tube furnace set to 0
12/18/2010	10:53:18 AM	Helium valve closed
12/18/2010	10:53:18 AM	H2 valve closed
12/18/2010	10:53:18 AM	BCl3 valve closed
12/18/2010	10:53:18 AM	PH3 valve closed
12/18/2010	10:53:18 AM	SiCl4 pre valve closed
12/18/2010	10:53:18 AM	SiCl4 post valve closed
12/18/2010	10:53:18 AM	Bubbler valve closed
12/18/2010	10:53:18 AM	Main Vac valve opened
12/18/2010	10:53:18 AM	Bypass valve opened
12/18/2010	10:53:18 AM	Helium MFC set to  0.000000
12/18/2010	10:53:18 AM	H2 MFC set to  0.000000
12/18/2010	10:53:18 AM	BCl3 MFC set to  0.000000
12/18/2010	10:53:18 AM	PHl3 MFC set to  0.000000
12/18/2010	10:53:18 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:53:18 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:53:18 AM	Tube furnace set to 0
12/18/2010	10:54:18 AM	H2 valve closed
12/18/2010	10:54:18 AM	BCl3 valve closed
12/18/2010	10:54:18 AM	PH3 valve closed
12/18/2010	10:54:18 AM	SiCl4 pre valve closed
12/18/2010	10:54:18 AM	SiCl4 post valve closed
12/18/2010	10:54:18 AM	Bubbler valve closed
12/18/2010	10:54:18 AM	Helium valve opened
12/18/2010	10:54:18 AM	Main Vac valve opened
12/18/2010	10:54:18 AM	Bypass valve opened
12/18/2010	10:54:18 AM	Helium MFC set to  100.000000
12/18/2010	10:54:18 AM	H2 MFC set to  0.000000
12/18/2010	10:54:18 AM	BCl3 MFC set to  0.000000
12/18/2010	10:54:18 AM	PHl3 MFC set to  0.000000
12/18/2010	10:54:18 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:54:18 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:54:18 AM	Tube furnace set to 0
12/18/2010	10:55:18 AM	Helium valve closed
12/18/2010	10:55:18 AM	H2 valve closed
12/18/2010	10:55:18 AM	BCl3 valve closed
12/18/2010	10:55:18 AM	PH3 valve closed
12/18/2010	10:55:18 AM	SiCl4 pre valve closed
12/18/2010	10:55:18 AM	SiCl4 post valve closed
12/18/2010	10:55:18 AM	Bubbler valve closed
12/18/2010	10:55:18 AM	Main Vac valve opened
12/18/2010	10:55:18 AM	Bypass valve opened
12/18/2010	10:55:18 AM	Helium MFC set to  0.000000
12/18/2010	10:55:18 AM	H2 MFC set to  0.000000
12/18/2010	10:55:18 AM	BCl3 MFC set to  0.000000
12/18/2010	10:55:18 AM	PHl3 MFC set to  0.000000
12/18/2010	10:55:18 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:55:18 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:55:18 AM	Tube furnace set to 0
12/18/2010	10:56:18 AM	H2 valve closed
12/18/2010	10:56:18 AM	BCl3 valve closed
12/18/2010	10:56:18 AM	PH3 valve closed
12/18/2010	10:56:18 AM	SiCl4 pre valve closed
12/18/2010	10:56:18 AM	SiCl4 post valve closed
12/18/2010	10:56:18 AM	Bubbler valve closed
12/18/2010	10:56:18 AM	Helium valve opened
12/18/2010	10:56:18 AM	Main Vac valve opened
12/18/2010	10:56:18 AM	Bypass valve opened
12/18/2010	10:56:18 AM	Helium MFC set to  100.000000
12/18/2010	10:56:18 AM	H2 MFC set to  0.000000
12/18/2010	10:56:18 AM	BCl3 MFC set to  0.000000
12/18/2010	10:56:18 AM	PHl3 MFC set to  0.000000
12/18/2010	10:56:18 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:56:18 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:56:19 AM	Tube furnace set to 0
12/18/2010	10:57:19 AM	Helium valve closed
12/18/2010	10:57:19 AM	H2 valve closed
12/18/2010	10:57:19 AM	BCl3 valve closed
12/18/2010	10:57:19 AM	PH3 valve closed
12/18/2010	10:57:19 AM	SiCl4 pre valve closed
12/18/2010	10:57:19 AM	SiCl4 post valve closed
12/18/2010	10:57:19 AM	Bubbler valve closed
12/18/2010	10:57:19 AM	Main Vac valve opened
12/18/2010	10:57:19 AM	Bypass valve opened
12/18/2010	10:57:19 AM	Helium MFC set to  0.000000
12/18/2010	10:57:19 AM	H2 MFC set to  0.000000
12/18/2010	10:57:19 AM	BCl3 MFC set to  0.000000
12/18/2010	10:57:19 AM	PHl3 MFC set to  0.000000
12/18/2010	10:57:19 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:57:19 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:57:19 AM	Tube furnace set to 0
12/18/2010	10:58:19 AM	H2 valve closed
12/18/2010	10:58:19 AM	BCl3 valve closed
12/18/2010	10:58:19 AM	PH3 valve closed
12/18/2010	10:58:19 AM	SiCl4 pre valve closed
12/18/2010	10:58:19 AM	SiCl4 post valve closed
12/18/2010	10:58:19 AM	Bubbler valve closed
12/18/2010	10:58:19 AM	Helium valve opened
12/18/2010	10:58:19 AM	Main Vac valve opened
12/18/2010	10:58:19 AM	Bypass valve opened
12/18/2010	10:58:19 AM	Helium MFC set to  100.000000
12/18/2010	10:58:19 AM	H2 MFC set to  0.000000
12/18/2010	10:58:19 AM	BCl3 MFC set to  0.000000
12/18/2010	10:58:19 AM	PHl3 MFC set to  0.000000
12/18/2010	10:58:19 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:58:19 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:58:19 AM	Tube furnace set to 0
12/18/2010	10:59:19 AM	Helium valve closed
12/18/2010	10:59:19 AM	H2 valve closed
12/18/2010	10:59:19 AM	BCl3 valve closed
12/18/2010	10:59:19 AM	PH3 valve closed
12/18/2010	10:59:19 AM	SiCl4 pre valve closed
12/18/2010	10:59:19 AM	SiCl4 post valve closed
12/18/2010	10:59:19 AM	Bubbler valve closed
12/18/2010	10:59:19 AM	Main Vac valve opened
12/18/2010	10:59:19 AM	Bypass valve opened
12/18/2010	10:59:19 AM	Helium MFC set to  0.000000
12/18/2010	10:59:19 AM	H2 MFC set to  0.000000
12/18/2010	10:59:19 AM	BCl3 MFC set to  0.000000
12/18/2010	10:59:19 AM	PHl3 MFC set to  0.000000
12/18/2010	10:59:19 AM	SiCl4 MFC set to  0.000000
12/18/2010	10:59:19 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	10:59:19 AM	Tube furnace set to 0
12/18/2010	11:00:19 AM	H2 valve closed
12/18/2010	11:00:19 AM	BCl3 valve closed
12/18/2010	11:00:19 AM	PH3 valve closed
12/18/2010	11:00:19 AM	SiCl4 pre valve closed
12/18/2010	11:00:19 AM	SiCl4 post valve closed
12/18/2010	11:00:19 AM	Bubbler valve closed
12/18/2010	11:00:19 AM	Helium valve opened
12/18/2010	11:00:19 AM	Main Vac valve opened
12/18/2010	11:00:19 AM	Bypass valve opened
12/18/2010	11:00:19 AM	Helium MFC set to  100.000000
12/18/2010	11:00:19 AM	H2 MFC set to  0.000000
12/18/2010	11:00:19 AM	BCl3 MFC set to  0.000000
12/18/2010	11:00:19 AM	PHl3 MFC set to  0.000000
12/18/2010	11:00:19 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:00:19 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:00:19 AM	Tube furnace set to 0
12/18/2010	11:01:19 AM	Helium valve closed
12/18/2010	11:01:19 AM	H2 valve closed
12/18/2010	11:01:19 AM	BCl3 valve closed
12/18/2010	11:01:19 AM	PH3 valve closed
12/18/2010	11:01:19 AM	SiCl4 pre valve closed
12/18/2010	11:01:19 AM	SiCl4 post valve closed
12/18/2010	11:01:19 AM	Bubbler valve closed
12/18/2010	11:01:19 AM	Main Vac valve opened
12/18/2010	11:01:19 AM	Bypass valve opened
12/18/2010	11:01:19 AM	Helium MFC set to  0.000000
12/18/2010	11:01:19 AM	H2 MFC set to  0.000000
12/18/2010	11:01:19 AM	BCl3 MFC set to  0.000000
12/18/2010	11:01:19 AM	PHl3 MFC set to  0.000000
12/18/2010	11:01:19 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:01:19 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:01:19 AM	Tube furnace set to 0
12/18/2010	11:01:20 AM	Run finished at 11:01 AM
12/18/2010	11:01:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	11:02:30 AM	Bypass valve closed
12/18/2010	11:02:30 AM	Main Vac valve closed
12/18/2010	11:02:45 AM	Main Vac valve opened
12/18/2010	11:02:46 AM	Bypass valve opened
12/18/2010	11:02:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	11:03:03 AM	Recipe started at 11:02 AM
12/18/2010	11:03:03 AM	Helium valve closed
12/18/2010	11:03:03 AM	H2 valve closed
12/18/2010	11:03:03 AM	BCl3 valve closed
12/18/2010	11:03:03 AM	PH3 valve closed
12/18/2010	11:03:03 AM	SiCl4 pre valve closed
12/18/2010	11:03:03 AM	SiCl4 post valve closed
12/18/2010	11:03:03 AM	Main Vac valve closed
12/18/2010	11:03:03 AM	Bubbler valve closed
12/18/2010	11:03:03 AM	Bypass valve opened
12/18/2010	11:03:03 AM	Helium MFC set to  0.000000
12/18/2010	11:03:03 AM	H2 MFC set to  0.000000
12/18/2010	11:03:03 AM	BCl3 MFC set to  0.000000
12/18/2010	11:03:03 AM	PHl3 MFC set to  0.000000
12/18/2010	11:03:03 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:03:03 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:03:04 AM	Tube furnace set to 0
12/18/2010	11:03:04 AM	Helium valve closed
12/18/2010	11:03:04 AM	H2 valve closed
12/18/2010	11:03:04 AM	BCl3 valve closed
12/18/2010	11:03:04 AM	PH3 valve closed
12/18/2010	11:03:04 AM	SiCl4 pre valve closed
12/18/2010	11:03:04 AM	SiCl4 post valve closed
12/18/2010	11:03:04 AM	Bubbler valve closed
12/18/2010	11:03:04 AM	Main Vac valve opened
12/18/2010	11:03:04 AM	Bypass valve opened
12/18/2010	11:03:04 AM	Helium MFC set to  0.000000
12/18/2010	11:03:04 AM	H2 MFC set to  0.000000
12/18/2010	11:03:04 AM	BCl3 MFC set to  0.000000
12/18/2010	11:03:04 AM	PHl3 MFC set to  0.000000
12/18/2010	11:03:04 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:03:04 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:03:04 AM	Tube furnace set to 0
12/18/2010	11:04:04 AM	H2 valve closed
12/18/2010	11:04:04 AM	BCl3 valve closed
12/18/2010	11:04:04 AM	PH3 valve closed
12/18/2010	11:04:04 AM	SiCl4 pre valve closed
12/18/2010	11:04:04 AM	SiCl4 post valve closed
12/18/2010	11:04:04 AM	Bubbler valve closed
12/18/2010	11:04:04 AM	Helium valve opened
12/18/2010	11:04:04 AM	Main Vac valve opened
12/18/2010	11:04:04 AM	Bypass valve opened
12/18/2010	11:04:04 AM	Helium MFC set to  100.000000
12/18/2010	11:04:04 AM	H2 MFC set to  0.000000
12/18/2010	11:04:04 AM	BCl3 MFC set to  0.000000
12/18/2010	11:04:04 AM	PHl3 MFC set to  0.000000
12/18/2010	11:04:04 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:04:04 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:04:04 AM	Tube furnace set to 0
12/18/2010	11:05:04 AM	Helium valve closed
12/18/2010	11:05:04 AM	H2 valve closed
12/18/2010	11:05:04 AM	BCl3 valve closed
12/18/2010	11:05:04 AM	PH3 valve closed
12/18/2010	11:05:04 AM	SiCl4 pre valve closed
12/18/2010	11:05:04 AM	SiCl4 post valve closed
12/18/2010	11:05:04 AM	Bubbler valve closed
12/18/2010	11:05:04 AM	Main Vac valve opened
12/18/2010	11:05:04 AM	Bypass valve opened
12/18/2010	11:05:04 AM	Helium MFC set to  0.000000
12/18/2010	11:05:04 AM	H2 MFC set to  0.000000
12/18/2010	11:05:04 AM	BCl3 MFC set to  0.000000
12/18/2010	11:05:04 AM	PHl3 MFC set to  0.000000
12/18/2010	11:05:04 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:05:04 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:05:04 AM	Tube furnace set to 0
12/18/2010	11:06:04 AM	H2 valve closed
12/18/2010	11:06:04 AM	BCl3 valve closed
12/18/2010	11:06:04 AM	PH3 valve closed
12/18/2010	11:06:04 AM	SiCl4 pre valve closed
12/18/2010	11:06:04 AM	SiCl4 post valve closed
12/18/2010	11:06:04 AM	Bubbler valve closed
12/18/2010	11:06:04 AM	Helium valve opened
12/18/2010	11:06:04 AM	Main Vac valve opened
12/18/2010	11:06:04 AM	Bypass valve opened
12/18/2010	11:06:04 AM	Helium MFC set to  100.000000
12/18/2010	11:06:04 AM	H2 MFC set to  0.000000
12/18/2010	11:06:04 AM	BCl3 MFC set to  0.000000
12/18/2010	11:06:04 AM	PHl3 MFC set to  0.000000
12/18/2010	11:06:04 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:06:04 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:06:05 AM	Tube furnace set to 0
12/18/2010	11:07:05 AM	Helium valve closed
12/18/2010	11:07:05 AM	H2 valve closed
12/18/2010	11:07:05 AM	BCl3 valve closed
12/18/2010	11:07:05 AM	PH3 valve closed
12/18/2010	11:07:05 AM	SiCl4 pre valve closed
12/18/2010	11:07:05 AM	SiCl4 post valve closed
12/18/2010	11:07:05 AM	Bubbler valve closed
12/18/2010	11:07:05 AM	Main Vac valve opened
12/18/2010	11:07:05 AM	Bypass valve opened
12/18/2010	11:07:05 AM	Helium MFC set to  0.000000
12/18/2010	11:07:05 AM	H2 MFC set to  0.000000
12/18/2010	11:07:05 AM	BCl3 MFC set to  0.000000
12/18/2010	11:07:05 AM	PHl3 MFC set to  0.000000
12/18/2010	11:07:05 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:07:05 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:07:05 AM	Tube furnace set to 0
12/18/2010	11:08:05 AM	H2 valve closed
12/18/2010	11:08:05 AM	BCl3 valve closed
12/18/2010	11:08:05 AM	PH3 valve closed
12/18/2010	11:08:05 AM	SiCl4 pre valve closed
12/18/2010	11:08:05 AM	SiCl4 post valve closed
12/18/2010	11:08:05 AM	Bubbler valve closed
12/18/2010	11:08:05 AM	Helium valve opened
12/18/2010	11:08:05 AM	Main Vac valve opened
12/18/2010	11:08:05 AM	Bypass valve opened
12/18/2010	11:08:05 AM	Helium MFC set to  100.000000
12/18/2010	11:08:05 AM	H2 MFC set to  0.000000
12/18/2010	11:08:05 AM	BCl3 MFC set to  0.000000
12/18/2010	11:08:05 AM	PHl3 MFC set to  0.000000
12/18/2010	11:08:05 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:08:05 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:08:05 AM	Tube furnace set to 0
12/18/2010	11:09:05 AM	Helium valve closed
12/18/2010	11:09:05 AM	H2 valve closed
12/18/2010	11:09:05 AM	BCl3 valve closed
12/18/2010	11:09:05 AM	PH3 valve closed
12/18/2010	11:09:05 AM	SiCl4 pre valve closed
12/18/2010	11:09:05 AM	SiCl4 post valve closed
12/18/2010	11:09:05 AM	Bubbler valve closed
12/18/2010	11:09:05 AM	Main Vac valve opened
12/18/2010	11:09:05 AM	Bypass valve opened
12/18/2010	11:09:05 AM	Helium MFC set to  0.000000
12/18/2010	11:09:05 AM	H2 MFC set to  0.000000
12/18/2010	11:09:05 AM	BCl3 MFC set to  0.000000
12/18/2010	11:09:05 AM	PHl3 MFC set to  0.000000
12/18/2010	11:09:05 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:09:05 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:09:05 AM	Tube furnace set to 0
12/18/2010	11:10:05 AM	H2 valve closed
12/18/2010	11:10:05 AM	BCl3 valve closed
12/18/2010	11:10:05 AM	PH3 valve closed
12/18/2010	11:10:05 AM	SiCl4 pre valve closed
12/18/2010	11:10:05 AM	SiCl4 post valve closed
12/18/2010	11:10:05 AM	Bubbler valve closed
12/18/2010	11:10:05 AM	Helium valve opened
12/18/2010	11:10:05 AM	Main Vac valve opened
12/18/2010	11:10:05 AM	Bypass valve opened
12/18/2010	11:10:05 AM	Helium MFC set to  100.000000
12/18/2010	11:10:05 AM	H2 MFC set to  0.000000
12/18/2010	11:10:05 AM	BCl3 MFC set to  0.000000
12/18/2010	11:10:05 AM	PHl3 MFC set to  0.000000
12/18/2010	11:10:05 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:10:05 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:10:05 AM	Tube furnace set to 0
12/18/2010	11:11:05 AM	Helium valve closed
12/18/2010	11:11:05 AM	H2 valve closed
12/18/2010	11:11:05 AM	BCl3 valve closed
12/18/2010	11:11:05 AM	PH3 valve closed
12/18/2010	11:11:05 AM	SiCl4 pre valve closed
12/18/2010	11:11:05 AM	SiCl4 post valve closed
12/18/2010	11:11:05 AM	Bubbler valve closed
12/18/2010	11:11:05 AM	Main Vac valve opened
12/18/2010	11:11:05 AM	Bypass valve opened
12/18/2010	11:11:05 AM	Helium MFC set to  0.000000
12/18/2010	11:11:05 AM	H2 MFC set to  0.000000
12/18/2010	11:11:05 AM	BCl3 MFC set to  0.000000
12/18/2010	11:11:05 AM	PHl3 MFC set to  0.000000
12/18/2010	11:11:05 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:11:05 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:11:06 AM	Tube furnace set to 0
12/18/2010	11:12:06 AM	H2 valve closed
12/18/2010	11:12:06 AM	BCl3 valve closed
12/18/2010	11:12:06 AM	PH3 valve closed
12/18/2010	11:12:06 AM	SiCl4 pre valve closed
12/18/2010	11:12:06 AM	SiCl4 post valve closed
12/18/2010	11:12:06 AM	Bubbler valve closed
12/18/2010	11:12:06 AM	Helium valve opened
12/18/2010	11:12:06 AM	Main Vac valve opened
12/18/2010	11:12:06 AM	Bypass valve opened
12/18/2010	11:12:06 AM	Helium MFC set to  100.000000
12/18/2010	11:12:06 AM	H2 MFC set to  0.000000
12/18/2010	11:12:06 AM	BCl3 MFC set to  0.000000
12/18/2010	11:12:06 AM	PHl3 MFC set to  0.000000
12/18/2010	11:12:06 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:12:06 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:12:06 AM	Tube furnace set to 0
12/18/2010	11:13:06 AM	Helium valve closed
12/18/2010	11:13:06 AM	H2 valve closed
12/18/2010	11:13:06 AM	BCl3 valve closed
12/18/2010	11:13:06 AM	PH3 valve closed
12/18/2010	11:13:06 AM	SiCl4 pre valve closed
12/18/2010	11:13:06 AM	SiCl4 post valve closed
12/18/2010	11:13:06 AM	Bubbler valve closed
12/18/2010	11:13:06 AM	Main Vac valve opened
12/18/2010	11:13:06 AM	Bypass valve opened
12/18/2010	11:13:06 AM	Helium MFC set to  0.000000
12/18/2010	11:13:06 AM	H2 MFC set to  0.000000
12/18/2010	11:13:06 AM	BCl3 MFC set to  0.000000
12/18/2010	11:13:06 AM	PHl3 MFC set to  0.000000
12/18/2010	11:13:06 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:13:06 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:13:06 AM	Tube furnace set to 0
12/18/2010	11:14:06 AM	H2 valve closed
12/18/2010	11:14:06 AM	BCl3 valve closed
12/18/2010	11:14:06 AM	PH3 valve closed
12/18/2010	11:14:06 AM	SiCl4 pre valve closed
12/18/2010	11:14:06 AM	SiCl4 post valve closed
12/18/2010	11:14:06 AM	Bubbler valve closed
12/18/2010	11:14:06 AM	Helium valve opened
12/18/2010	11:14:06 AM	Main Vac valve opened
12/18/2010	11:14:06 AM	Bypass valve opened
12/18/2010	11:14:06 AM	Helium MFC set to  100.000000
12/18/2010	11:14:06 AM	H2 MFC set to  0.000000
12/18/2010	11:14:06 AM	BCl3 MFC set to  0.000000
12/18/2010	11:14:06 AM	PHl3 MFC set to  0.000000
12/18/2010	11:14:06 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:14:06 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:14:06 AM	Tube furnace set to 0
12/18/2010	11:15:06 AM	Helium valve closed
12/18/2010	11:15:06 AM	H2 valve closed
12/18/2010	11:15:06 AM	BCl3 valve closed
12/18/2010	11:15:06 AM	PH3 valve closed
12/18/2010	11:15:06 AM	SiCl4 pre valve closed
12/18/2010	11:15:06 AM	SiCl4 post valve closed
12/18/2010	11:15:06 AM	Bubbler valve closed
12/18/2010	11:15:06 AM	Main Vac valve opened
12/18/2010	11:15:06 AM	Bypass valve opened
12/18/2010	11:15:06 AM	Helium MFC set to  0.000000
12/18/2010	11:15:06 AM	H2 MFC set to  0.000000
12/18/2010	11:15:06 AM	BCl3 MFC set to  0.000000
12/18/2010	11:15:06 AM	PHl3 MFC set to  0.000000
12/18/2010	11:15:06 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:15:06 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:15:06 AM	Tube furnace set to 0
12/18/2010	11:16:06 AM	H2 valve closed
12/18/2010	11:16:06 AM	BCl3 valve closed
12/18/2010	11:16:06 AM	PH3 valve closed
12/18/2010	11:16:06 AM	SiCl4 pre valve closed
12/18/2010	11:16:06 AM	SiCl4 post valve closed
12/18/2010	11:16:06 AM	Bubbler valve closed
12/18/2010	11:16:06 AM	Helium valve opened
12/18/2010	11:16:06 AM	Main Vac valve opened
12/18/2010	11:16:06 AM	Bypass valve opened
12/18/2010	11:16:06 AM	Helium MFC set to  100.000000
12/18/2010	11:16:06 AM	H2 MFC set to  0.000000
12/18/2010	11:16:06 AM	BCl3 MFC set to  0.000000
12/18/2010	11:16:06 AM	PHl3 MFC set to  0.000000
12/18/2010	11:16:06 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:16:06 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:16:07 AM	Tube furnace set to 0
12/18/2010	11:17:07 AM	Helium valve closed
12/18/2010	11:17:07 AM	H2 valve closed
12/18/2010	11:17:07 AM	BCl3 valve closed
12/18/2010	11:17:07 AM	PH3 valve closed
12/18/2010	11:17:07 AM	SiCl4 pre valve closed
12/18/2010	11:17:07 AM	SiCl4 post valve closed
12/18/2010	11:17:07 AM	Bubbler valve closed
12/18/2010	11:17:07 AM	Main Vac valve opened
12/18/2010	11:17:07 AM	Bypass valve opened
12/18/2010	11:17:07 AM	Helium MFC set to  0.000000
12/18/2010	11:17:07 AM	H2 MFC set to  0.000000
12/18/2010	11:17:07 AM	BCl3 MFC set to  0.000000
12/18/2010	11:17:07 AM	PHl3 MFC set to  0.000000
12/18/2010	11:17:07 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:17:07 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:17:07 AM	Tube furnace set to 0
12/18/2010	11:18:07 AM	H2 valve closed
12/18/2010	11:18:07 AM	BCl3 valve closed
12/18/2010	11:18:07 AM	PH3 valve closed
12/18/2010	11:18:07 AM	SiCl4 pre valve closed
12/18/2010	11:18:07 AM	SiCl4 post valve closed
12/18/2010	11:18:07 AM	Bubbler valve closed
12/18/2010	11:18:07 AM	Helium valve opened
12/18/2010	11:18:07 AM	Main Vac valve opened
12/18/2010	11:18:07 AM	Bypass valve opened
12/18/2010	11:18:07 AM	Helium MFC set to  100.000000
12/18/2010	11:18:07 AM	H2 MFC set to  0.000000
12/18/2010	11:18:07 AM	BCl3 MFC set to  0.000000
12/18/2010	11:18:07 AM	PHl3 MFC set to  0.000000
12/18/2010	11:18:07 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:18:07 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:18:07 AM	Tube furnace set to 0
12/18/2010	11:19:07 AM	Helium valve closed
12/18/2010	11:19:07 AM	H2 valve closed
12/18/2010	11:19:07 AM	BCl3 valve closed
12/18/2010	11:19:07 AM	PH3 valve closed
12/18/2010	11:19:07 AM	SiCl4 pre valve closed
12/18/2010	11:19:07 AM	SiCl4 post valve closed
12/18/2010	11:19:07 AM	Bubbler valve closed
12/18/2010	11:19:07 AM	Main Vac valve opened
12/18/2010	11:19:07 AM	Bypass valve opened
12/18/2010	11:19:07 AM	Helium MFC set to  0.000000
12/18/2010	11:19:07 AM	H2 MFC set to  0.000000
12/18/2010	11:19:07 AM	BCl3 MFC set to  0.000000
12/18/2010	11:19:07 AM	PHl3 MFC set to  0.000000
12/18/2010	11:19:07 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:19:07 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:19:07 AM	Tube furnace set to 0
12/18/2010	11:20:07 AM	H2 valve closed
12/18/2010	11:20:07 AM	BCl3 valve closed
12/18/2010	11:20:07 AM	PH3 valve closed
12/18/2010	11:20:07 AM	SiCl4 pre valve closed
12/18/2010	11:20:07 AM	SiCl4 post valve closed
12/18/2010	11:20:07 AM	Bubbler valve closed
12/18/2010	11:20:07 AM	Helium valve opened
12/18/2010	11:20:07 AM	Main Vac valve opened
12/18/2010	11:20:07 AM	Bypass valve opened
12/18/2010	11:20:07 AM	Helium MFC set to  100.000000
12/18/2010	11:20:07 AM	H2 MFC set to  0.000000
12/18/2010	11:20:07 AM	BCl3 MFC set to  0.000000
12/18/2010	11:20:07 AM	PHl3 MFC set to  0.000000
12/18/2010	11:20:07 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:20:07 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:20:07 AM	Tube furnace set to 0
12/18/2010	11:21:07 AM	Helium valve closed
12/18/2010	11:21:07 AM	H2 valve closed
12/18/2010	11:21:07 AM	BCl3 valve closed
12/18/2010	11:21:07 AM	PH3 valve closed
12/18/2010	11:21:07 AM	SiCl4 pre valve closed
12/18/2010	11:21:07 AM	SiCl4 post valve closed
12/18/2010	11:21:07 AM	Bubbler valve closed
12/18/2010	11:21:07 AM	Main Vac valve opened
12/18/2010	11:21:07 AM	Bypass valve opened
12/18/2010	11:21:07 AM	Helium MFC set to  0.000000
12/18/2010	11:21:07 AM	H2 MFC set to  0.000000
12/18/2010	11:21:07 AM	BCl3 MFC set to  0.000000
12/18/2010	11:21:07 AM	PHl3 MFC set to  0.000000
12/18/2010	11:21:07 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:21:07 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:21:08 AM	Tube furnace set to 0
12/18/2010	11:22:08 AM	H2 valve closed
12/18/2010	11:22:08 AM	BCl3 valve closed
12/18/2010	11:22:08 AM	PH3 valve closed
12/18/2010	11:22:08 AM	SiCl4 pre valve closed
12/18/2010	11:22:08 AM	SiCl4 post valve closed
12/18/2010	11:22:08 AM	Bubbler valve closed
12/18/2010	11:22:08 AM	Helium valve opened
12/18/2010	11:22:08 AM	Main Vac valve opened
12/18/2010	11:22:08 AM	Bypass valve opened
12/18/2010	11:22:08 AM	Helium MFC set to  100.000000
12/18/2010	11:22:08 AM	H2 MFC set to  0.000000
12/18/2010	11:22:08 AM	BCl3 MFC set to  0.000000
12/18/2010	11:22:08 AM	PHl3 MFC set to  0.000000
12/18/2010	11:22:08 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:22:08 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:22:08 AM	Tube furnace set to 0
12/18/2010	11:23:08 AM	Helium valve closed
12/18/2010	11:23:08 AM	H2 valve closed
12/18/2010	11:23:08 AM	BCl3 valve closed
12/18/2010	11:23:08 AM	PH3 valve closed
12/18/2010	11:23:08 AM	SiCl4 pre valve closed
12/18/2010	11:23:08 AM	SiCl4 post valve closed
12/18/2010	11:23:08 AM	Bubbler valve closed
12/18/2010	11:23:08 AM	Main Vac valve opened
12/18/2010	11:23:08 AM	Bypass valve opened
12/18/2010	11:23:08 AM	Helium MFC set to  0.000000
12/18/2010	11:23:08 AM	H2 MFC set to  0.000000
12/18/2010	11:23:08 AM	BCl3 MFC set to  0.000000
12/18/2010	11:23:08 AM	PHl3 MFC set to  0.000000
12/18/2010	11:23:08 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:23:08 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:23:08 AM	Tube furnace set to 0
12/18/2010	11:23:09 AM	Run finished at 11:23 AM
12/18/2010	11:23:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	11:24:16 AM	Recipe started at 11:24 AM
12/18/2010	11:24:16 AM	Helium valve closed
12/18/2010	11:24:16 AM	BCl3 valve closed
12/18/2010	11:24:16 AM	PH3 valve closed
12/18/2010	11:24:16 AM	SiCl4 pre valve closed
12/18/2010	11:24:16 AM	SiCl4 post valve closed
12/18/2010	11:24:16 AM	Main Vac valve closed
12/18/2010	11:24:16 AM	Bypass valve closed
12/18/2010	11:24:16 AM	Bubbler valve closed
12/18/2010	11:24:16 AM	H2 valve opened
12/18/2010	11:24:16 AM	Helium MFC set to  0.000000
12/18/2010	11:24:16 AM	H2 MFC set to  500.000000
12/18/2010	11:24:16 AM	BCl3 MFC set to  0.000000
12/18/2010	11:24:16 AM	PHl3 MFC set to  0.000000
12/18/2010	11:24:16 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:24:16 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:24:16 AM	Tube furnace set to 0
12/18/2010	11:25:32 AM	Helium valve closed
12/18/2010	11:25:32 AM	BCl3 valve closed
12/18/2010	11:25:32 AM	PH3 valve closed
12/18/2010	11:25:32 AM	SiCl4 pre valve closed
12/18/2010	11:25:32 AM	SiCl4 post valve closed
12/18/2010	11:25:32 AM	Main Vac valve closed
12/18/2010	11:25:32 AM	Bypass valve closed
12/18/2010	11:25:32 AM	H2 valve opened
12/18/2010	11:25:32 AM	Bubbler valve opened
12/18/2010	11:25:32 AM	Helium MFC set to  0.000000
12/18/2010	11:25:32 AM	H2 MFC set to  500.000000
12/18/2010	11:25:32 AM	BCl3 MFC set to  0.000000
12/18/2010	11:25:32 AM	PHl3 MFC set to  0.000000
12/18/2010	11:25:32 AM	SiCl4 MFC set to  0.000000
12/18/2010	11:25:32 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:25:32 AM	Tube furnace set to 1000
12/18/2010	11:45:32 AM	Helium valve closed
12/18/2010	11:45:32 AM	BCl3 valve closed
12/18/2010	11:45:32 AM	Main Vac valve closed
12/18/2010	11:45:32 AM	Bypass valve closed
12/18/2010	11:45:32 AM	H2 valve opened
12/18/2010	11:45:32 AM	PH3 valve opened
12/18/2010	11:45:32 AM	SiCl4 pre valve opened
12/18/2010	11:45:32 AM	SiCl4 post valve opened
12/18/2010	11:45:32 AM	Bubbler valve opened
12/18/2010	11:45:32 AM	Helium MFC set to  0.000000
12/18/2010	11:45:32 AM	H2 MFC set to  500.000000
12/18/2010	11:45:32 AM	BCl3 MFC set to  0.000000
12/18/2010	11:45:32 AM	PHl3 MFC set to  4.000000
12/18/2010	11:45:32 AM	SiCl4 MFC set to  50.000000
12/18/2010	11:45:32 AM	Bypass solenoid MFC set to  0.000000
12/18/2010	11:45:32 AM	Tube furnace set to 1000
12/18/2010	12:02:32 PM	H2 valve closed
12/18/2010	12:02:32 PM	BCl3 valve closed
12/18/2010	12:02:32 PM	PH3 valve closed
12/18/2010	12:02:32 PM	SiCl4 pre valve closed
12/18/2010	12:02:32 PM	SiCl4 post valve closed
12/18/2010	12:02:32 PM	Main Vac valve closed
12/18/2010	12:02:32 PM	Bypass valve closed
12/18/2010	12:02:32 PM	Helium valve opened
12/18/2010	12:02:32 PM	Bubbler valve opened
12/18/2010	12:02:32 PM	Helium MFC set to  500.000000
12/18/2010	12:02:32 PM	H2 MFC set to  0.000000
12/18/2010	12:02:32 PM	BCl3 MFC set to  0.000000
12/18/2010	12:02:32 PM	PHl3 MFC set to  0.000000
12/18/2010	12:02:32 PM	SiCl4 MFC set to  0.000000
12/18/2010	12:02:32 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:02:33 PM	Tube furnace set to 0
12/18/2010	12:22:33 PM	Helium valve closed
12/18/2010	12:22:33 PM	H2 valve closed
12/18/2010	12:22:33 PM	BCl3 valve closed
12/18/2010	12:22:33 PM	PH3 valve closed
12/18/2010	12:22:33 PM	SiCl4 pre valve closed
12/18/2010	12:22:33 PM	SiCl4 post valve closed
12/18/2010	12:22:33 PM	Main Vac valve closed
12/18/2010	12:22:33 PM	Bypass valve closed
12/18/2010	12:22:33 PM	Bubbler valve closed
12/18/2010	12:22:33 PM	Helium MFC set to  0.000000
12/18/2010	12:22:33 PM	H2 MFC set to  0.000000
12/18/2010	12:22:33 PM	BCl3 MFC set to  0.000000
12/18/2010	12:22:33 PM	PHl3 MFC set to  0.000000
12/18/2010	12:22:33 PM	SiCl4 MFC set to  0.000000
12/18/2010	12:22:33 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:22:33 PM	Tube furnace set to 0
12/18/2010	12:22:33 PM	Run finished at 12:22 PM
12/18/2010	12:49:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/18/2010	12:49:00 PM	Recipe started at 12:49 PM
12/18/2010	12:49:00 PM	H2 valve closed
12/18/2010	12:49:00 PM	BCl3 valve closed
12/18/2010	12:49:00 PM	PH3 valve closed
12/18/2010	12:49:00 PM	SiCl4 pre valve closed
12/18/2010	12:49:00 PM	SiCl4 post valve closed
12/18/2010	12:49:00 PM	Main Vac valve closed
12/18/2010	12:49:00 PM	Bypass valve closed
12/18/2010	12:49:00 PM	Bubbler valve closed
12/18/2010	12:49:00 PM	Helium valve opened
12/18/2010	12:49:00 PM	Helium MFC set to  500.000000
12/18/2010	12:49:00 PM	H2 MFC set to  0.000000
12/18/2010	12:49:00 PM	BCl3 MFC set to  0.000000
12/18/2010	12:49:00 PM	PHl3 MFC set to  0.000000
12/18/2010	12:49:00 PM	SiCl4 MFC set to  0.000000
12/18/2010	12:49:00 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:49:00 PM	Tube furnace set to 0
12/18/2010	12:49:04 PM	Helium valve closed
12/18/2010	12:49:04 PM	H2 valve closed
12/18/2010	12:49:04 PM	BCl3 valve closed
12/18/2010	12:49:04 PM	PH3 valve closed
12/18/2010	12:49:04 PM	SiCl4 pre valve closed
12/18/2010	12:49:04 PM	SiCl4 post valve closed
12/18/2010	12:49:04 PM	Main Vac valve closed
12/18/2010	12:49:04 PM	Bypass valve closed
12/18/2010	12:49:05 PM	Bubbler valve closed
12/18/2010	12:49:05 PM	Helium MFC set to  0.000000
12/18/2010	12:49:05 PM	H2 MFC set to  0.000000
12/18/2010	12:49:05 PM	BCl3 MFC set to  0.000000
12/18/2010	12:49:05 PM	PHl3 MFC set to  0.000000
12/18/2010	12:49:05 PM	SiCl4 MFC set to  0.000000
12/18/2010	12:49:05 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:49:05 PM	Tube furnace set to 0
12/18/2010	12:49:05 PM	Run finished at 12:49 PM
12/18/2010	12:49:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/18/2010	12:51:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2010	12:51:02 PM	Recipe started at 12:51 PM
12/18/2010	12:51:02 PM	Helium valve closed
12/18/2010	12:51:02 PM	H2 valve closed
12/18/2010	12:51:02 PM	BCl3 valve closed
12/18/2010	12:51:02 PM	PH3 valve closed
12/18/2010	12:51:02 PM	SiCl4 pre valve closed
12/18/2010	12:51:02 PM	SiCl4 post valve closed
12/18/2010	12:51:02 PM	Main Vac valve closed
12/18/2010	12:51:02 PM	Bubbler valve closed
12/18/2010	12:51:02 PM	Bypass valve opened
12/18/2010	12:51:02 PM	Helium MFC set to  0.000000
12/18/2010	12:51:02 PM	H2 MFC set to  0.000000
12/18/2010	12:51:02 PM	BCl3 MFC set to  0.000000
12/18/2010	12:51:02 PM	PHl3 MFC set to  0.000000
12/18/2010	12:51:02 PM	SiCl4 MFC set to  0.000000
12/18/2010	12:51:02 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:51:02 PM	Tube furnace set to 0
12/18/2010	12:51:56 PM	Helium valve closed
12/18/2010	12:51:56 PM	H2 valve closed
12/18/2010	12:51:56 PM	BCl3 valve closed
12/18/2010	12:51:56 PM	PH3 valve closed
12/18/2010	12:51:56 PM	SiCl4 pre valve closed
12/18/2010	12:51:56 PM	SiCl4 post valve closed
12/18/2010	12:51:56 PM	Bubbler valve closed
12/18/2010	12:51:56 PM	Main Vac valve opened
12/18/2010	12:51:56 PM	Bypass valve opened
12/18/2010	12:51:56 PM	Helium MFC set to  0.000000
12/18/2010	12:51:56 PM	H2 MFC set to  0.000000
12/18/2010	12:51:56 PM	BCl3 MFC set to  0.000000
12/18/2010	12:51:56 PM	PHl3 MFC set to  0.000000
12/18/2010	12:51:56 PM	SiCl4 MFC set to  0.000000
12/18/2010	12:51:56 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:51:57 PM	Tube furnace set to 0
12/18/2010	12:51:57 PM	Run finished at 12:51 PM
12/18/2010	12:51:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2010	12:52:33 PM	Bypass valve closed
12/18/2010	12:52:34 PM	Main Vac valve closed
12/18/2010	12:52:43 PM	Main Vac valve opened
12/18/2010	12:52:44 PM	Bypass valve opened
12/18/2010	12:52:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	12:52:58 PM	Recipe started at 12:52 PM
12/18/2010	12:52:58 PM	Helium valve closed
12/18/2010	12:52:58 PM	H2 valve closed
12/18/2010	12:52:58 PM	BCl3 valve closed
12/18/2010	12:52:58 PM	PH3 valve closed
12/18/2010	12:52:58 PM	SiCl4 pre valve closed
12/18/2010	12:52:58 PM	SiCl4 post valve closed
12/18/2010	12:52:58 PM	Main Vac valve closed
12/18/2010	12:52:58 PM	Bubbler valve closed
12/18/2010	12:52:58 PM	Bypass valve opened
12/18/2010	12:52:58 PM	Helium MFC set to  0.000000
12/18/2010	12:52:58 PM	H2 MFC set to  0.000000
12/18/2010	12:52:58 PM	BCl3 MFC set to  0.000000
12/18/2010	12:52:58 PM	PHl3 MFC set to  0.000000
12/18/2010	12:52:58 PM	SiCl4 MFC set to  0.000000
12/18/2010	12:52:58 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:52:58 PM	Tube furnace set to 0
12/18/2010	12:52:58 PM	Helium valve closed
12/18/2010	12:52:58 PM	H2 valve closed
12/18/2010	12:52:58 PM	BCl3 valve closed
12/18/2010	12:52:58 PM	PH3 valve closed
12/18/2010	12:52:58 PM	SiCl4 pre valve closed
12/18/2010	12:52:58 PM	SiCl4 post valve closed
12/18/2010	12:52:58 PM	Bubbler valve closed
12/18/2010	12:52:58 PM	Main Vac valve opened
12/18/2010	12:52:58 PM	Bypass valve opened
12/18/2010	12:52:58 PM	Helium MFC set to  0.000000
12/18/2010	12:52:58 PM	H2 MFC set to  0.000000
12/18/2010	12:52:58 PM	BCl3 MFC set to  0.000000
12/18/2010	12:52:58 PM	PHl3 MFC set to  0.000000
12/18/2010	12:52:58 PM	SiCl4 MFC set to  0.000000
12/18/2010	12:52:58 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:52:59 PM	Tube furnace set to 0
12/18/2010	12:53:59 PM	H2 valve closed
12/18/2010	12:53:59 PM	BCl3 valve closed
12/18/2010	12:53:59 PM	PH3 valve closed
12/18/2010	12:53:59 PM	SiCl4 pre valve closed
12/18/2010	12:53:59 PM	SiCl4 post valve closed
12/18/2010	12:53:59 PM	Bubbler valve closed
12/18/2010	12:53:59 PM	Helium valve opened
12/18/2010	12:53:59 PM	Main Vac valve opened
12/18/2010	12:53:59 PM	Bypass valve opened
12/18/2010	12:53:59 PM	Helium MFC set to  100.000000
12/18/2010	12:53:59 PM	H2 MFC set to  0.000000
12/18/2010	12:53:59 PM	BCl3 MFC set to  0.000000
12/18/2010	12:53:59 PM	PHl3 MFC set to  0.000000
12/18/2010	12:53:59 PM	SiCl4 MFC set to  0.000000
12/18/2010	12:53:59 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:53:59 PM	Tube furnace set to 0
12/18/2010	12:54:59 PM	Helium valve closed
12/18/2010	12:54:59 PM	H2 valve closed
12/18/2010	12:54:59 PM	BCl3 valve closed
12/18/2010	12:54:59 PM	PH3 valve closed
12/18/2010	12:54:59 PM	SiCl4 pre valve closed
12/18/2010	12:54:59 PM	SiCl4 post valve closed
12/18/2010	12:54:59 PM	Bubbler valve closed
12/18/2010	12:54:59 PM	Main Vac valve opened
12/18/2010	12:54:59 PM	Bypass valve opened
12/18/2010	12:54:59 PM	Helium MFC set to  0.000000
12/18/2010	12:54:59 PM	H2 MFC set to  0.000000
12/18/2010	12:54:59 PM	BCl3 MFC set to  0.000000
12/18/2010	12:54:59 PM	PHl3 MFC set to  0.000000
12/18/2010	12:54:59 PM	SiCl4 MFC set to  0.000000
12/18/2010	12:54:59 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:54:59 PM	Tube furnace set to 0
12/18/2010	12:55:59 PM	H2 valve closed
12/18/2010	12:55:59 PM	BCl3 valve closed
12/18/2010	12:55:59 PM	PH3 valve closed
12/18/2010	12:55:59 PM	SiCl4 pre valve closed
12/18/2010	12:55:59 PM	SiCl4 post valve closed
12/18/2010	12:55:59 PM	Bubbler valve closed
12/18/2010	12:55:59 PM	Helium valve opened
12/18/2010	12:55:59 PM	Main Vac valve opened
12/18/2010	12:55:59 PM	Bypass valve opened
12/18/2010	12:55:59 PM	Helium MFC set to  100.000000
12/18/2010	12:55:59 PM	H2 MFC set to  0.000000
12/18/2010	12:55:59 PM	BCl3 MFC set to  0.000000
12/18/2010	12:55:59 PM	PHl3 MFC set to  0.000000
12/18/2010	12:55:59 PM	SiCl4 MFC set to  0.000000
12/18/2010	12:55:59 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:55:59 PM	Tube furnace set to 0
12/18/2010	12:56:59 PM	Helium valve closed
12/18/2010	12:56:59 PM	H2 valve closed
12/18/2010	12:56:59 PM	BCl3 valve closed
12/18/2010	12:56:59 PM	PH3 valve closed
12/18/2010	12:56:59 PM	SiCl4 pre valve closed
12/18/2010	12:56:59 PM	SiCl4 post valve closed
12/18/2010	12:56:59 PM	Bubbler valve closed
12/18/2010	12:56:59 PM	Main Vac valve opened
12/18/2010	12:56:59 PM	Bypass valve opened
12/18/2010	12:56:59 PM	Helium MFC set to  0.000000
12/18/2010	12:56:59 PM	H2 MFC set to  0.000000
12/18/2010	12:56:59 PM	BCl3 MFC set to  0.000000
12/18/2010	12:56:59 PM	PHl3 MFC set to  0.000000
12/18/2010	12:56:59 PM	SiCl4 MFC set to  0.000000
12/18/2010	12:56:59 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:56:59 PM	Tube furnace set to 0
12/18/2010	12:57:59 PM	H2 valve closed
12/18/2010	12:57:59 PM	BCl3 valve closed
12/18/2010	12:57:59 PM	PH3 valve closed
12/18/2010	12:57:59 PM	SiCl4 pre valve closed
12/18/2010	12:57:59 PM	SiCl4 post valve closed
12/18/2010	12:57:59 PM	Bubbler valve closed
12/18/2010	12:57:59 PM	Helium valve opened
12/18/2010	12:57:59 PM	Main Vac valve opened
12/18/2010	12:57:59 PM	Bypass valve opened
12/18/2010	12:57:59 PM	Helium MFC set to  100.000000
12/18/2010	12:57:59 PM	H2 MFC set to  0.000000
12/18/2010	12:57:59 PM	BCl3 MFC set to  0.000000
12/18/2010	12:57:59 PM	PHl3 MFC set to  0.000000
12/18/2010	12:57:59 PM	SiCl4 MFC set to  0.000000
12/18/2010	12:57:59 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:58:00 PM	Tube furnace set to 0
12/18/2010	12:59:00 PM	Helium valve closed
12/18/2010	12:59:00 PM	H2 valve closed
12/18/2010	12:59:00 PM	BCl3 valve closed
12/18/2010	12:59:00 PM	PH3 valve closed
12/18/2010	12:59:00 PM	SiCl4 pre valve closed
12/18/2010	12:59:00 PM	SiCl4 post valve closed
12/18/2010	12:59:00 PM	Bubbler valve closed
12/18/2010	12:59:00 PM	Main Vac valve opened
12/18/2010	12:59:00 PM	Bypass valve opened
12/18/2010	12:59:00 PM	Helium MFC set to  0.000000
12/18/2010	12:59:00 PM	H2 MFC set to  0.000000
12/18/2010	12:59:00 PM	BCl3 MFC set to  0.000000
12/18/2010	12:59:00 PM	PHl3 MFC set to  0.000000
12/18/2010	12:59:00 PM	SiCl4 MFC set to  0.000000
12/18/2010	12:59:00 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	12:59:00 PM	Tube furnace set to 0
12/18/2010	1:00:00 PM	H2 valve closed
12/18/2010	1:00:00 PM	BCl3 valve closed
12/18/2010	1:00:00 PM	PH3 valve closed
12/18/2010	1:00:00 PM	SiCl4 pre valve closed
12/18/2010	1:00:00 PM	SiCl4 post valve closed
12/18/2010	1:00:00 PM	Bubbler valve closed
12/18/2010	1:00:00 PM	Helium valve opened
12/18/2010	1:00:00 PM	Main Vac valve opened
12/18/2010	1:00:00 PM	Bypass valve opened
12/18/2010	1:00:00 PM	Helium MFC set to  100.000000
12/18/2010	1:00:00 PM	H2 MFC set to  0.000000
12/18/2010	1:00:00 PM	BCl3 MFC set to  0.000000
12/18/2010	1:00:00 PM	PHl3 MFC set to  0.000000
12/18/2010	1:00:00 PM	SiCl4 MFC set to  0.000000
12/18/2010	1:00:00 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	1:00:00 PM	Tube furnace set to 0
12/18/2010	1:01:00 PM	Helium valve closed
12/18/2010	1:01:00 PM	H2 valve closed
12/18/2010	1:01:00 PM	BCl3 valve closed
12/18/2010	1:01:00 PM	PH3 valve closed
12/18/2010	1:01:00 PM	SiCl4 pre valve closed
12/18/2010	1:01:00 PM	SiCl4 post valve closed
12/18/2010	1:01:00 PM	Bubbler valve closed
12/18/2010	1:01:00 PM	Main Vac valve opened
12/18/2010	1:01:00 PM	Bypass valve opened
12/18/2010	1:01:00 PM	Helium MFC set to  0.000000
12/18/2010	1:01:00 PM	H2 MFC set to  0.000000
12/18/2010	1:01:00 PM	BCl3 MFC set to  0.000000
12/18/2010	1:01:00 PM	PHl3 MFC set to  0.000000
12/18/2010	1:01:00 PM	SiCl4 MFC set to  0.000000
12/18/2010	1:01:00 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	1:01:00 PM	Tube furnace set to 0
12/18/2010	1:02:00 PM	H2 valve closed
12/18/2010	1:02:00 PM	BCl3 valve closed
12/18/2010	1:02:00 PM	PH3 valve closed
12/18/2010	1:02:00 PM	SiCl4 pre valve closed
12/18/2010	1:02:00 PM	SiCl4 post valve closed
12/18/2010	1:02:00 PM	Bubbler valve closed
12/18/2010	1:02:00 PM	Helium valve opened
12/18/2010	1:02:00 PM	Main Vac valve opened
12/18/2010	1:02:00 PM	Bypass valve opened
12/18/2010	1:02:00 PM	Helium MFC set to  100.000000
12/18/2010	1:02:00 PM	H2 MFC set to  0.000000
12/18/2010	1:02:00 PM	BCl3 MFC set to  0.000000
12/18/2010	1:02:00 PM	PHl3 MFC set to  0.000000
12/18/2010	1:02:00 PM	SiCl4 MFC set to  0.000000
12/18/2010	1:02:00 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	1:02:00 PM	Tube furnace set to 0
12/18/2010	1:03:00 PM	Helium valve closed
12/18/2010	1:03:00 PM	H2 valve closed
12/18/2010	1:03:00 PM	BCl3 valve closed
12/18/2010	1:03:00 PM	PH3 valve closed
12/18/2010	1:03:00 PM	SiCl4 pre valve closed
12/18/2010	1:03:00 PM	SiCl4 post valve closed
12/18/2010	1:03:00 PM	Bubbler valve closed
12/18/2010	1:03:00 PM	Main Vac valve opened
12/18/2010	1:03:00 PM	Bypass valve opened
12/18/2010	1:03:00 PM	Helium MFC set to  0.000000
12/18/2010	1:03:00 PM	H2 MFC set to  0.000000
12/18/2010	1:03:00 PM	BCl3 MFC set to  0.000000
12/18/2010	1:03:00 PM	PHl3 MFC set to  0.000000
12/18/2010	1:03:00 PM	SiCl4 MFC set to  0.000000
12/18/2010	1:03:00 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	1:03:00 PM	Tube furnace set to 0
12/18/2010	1:04:01 PM	H2 valve closed
12/18/2010	1:04:01 PM	BCl3 valve closed
12/18/2010	1:04:01 PM	PH3 valve closed
12/18/2010	1:04:01 PM	SiCl4 pre valve closed
12/18/2010	1:04:01 PM	SiCl4 post valve closed
12/18/2010	1:04:01 PM	Bubbler valve closed
12/18/2010	1:04:01 PM	Helium valve opened
12/18/2010	1:04:01 PM	Main Vac valve opened
12/18/2010	1:04:01 PM	Bypass valve opened
12/18/2010	1:04:01 PM	Helium MFC set to  100.000000
12/18/2010	1:04:01 PM	H2 MFC set to  0.000000
12/18/2010	1:04:01 PM	BCl3 MFC set to  0.000000
12/18/2010	1:04:01 PM	PHl3 MFC set to  0.000000
12/18/2010	1:04:01 PM	SiCl4 MFC set to  0.000000
12/18/2010	1:04:01 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	1:04:01 PM	Tube furnace set to 0
12/18/2010	1:05:01 PM	Helium valve closed
12/18/2010	1:05:01 PM	H2 valve closed
12/18/2010	1:05:01 PM	BCl3 valve closed
12/18/2010	1:05:01 PM	PH3 valve closed
12/18/2010	1:05:01 PM	SiCl4 pre valve closed
12/18/2010	1:05:01 PM	SiCl4 post valve closed
12/18/2010	1:05:01 PM	Bubbler valve closed
12/18/2010	1:05:01 PM	Main Vac valve opened
12/18/2010	1:05:01 PM	Bypass valve opened
12/18/2010	1:05:01 PM	Helium MFC set to  0.000000
12/18/2010	1:05:01 PM	H2 MFC set to  0.000000
12/18/2010	1:05:01 PM	BCl3 MFC set to  0.000000
12/18/2010	1:05:01 PM	PHl3 MFC set to  0.000000
12/18/2010	1:05:01 PM	SiCl4 MFC set to  0.000000
12/18/2010	1:05:01 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	1:05:01 PM	Tube furnace set to 0
12/18/2010	1:06:01 PM	H2 valve closed
12/18/2010	1:06:01 PM	BCl3 valve closed
12/18/2010	1:06:01 PM	PH3 valve closed
12/18/2010	1:06:01 PM	SiCl4 pre valve closed
12/18/2010	1:06:01 PM	SiCl4 post valve closed
12/18/2010	1:06:01 PM	Bubbler valve closed
12/18/2010	1:06:01 PM	Helium valve opened
12/18/2010	1:06:01 PM	Main Vac valve opened
12/18/2010	1:06:01 PM	Bypass valve opened
12/18/2010	1:06:01 PM	Helium MFC set to  100.000000
12/18/2010	1:06:01 PM	H2 MFC set to  0.000000
12/18/2010	1:06:01 PM	BCl3 MFC set to  0.000000
12/18/2010	1:06:01 PM	PHl3 MFC set to  0.000000
12/18/2010	1:06:01 PM	SiCl4 MFC set to  0.000000
12/18/2010	1:06:01 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	1:06:01 PM	Tube furnace set to 0
12/18/2010	1:07:01 PM	Helium valve closed
12/18/2010	1:07:01 PM	H2 valve closed
12/18/2010	1:07:01 PM	BCl3 valve closed
12/18/2010	1:07:01 PM	PH3 valve closed
12/18/2010	1:07:01 PM	SiCl4 pre valve closed
12/18/2010	1:07:01 PM	SiCl4 post valve closed
12/18/2010	1:07:01 PM	Bubbler valve closed
12/18/2010	1:07:01 PM	Main Vac valve opened
12/18/2010	1:07:01 PM	Bypass valve opened
12/18/2010	1:07:01 PM	Helium MFC set to  0.000000
12/18/2010	1:07:01 PM	H2 MFC set to  0.000000
12/18/2010	1:07:01 PM	BCl3 MFC set to  0.000000
12/18/2010	1:07:01 PM	PHl3 MFC set to  0.000000
12/18/2010	1:07:01 PM	SiCl4 MFC set to  0.000000
12/18/2010	1:07:01 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	1:07:01 PM	Tube furnace set to 0
12/18/2010	1:07:10 PM	H2 valve closed
12/18/2010	1:07:10 PM	BCl3 valve closed
12/18/2010	1:07:10 PM	PH3 valve closed
12/18/2010	1:07:10 PM	SiCl4 pre valve closed
12/18/2010	1:07:10 PM	SiCl4 post valve closed
12/18/2010	1:07:10 PM	Bubbler valve closed
12/18/2010	1:07:10 PM	Helium valve opened
12/18/2010	1:07:10 PM	Main Vac valve opened
12/18/2010	1:07:10 PM	Bypass valve opened
12/18/2010	1:07:10 PM	Helium MFC set to  100.000000
12/18/2010	1:07:10 PM	H2 MFC set to  0.000000
12/18/2010	1:07:10 PM	BCl3 MFC set to  0.000000
12/18/2010	1:07:10 PM	PHl3 MFC set to  0.000000
12/18/2010	1:07:10 PM	SiCl4 MFC set to  0.000000
12/18/2010	1:07:10 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	1:07:10 PM	Tube furnace set to 0
12/18/2010	1:07:10 PM	Helium valve closed
12/18/2010	1:07:10 PM	H2 valve closed
12/18/2010	1:07:10 PM	BCl3 valve closed
12/18/2010	1:07:10 PM	PH3 valve closed
12/18/2010	1:07:10 PM	SiCl4 pre valve closed
12/18/2010	1:07:10 PM	SiCl4 post valve closed
12/18/2010	1:07:10 PM	Bubbler valve closed
12/18/2010	1:07:10 PM	Main Vac valve opened
12/18/2010	1:07:10 PM	Bypass valve opened
12/18/2010	1:07:10 PM	Helium MFC set to  0.000000
12/18/2010	1:07:10 PM	H2 MFC set to  0.000000
12/18/2010	1:07:10 PM	BCl3 MFC set to  0.000000
12/18/2010	1:07:10 PM	PHl3 MFC set to  0.000000
12/18/2010	1:07:10 PM	SiCl4 MFC set to  0.000000
12/18/2010	1:07:10 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	1:07:10 PM	Tube furnace set to 0
12/18/2010	1:07:11 PM	H2 valve closed
12/18/2010	1:07:11 PM	BCl3 valve closed
12/18/2010	1:07:11 PM	PH3 valve closed
12/18/2010	1:07:11 PM	SiCl4 pre valve closed
12/18/2010	1:07:11 PM	SiCl4 post valve closed
12/18/2010	1:07:11 PM	Bubbler valve closed
12/18/2010	1:07:11 PM	Helium valve opened
12/18/2010	1:07:11 PM	Main Vac valve opened
12/18/2010	1:07:11 PM	Bypass valve opened
12/18/2010	1:07:11 PM	Helium MFC set to  100.000000
12/18/2010	1:07:11 PM	H2 MFC set to  0.000000
12/18/2010	1:07:11 PM	BCl3 MFC set to  0.000000
12/18/2010	1:07:11 PM	PHl3 MFC set to  0.000000
12/18/2010	1:07:11 PM	SiCl4 MFC set to  0.000000
12/18/2010	1:07:11 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	1:07:11 PM	Tube furnace set to 0
12/18/2010	1:07:12 PM	Helium valve closed
12/18/2010	1:07:12 PM	H2 valve closed
12/18/2010	1:07:12 PM	BCl3 valve closed
12/18/2010	1:07:12 PM	PH3 valve closed
12/18/2010	1:07:12 PM	SiCl4 pre valve closed
12/18/2010	1:07:12 PM	SiCl4 post valve closed
12/18/2010	1:07:12 PM	Bubbler valve closed
12/18/2010	1:07:12 PM	Main Vac valve opened
12/18/2010	1:07:12 PM	Bypass valve opened
12/18/2010	1:07:12 PM	Helium MFC set to  0.000000
12/18/2010	1:07:12 PM	H2 MFC set to  0.000000
12/18/2010	1:07:12 PM	BCl3 MFC set to  0.000000
12/18/2010	1:07:12 PM	PHl3 MFC set to  0.000000
12/18/2010	1:07:12 PM	SiCl4 MFC set to  0.000000
12/18/2010	1:07:12 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	1:07:12 PM	Tube furnace set to 0
12/18/2010	1:08:12 PM	H2 valve closed
12/18/2010	1:08:12 PM	BCl3 valve closed
12/18/2010	1:08:12 PM	PH3 valve closed
12/18/2010	1:08:12 PM	SiCl4 pre valve closed
12/18/2010	1:08:12 PM	SiCl4 post valve closed
12/18/2010	1:08:12 PM	Bubbler valve closed
12/18/2010	1:08:12 PM	Helium valve opened
12/18/2010	1:08:12 PM	Main Vac valve opened
12/18/2010	1:08:12 PM	Bypass valve opened
12/18/2010	1:08:12 PM	Helium MFC set to  100.000000
12/18/2010	1:08:12 PM	H2 MFC set to  0.000000
12/18/2010	1:08:12 PM	BCl3 MFC set to  0.000000
12/18/2010	1:08:12 PM	PHl3 MFC set to  0.000000
12/18/2010	1:08:12 PM	SiCl4 MFC set to  0.000000
12/18/2010	1:08:12 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	1:08:12 PM	Tube furnace set to 0
12/18/2010	1:09:12 PM	Helium valve closed
12/18/2010	1:09:12 PM	H2 valve closed
12/18/2010	1:09:12 PM	BCl3 valve closed
12/18/2010	1:09:12 PM	PH3 valve closed
12/18/2010	1:09:12 PM	SiCl4 pre valve closed
12/18/2010	1:09:12 PM	SiCl4 post valve closed
12/18/2010	1:09:12 PM	Bubbler valve closed
12/18/2010	1:09:12 PM	Main Vac valve opened
12/18/2010	1:09:12 PM	Bypass valve opened
12/18/2010	1:09:12 PM	Helium MFC set to  0.000000
12/18/2010	1:09:12 PM	H2 MFC set to  0.000000
12/18/2010	1:09:12 PM	BCl3 MFC set to  0.000000
12/18/2010	1:09:12 PM	PHl3 MFC set to  0.000000
12/18/2010	1:09:12 PM	SiCl4 MFC set to  0.000000
12/18/2010	1:09:12 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	1:09:12 PM	Tube furnace set to 0
12/18/2010	1:09:13 PM	Run finished at 1:09 PM
12/18/2010	1:09:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/18/2010	1:10:37 PM	Main Vac valve closed
12/18/2010	1:10:38 PM	Bypass valve closed
12/18/2010	1:10:52 PM	Main Vac valve opened
12/18/2010	1:10:52 PM	Bypass valve opened
12/18/2010	4:24:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/18/2010	4:24:00 PM	Recipe started at 4:24 PM
12/18/2010	4:24:00 PM	Helium valve closed
12/18/2010	4:24:00 PM	H2 valve closed
12/18/2010	4:24:00 PM	BCl3 valve closed
12/18/2010	4:24:00 PM	PH3 valve closed
12/18/2010	4:24:00 PM	SiCl4 pre valve closed
12/18/2010	4:24:00 PM	SiCl4 post valve closed
12/18/2010	4:24:00 PM	Main Vac valve closed
12/18/2010	4:24:00 PM	Bypass valve closed
12/18/2010	4:24:00 PM	Bubbler valve closed
12/18/2010	4:24:00 PM	Helium MFC set to  0.000000
12/18/2010	4:24:00 PM	H2 MFC set to  0.000000
12/18/2010	4:24:00 PM	BCl3 MFC set to  0.000000
12/18/2010	4:24:00 PM	PHl3 MFC set to  0.000000
12/18/2010	4:24:00 PM	SiCl4 MFC set to  0.000000
12/18/2010	4:24:00 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:24:00 PM	Tube furnace set to 0
12/18/2010	4:24:01 PM	Run finished at 4:24 PM
12/18/2010	4:24:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/18/2010	4:24:04 PM	Program exited cleanly
12/18/2010	4:28:10 PM	Program started normally
12/18/2010	4:28:10 PM	Helium valve closed
12/18/2010	4:28:10 PM	H2 valve closed
12/18/2010	4:28:10 PM	BCl3 valve closed
12/18/2010	4:28:10 PM	PH3 valve closed
12/18/2010	4:28:10 PM	SiCl4 pre valve closed
12/18/2010	4:28:10 PM	SiCl4 post valve closed
12/18/2010	4:28:10 PM	Main Vac valve closed
12/18/2010	4:28:10 PM	Bypass valve closed
12/18/2010	4:28:10 PM	Bubbler valve closed
12/18/2010	4:28:10 PM	Helium MFC set to  0.000000
12/18/2010	4:28:10 PM	H2 MFC set to  0.000000
12/18/2010	4:28:10 PM	BCl3 MFC set to  0.000000
12/18/2010	4:28:10 PM	PHl3 MFC set to  0.000000
12/18/2010	4:28:10 PM	SiCl4 MFC set to  0.000000
12/18/2010	4:28:10 PM	Bypass solenoid MFC set to  760.000000
12/18/2010	4:28:11 PM	Tube furnace set to 0
12/18/2010	4:28:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/18/2010	4:28:29 PM	Recipe started at 4:28 PM
12/18/2010	4:28:29 PM	Helium valve closed
12/18/2010	4:28:29 PM	H2 valve closed
12/18/2010	4:28:29 PM	BCl3 valve closed
12/18/2010	4:28:29 PM	PH3 valve closed
12/18/2010	4:28:29 PM	SiCl4 pre valve closed
12/18/2010	4:28:29 PM	SiCl4 post valve closed
12/18/2010	4:28:29 PM	Main Vac valve closed
12/18/2010	4:28:30 PM	Bubbler valve closed
12/18/2010	4:28:30 PM	Bypass valve opened
12/18/2010	4:28:30 PM	Helium MFC set to  0.000000
12/18/2010	4:28:30 PM	H2 MFC set to  0.000000
12/18/2010	4:28:30 PM	BCl3 MFC set to  0.000000
12/18/2010	4:28:30 PM	PHl3 MFC set to  0.000000
12/18/2010	4:28:30 PM	SiCl4 MFC set to  0.000000
12/18/2010	4:28:30 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:28:30 PM	Tube furnace set to 0
12/18/2010	4:28:30 PM	Helium valve closed
12/18/2010	4:28:30 PM	H2 valve closed
12/18/2010	4:28:30 PM	BCl3 valve closed
12/18/2010	4:28:30 PM	PH3 valve closed
12/18/2010	4:28:30 PM	SiCl4 pre valve closed
12/18/2010	4:28:30 PM	SiCl4 post valve closed
12/18/2010	4:28:30 PM	Bubbler valve closed
12/18/2010	4:28:30 PM	Main Vac valve opened
12/18/2010	4:28:30 PM	Bypass valve opened
12/18/2010	4:28:30 PM	Helium MFC set to  0.000000
12/18/2010	4:28:30 PM	H2 MFC set to  0.000000
12/18/2010	4:28:30 PM	BCl3 MFC set to  0.000000
12/18/2010	4:28:30 PM	PHl3 MFC set to  0.000000
12/18/2010	4:28:30 PM	SiCl4 MFC set to  0.000000
12/18/2010	4:28:30 PM	Bypass solenoid MFC set to  0.000000
12/18/2010	4:28:30 PM	Tube furnace set to 0
12/18/2010	4:28:31 PM	Run finished at 4:28 PM
12/18/2010	4:28:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
